Pre-exposure scan; original with original holder alignment; Prealignment

Industry

CPC
G03F9/7011

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7011Pre-exposure scan; original with original holder alignment; Prealignment

Industries

Patents Grantslast 30 patents

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Wafer alignment mark scheme
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Pre-alignment measurement device and method
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- Patent number 10,146,145
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- Yukihiko Inagaki
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- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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Pre-exposure scan; original with original holder alignment; Prealignment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of obtaining array of plurality of regions on substrate, exp...

Operational policies of industrial field devices and distributed da...

Reticle pod including motion limiting features and method of assemb...

Invariable magnification multilevel optical device with telecentric...

Lithographic patterning device multichannel position and level gauge

Alignment method and associated metrology device

Alignment apparatus, alignment method, lithography apparatus, and m...

Measurement system, substrate processing system, and device manufac...

Wafer alignment mark scheme

Substrate positioning apparatus and methods

Silicon wafer processing device and method

Lithography apparatus, lithography method, decision method, storage...

Method for detecting the position of a mask holder on a measuring t...

Method and apparatus for aligning substrates on a substrate support...

Lithographic apparatus, device manufacturing method and associated...

Wafer alignment mark scheme

Measurement method, measurement apparatus, lithography apparatus, a...

Substrate pre-alignment method

Apparatus and method for ascertaining orientation errors

Substrate handling system and lithographic apparatus

Substrate placement in immersion lithography

Optical system for producing lithographic structures

Position measurement method, position control method, measurement m...

Pre-alignment measurement device and method

Measurement apparatus, lithography apparatus, and method of manufac...

Measurement apparatus, lithography apparatus, and method of manufac...

Substrate processing apparatus and substrate processing method

Lithography apparatus, control method therefor, and method of manuf...

Sensor system, substrate handling system and lithographic apparatus

Optical system for producing lithographic structures

Patents Applicationslast 30 patents

RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...

INVARIABLE MAGNIFICATION MULTILEVEL OPTICAL DEVICE WITH TELECENTRIC...

MANAGING MULTI-OBJECTIVE ALIGNMENTS FOR IMPRINTING

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILL...

RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...

LITHOGRAPHIC PATTERNING DEVICE MULTICHANNEL POSITION AND LEVEL GAUGE

METHOD OF OBTAINING ARRAY OF PLURALITY OF REGIONS ON SUBSTRATE, EXP...

MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...

ALIGNMENT METHOD AND ASSOCIATED METROLOGY DEVICE

ALIGNMENT APPARATUS, ALIGNMENT METHOD, LITHOGRAPHY APPARATUS, AND M...

Wafer Alignment Mark Scheme

METHOD AND APPARATUS FOR ALIGNING SUBSTRATES ON A SUBSTRATE SUPPORT...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...

APPARATUS AND METHOD FOR ASCERTAINING ORIENTATION ERRORS

OPTICAL SYSTEM FOR PRODUCING LITHOGRAPHIC STRUCTURES

Wafer Alignment Mark Scheme

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY

OPTICAL SYSTEM FOR PRODUCING LITHOGRAPHIC STRUCTURES

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...

METHOD AND DEVICE FOR WRITING PHOTOMASKS WITH REDUCED MURA ERRORS

SUBSTRATE PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD O...

DEBUGGING METHOD FOR PRE-ALIGNMENT

SYSTEM AND PROCESS FOR FABRICATING SEMICONDUCTOR PACKAGES

METHOD OF EXPOSING A SEMICONDUCTOR WAFER AND EXPOSURE APPARATUS

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT M...

WAFER ALIGNMENT MARK SCHEME