Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619

Industry

CPC
B81C1/00626

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00626Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619

Industries

Patents Grantslast 30 patents

Information Patent Grant
Online trimming device and method for micro-shell resonator gyroscope
- Patent number 11,703,356
- Issue date Jul 18, 2023
- NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
- Kun Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating pressure sensors with non-silicon diaphragms
- Patent number 11,624,668
- Issue date Apr 11, 2023
- ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO., LTD.
- Tom Kwa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical device having inclined opti...
- Patent number 11,479,461
- Issue date Oct 25, 2022
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Additive manufacturing methods for modification and improvement of...
- Patent number 11,459,232
- Issue date Oct 4, 2022
- Dennis Willard Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for selective etching of nanostructures
- Patent number 11,424,130
- Issue date Aug 23, 2022
- ALIXLABS AB
- Md Sabbir Ahmed Khan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 11,317,219
- Issue date Apr 26, 2022
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device comprising a micro-electro-mechanical system substrate with...
- Patent number 11,040,871
- Issue date Jun 22, 2021
- Invensense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Laminate
- Patent number 11,027,532
- Issue date Jun 8, 2021
- LG Chem, Ltd.
- Eun Young Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protective wafer including inclined optical windows and device
- Patent number 10,996,461
- Issue date May 4, 2021
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical transducer
- Patent number 10,926,999
- Issue date Feb 23, 2021
- Infineon Technologies AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for selective etching of nanostructures
- Patent number 10,930,515
- Issue date Feb 23, 2021
- ALIXLABS AB
- Md Sabbir Ahmed Khan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,906,803
- Issue date Feb 2, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,766,765
- Issue date Sep 8, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selectively controlling application of a self-assembled monolayer c...
- Patent number 10,692,761
- Issue date Jun 23, 2020
- Invensense, Inc.
- Bongsang Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,364
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,365
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical transducer
- Patent number 10,626,007
- Issue date Apr 21, 2020
- Infineon Technologies AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,802
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,803
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembly processes for three-dimensional microstructures
- Patent number 10,612,925
- Issue date Apr 7, 2020
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a protective wafer including inclined opti...
- Patent number 10,591,721
- Issue date Mar 17, 2020
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,584,026
- Issue date Mar 10, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 10,555,091
- Issue date Feb 4, 2020
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMACHINED SUPERCONDUCTING INTERCONNECT IN SILICON
- Publication number 20230391609
- Publication date Dec 7, 2023
- International Business Machines Corporation
- Muir Kumph
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
- Publication number 20220258243
- Publication date Aug 18, 2022
- HENAN UNIVERSITY
- Guanghong Yang
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
- Publication number 20220262642
- Publication date Aug 18, 2022
- ALIXLABS AB
- MD Sabbir KHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL DEVICE HAVING INCLINED OPTI...
- Publication number 20210198102
- Publication date Jul 1, 2021
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
- Publication number 20210175087
- Publication date Jun 10, 2021
- ALIXLABS AB
- MD Sabbir Ahmed KHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PROTECTIVE WAFER INCLUDING INCLINED OPTI...
- Publication number 20200166743
- Publication date May 28, 2020
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20200092659
- Publication date Mar 19, 2020
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
- Publication number 20200024126
- Publication date Jan 23, 2020
- NextInput, Inc.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200024127
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017355
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017356
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL TRANSDUCER
- Publication number 20190367355
- Publication date Dec 5, 2019
- INFINEON TECHNOLOGIES AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS
- Publication number 20190310153
- Publication date Oct 10, 2019
- DunAn Sensing, LLC
- TOM KWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190248644
- Publication date Aug 15, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190233277
- Publication date Aug 1, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190169017
- Publication date Jun 6, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190152767
- Publication date May 23, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ASSEMBLY PROCESSES FOR THREE-DIMENSIONAL MICROSTRUCTURES
- Publication number 20190094024
- Publication date Mar 28, 2019
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20190090067
- Publication date Mar 21, 2019
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING SURFACE PROTRUSIONS ON AN ARTICLE AND THE ARTICLE...
- Publication number 20180348259
- Publication date Dec 6, 2018
- International Business Machines Corporation
- Bing Dang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180346318
- Publication date Dec 6, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180257931
- Publication date Sep 13, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLI...
- Publication number 20180257932
- Publication date Sep 13, 2018
- ROBERT BOSCH GmbH
- Benjamin Steuer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
- Publication number 20180179050
- Publication date Jun 28, 2018
- NextInput, Inc.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LAMINATE
- Publication number 20180170024
- Publication date Jun 21, 2018
- LG CHEM, LTD.
- Eun Young Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072568
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072566
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072567
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Online trimming device and method for micro-shell resonator gyroscope

Methods for fabricating pressure sensors with non-silicon diaphragms

Production method for a micromechanical device having inclined opti...

Additive manufacturing methods for modification and improvement of...

Method for selective etching of nanostructures

Method for manufacturing a thin filtering membrane and an acoustic...

Fence structure to prevent stiction in a MEMS motion sensor

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Device comprising a micro-electro-mechanical system substrate with...

Laminate

Planar cavity MEMS and related structures, methods of manufacture a...

Protective wafer including inclined optical windows and device

Microelectromechanical transducer

Method for selective etching of nanostructures

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Selectively controlling application of a self-assembled monolayer c...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Microelectromechanical transducer

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Assembly processes for three-dimensional microstructures

Method for manufacturing a protective wafer including inclined opti...

Planar cavity MEMS and related structures, methods of manufacture a...

Fence structure to prevent stiction in a MEMS motion sensor

Method for manufacturing a thin filtering membrane and an acoustic...

Patents Applicationslast 30 patents

MICROMACHINED SUPERCONDUCTING INTERCONNECT IN SILICON

CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE

METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES

PRODUCTION METHOD FOR A MICROMECHANICAL DEVICE HAVING INCLINED OPTI...

METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES

METHOD FOR MANUFACTURING A PROTECTIVE WAFER INCLUDING INCLINED OPTI...

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

MICROELECTROMECHANICAL TRANSDUCER

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

ASSEMBLY PROCESSES FOR THREE-DIMENSIONAL MICROSTRUCTURES

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

METHOD OF FORMING SURFACE PROTRUSIONS ON AN ARTICLE AND THE ARTICLE...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLI...

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

LAMINATE

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...