Premixing before introduction in the reaction chamber

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CPC
C23C16/45512

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45512Premixing before introduction in the reaction chamber

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Patents Grantslast 30 patents

Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a processing system
- Patent number 12,134,823
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Andreas Neuber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for silicon germanium uniformity control using multiple pre...
- Patent number 12,057,314
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 11,873,558
- Issue date Jan 16, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 11,746,420
- Issue date Sep 5, 2023
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,746,413
- Issue date Sep 5, 2023
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber mixing systems
- Patent number 11,721,527
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Ganesh Subbuswamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated cutting tool, and method and system for manufacturing the sa...
- Patent number 11,541,461
- Issue date Jan 3, 2023
- MOLDINO Tool Engineering, Ltd.
- Yuuzoh Fukunaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chemical vapor deposition process for depositing a coating and the...
- Patent number 11,535,552
- Issue date Dec 27, 2022
- Pilkington Group Limited
- Lila Raj Dahal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid precursor injection for thin film deposition
- Patent number 11,459,654
- Issue date Oct 4, 2022
- Eugenus, Inc.
- Alex Finkelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,421,320
- Issue date Aug 23, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a processing system
- Patent number 11,396,699
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Andreas Neuber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution unit in connection with ALD reactor
- Patent number 11,371,146
- Issue date Jun 28, 2022
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,345,997
- Issue date May 31, 2022
- Ceres Technologies, Inc.
- Egbert Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus comprising a first conduit circumscribed by a...
- Patent number 11,338,257
- Issue date May 24, 2022
- Corning Incorporated
- John Alan Langstrand
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,193,206
- Issue date Dec 7, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
- Patent number 11,186,911
- Issue date Nov 30, 2021
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having a gas-mixing manifold
- Patent number 11,118,262
- Issue date Sep 14, 2021
- ASM IP Holding B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
- Patent number 11,066,748
- Issue date Jul 20, 2021
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ generation of gaseous precursors for chemical vapor deposit...
- Patent number 11,060,186
- Issue date Jul 13, 2021
- Massachusetts Institute of Technology
- Jing Kong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, vapor phase growth apparatus, and vapor phase growth m...
- Patent number 11,047,047
- Issue date Jun 29, 2021
- NUFLARE TECHNOLOGY, INC.
- Takumi Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,017,986
- Issue date May 25, 2021
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery system
- Patent number 10,957,561
- Issue date Mar 23, 2021
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Titanium silicide region forming method
- Patent number 10,903,086
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dichlorosilane compensating control strategy for improved polycryst...
- Patent number 10,851,459
- Issue date Dec 1, 2020
- HEMLOCK SEMICONDUCTOR OPERATIONS LLC
- John Victor Bucci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVI/CVD matrix densification process and apparatus
- Patent number 10,837,109
- Issue date Nov 17, 2020
- United Technologies Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20240332016
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
- Publication number 20240327980
- Publication date Oct 3, 2024
- Suzhou Everbright Photonics Co., Ltd.
- Yang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UPSTREAM PROCESS MONITORING FOR DEPOSITION AND ETCH CHAMBERS
- Publication number 20240312812
- Publication date Sep 19, 2024
- Inficon, Inc.
- Matan Lapidot
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF FORMING CRYSTALLINE SEMICONDUC...
- Publication number 20240234140
- Publication date Jul 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND MIXING INLET DEVICE
- Publication number 20240183032
- Publication date Jun 6, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jingfeng WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING LAMINATE, PRODUCING APPARATUS FOR LAMINATE, LA...
- Publication number 20240177993
- Publication date May 30, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING
- Publication number 20240167153
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET DEVICE, AND SEMICO...
- Publication number 20240117522
- Publication date Apr 11, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CONTAINER
- Publication number 20240084449
- Publication date Mar 14, 2024
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
- Publication number 20240068095
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Youngki Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE PROCESS GAS FEED LINE ARCHITECTURE
- Publication number 20240043999
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhijit A. Kangude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240035153
- Publication date Feb 1, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C01 - INORGANIC CHEMISTRY
Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
- Publication number 20240030028
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Abbin Antony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230272523
- Publication date Aug 31, 2023
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION APPARATUS AND ASSEMBLY FOR GAS INFLOW I...
- Publication number 20230235456
- Publication date Jul 27, 2023
- Zimmer, Inc.
- Akshay Vinayak Dhamankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20230235455
- Publication date Jul 27, 2023
- Jusung Engineering Co., Ltd.
- Duck Ho KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...
- Publication number 20230193458
- Publication date Jun 22, 2023
- Taiyo Nippon Sanso Corporation
- Hayato MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION
- Publication number 20230128366
- Publication date Apr 27, 2023
- EUGENUS, INC.
- Alex Finkelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLED DELIVERY OF LOW-VAPOR-PRESSURE PRECURSOR INTO A CHAMBER
- Publication number 20230124304
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH MODULUS BORON-BASED CERAMICS FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20230112746
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Ananda K. BANERJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CONTAINER
- Publication number 20230076675
- Publication date Mar 9, 2023
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20220403513
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METH...
- Publication number 20220389582
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341038
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING A PROCESSING SYSTEM
- Publication number 20220333238
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Andreas NEUBER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220328285
- Publication date Oct 13, 2022
- Abdullah ZAFAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Premixing before introduction in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Precursor container

Method for controlling a processing system

Methods for silicon germanium uniformity control using multiple pre...

Apparatus and method for manufacturing hexagonal silicon crystal

Precursor container

Deposition radial and edge profile tunability through independent c...

PECVD apparatus for in-situ deposition of film stacks

Chemical delivery system and method of operating the chemical deliv...

Processing chamber mixing systems

Vapor delivery device, methods of manufacture and methods of use th...

Coated cutting tool, and method and system for manufacturing the sa...

Chemical vapor deposition process for depositing a coating and the...

Apparatus and method of manufacturing display apparatus

Liquid precursor injection for thin film deposition

Chemical delivery system and method of operating the chemical deliv...

Method for controlling a processing system

Gas distribution unit in connection with ALD reactor

Vapor delivery device, methods of manufacture and methods of use th...

Methods and apparatus comprising a first conduit circumscribed by a...

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Microwave plasma and ultraviolet assisted deposition apparatus and...

Substrate processing apparatus having a gas-mixing manifold

Microwave plasma and ultraviolet assisted deposition apparatus and...

In situ generation of gaseous precursors for chemical vapor deposit...

Shower head, vapor phase growth apparatus, and vapor phase growth m...

Deposition radial and edge profile tunability through independent c...

Gas delivery system

Titanium silicide region forming method

Dichlorosilane compensating control strategy for improved polycryst...

CVI/CVD matrix densification process and apparatus

Patents Applicationslast 30 patents

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...

UPSTREAM PROCESS MONITORING FOR DEPOSITION AND ETCH CHAMBERS

FILM FORMING APPARATUS AND METHOD OF FORMING CRYSTALLINE SEMICONDUC...

SEMICONDUCTOR PROCESSING APPARATUS AND MIXING INLET DEVICE

METHOD FOR PRODUCING LAMINATE, PRODUCING APPARATUS FOR LAMINATE, LA...

IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET DEVICE, AND SEMICO...

PRECURSOR CONTAINER

GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY

SINGLE PROCESS GAS FEED LINE ARCHITECTURE

Method and Device for Producing a SiC Solid Material

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

DEPOSITION METHOD AND DEPOSITION APPARATUS

CHEMICAL VAPOR INFILTRATION APPARATUS AND ASSEMBLY FOR GAS INFLOW I...

SUBSTRATE TREATMENT APPARATUS

DEVICE FOR SUPPLYING A MIXED GAS, DEVICE FOR PRODUCING METAL NITRID...

LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION

CONTROLLED DELIVERY OF LOW-VAPOR-PRESSURE PRECURSOR INTO A CHAMBER

HIGH MODULUS BORON-BASED CERAMICS FOR SEMICONDUCTOR APPLICATIONS

PRECURSOR CONTAINER

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METH...

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

METHOD FOR CONTROLLING A PROCESSING SYSTEM

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE