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CPC
B81C2203/052
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B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2203/00
Forming micro-structural systems
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B81C2203/052
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Patents Grants
last 30 patents
Information
Patent Grant
Top port MEMS cavity package and method of manufacture thereof
Patent number
9,337,354
Issue date
May 10, 2016
Unisem (M) Berhad
Rob Protheroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Top Port MEMS Cavity Package and Method of Manufacture Thereof
Publication number
20140246739
Publication date
Sep 4, 2014
UNISEM (M) BERHAD
Rob Protheroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Top Port MEMS Cavity Package and Method of Manufacture Thereof
Publication number
20140246738
Publication date
Sep 4, 2014
UNISEM (M) BERHAD
Rob Protheroe
B81 - MICRO-STRUCTURAL TECHNOLOGY