Positioning devices for conditioning tools

Industry

CPC
B24B53/005

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BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B53/00Devices or means for dressing or conditioning abrasive surfaces

Current Industry

B24B53/005Positioning devices for conditioning tools

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Platen surface modification and high-performance pad conditioning t...
- Patent number 11,794,305
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Christopher Heung-Gyun Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Use of steam for pre-heating of CMP components
- Patent number 11,633,833
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner and chemical mechanical polishing apparatus including t...
- Patent number 11,577,364
- Issue date Feb 14, 2023
- Samsung Electronics Co., Ltd.
- Yong-Hee Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for monitoring chemical mechanical polishing p...
- Patent number 11,279,001
- Issue date Mar 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Wei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, control method and apparatus for chemical mechanical polishing
- Patent number 10,792,783
- Issue date Oct 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiang-Chu Hu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 10,625,395
- Issue date Apr 21, 2020
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with pad carrier and conditioning station
- Patent number 9,987,724
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for monitoring a polishing surface of a polish...
- Patent number 9,943,943
- Issue date Apr 17, 2018
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for modifying and adding features on grinding wheel surfaces
- Patent number 9,895,787
- Issue date Feb 20, 2018
- United Technologies Corporation
- John P. Rizzo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dressing apparatus, polishing apparatus having the dressing apparat...
- Patent number 9,855,638
- Issue date Jan 2, 2018
- Ebara Corporation
- Satoshi Nagai
- B24 - GRINDING POLISHING
Information Patent Grant
Programmable coolant nozzle system for grinding
- Patent number 9,393,671
- Issue date Jul 19, 2016
- Dimensional Control, Inc.
- John A. Webster
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding machine
- Patent number 9,254,549
- Issue date Feb 9, 2016
- JTEKT Corporation
- Toshiki Sakai
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Truing device of grinding machine
- Patent number 8,920,211
- Issue date Dec 30, 2014
- JTEKT Corporation
- Yoshio Wakazono
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and methods for conditioning a polishing pad
- Patent number 7,963,826
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Grant
Machine including grinding wheel and wheel dresser
- Patent number 7,797,074
- Issue date Sep 14, 2010
- Mori Seiki USA, Inc.
- Gregory Hyatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pad conditioner cleaning apparatus
- Patent number 6,358,124
- Issue date Mar 19, 2002
- Applied Materials, Inc.
- Raijiro Koga
- B08 - CLEANING
Information Patent Grant
Grinding machine
- Patent number 6,224,462
- Issue date May 1, 2001
- Hitachi Seiki Co., Ltd.
- Shigeru Yokoyama
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioner cleaning apparatus
- Patent number 6,217,430
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Raijiro Koga
- B08 - CLEANING
Information Patent Grant
Precision grinding machine
- Patent number 5,323,572
- Issue date Jun 28, 1994
- Voumard Machines Co. S.A.
- Maurice Guenin
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing tool gauge for positioning cutting tools in removable head...
- Patent number 4,993,167
- Issue date Feb 19, 1991
- Durfee; Susan M.
- David L. Durfee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
MULTI HEAD PAD CONDITIONING APPARATUS AND METHOD OF USE
- Publication number 20240383099
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Christopher Heung-Gyun LEE
- B24 - GRINDING POLISHING
Information Patent Application
IN-SITU CONDITIONER DISK CLEANING DURING CMP
- Publication number 20230390895
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVIC...
- Publication number 20230339071
- Publication date Oct 26, 2023
- Samsung Electronics Co., Ltd.
- Junghyun ROH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS
- Publication number 20230256562
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
Grinding Machine with Replacement Structure for Replacing Trimming...
- Publication number 20230112392
- Publication date Apr 13, 2023
- FALCON MACHINE TOOLS CO., LTD.
- Po-Ming Chang
- B24 - GRINDING POLISHING
Information Patent Application
PLATEN SURFACE MODIFICATION AND HIGH-PERFORMANCE PAD CONDITIONING T...
- Publication number 20220097206
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Christopher Heung-Gyun LEE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS
- Publication number 20200376626
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING CHEMICAL MECHANICAL POLISHING P...
- Publication number 20200269382
- Publication date Aug 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Wei HUANG
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR DETERMINING POLISHING PAD HEIGHT AND POLISHING SYSTEM
- Publication number 20200061774
- Publication date Feb 27, 2020
- EBARA CORPORATION
- KUNIMASA MATSUSHITA
- B24 - GRINDING POLISHING
Information Patent Application
CONDITIONER AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING T...
- Publication number 20190358772
- Publication date Nov 28, 2019
- Samsung Electronics Co., Ltd.
- Yong-Hee LEE
- B24 - GRINDING POLISHING
Information Patent Application
AN APPARATUS FOR DRESSING A GRINDING WHEEL
- Publication number 20180311789
- Publication date Nov 1, 2018
- THYSSENKRUPP METALÚRGICA CAMPO LIMPO LTDA.
- Bruno BARBOSA DE OLIVEIRA FERREIRA SALLES
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20180093363
- Publication date Apr 5, 2018
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
Grinding machine
- Publication number 20180085892
- Publication date Mar 29, 2018
- Karl Heesemann Maschinenfabrik GmbH & Co. KG
- Christoph GIESE
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR MODIFYING AND ADDING FEATURES ON GRINDING W...
- Publication number 20150174729
- Publication date Jun 25, 2015
- United Technologies Corporation
- John P. Rizzo
- B24 - GRINDING POLISHING
Information Patent Application
DRESSING APPARATUS, POLISHING APPARATUS HAVING THE DRESSING APPARAT...
- Publication number 20140349552
- Publication date Nov 27, 2014
- Satoshi Nagai
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING MACHINE
- Publication number 20140335769
- Publication date Nov 13, 2014
- JTEKT Corporation
- Toshiki Sakai
- B24 - GRINDING POLISHING
Information Patent Application
Programmable Coolant Nozzle System for Grinding
- Publication number 20140273750
- Publication date Sep 18, 2014
- DIMENSIONAL CONTROL, INC.
- John A. Webster
- B24 - GRINDING POLISHING
Information Patent Application
TRUING DEVICE OF GRINDING MACHINE
- Publication number 20120329368
- Publication date Dec 27, 2012
- JTEKT Corporation
- Yoshio WAKAZONO
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD
- Publication number 20110318997
- Publication date Dec 29, 2011
- Applied Materials, Inc.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD
- Publication number 20100093263
- Publication date Apr 15, 2010
- Applied Materials, Inc.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Application
Device and method for truing a machining wheel by means of a rotati...
- Publication number 20090203296
- Publication date Aug 13, 2009
- Vollmer Werke Maschinenfabrik GmbH
- Rainer Braig
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD
- Publication number 20090036036
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD
- Publication number 20090036035
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Application
Machine Including Grinding Wheel and Wheel Dresser
- Publication number 20080220697
- Publication date Sep 11, 2008
- Mori Seiki USA, Inc.
- Gregory Hyatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Truing tool for a grindstone
- Publication number 20080020685
- Publication date Jan 24, 2008
- TJ UTVECKLING AB
- Torgny Jansson
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD
- Publication number 20070212983
- Publication date Sep 13, 2007
- APPLIED MATERIALS, INC.
- Roy C. Nangoy
- B24 - GRINDING POLISHING

Positioning devices for conditioning tools

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Platen surface modification and high-performance pad conditioning t...

Use of steam for pre-heating of CMP components

Conditioner and chemical mechanical polishing apparatus including t...

Substrate processing apparatus

Method and apparatus for monitoring chemical mechanical polishing p...

System, control method and apparatus for chemical mechanical polishing

Substrate polishing apparatus

Polishing system with pad carrier and conditioning station

Method and apparatus for monitoring a polishing surface of a polish...

Methods for modifying and adding features on grinding wheel surfaces

Dressing apparatus, polishing apparatus having the dressing apparat...

Programmable coolant nozzle system for grinding

Grinding machine

Method of obtaining a sliding distance distribution of a dresser on...

Truing device of grinding machine

Apparatus and methods for conditioning a polishing pad

Machine including grinding wheel and wheel dresser

Pad conditioner cleaning apparatus

Grinding machine

Pad conditioner cleaning apparatus

Precision grinding machine

Dressing tool gauge for positioning cutting tools in removable head...

Patents Applicationslast 30 patents

MULTI HEAD PAD CONDITIONING APPARATUS AND METHOD OF USE

IN-SITU CONDITIONER DISK CLEANING DURING CMP

GRINDING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVIC...

USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS

Grinding Machine with Replacement Structure for Replacing Trimming...

PLATEN SURFACE MODIFICATION AND HIGH-PERFORMANCE PAD CONDITIONING T...

SUBSTRATE PROCESSING APPARATUS

USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS

METHOD AND APPARATUS FOR MONITORING CHEMICAL MECHANICAL POLISHING P...

METHOD FOR DETERMINING POLISHING PAD HEIGHT AND POLISHING SYSTEM

CONDITIONER AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING T...

AN APPARATUS FOR DRESSING A GRINDING WHEEL

SUBSTRATE POLISHING APPARATUS

Grinding machine

SYSTEMS AND METHODS FOR MODIFYING AND ADDING FEATURES ON GRINDING W...

DRESSING APPARATUS, POLISHING APPARATUS HAVING THE DRESSING APPARAT...

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

GRINDING MACHINE

Programmable Coolant Nozzle System for Grinding

TRUING DEVICE OF GRINDING MACHINE

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

Device and method for truing a machining wheel by means of a rotati...

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

Machine Including Grinding Wheel and Wheel Dresser

Truing tool for a grindstone

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD