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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2817
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Patents Grants
last 30 patents
Information
Patent Grant
Method, apparatus, and system for dynamically controlling an electr...
Patent number
12,368,067
Issue date
Jul 22, 2025
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for inspecting a specimen and charged particle beam device
Patent number
12,362,131
Issue date
Jul 15, 2025
Applied Materials Israel Ltd.
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor inspection apparatus and semiconductor inspection met...
Patent number
12,362,139
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Yujin Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple landing energy scanning electron microscopy systems and me...
Patent number
12,354,833
Issue date
Jul 8, 2025
ASML Netherlands B.V.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay measurement system and overlay measurement device for overl...
Patent number
12,354,829
Issue date
Jul 8, 2025
HITACHI HIGH-TECH CORPORATION
Masaki Sugie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Computer system, dimension measurement method, and storage medium
Patent number
12,345,522
Issue date
Jul 1, 2025
HITACHI HIGH-TECH CORPORATION
Yutaka Okuyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple charged-particle beam apparatus and methods of operating t...
Patent number
12,347,643
Issue date
Jul 1, 2025
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus match detection method, detection system, prewarning meth...
Patent number
12,341,070
Issue date
Jun 24, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Weigang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-electron beam inspection apparatus, multipole array control m...
Patent number
12,308,202
Issue date
May 20, 2025
NuFlare Technology, Inc.
Yuichi Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
Patent number
12,288,705
Issue date
Apr 29, 2025
Carl Zeiss SMT GmbH
Amir Avishai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern height metrology using an e-beam system
Patent number
12,278,086
Issue date
Apr 15, 2025
Imec VZW
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lens designs
Patent number
12,243,714
Issue date
Mar 4, 2025
ASML Netherlands B.V.
Laura Del Tin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, apparatus, and program for determining condition related to...
Patent number
12,243,711
Issue date
Mar 4, 2025
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for defect inspection using voltage contrast in a...
Patent number
12,191,112
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system and overlay misalignment measurement m...
Patent number
12,183,541
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern measurement device and pattern measurement method
Patent number
12,174,551
Issue date
Dec 24, 2024
Hitachi High-Technologies Corporation
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspecting device
Patent number
12,176,181
Issue date
Dec 24, 2024
HITACHI HIGH-TECH CORPORATION
Wei Sun
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for scanning a sample using multi-beam inspection...
Patent number
12,165,837
Issue date
Dec 10, 2024
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,142,457
Issue date
Nov 12, 2024
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection of probabilistic process windows
Patent number
12,142,454
Issue date
Nov 12, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multi-source charged particle illumination apparatus
Patent number
12,125,671
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Stijn Wilem Herman Karel Steenbrink
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
12,125,669
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
12,087,541
Issue date
Sep 10, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image contrast enhancement in sample inspection
Patent number
12,087,542
Issue date
Sep 10, 2024
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
Patent number
12,080,513
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Wei Fang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
Patent number
12,055,861
Issue date
Aug 6, 2024
Samsung Electronics Co., Ltd.
Kihyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for generating and analyzing roughness measuremen...
Patent number
11,996,265
Issue date
May 28, 2024
Fractilla, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement and correction of optical aberrations in charged partic...
Patent number
11,990,315
Issue date
May 21, 2024
FEI Company
Erik Franken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
Publication number
20250232946
Publication date
Jul 17, 2025
Hitachi High-Tech Corporation
Minami UCHIHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
Publication number
20250231129
Publication date
Jul 17, 2025
ASML NETHERLANDS B.V.
Benoit Herve GAURY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
Publication number
20250226174
Publication date
Jul 10, 2025
ASML NETHERLANDS B.V.
Wei FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...
Publication number
20250226175
Publication date
Jul 10, 2025
ASML NETHERLANDS B.V.
Zhong-wei CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSESSMENT APPARATUS AND METHODS
Publication number
20250132122
Publication date
Apr 24, 2025
ASML NETHERLANDS B.V.
Thomas Izaak Fred HAARTSEN
G01 - MEASURING TESTING
Information
Patent Application
LENS DESIGNS
Publication number
20250125120
Publication date
Apr 17, 2025
ASML NETHERLANDS B.V.
Laura DEL TIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20250112023
Publication date
Apr 3, 2025
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
Publication number
20250104966
Publication date
Mar 27, 2025
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
Publication number
20250095133
Publication date
Mar 20, 2025
ASML NETHERLANDS B.V.
Vincent Sylvester KUIPER
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
Publication number
20250095955
Publication date
Mar 20, 2025
APPLIED MATERIALS ISRAEL LTD.
Konstantin Chirko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20250087444
Publication date
Mar 13, 2025
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...
Publication number
20250069842
Publication date
Feb 27, 2025
FEI Company
Neel Leslie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detection of Probabilistic Process Windows
Publication number
20250069843
Publication date
Feb 27, 2025
FRACTILIA, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern Measurement Device and Pattern Measurement Method
Publication number
20250060678
Publication date
Feb 20, 2025
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
Publication number
20250029811
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Arthur Eduard OVERLACK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
Publication number
20250022680
Publication date
Jan 16, 2025
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Correction Method and Correction Device
Publication number
20250014858
Publication date
Jan 9, 2025
Hitachi High-Tech Corporation
Tomoaki YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...
Publication number
20250005739
Publication date
Jan 2, 2025
ASML NETHERLANDS B.V.
Shengcheng JIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
Publication number
20250006456
Publication date
Jan 2, 2025
ASML NETHERLANDS B.V.
Wei FANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIO...
Publication number
20240429107
Publication date
Dec 26, 2024
Shanghai Huali Integrated Circuit Corporation
Guanbo Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISCHARGING A REGION OF A SAMPLE
Publication number
20240420917
Publication date
Dec 19, 2024
APPLIED MATERIALS ISRAEL LTD.
Roey Levy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION METHOD
Publication number
20240412943
Publication date
Dec 12, 2024
Samsung Electronics Co., LTD
Jinwoo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
Publication number
20240379325
Publication date
Nov 14, 2024
ASML NETHERLANDS B.V.
Frank Nan ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
Publication number
20240339293
Publication date
Oct 10, 2024
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
Publication number
20240339295
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Tzu-Chao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
Publication number
20240312757
Publication date
Sep 19, 2024
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
Publication number
20240304411
Publication date
Sep 12, 2024
WINBOND ELECTRONICS CORP.
Yen-Chiao CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
Publication number
20240282547
Publication date
Aug 22, 2024
NuFlare Technology, Inc.
Koichi ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
Publication number
20240258066
Publication date
Aug 1, 2024
FRACTILIA, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
Publication number
20240249912
Publication date
Jul 25, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS