Physical deposition at reduced pressure

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H01L21/02631

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02631Physical deposition at reduced pressure

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Gallium nitride particles and method for producing same
- Patent number 12,351,455
- Issue date Jul 8, 2025
- Tosoh Corporation
- Masami Mesuda
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Semiconductor device with oxide-based semiconductor channel
- Patent number 12,349,413
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jih-Chao Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mixed metal oxide
- Patent number 12,349,430
- Issue date Jul 1, 2025
- Imec VZW
- Michiel Jan van Setten
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
III-N heteroepitaxial devices on rock salt substrates
- Patent number 12,344,958
- Issue date Jul 1, 2025
- Alliance for Sustainable Energy, LLC
- Marshall Brooks Tellekamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 12,349,460
- Issue date Jul 1, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Masashi Oota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
N-type SNS thin film, photoelectric conversion element, solar cell,...
- Patent number 12,342,655
- Issue date Jun 24, 2025
- Tohoku University
- Issei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing device for SiC semiconductor substrate
- Patent number 12,325,930
- Issue date Jun 10, 2025
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,324,189
- Issue date Jun 3, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using sic container
- Patent number 12,320,030
- Issue date Jun 3, 2025
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 12,324,193
- Issue date Jun 3, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu Asami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal oxide film and method for forming metal oxide film
- Patent number 12,302,639
- Issue date May 13, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate structure of transistor including a plurality of work function...
- Patent number 12,283,609
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Yi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device comprising driver circuit
- Patent number 12,272,698
- Issue date Apr 8, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Junichiro Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrawide bandgap semiconductor devices including magnesium germani...
- Patent number 12,266,697
- Issue date Apr 1, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field stop IGBT with grown injection region
- Patent number 12,262,553
- Issue date Mar 25, 2025
- iPower Semiconductor
- Hamza Yilmaz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target, method for manufacturing sputtering target, and...
- Patent number 12,252,775
- Issue date Mar 18, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene hybrids for biological and chemical sensing
- Patent number 12,247,923
- Issue date Mar 11, 2025
- The Penn State Research Foundation
- Joshua A. Robinson
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods and material deposition systems for forming semiconductor l...
- Patent number 12,249,506
- Issue date Mar 11, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer film structure and method for producing same
- Patent number 12,247,297
- Issue date Mar 11, 2025
- Tosoh Corporation
- Yuya Tsuchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device
- Patent number 12,243,943
- Issue date Mar 4, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Takahiro Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,224,355
- Issue date Feb 11, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group IIIA nitride growth system and method
- Patent number 12,211,690
- Issue date Jan 28, 2025
- Robbie J. Jorgenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor substrate and epitaxial growt...
- Patent number 12,209,328
- Issue date Jan 28, 2025
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- C30 - CRYSTAL GROWTH
Information Patent Grant
Crystalline oxide thin film, multilayer body and thin film transistor
- Patent number 12,205,992
- Issue date Jan 21, 2025
- Idemitsu Kosan Co., Ltd.
- Emi Kawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,206,006
- Issue date Jan 21, 2025
- SK Hynix Inc.
- Young Gwang Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanoscale thin film structure and implementing method thereof
- Patent number 12,205,986
- Issue date Jan 21, 2025
- KOREA ADVANCED NANO FAB CENTER
- Dong Hwan Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for integrated microwave photonics on a sapphire platform...
- Patent number 12,199,130
- Issue date Jan 14, 2025
- Board of Trustees of the University of Arkansas
- Shui-Qing Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two transistor gain cell memory with indium gallium zinc oxide
- Patent number 12,191,135
- Issue date Jan 7, 2025
- Intel Corporation
- Shigeki Tomishima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming engineered wafers
- Patent number 12,191,192
- Issue date Jan 7, 2025
- Bing Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,183,832
- Issue date Dec 31, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Kengo Akimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20250239449
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kun-Yen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE SEMICONDUCTOR FILM, THIN FILM TRANSISTOR, SPUTTERING TARGET,...
- Publication number 20250220976
- Publication date Jul 3, 2025
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Mototaka OCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE STRUCTURE OF TRANSISTOR INCLUDING A PLURALITY OF WORK FUNCTION...
- Publication number 20250220993
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Yi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnesium Group IV Oxides
- Publication number 20250212474
- Publication date Jun 26, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER STRUCTURE, METHOD FOR PRODUCING MULTILAYER STRUCTURE AND...
- Publication number 20250201554
- Publication date Jun 19, 2025
- Japan Display Inc.
- Hayata AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250191913
- Publication date Jun 12, 2025
- Japan Display Inc.
- Hayata AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR THIN FILM COMPRISING INDIUM-SELENIDE COMPOUND, THIN F...
- Publication number 20250191915
- Publication date Jun 12, 2025
- POSTECH Research and Business Development Foundation
- Yong-Young NOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A Method of Manufacturing Group III-V Based Semiconductor Materials...
- Publication number 20250185408
- Publication date Jun 5, 2025
- Integrated Solar AS
- Renato Bugge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...
- Publication number 20250183033
- Publication date Jun 5, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCTION METHOD FOR SINGLE CRYSTAL SEMICONDUCTOR FILM, PRODUCTION...
- Publication number 20250163606
- Publication date May 22, 2025
- Mach Corporation Co., Ltd.
- Goubun AKATSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250159939
- Publication date May 15, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250159936
- Publication date May 15, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Takahiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PN HETEROJUNCTION BETWEEN NICKEL OXIDE AND GALLIU...
- Publication number 20250151297
- Publication date May 8, 2025
- POWER CUBESEMI INC.
- Tai Young KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...
- Publication number 20250146126
- Publication date May 8, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, AND SEMICO...
- Publication number 20250120178
- Publication date Apr 10, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Toshikazu Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20250098316
- Publication date Mar 20, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20250081629
- Publication date Mar 6, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Ryota HODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250066901
- Publication date Feb 27, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED STRUCTURE, FABRICATION METHOD OF THE STACKED STRUCTURE, AND...
- Publication number 20250072068
- Publication date Feb 27, 2025
- Japan Display Inc.
- Masumi NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20250063751
- Publication date Feb 20, 2025
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20250048662
- Publication date Feb 6, 2025
- Hyundai Motor Company
- Taehyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLINE TRANSITION METAL DICHALCOGENIDE FILMS AND METHODS OF MA...
- Publication number 20250037999
- Publication date Jan 30, 2025
- University of Dayton
- Christopher Muratore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A VERTICAL HEMT, AN ELECTRICAL CIRCUIT, AND A METHOD FOR PRODUCING...
- Publication number 20250040175
- Publication date Jan 30, 2025
- Epinovatech AB
- Martin Andreas Olsson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO TRANSISTOR GAIN CELL MEMORY WITH INDIUM GALLIUM ZINC OXIDE
- Publication number 20250031453
- Publication date Jan 23, 2025
- Intel Corporation
- Shigeki TOMISHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE
- Publication number 20250014530
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
OXIDE SEMICONDUCTOR LAYER, METHOD FOR FORMING THE OXIDE SEMICONDUCT...
- Publication number 20250015193
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING OXIDE SEMICONDUCTOR FILM, SEMICONDUCTOR DEVICE,...
- Publication number 20250015197
- Publication date Jan 9, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION PROCESSES ON SEMICONDUCTOR SUBSTRATES
- Publication number 20250006485
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Mark Saly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING POLYCRYSTALLINE SILICON CARBIDE SUBSTRATE
- Publication number 20240429047
- Publication date Dec 26, 2024
- SICOXS CORPORATION
- Kuniaki YAGI
- H01 - BASIC ELECTRIC ELEMENTS

Physical deposition at reduced pressure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Gallium nitride particles and method for producing same

Semiconductor device with oxide-based semiconductor channel

Mixed metal oxide

III-N heteroepitaxial devices on rock salt substrates

Manufacturing method of semiconductor device

N-type SNS thin film, photoelectric conversion element, solar cell,...

Manufacturing device for SiC semiconductor substrate

Semiconductor device and manufacturing method thereof

Method of using sic container

Semiconductor device and method for manufacturing the same

Metal oxide film and method for forming metal oxide film

Gate structure of transistor including a plurality of work function...

Semiconductor device comprising driver circuit

Ultrawide bandgap semiconductor devices including magnesium germani...

Field stop IGBT with grown injection region

Sputtering target, method for manufacturing sputtering target, and...

Graphene hybrids for biological and chemical sensing

Methods and material deposition systems for forming semiconductor l...

Multilayer film structure and method for producing same

Semiconductor device

Semiconductor device and manufacturing method thereof

Group IIIA nitride growth system and method

Method of manufacturing semiconductor substrate and epitaxial growt...

Crystalline oxide thin film, multilayer body and thin film transistor

Semiconductor device and method for fabricating the same

Nanoscale thin film structure and implementing method thereof

Apparatus for integrated microwave photonics on a sapphire platform...

Two transistor gain cell memory with indium gallium zinc oxide

Method of forming engineered wafers

Semiconductor device and manufacturing method thereof

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF

OXIDE SEMICONDUCTOR FILM, THIN FILM TRANSISTOR, SPUTTERING TARGET,...

GATE STRUCTURE OF TRANSISTOR INCLUDING A PLURALITY OF WORK FUNCTION...

Magnesium Group IV Oxides

MULTILAYER STRUCTURE, METHOD FOR PRODUCING MULTILAYER STRUCTURE AND...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR THIN FILM COMPRISING INDIUM-SELENIDE COMPOUND, THIN F...

A Method of Manufacturing Group III-V Based Semiconductor Materials...

METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...

PRODUCTION METHOD FOR SINGLE CRYSTAL SEMICONDUCTOR FILM, PRODUCTION...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE

METHOD OF FORMING PN HETEROJUNCTION BETWEEN NICKEL OXIDE AND GALLIU...

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...

THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, AND SEMICO...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

STACKED STRUCTURE, FABRICATION METHOD OF THE STACKED STRUCTURE, AND...

MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

CRYSTALLINE TRANSITION METAL DICHALCOGENIDE FILMS AND METHODS OF MA...

A VERTICAL HEMT, AN ELECTRICAL CIRCUIT, AND A METHOD FOR PRODUCING...

TWO TRANSISTOR GAIN CELL MEMORY WITH INDIUM GALLIUM ZINC OXIDE

DISPLAY DEVICE

OXIDE SEMICONDUCTOR LAYER, METHOD FOR FORMING THE OXIDE SEMICONDUCT...

METHOD FOR FORMING OXIDE SEMICONDUCTOR FILM, SEMICONDUCTOR DEVICE,...

SELECTIVE DEPOSITION PROCESSES ON SEMICONDUCTOR SUBSTRATES

METHOD FOR PRODUCING POLYCRYSTALLINE SILICON CARBIDE SUBSTRATE