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Preparation of substrate for selective deposition
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02639
Preparation of substrate for selective deposition
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last 30 patents
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Patent Grant
Metal-insensitive epitaxy formation
Patent number
11,935,951
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Epitaxial structures exposed in airgaps for semiconductor devices
Patent number
11,923,409
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Yu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Regrowth uniformity in GaN vertical devices
Patent number
11,916,134
Issue date
Feb 27, 2024
NEXGEN POWER SYSTEMS, INC.
Clifford Drowley
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Heterogeneous semiconductor device substrates with high quality epi...
Patent number
11,908,922
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Carlos H. Diaz
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Diffusion barrier layer for source and drain structures to increase...
Patent number
11,901,413
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Ming Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High electron mobility transistor with improved barrier layer
Patent number
11,894,453
Issue date
Feb 6, 2024
United Microelectronics Corp.
Po-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing an optoelectronic semiconductor chip and optoe...
Patent number
11,888,083
Issue date
Jan 30, 2024
Osram Opto Semiconductors GmbH
Werner Bergbauer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process for collectively fabricating a plurality of semiconductor s...
Patent number
11,876,073
Issue date
Jan 16, 2024
Soitec
David Sotta
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of cooling semiconductor devices
Patent number
11,869,804
Issue date
Jan 9, 2024
Micron Technology, Inc.
David H. Wells
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Selective capping processes and structures formed thereby
Patent number
11,830,742
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Chien Chi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Conductive C-plane GaN substrate
Patent number
11,810,782
Issue date
Nov 7, 2023
Mitsubishi Chemical Corporation
Yutaka Mikawa
C30 - CRYSTAL GROWTH
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Patent Grant
Graded planar buffer for nanowires
Patent number
11,798,988
Issue date
Oct 24, 2023
Microsoft Technology Licensing, LLC
Geoffrey C. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with multi-layered source/drain regions having...
Patent number
11,776,851
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Yu Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of silicon using deposition-treat-etch process
Patent number
11,769,666
Issue date
Sep 26, 2023
Applied Materials, Inc.
Rui Cheng
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of manufacturing semiconductor device
Patent number
11,764,285
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chuan Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,764,290
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Georgios Vellianitis
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process for the hetero-integration of a semiconductor material of i...
Patent number
11,756,787
Issue date
Sep 12, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Mickaël Martin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
High electron mobility transistor and method for fabricating the same
Patent number
11,749,748
Issue date
Sep 5, 2023
United Microelectronics Corp.
Kai-Lin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a vertically-aligned three dimensional semiconduct...
Patent number
11,721,744
Issue date
Aug 8, 2023
Hon Hai Precision Industry Co., Ltd.
Chung-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated photonics including waveguiding material
Patent number
11,703,643
Issue date
Jul 18, 2023
The Research Foundation for the State University of New York
Douglas Coolbaugh
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Semiconductor device and forming method thereof
Patent number
11,705,507
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yao-Sheng Huang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for fabricating a heterostructure comprising active or passi...
Patent number
11,698,488
Issue date
Jul 11, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Fabrice Nemouchi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming shaped source/drain epitaxial layers of a semicon...
Patent number
11,695,063
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Jing Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gallium nitride substrate and manufacturing method of nitride semic...
Patent number
11,670,687
Issue date
Jun 6, 2023
Mitsubishi Chemical Corporation
Yusuke Tsukada
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor structures and methods of forming thereof
Patent number
11,664,456
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Hsien Wu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for manufacturing a vertical power device including an III-n...
Patent number
11,664,223
Issue date
May 30, 2023
Imec VZW
Steve Stoffels
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Atomic layer deposition of indium gallium zinc oxide
Patent number
11,664,222
Issue date
May 30, 2023
ASM IP Holding, B.V.
Oreste Madia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor epitaxy bordering isolation structure
Patent number
11,658,032
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Chin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for filling recessed features in semiconductor devices with...
Patent number
11,621,190
Issue date
Apr 4, 2023
Tokyo Electron Limited
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field effect transistor using transition metal dichalcogenide and a...
Patent number
11,581,185
Issue date
Feb 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ming-Yang Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TEMPLATE SUBSTRATE, METHOD AND APPARATUS FOR MANUFACTURING TEMPLATE...
Publication number
20240145622
Publication date
May 2, 2024
KYOCERA CORPORATION
Takeshi KAMIKAWA
C30 - CRYSTAL GROWTH
Information
Patent Application
SURFACE MODIFIERS FOR ENHANCED EPITAXIAL NUCLEATION AND WETTING
Publication number
20240145241
Publication date
May 2, 2024
Applied Materials, Inc.
Joe MARGETIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR STRUCTURES AND RESULTING SEMICONDU...
Publication number
20240128336
Publication date
Apr 18, 2024
Wolfspeed, Inc.
Christer Hallin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR WITH IMPROVED BARRIER LAYER
Publication number
20240120416
Publication date
Apr 11, 2024
UNITED MICROELECTRONICS CORP.
Po-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE C-PLANE GaN SUBSTRATE
Publication number
20240105449
Publication date
Mar 28, 2024
MITSUBISHI CHEMICAL CORPORATION
Yutaka MIKAWA
C30 - CRYSTAL GROWTH
Information
Patent Application
Methods of Forming One or More Covered Voids in a Semiconductor Sub...
Publication number
20240087948
Publication date
Mar 14, 2024
Micron Technology, Inc.
David H. Wells
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Confined Growth of 2D Materials and Their Heterostructures
Publication number
20240071759
Publication date
Feb 29, 2024
Massachusetts Institute of Technology
Jeehwan Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240071761
Publication date
Feb 29, 2024
ENKRIS SEMICONDUCTOR, INC.
Kai CHENG
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for Reducing Loss of Dielectric Layer in IO Silicon Oxide Re...
Publication number
20240071760
Publication date
Feb 29, 2024
Shanghai Huali Integrated Circuit Corporation
Zhenquan Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING A III-N MATERIAL-BASED LAYER
Publication number
20240038532
Publication date
Feb 1, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Matthew CHARLES
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transistor Source/Drain Regions and Methods of Forming the Same
Publication number
20230420520
Publication date
Dec 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Han Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
Publication number
20230420251
Publication date
Dec 28, 2023
Samsung Electronics Co., Ltd.
Kyungwook HWANG
C30 - CRYSTAL GROWTH
Information
Patent Application
NITRIDE-CONTAINING STI LINER FOR SIGE CHANNEL
Publication number
20230386859
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ya-Wen Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20230369467
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Georgios VELLIANITIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FABRICATING THE SAME
Publication number
20230361207
Publication date
Nov 9, 2023
UNITED MICROELECTRONICS CORP.
Kai-Lin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH CONFORMAL SOURCE/DRAIN LAYER
Publication number
20230327004
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yao-Sheng HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITING A SILICON GERMANIUM LAYER ON A SUBSTRATE
Publication number
20230326750
Publication date
Oct 12, 2023
Siltronic AG
Lucas Becker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
LOW-LEAKAGE SCHOTTKY DIODES AND METHOD OF MAKING A POWER SEMICONDUC...
Publication number
20230327027
Publication date
Oct 12, 2023
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Kyekyoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SHAPED SOURCE/DRAIN EPITAXIAL LAYERS OF A SEMICON...
Publication number
20230290866
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing company Ltd.
Yi-Jing LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING REGROWN FIDUCIALS FOR SEMICONDUCT...
Publication number
20230230931
Publication date
Jul 20, 2023
NEXGEN POWER SYSTEMS, INC.
Karthik Suresh Arulalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20230231051
Publication date
Jul 20, 2023
UNITED MICROELECTRONICS CORP.
Chia-Jhe Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFET EPI CHANNELS HAVING DIFFERENT HEIGHTS ON A STEPPED SUBSTRATE
Publication number
20230154802
Publication date
May 18, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Han Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR SELECTIVE DEPOSITION UTILIZING N-TYPE DOPANTS AND/OR AL...
Publication number
20230145240
Publication date
May 11, 2023
ASM IP HOLDING B.V.
John Tolle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NITRIDE SEMICONDUCTOR COMPONENT AND PROCESS FOR ITS PRODUCTION
Publication number
20230134459
Publication date
May 4, 2023
AZUR SPACE SOLAR POWER GMBH
Armin DADGAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH SEMICONDUCTOR-ON-INSULATOR REGION AND...
Publication number
20230125584
Publication date
Apr 27, 2023
GLOBALFOUNDRIES U.S. Inc.
Ramsey Hazbun
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20230106052
Publication date
Apr 6, 2023
ENKRIS SEMICONDUCTOR, INC.
Kai CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHADOW WALLS FOR USE IN FABRICATING DEVICES
Publication number
20230106283
Publication date
Apr 6, 2023
Microsoft Technology Licensing, LLC
Elvedin MEMISEVIC
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal-Insensitive Epitaxy Formation
Publication number
20230063033
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GROUP III NITRIDE STRUCTURES AND MANUFACTURING METHODS THEREOF
Publication number
20230053953
Publication date
Feb 23, 2023
ENKRIS SEMICONDUCTOR, INC.
Kai CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230057216
Publication date
Feb 23, 2023
RENESAS ELECTRONICS CORPORATION
Makoto KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS