Position control

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CPC
G03F7/70775

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70775Position control

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for positioning a shadow mask
- Patent number 12,235,591
- Issue date Feb 25, 2025
- ABB Schweiz AG
- Johannes Felix Holger Schmitt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology system for packaging applications
- Patent number 12,222,659
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Venkatakaushik Voleti
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 12,216,410
- Issue date Feb 4, 2025
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder, tool and method of manufacturing an object holder
- Patent number 12,197,139
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Bastiaan Lambertus Wilhelmus Marinus Van De Ven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, lithography apparatus and article manufactur...
- Patent number 12,169,368
- Issue date Dec 17, 2024
- Canon Kabushiki Kaisha
- Tsutomu Terao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Displacement measuring apparatus, displacement measuring method and...
- Patent number 12,163,814
- Issue date Dec 10, 2024
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motion control apparatus, lithography apparatus, planarization appa...
- Patent number 12,147,164
- Issue date Nov 19, 2024
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 12,147,162
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device
- Patent number 12,140,873
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Paul Corné Henri De Wit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate stage and substrate processing system using the same
- Patent number 12,111,582
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
- Patent number 12,105,430
- Issue date Oct 1, 2024
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 12,072,638
- Issue date Aug 27, 2024
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 12,061,422
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor substrate alignment device and a semiconductor substr...
- Patent number 12,027,401
- Issue date Jul 2, 2024
- Samsung Electronics Co., Ltd.
- Gwanghee Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 12,007,702
- Issue date Jun 11, 2024
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Control method of movable body, exposure method, device manufacturi...
- Patent number 11,994,811
- Issue date May 28, 2024
- Nikon Corporation
- Akihiro Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask orientation
- Patent number 11,977,246
- Issue date May 7, 2024
- Applied Materials, Inc.
- Yongan Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic overlay correction and lithographic process
- Patent number 11,966,170
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ai-Jen Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mirror calibrating method, a position measuring method, a lithograp...
- Patent number 11,940,264
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Johannes Mathias Theodorus Antonius Adriaens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,914,308
- Issue date Feb 27, 2024
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement system, substrate processing system, and device manufac...
- Patent number 11,915,961
- Issue date Feb 27, 2024
- Nikon Corporation
- Go Ichinose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanoscale positioning apparatus with large stroke and multiple degr...
- Patent number 11,911,896
- Issue date Feb 27, 2024
- WUXI FRIEDRICH MEASUREMENT AND CONTROL INSTRUMENTS CO., LTD
- Fengwei Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for adjusting wafer, reaction chamber, and method for adjust...
- Patent number 11,892,778
- Issue date Feb 6, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Congjun Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-calibrating overlay metrology
- Patent number 11,880,142
- Issue date Jan 23, 2024
- KLA Corporation
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multifunctional lithography device
- Patent number 11,868,055
- Issue date Jan 9, 2024
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a cryostat and layer of superconducting coils a...
- Patent number 11,860,553
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Hessel Bart Koolmees
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of unloading an object from a support table
- Patent number 11,846,879
- Issue date Dec 19, 2023
- ASML Netherland B.V.
- Giovanna De Simone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning substrates in imprint lithography processes
- Patent number 11,846,890
- Issue date Dec 19, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
- Patent number 11,835,863
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 11,835,869
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20250102925
- Publication date Mar 27, 2025
- Canon Kabushiki Kaisha
- SHIORI OTOMO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20250076774
- Publication date Mar 6, 2025
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20250060681
- Publication date Feb 20, 2025
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IMAGING A MASK LAYER AND ASSOCIATED IMAGING SYSTEM
- Publication number 20250028252
- Publication date Jan 23, 2025
- XSYS PREPRESS N.V.
- Frederik DEFOUR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20250021022
- Publication date Jan 16, 2025
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND METHOD OF MANUFACTURING ART...
- Publication number 20250004388
- Publication date Jan 2, 2025
- Canon Kabushiki Kaisha
- HIRONOBU FUJISHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SENSOR POSITIONING METHOD, A POSITIONING SYSTEM, A LITHOGRAPHIC A...
- Publication number 20250004390
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Jeroen Johan Maarten VAN DE WIJDEVEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Rotary Substrate Support Having an Actuator for Aligning a Substrate
- Publication number 20240427255
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Nagesha JANSALE VENKATESHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD
- Publication number 20240385539
- Publication date Nov 21, 2024
- HITACHI HIGH-TECH CORPORATION
- Akira NISHIOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE
- Publication number 20240377762
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...
- Publication number 20240361706
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240361707
- Publication date Oct 31, 2024
- Canon Kabushiki Kaisha
- JUNICHI MOTOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...
- Publication number 20240345494
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- NAOKI FUNABASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240337955
- Publication date Oct 10, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20240329545
- Publication date Oct 3, 2024
- Ushio Denki Kabushiki Kaisha
- Naoya SOHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240319585
- Publication date Sep 26, 2024
- Koninklijke Philips N.V.
- Marcus Antonius Verschuuren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...
- Publication number 20240313684
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20240312820
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Yoshio MIZUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...
- Publication number 20240264524
- Publication date Aug 8, 2024
- ASMPT SINGAPORE PTE. LTD
- Kai Siu LAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology system for packaging applications
- Publication number 20240241456
- Publication date Jul 18, 2024
- Venkatakaushik VOLETI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS AND LITHOGRAPHIC APPARATUS
- Publication number 20240241452
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Arjan Johannes Anton Beukman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, A...
- Publication number 20240184214
- Publication date Jun 6, 2024
- Nikon Corporation
- Yoji WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING DEVICE
- Publication number 20240168393
- Publication date May 23, 2024
- Dr. Johannes Heidenhain Gmbh
- Arjan Bakker
- G01 - MEASURING TESTING
Information Patent Application
VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD
- Publication number 20240168395
- Publication date May 23, 2024
- ORBOTECH LTD.
- Tal Goichman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRAWING APPARATUS AND DRAWING METHOD
- Publication number 20240168386
- Publication date May 23, 2024
- SCREEN Holdings Co., Ltd.
- Shota MAJIMA
- G02 - OPTICS
Information Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
- Publication number 20240134294
- Publication date Apr 25, 2024
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20240118607
- Publication date Apr 11, 2024
- SEMES CO.,LTD
- Hyun YOON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
- Publication number 20240118626
- Publication date Apr 11, 2024
- Canon Kabushiki Kaisha
- SHUJI SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Position control

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device and method for positioning a shadow mask

Metrology system for packaging applications

Exposure apparatus and method of manufacturing article

Object holder, tool and method of manufacturing an object holder

Positioning apparatus, lithography apparatus and article manufactur...

Displacement measuring apparatus, displacement measuring method and...

Motion control apparatus, lithography apparatus, planarization appa...

Imprint lithography

Positioning device

Substrate stage and substrate processing system using the same

Exposure apparatus, exposure method, and manufacturing method for p...

Exposure apparatus, exposure method, and method of manufacturing ar...

Method for fast loading substrates in a flat panel tool

Semiconductor substrate alignment device and a semiconductor substr...

Measurement device, lithography system and exposure apparatus, and...

Control method of movable body, exposure method, device manufacturi...

Mask orientation

Lithographic overlay correction and lithographic process

Mirror calibrating method, a position measuring method, a lithograp...

Lithographic apparatus

Measurement system, substrate processing system, and device manufac...

Nanoscale positioning apparatus with large stroke and multiple degr...

Device for adjusting wafer, reaction chamber, and method for adjust...

Self-calibrating overlay metrology

Multifunctional lithography device

Assembly comprising a cryostat and layer of superconducting coils a...

Method of unloading an object from a support table

Positioning substrates in imprint lithography processes

Exposure apparatus, exposure method, and manufacturing method for p...

Exposure apparatus, exposure method, and method of manufacturing ar...

Patents Applicationslast 30 patents

PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND ARTICLE MANUFACTURING M...

A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS

METHOD FOR IMAGING A MASK LAYER AND ASSOCIATED IMAGING SYSTEM

ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS

EXPOSURE APPARATUS, CONTROL METHOD, AND METHOD OF MANUFACTURING ART...

A SENSOR POSITIONING METHOD, A POSITIONING SYSTEM, A LITHOGRAPHIC A...

Rotary Substrate Support Having an Actuator for Aligning a Substrate

IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE

A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD

TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...

IMPRINTING APPARATUS

EXPOSURE APPARATUS

IMPRINTING APPARATUS

ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

COMBINED DISPENSING AND STAMPING APPARATUS AND METHOD FOR APPLYING...

SUBSTRATE HOLDER AND METHOD

Metrology system for packaging applications

METROLOGY APPARATUS AND LITHOGRAPHIC APPARATUS

EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, A...

POSITIONING DEVICE

VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD

DRAWING APPARATUS AND DRAWING METHOD

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...