Physical deposition at reduced pressure

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H01L21/02631

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02631Physical deposition at reduced pressure

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for forming oxide semiconductor film, semiconductor device,...
- Patent number 12,170,339
- Issue date Dec 17, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrawide bandgap semiconductor devices including magnesium germani...
- Patent number 12,166,085
- Issue date Dec 10, 2024
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C30 - CRYSTAL GROWTH
Information Patent Grant
GaN/two-dimensional AlN heterojunction rectifier on silicon substra...
- Patent number 12,154,990
- Issue date Nov 26, 2024
- South China University of Technology
- Wenliang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory device and method for making same
- Patent number 12,144,182
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Wei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing electronic structures
- Patent number 12,136,632
- Issue date Nov 5, 2024
- Pragmatic Printing Ltd
- Richard Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 12,136,663
- Issue date Nov 5, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, method for manufacturing the same, and semico...
- Patent number 12,136,629
- Issue date Nov 5, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Toshikazu Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 12,125,453
- Issue date Oct 22, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Oxide semiconductor sputtering target and method of fabricating thi...
- Patent number 12,119,225
- Issue date Oct 15, 2024
- KV Materials Co., Ltd.
- Shinhyuk Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming oxide semiconductor film, semiconductor device,...
- Patent number 12,119,408
- Issue date Oct 15, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 12,113,074
- Issue date Oct 8, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preparation method of GaN field effect transistor based on diamond...
- Patent number 12,112,944
- Issue date Oct 8, 2024
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Yuangang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor, method of manufacturing transistor, and display device...
- Patent number 12,113,134
- Issue date Oct 8, 2024
- Mikuni Electron Corporation
- Sakae Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming nitride semiconductor film
- Patent number 12,094,710
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Nobuaki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial wafer, method of manufacturing the epitaxial wafer, diode...
- Patent number 12,087,868
- Issue date Sep 10, 2024
- South China Normal University
- Richard Notzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device comprising silicon and oxide semiconductor in...
- Patent number 12,080,802
- Issue date Sep 3, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a SiC substrate by simultaneously forming...
- Patent number 12,065,758
- Issue date Aug 20, 2024
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming oxide semiconductor film, semiconductor device,...
- Patent number 12,062,724
- Issue date Aug 13, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and a semiconductor...
- Patent number 12,062,580
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor, method of manufacturing transistor, and display device...
- Patent number 12,040,410
- Issue date Jul 16, 2024
- Mikuni Electron Corporation
- Sakae Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing the same, or display...
- Patent number 12,034,080
- Issue date Jul 9, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming material within openings extending into a semico...
- Patent number 12,020,979
- Issue date Jun 25, 2024
- Micron Technology, Inc.
- Gurtej S. Sandhu
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Low resistivity DRAM buried word line stack
- Patent number 12,022,650
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for manufacturing semiconductor substrate comprising tempera...
- Patent number 12,014,939
- Issue date Jun 18, 2024
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epi-growth apparatus of separate chamber type
- Patent number 12,000,061
- Issue date Jun 4, 2024
- T.O.S Co., Ltd.
- Bum Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device including annealing a...
- Patent number 11,996,291
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optoelectronic device including a superlattice
- Patent number 11,990,338
- Issue date May 21, 2024
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a semiconductor fin comprising a sil...
- Patent number 11,978,632
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic structure having two field effect transistors
- Patent number 11,978,744
- Issue date May 7, 2024
- Pragmatic Printing Ltd
- Richard Price
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240421231
- Publication date Dec 19, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING USING MONOMER BASED SACRIFICIAL MATERIAL LIFTOFF
- Publication number 20240412973
- Publication date Dec 12, 2024
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Nathaniel P. Wyckoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240401184
- Publication date Dec 5, 2024
- TOSOH CORPORATION
- Yuya SUEMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMORY DEVICE AND METHOD FOR MAKING SAME
- Publication number 20240389333
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Wei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20240355681
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shahaji B. MORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LAYER INCLUDING Sn BASED PEROVSKITE INCLUDING CHLORID...
- Publication number 20240351905
- Publication date Oct 24, 2024
- POSTECH Research and Business Development Foundation
- Yong-Young NOH
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR EVALUATING M...
- Publication number 20240321577
- Publication date Sep 26, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Toshimitsu OBONAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LATERAL GALLIUM OXIDE TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240321971
- Publication date Sep 26, 2024
- POWER CUBESEMI INC.
- Tai Young KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR, METHOD OF MANUFACTURING TRANSISTOR, AND DISPLAY DEVICE...
- Publication number 20240322047
- Publication date Sep 26, 2024
- MIKUNI ELECTRON CORPORATION
- SAKAE TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE FILM AND METHOD FOR FORMING METAL OXIDE FILM
- Publication number 20240321897
- Publication date Sep 26, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Material Within Openings Extending into a Semico...
- Publication number 20240297068
- Publication date Sep 5, 2024
- Micron Technology, Inc.
- Gurtej S. Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Layered Substrate with Ruthenium Layer and Method for Producing
- Publication number 20240282709
- Publication date Aug 22, 2024
- Zhaoxuan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...
- Publication number 20240282574
- Publication date Aug 22, 2024
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLANARIZATION DEVICE, DEPOSITION SYSTEM INCLUDING THE SAM...
- Publication number 20240274456
- Publication date Aug 15, 2024
- SAMSUNG DISPLAY CO., LTD.
- Cheol Rae JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...
- Publication number 20240254616
- Publication date Aug 1, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING...
- Publication number 20240234135
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Junhee CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE INCLUDING TRANSISTOR AND MANUFACTURING METHOD THEREOF
- Publication number 20240234432
- Publication date Jul 11, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Junichiro SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240213222
- Publication date Jun 27, 2024
- Advanced Semiconductor Engineering, Inc.
- Shang-Ruei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin Film Transistor, Manufacturing Method Thereof and Display Appa...
- Publication number 20240204108
- Publication date Jun 20, 2024
- LG Display Co., Ltd.
- Sunggu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING AN ELECTRONIC DEVICE
- Publication number 20240203731
- Publication date Jun 20, 2024
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Rémy Gassilloud
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE CRYSTAL, CRYSTALLINE OXIDE FILM, CRYSTALLINE MULTILAYER STRUC...
- Publication number 20240170542
- Publication date May 23, 2024
- FLOSFIA INC.
- Kentaro KANEKO
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20240170536
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Yi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME
- Publication number 20240158954
- Publication date May 16, 2024
- TOSOH CORPORATION
- Yuya TSUCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, AND SEMICO...
- Publication number 20240162234
- Publication date May 16, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Toshikazu Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
- Publication number 20240154041
- Publication date May 9, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORRELATED ORBITALS YIELD HIGH-MOBILITY, BACK-END-OF-LINE COMPATIBL...
- Publication number 20240136178
- Publication date Apr 25, 2024
- Cornell University
- Darrell G. Schlom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240128363
- Publication date Apr 18, 2024
- RayNext semiconductor Co., Ltd.
- Yen-Teng HO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240113228
- Publication date Apr 4, 2024
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATE AND METHOD OF MANUFACTURING LAMINATE
- Publication number 20240113174
- Publication date Apr 4, 2024
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRAT...
- Publication number 20240102152
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Yun-Chu TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Physical deposition at reduced pressure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming oxide semiconductor film, semiconductor device,...

Ultrawide bandgap semiconductor devices including magnesium germani...

GaN/two-dimensional AlN heterojunction rectifier on silicon substra...

Memory device and method for making same

Methods of manufacturing electronic structures

Semiconductor device and manufacturing method of semiconductor device

Thin film transistor, method for manufacturing the same, and semico...

Display device

Oxide semiconductor sputtering target and method of fabricating thi...

Method for forming oxide semiconductor film, semiconductor device,...

Semiconductor device and method for manufacturing the same

Preparation method of GaN field effect transistor based on diamond...

Transistor, method of manufacturing transistor, and display device...

Method of forming nitride semiconductor film

Physical vapor deposition apparatus and method thereof

Epitaxial wafer, method of manufacturing the epitaxial wafer, diode...

Semiconductor device comprising silicon and oxide semiconductor in...

Method for manufacturing a SiC substrate by simultaneously forming...

Method for forming oxide semiconductor film, semiconductor device,...

Method of manufacturing a semiconductor device and a semiconductor...

Transistor, method of manufacturing transistor, and display device...

Semiconductor device, method for manufacturing the same, or display...

Methods of forming material within openings extending into a semico...

Low resistivity DRAM buried word line stack

Device for manufacturing semiconductor substrate comprising tempera...

Epi-growth apparatus of separate chamber type

Method for manufacturing semiconductor device including annealing a...

Optoelectronic device including a superlattice

Semiconductor device including a semiconductor fin comprising a sil...

Electronic structure having two field effect transistors

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

PATTERNING USING MONOMER BASED SACRIFICIAL MATERIAL LIFTOFF

LAMINATE AND METHOD FOR MANUFACTURING SAME

MEMORY DEVICE AND METHOD FOR MAKING SAME

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

SEMICONDUCTOR LAYER INCLUDING Sn BASED PEROVSKITE INCLUDING CHLORID...

METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR EVALUATING M...

LATERAL GALLIUM OXIDE TRANSISTOR AND METHOD OF MANUFACTURING THE SAME

TRANSISTOR, METHOD OF MANUFACTURING TRANSISTOR, AND DISPLAY DEVICE...

METAL OXIDE FILM AND METHOD FOR FORMING METAL OXIDE FILM

Methods of Forming Material Within Openings Extending into a Semico...

Layered Substrate with Ruthenium Layer and Method for Producing

METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...

SUBSTRATE PLANARIZATION DEVICE, DEPOSITION SYSTEM INCLUDING THE SAM...

SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...

SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING...

DISPLAY DEVICE INCLUDING TRANSISTOR AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

Thin Film Transistor, Manufacturing Method Thereof and Display Appa...

METHOD OF MANUFACTURING AN ELECTRONIC DEVICE

OXIDE CRYSTAL, CRYSTALLINE OXIDE FILM, CRYSTALLINE MULTILAYER STRUC...

SEMICONDUCTOR DEVICE AND METHOD

MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME

THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, AND SEMICO...

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME

CORRELATED ORBITALS YIELD HIGH-MOBILITY, BACK-END-OF-LINE COMPATIBL...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

LAMINATE AND METHOD OF MANUFACTURING LAMINATE

METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRAT...