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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70775
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Patents Grants
last 30 patents
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Patent Grant
Mask orientation
Patent number
11,977,246
Issue date
May 7, 2024
Applied Materials, Inc.
Yongan Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic overlay correction and lithographic process
Patent number
11,966,170
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ai-Jen Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mirror calibrating method, a position measuring method, a lithograp...
Patent number
11,940,264
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Johannes Mathias Theodorus Antonius Adriaens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,914,308
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,915,961
Issue date
Feb 27, 2024
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanoscale positioning apparatus with large stroke and multiple degr...
Patent number
11,911,896
Issue date
Feb 27, 2024
WUXI FRIEDRICH MEASUREMENT AND CONTROL INSTRUMENTS CO., LTD
Fengwei Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for adjusting wafer, reaction chamber, and method for adjust...
Patent number
11,892,778
Issue date
Feb 6, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Congjun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-calibrating overlay metrology
Patent number
11,880,142
Issue date
Jan 23, 2024
KLA Corporation
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multifunctional lithography device
Patent number
11,868,055
Issue date
Jan 9, 2024
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Assembly comprising a cryostat and layer of superconducting coils a...
Patent number
11,860,553
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Hessel Bart Koolmees
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method of unloading an object from a support table
Patent number
11,846,879
Issue date
Dec 19, 2023
ASML Netherland B.V.
Giovanna De Simone
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning substrates in imprint lithography processes
Patent number
11,846,890
Issue date
Dec 19, 2023
Molecular Imprints, Inc.
Roy Matthew Patterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
Patent number
11,835,863
Issue date
Dec 5, 2023
Canon Kabushiki Kaisha
Yuhei Sumiyoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
Patent number
11,835,869
Issue date
Dec 5, 2023
Canon Kabushiki Kaisha
Kazuki Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning apparatus, lithography apparatus and article manufactur...
Patent number
11,829,079
Issue date
Nov 28, 2023
Canon Kabushiki Kaisha
Tsutomu Terao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment mark for front to back side alignment and lithography for...
Patent number
11,815,823
Issue date
Nov 14, 2023
Applied Materials, Inc.
Yongan Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging system with one or more mask units and corresponding method...
Patent number
11,808,902
Issue date
Nov 7, 2023
Steven Brown
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system for examining objects with EUV measurement light
Patent number
11,796,926
Issue date
Oct 24, 2023
Carl Zeiss SMT GmbH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object positioning system diagnostic and calibration methods positi...
Patent number
11,789,373
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Bas Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,762,299
Issue date
Sep 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
Patent number
11,747,736
Issue date
Sep 5, 2023
Nikon Corporation
Yuichi Shibazaki
G01 - MEASURING TESTING
Information
Patent Grant
Substrate stage, substrate processing system using the same, and me...
Patent number
11,747,741
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interferometer system, method of determining a mode hop of a laser...
Patent number
11,719,529
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Maarten Jozef Jansen
G01 - MEASURING TESTING
Information
Patent Grant
Imprint apparatus
Patent number
11,709,421
Issue date
Jul 25, 2023
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and related methods
Patent number
11,703,768
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alisia Mariska Willems-Peters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control apparatus, positioning apparatus, lithography apparatus, an...
Patent number
11,693,323
Issue date
Jul 4, 2023
Canon Kabushiki Kaisha
Takashi Kurihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus and method of manufacturing article
Patent number
11,681,237
Issue date
Jun 20, 2023
Canon Kabushiki Kaisha
Naosuke Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Registration mark, positional deviation detection method and device...
Patent number
11,646,239
Issue date
May 9, 2023
Kioxia Corporation
Sho Kawadahara
G01 - MEASURING TESTING
Information
Patent Grant
Imprint lithography
Patent number
11,635,696
Issue date
Apr 25, 2023
ASML Netherlands B.V.
Catharinus De Schiffart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
Publication number
20240134294
Publication date
Apr 25, 2024
Nikon Corporation
Yuichi Shibazaki
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
Publication number
20240118626
Publication date
Apr 11, 2024
Canon Kabushiki Kaisha
SHUJI SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM FOR AUTOMATED SYNTHESIS OF BIOCHIPS
Publication number
20240118630
Publication date
Apr 11, 2024
Centrillion Technology Holdings Corporation
Bolan LI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20240085806
Publication date
Mar 14, 2024
Canon Kabushiki Kaisha
YUICHI OZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR...
Publication number
20240077806
Publication date
Mar 7, 2024
Canon Kabushiki Kaisha
Yuhei Sumiyoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20240061350
Publication date
Feb 22, 2024
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AN INTERFEROMETER SYSTEM, POSITIONING SYSTEM, A LITHOGRAPHIC APPARA...
Publication number
20240061351
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Maarten Jozef JANSEN
G01 - MEASURING TESTING
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND ARTICLE MANUFACTURING METHOD
Publication number
20240053686
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
MASAKI IMAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ANALYZING METHOD, ANALYSIS APPARATUS, MEASURING METHOD, MEASUREMENT...
Publication number
20240045348
Publication date
Feb 8, 2024
Nikon Corporation
Ayako SUGIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION
Publication number
20240045345
Publication date
Feb 8, 2024
Applied Materials, Inc.
Ulrich MUELLER
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
POSITIONING APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTUR...
Publication number
20240004314
Publication date
Jan 4, 2024
Canon Kabushiki Kaisha
Tsutomu Terao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230393486
Publication date
Dec 7, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
Publication number
20230359133
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTRA TALL TARGET METROLOGY
Publication number
20230324809
Publication date
Oct 12, 2023
Yoram Uziel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER...
Publication number
20230324164
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Maarten Jozef JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and Method for Positioning a Shadow Mask
Publication number
20230314961
Publication date
Oct 5, 2023
ABB Schweiz AG
Johannes Felix Holger Schmitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20230266678
Publication date
Aug 24, 2023
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS, SYSTEM, AND SOFTWARE FOR MASKLESS LITHOGRAPHY SYSTEMS
Publication number
20230259038
Publication date
Aug 17, 2023
Applied Materials, Inc.
Zheng GU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MACHINE MEASUREMENT METROLOGY FRAME FOR A LITHOGRAPHY SYSTEM
Publication number
20230221658
Publication date
Jul 13, 2023
Applied Materials, Inc.
Ulrich MUELLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELF-CALIBRATING OVERLAY METROLOGY
Publication number
20230221656
Publication date
Jul 13, 2023
KLA Corporation
Stilian Pandev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT LITHOGRAPHY
Publication number
20230221651
Publication date
Jul 13, 2023
ASML NETHERLANDS B.V.
Catharinus DE SCHIFFART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK ORIENTATION
Publication number
20230213693
Publication date
Jul 6, 2023
Applied Materials, Inc.
Yongan XU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
Publication number
20230205101
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Luuc KEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MOTION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, PLANARIZATION APPA...
Publication number
20230194999
Publication date
Jun 22, 2023
Canon Kabushiki Kaisha
RYO NAWATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20230185205
Publication date
Jun 15, 2023
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIONING SUBSTRATES IN IMPRINT LITHOGRAPHY PROCESSES
Publication number
20230176493
Publication date
Jun 8, 2023
Molecular Imprints, Inc.
Roy Matthew Patterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY SYSTEM FOR EXAMINING OBJECTS WITH EUV MEASUREMENT LIGHT
Publication number
20230168593
Publication date
Jun 1, 2023
Carl Zeiss SMT GMBH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Assembly Comprising a Cryostat and Layer of Superconducting Coils a...
Publication number
20230161271
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Hessel Bart KOOLMEES
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
Publication number
20230143407
Publication date
May 11, 2023
Nikon Corporation
Yuichi Shibazaki
G01 - MEASURING TESTING