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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2817
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Patents Grants
last 30 patents
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
Patent number
11,961,700
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Information
Patent Grant
Charged particle beam apparatus, and systems and methods for operat...
Patent number
11,798,777
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,798,780
Issue date
Oct 24, 2023
HITACHI HIGH-TECH CORPORATION
Toshiyuki Yokosuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam observation device, electron beam observation system,...
Patent number
11,791,130
Issue date
Oct 17, 2023
HITACHI HIGH-TECH CORPORATION
Koichi Hamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method for controlling charged...
Patent number
11,791,131
Issue date
Oct 17, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Dobashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
11,728,131
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with improved detection performance...
Patent number
11,721,521
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low dose charged particle metrology system
Patent number
11,720,030
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern shape evaluation device, pattern shape evaluation system, a...
Patent number
11,713,963
Issue date
Aug 1, 2023
HITACHI HIGH-TECH CORPORATION
Atsuko Shintani
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for charged particle detection
Patent number
11,715,619
Issue date
Aug 1, 2023
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,705,304
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,688,580
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for generating and analyzing roughness measurements
Patent number
11,670,480
Issue date
Jun 6, 2023
Fractilia, LLC
Chris Mack
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern matching device and computer program for pattern matching
Patent number
11,669,953
Issue date
Jun 6, 2023
HITACHI HIGH-TECH CORPORATION
Wataru Nagatomo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
11,670,481
Issue date
Jun 6, 2023
HITACHI HIGH-TECH CORPORATION
Motonobu Hommi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,670,477
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,657,999
Issue date
May 23, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20240087842
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS
Publication number
20240079206
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
Kihyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
Publication number
20240079205
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240062986
Publication date
Feb 22, 2024
Hitachi High-Tech Corporation
Naho TERAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEFECTS ON A WAFER AND RELATED NON-...
Publication number
20230411224
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing company Ltd.
SHIH-CHANG WANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT INSPECTION APPARATUS
Publication number
20230402249
Publication date
Dec 14, 2023
HITACHI HIGH-TECH CORPORATION
Yasuhiro YOSHIDA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
Publication number
20230395352
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Ning YE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
Publication number
20230326711
Publication date
Oct 12, 2023
FRACTILIA, LLC
Chris MACK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS
Publication number
20230326714
Publication date
Oct 12, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCREENING EDGE PLACEMENT UNIFORMITY WAFER STOCHASTICS
Publication number
20230326710
Publication date
Oct 12, 2023
KLA Corporation
Stefan Eyring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing System and Charged Particle Beam Apparatus
Publication number
20230314128
Publication date
Oct 5, 2023
HITACHI HIGH-TECH CORPORATION
Masaya GOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION METHOD AND INSPECTION TOOL
Publication number
20230298850
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PERFORMING METROLOGY ON A MICROFABRICATION PATTERN
Publication number
20230298854
Publication date
Sep 21, 2023
IMEC vzw
Joren Severi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APERTURE PATTERNS FOR DEFINING MULTI-BEAMS
Publication number
20230282440
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
Publication number
20230280293
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Xuerang HU
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
Publication number
20230274906
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Martinus Gerardus, Maria, Johannes MAASSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT AND CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTIC...
Publication number
20230274908
Publication date
Aug 31, 2023
FEI Company
Erik Franken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE IMAGE-BASED PITCH WALK INSPECTION METH...
Publication number
20230253179
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
SUNG MIN NAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...
Publication number
20230197402
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
YUJIN CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
Publication number
20230178406
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Yixiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM INSPECTION DEVICE AND MULTI-ELECTRON BEAM INSPE...
Publication number
20230170183
Publication date
Jun 1, 2023
NuFlare Technology, Inc.
Riki OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED...
Publication number
20230162944
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Xiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED CHARGED-PARTICLE BEAM SYSTEM
Publication number
20230154722
Publication date
May 18, 2023
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
H01 - BASIC ELECTRIC ELEMENTS