Porous silicon

Industry

CPC
B81C2201/0115

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0115Porous silicon

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing at least one membrane system, membrane sys...
- Patent number 11,866,323
- Issue date Jan 9, 2024
- Robert Bosch GmbH
- Renate Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating calcite nanofluidic channels
- Patent number 11,628,406
- Issue date Apr 18, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-purpose MEMS thermopile sensors
- Patent number 11,454,553
- Issue date Sep 27, 2022
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 11,167,981
- Issue date Nov 9, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating calcite nanofluidic channels
- Patent number 10,926,227
- Issue date Feb 23, 2021
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-purpose MEMS thermopile sensors
- Patent number 10,876,903
- Issue date Dec 29, 2020
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for creating fluidic cavities by transmembrane etching thro...
- Patent number 10,668,436
- Issue date Jun 2, 2020
- SiMPore Inc.
- Christopher C. Striemer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
- Patent number 10,558,169
- Issue date Feb 11, 2020
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 10,519,034
- Issue date Dec 31, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra-high charge density electrets and method of making same
- Patent number 10,424,441
- Issue date Sep 24, 2019
- Honeywell International Inc.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Island etched filter passages
- Patent number 10,086,317
- Issue date Oct 2, 2018
- Hewlett-Packard Development Company, L.P.
- Roger A. McKay
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pseudo SOI process
- Patent number 10,053,360
- Issue date Aug 21, 2018
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate etch
- Patent number 9,988,263
- Issue date Jun 5, 2018
- Hewlett-Packard Development Company, L.P.
- Patrick Wayne Sadik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nonparallel island etching
- Patent number 9,938,139
- Issue date Apr 10, 2018
- Hewlett-Packard Development Company, L.P.
- Roger A. McKay
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum-cavity-insulated flow sensors
- Patent number 9,880,036
- Issue date Jan 30, 2018
- Posifa
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating electronic device package
- Patent number 9,771,259
- Issue date Sep 26, 2017
- Xintec Inc.
- Chien-Hung Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single silicon wafer micromachined thermal conduction sensor
- Patent number 9,580,305
- Issue date Feb 28, 2017
- POSiFA MICROSYSTEMS, INC.
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabrication of a micromechanical and/or nanomechanical...
- Patent number 9,527,729
- Issue date Dec 27, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a getter
- Patent number 9,511,998
- Issue date Dec 6, 2016
- Robert Bosch GmbH
- Ashwin Samarao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single silicon wafer micromachined thermal conduction sensor
- Patent number 9,440,847
- Issue date Sep 13, 2016
- POSiFA MICROSYSTEMS, INC.
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding method using porosified surfaces for making stacked structures
- Patent number 9,272,899
- Issue date Mar 1, 2016
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Rama Krishna Kotlanka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a suspended part of a microelectronic and/or nano...
- Patent number 9,096,427
- Issue date Aug 4, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Sofiane Ben Mbarek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a porous microneedle array and correspondi...
- Patent number 8,986,256
- Issue date Mar 24, 2015
- Robert Bosch GmbH
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding method using porosified surfaces for making stacked structures
- Patent number 8,940,616
- Issue date Jan 27, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Rama Krishna Kotlanka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a structure comprising at least one multi-thick a...
- Patent number 8,716,052
- Issue date May 6, 2014
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a component, and sensor element
- Patent number 8,530,261
- Issue date Sep 10, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a component, in particular a micromechanical a...
- Patent number 8,529,781
- Issue date Sep 10, 2013
- Robert Bosch GmbH
- Tino Fuchs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical diaphragm structure havi...
- Patent number 8,519,494
- Issue date Aug 27, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a multilayer structure
- Patent number 8,470,689
- Issue date Jun 25, 2013
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Sébastien Desplobain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing porous microstructures, porous microstruct...
- Patent number 8,377,315
- Issue date Feb 19, 2013
- Robert Bosch GmbH
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING AT LEAST ONE MEMBRANE SYSTEM, MEMBRANE SYS...
- Publication number 20210238031
- Publication date Aug 5, 2021
- ROBERT BOSCH GmbH
- Renate Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING CALCITE NANOFLUIDIC CHANNELS
- Publication number 20210162352
- Publication date Jun 3, 2021
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-Purpose MEMS Thermopile Sensors
- Publication number 20210063248
- Publication date Mar 4, 2021
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING CALCITE NANOFLUIDIC CHANNELS
- Publication number 20200171492
- Publication date Jun 4, 2020
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20200062586
- Publication date Feb 27, 2020
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Sabine TRUPP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME
- Publication number 20190013151
- Publication date Jan 10, 2019
- HONEYWELL INTERNATIONAL INC.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20180208459
- Publication date Jul 26, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Sabine TRUPP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Single Silicon Wafer Micromachined Thermal Conduction Sensor
- Publication number 20160355396
- Publication date Dec 8, 2016
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate Etch
- Publication number 20160200568
- Publication date Jul 14, 2016
- Hewlett-Packard Development Company, L.P.
- Patrick Wayne Sadik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20160052782
- Publication date Feb 25, 2016
- XINTEC INC.
- Chien-Hung LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...
- Publication number 20150274516
- Publication date Oct 1, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Eric OLLIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING A SUSPENDED PART OF A MICROELECTRONIC AND/OR NANO...
- Publication number 20140357006
- Publication date Dec 4, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Sofiane BEN MBAREK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING METHOD USING POROSIFIED SURFACES FOR MAKING STACKED STRUCTURES
- Publication number 20140030847
- Publication date Jan 30, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Rama Krishna KOTLANKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING A STRUCTURE COMPRISING AT LEAST ONE MULTI-THICK A...
- Publication number 20130137245
- Publication date May 30, 2013
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Philippe ROBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING A MULTILAYER STRUCTURE
- Publication number 20120115311
- Publication date May 10, 2012
- STMicroelectronics (Crolles 2) SAS
- Sébastien DESPLOBAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING POROUS MICROSTRUCTURES, POROUS MICROSTRUCT...
- Publication number 20110281102
- Publication date Nov 17, 2011
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Formation Of Nanoporous Materials
- Publication number 20110253544
- Publication date Oct 20, 2011
- University of South Australia
- Dusan Losic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AN ELECTRO-MECHANICAL MICROSYSTEM
- Publication number 20110221015
- Publication date Sep 15, 2011
- COMMISS. A L'ENERGIE ATOM ET AUX ENERG ALTERNA
- Frederic-Xavier Gaillard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micromechanical diaphragm structure havi...
- Publication number 20110147864
- Publication date Jun 23, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method for a porous microneedle array and correspondi...
- Publication number 20110137254
- Publication date Jun 9, 2011
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
- Publication number 20110001200
- Publication date Jan 6, 2011
- Karl-Heinz Kraft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a component, in particular a micromechanical a...
- Publication number 20100294710
- Publication date Nov 25, 2010
- ROBERT BOSCH GmbH
- Tino Fuchs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20100171189
- Publication date Jul 8, 2010
- Chien-Hung Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A COMPONENT, AND SENSOR ELEMENT
- Publication number 20100164027
- Publication date Jul 1, 2010
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONVERTING ENERGY
- Publication number 20100066208
- Publication date Mar 18, 2010
- Samsung Electronics, Co., Ltd.
- Jaeyoung CHOI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT
- Publication number 20100029031
- Publication date Feb 4, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCOPIC STRUCTURE PACKAGING METHOD AND DEVICE WITH PACKAGED MIC...
- Publication number 20100006957
- Publication date Jan 14, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Greja Johanna Adriana Maria VERHEIJDEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A THIN-LAYE...
- Publication number 20100003790
- Publication date Jan 7, 2010
- Silvia Kronmueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING AN ELECTROMECHANICAL DEVICE INCLUDING AT LEAS...
- Publication number 20090317931
- Publication date Dec 24, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS integrated process for fabricating monocrystalline silicon mic...
- Publication number 20090261387
- Publication date Oct 22, 2009
- MTA MuSZAKI FIZIKAI eS ANYAGTUDOMaNYI KUTAToINTeZET
- Antalne Adam
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Porous silicon

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing at least one membrane system, membrane sys...

Fabricating calcite nanofluidic channels

Multi-purpose MEMS thermopile sensors

Semiconductor device and method of producing a semiconductor device

Fabricating calcite nanofluidic channels

Multi-purpose MEMS thermopile sensors

Methods for creating fluidic cavities by transmembrane etching thro...

Method for manufacturing a micromechanical timepiece part and said...

Semiconductor device and method of producing a semiconductor device

Ultra-high charge density electrets and method of making same

Island etched filter passages

Pseudo SOI process

Substrate etch

Nonparallel island etching

Vacuum-cavity-insulated flow sensors

Method for fabricating electronic device package

Single silicon wafer micromachined thermal conduction sensor

Process for fabrication of a micromechanical and/or nanomechanical...

MEMS device having a getter

Single silicon wafer micromachined thermal conduction sensor

Bonding method using porosified surfaces for making stacked structures

Method for making a suspended part of a microelectronic and/or nano...

Manufacturing method for a porous microneedle array and correspondi...

Bonding method using porosified surfaces for making stacked structures

Method for making a structure comprising at least one multi-thick a...

Method for producing a component, and sensor element

Method for producing a component, in particular a micromechanical a...

Method for manufacturing a micromechanical diaphragm structure havi...

Method for forming a multilayer structure

Method for manufacturing porous microstructures, porous microstruct...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING AT LEAST ONE MEMBRANE SYSTEM, MEMBRANE SYS...

FABRICATING CALCITE NANOFLUIDIC CHANNELS

Multi-Purpose MEMS Thermopile Sensors

FABRICATING CALCITE NANOFLUIDIC CHANNELS

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE

ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE

Single Silicon Wafer Micromachined Thermal Conduction Sensor

Substrate Etch

ELECTRONIC DEVICE PACKAGE AND FABRICATION METHOD THEREOF

PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...

METHOD FOR MAKING A SUSPENDED PART OF A MICROELECTRONIC AND/OR NANO...

BONDING METHOD USING POROSIFIED SURFACES FOR MAKING STACKED STRUCTURES

METHOD FOR MAKING A STRUCTURE COMPRISING AT LEAST ONE MULTI-THICK A...

METHOD FOR FORMING A MULTILAYER STRUCTURE

METHOD FOR MANUFACTURING POROUS MICROSTRUCTURES, POROUS MICROSTRUCT...

Formation Of Nanoporous Materials

METHOD FOR PRODUCING AN ELECTRO-MECHANICAL MICROSYSTEM

Method for manufacturing a micromechanical diaphragm structure havi...

Manufacturing method for a porous microneedle array and correspondi...

MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

Method for producing a component, in particular a micromechanical a...

ELECTRONIC DEVICE PACKAGE AND FABRICATION METHOD THEREOF

METHOD FOR PRODUCING A COMPONENT, AND SENSOR ELEMENT

APPARATUS AND METHOD FOR CONVERTING ENERGY

METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT

MICROSCOPIC STRUCTURE PACKAGING METHOD AND DEVICE WITH PACKAGED MIC...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A THIN-LAYE...

METHOD OF FABRICATING AN ELECTROMECHANICAL DEVICE INCLUDING AT LEAS...

CMOS integrated process for fabricating monocrystalline silicon mic...