Processes for avoiding or controlling over-etching not provided for in B81C1/00571 - B81C1/00579

Industry

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B81C1/00587

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00587Processes for avoiding or controlling over-etching not provided for in B81C1/00571 - B81C1/00579

Industries

Patents Grantslast 30 patents

Information Patent Grant
Package structure of micro speaker and method for forming the same
- Patent number 11,818,563
- Issue date Nov 14, 2023
- FORTEMEDIA, INC.
- Li-Jen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing microstructures in a glass substrate
- Patent number 11,377,387
- Issue date Jul 5, 2022
- LPKF Laser & Electronics AG
- Roman Ostholt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
MEMS structure with an etch stop layer buried within inter-dielectr...
- Patent number 10,927,000
- Issue date Feb 23, 2021
- United Microelectronics Corp.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS method and structure
- Patent number 10,889,493
- Issue date Jan 12, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Hau Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Through silicon interposer wafer and method of manufacturing the same
- Patent number 10,882,737
- Issue date Jan 5, 2021
- Agency for Science, Technology and Research
- Navab Singh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Insulator semiconductor device-structure
- Patent number 10,832,920
- Issue date Nov 10, 2020
- Semiconductor Manufacturing International (Beijing) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,654,713
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,522,429
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preventing excessive etching of edges of an insulator layer
- Patent number 10,249,508
- Issue date Apr 2, 2019
- Semiconductor Manufacturing International (Beijing) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for reducing cracks in a step-shaped cavity
- Patent number 10,177,027
- Issue date Jan 8, 2019
- Semiconductor Manufacturing International (Beijing) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS method and structure
- Patent number 10,160,642
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Hau Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS method and structure
- Patent number 9,394,164
- Issue date Jul 19, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Hau Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate processing method
- Patent number 9,371,225
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Seiko Minami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic Microelectromechanical structures
- Patent number 8,975,104
- Issue date Mar 10, 2015
- The Royal Institution for the Advancement of Learning/McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element and method for manufacturing same
- Patent number 8,669,627
- Issue date Mar 11, 2014
- Murata Manufacturing Co., Ltd.
- Junichi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic microelectromechanical structures
- Patent number 8,658,452
- Issue date Feb 25, 2014
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element and method for manufacturing same
- Patent number 8,508,003
- Issue date Aug 13, 2013
- Murata Manufacturing Co., Ltd.
- Junichi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS diaphragm
- Patent number 8,492,857
- Issue date Jul 23, 2013
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS diaphragm
- Patent number 8,390,085
- Issue date Mar 5, 2013
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS diaphragm
- Patent number 8,134,215
- Issue date Mar 13, 2012
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a cavity by two-step etching and method of reduci...
- Patent number 7,514,287
- Issue date Apr 7, 2009
- Touch Micro-System Technology Inc.
- Ter-Chang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for quantifying over-etch of a conductive feature
- Patent number 7,419,609
- Issue date Sep 2, 2008
- Texas Instruments Incorporated
- Raba Mezenner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing external force detection sensor
- Patent number 7,393,714
- Issue date Jul 1, 2008
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined electromechanical device
- Patent number 7,208,806
- Issue date Apr 24, 2007
- Agency for Science, Technology and Research
- Kui Yao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for detecting an endpoint in a vapor phase etch
- Patent number 7,189,332
- Issue date Mar 13, 2007
- Texas Instruments Incorporated
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Envelope follower end point detection in time division multiplexed...
- Patent number 7,101,805
- Issue date Sep 5, 2006
- Unaxis USA Inc.
- David Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deep reactive ion etching process and microelectromechanical device...
- Patent number 7,077,007
- Issue date Jul 18, 2006
- Delphi Technologies, Inc.
- David Boyd Rich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing an external force detection sensor
- Patent number 7,067,344
- Issue date Jun 27, 2006
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
- Publication number 20230239628
- Publication date Jul 27, 2023
- Fortemedia, Inc.
- Li-Jen CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INSULATOR SEMICONDUCTOR DEVICE-STRUCTURE
- Publication number 20190172721
- Publication date Jun 6, 2019
- Semiconductor Manufacturing International (Beijing) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Method and Structure
- Publication number 20190119105
- Publication date Apr 25, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Hau Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170154830
- Publication date Jun 1, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- LEE-CHUAN TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electronic Device, Physical Quantity Sensor, Pressure Sensor, Altim...
- Publication number 20160137494
- Publication date May 19, 2016
- SEIKO EPSON CORPORATION
- Nobuyuki Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING MEMS DEVICE
- Publication number 20150259198
- Publication date Sep 17, 2015
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenxing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20150008788
- Publication date Jan 8, 2015
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Method and Structure
- Publication number 20140264644
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Hau Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND METHOD FOR MANUFACTURING SAME
- Publication number 20130292783
- Publication date Nov 7, 2013
- Murata Manufacturing Co., Ltd.
- Junichi YOSHIDA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC COMPONENT
- Publication number 20130026659
- Publication date Jan 31, 2013
- IHP GmbH - Innovations for High Performance Microelectronics
- Mehmet Kaynak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND METHOD FOR MANUFACTURING SAME
- Publication number 20120025333
- Publication date Feb 2, 2012
- Murata Manufacturing Co., Ltd.
- Junichi YOSHIDA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20110186945
- Publication date Aug 4, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20110169110
- Publication date Jul 14, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20110111545
- Publication date May 12, 2011
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20100090298
- Publication date Apr 15, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
- Publication number 20080134757
- Publication date Jun 12, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE
- Publication number 20080113087
- Publication date May 15, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Rabah Mezenner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH
- Publication number 20070119814
- Publication date May 31, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING A CAVITY BY TWO-STEP ETCHING AND METHOD OF REDUCI...
- Publication number 20070077727
- Publication date Apr 5, 2007
- Ter-Chang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for monitoring plasma conditions in an etching...
- Publication number 20060211253
- Publication date Sep 21, 2006
- Ing-shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device and manufacturing method of MEMS device
- Publication number 20060180882
- Publication date Aug 17, 2006
- SEIKO EPSON CORPORATION
- Akira Sato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing an external force detection sensor
- Publication number 20060110843
- Publication date May 25, 2006
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachined electromechanical device
- Publication number 20060068564
- Publication date Mar 30, 2006
- Agency For Science, Technology and Research
- Kui Yao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of etching cavities having different aspect ratios
- Publication number 20060024965
- Publication date Feb 2, 2006
- Chen-Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachined electromechanical device
- Publication number 20050014306
- Publication date Jan 20, 2005
- Agency For Science, Technology and Research
- Kui Yao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Envelope follower end point detection in time division multiplexed...
- Publication number 20040238489
- Publication date Dec 2, 2004
- David Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing an external force detection sensor
- Publication number 20040110318
- Publication date Jun 10, 2004
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Deep reactive ion etching process and microelectromechanical device...
- Publication number 20040099631
- Publication date May 27, 2004
- DELCO ELECTRONICS CORPORATION
- David Boyd Rich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and method for detecting an endpoint in a vapor phase etch
- Publication number 20040069747
- Publication date Apr 15, 2004
- REFLECTIVITY, INC., a California corporation
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for avoiding or controlling over-etching not provided for in B81C1/00571 - B81C1/00579

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Package structure of micro speaker and method for forming the same

Method for manufacturing micromechanical structures in a device wafer

Method for producing microstructures in a glass substrate

MEMS structure with an etch stop layer buried within inter-dielectr...

MEMS method and structure

Through silicon interposer wafer and method of manufacturing the same

Insulator semiconductor device-structure

Method for manufacturing micromechanical structures in a device wafer

Method for manufacturing microelectromechanical system structure ha...

Method of manufacturing semiconductor device

Method for preventing excessive etching of edges of an insulator layer

Method for reducing cracks in a step-shaped cavity

MEMS method and structure

MEMS method and structure

Substrate processing method

Low temperature ceramic Microelectromechanical structures

MEMS element and method for manufacturing same

Low temperature ceramic microelectromechanical structures

MEMS element and method for manufacturing same

MEMS diaphragm

MEMS diaphragm

MEMS diaphragm

Method of forming a cavity by two-step etching and method of reduci...

Method for quantifying over-etch of a conductive feature

Method of manufacturing external force detection sensor

Micromachined electromechanical device

Apparatus and method for detecting an endpoint in a vapor phase etch

Envelope follower end point detection in time division multiplexed...

Deep reactive ion etching process and microelectromechanical device...

Method of manufacturing an external force detection sensor

Patents Applicationslast 30 patents

PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME

METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER

INSULATOR SEMICONDUCTOR DEVICE-STRUCTURE

MEMS Method and Structure

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Electronic Device, Physical Quantity Sensor, Pressure Sensor, Altim...

METHODS OF FORMING MEMS DEVICE

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

MEMS Method and Structure

MEMS ELEMENT AND METHOD FOR MANUFACTURING SAME

MICROELECTRONIC COMPONENT

MEMS ELEMENT AND METHOD FOR MANUFACTURING SAME

MEMS DIAPHRAGM

MEMS DIAPHRAGM

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

MEMS DIAPHRAGM

Method And Apparatus For Monitoring Plasma Conditions In An Etching...

METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE

APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH

METHOD OF FORMING A CAVITY BY TWO-STEP ETCHING AND METHOD OF REDUCI...

Method and apparatus for monitoring plasma conditions in an etching...

MEMS device and manufacturing method of MEMS device

Method of manufacturing an external force detection sensor

Micromachined electromechanical device

Method of etching cavities having different aspect ratios

Micromachined electromechanical device

Envelope follower end point detection in time division multiplexed...

Method of manufacturing an external force detection sensor

Deep reactive ion etching process and microelectromechanical device...

Apparatus and method for detecting an endpoint in a vapor phase etch