Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192

Industry

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B81C2201/0197

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0197Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192

Industries

Patents Grantslast 30 patents

Information Patent Grant
Implantable microneedle and manufacturing method therefor
- Patent number 11,938,308
- Issue date Mar 26, 2024
- SNVIA CO., LTD.
- Seung Yun Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for closing openings in a flexible diaphragm of a MEMS element
- Patent number 11,554,952
- Issue date Jan 17, 2023
- Robert Bosch GmbH
- Bernhard Gehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,745,270
- Issue date Aug 18, 2020
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active opening MEMS switch device
- Patent number 10,640,363
- Issue date May 5, 2020
- Analog Devices Global
- Padraig Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of multilayered carbon MEMS devices
- Patent number 10,570,010
- Issue date Feb 25, 2020
- National Technology & Engineering Solutions of Sandia, LLC
- Patrick Sean Finnegan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Layer structure and method of manufacturing a layer structure
- Patent number 10,370,240
- Issue date Aug 6, 2019
- Infineon Technologies AG
- Matthias Koenig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS double-layer suspension microstructur...
- Patent number 10,301,175
- Issue date May 28, 2019
- CSMC Technologies Fab1 Co., Ltd.
- Errong Jing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-structure and method of making the same
- Patent number 10,287,697
- Issue date May 14, 2019
- Hewlett-Packard Development Company, L.P.
- Peter Mardilovich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro electro-mechanical system
- Patent number 10,167,191
- Issue date Jan 1, 2019
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ceramic substrate, bonded body, module, and method for manufacturin...
- Patent number 10,160,636
- Issue date Dec 25, 2018
- Mitsubishi Electric Corporation
- Nobuaki Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer bonding method for use in making a MEMS gyroscope
- Patent number 10,012,670
- Issue date Jul 3, 2018
- Insigh Tech, LLC
- Biao Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing thermal bimorph diaphragm and MEMS speaker...
- Patent number 9,866,971
- Issue date Jan 9, 2018
- GoerTek Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a differential comb drive MEMS
- Patent number 9,809,444
- Issue date Nov 7, 2017
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for forming graphene layers on silicon carbide
- Patent number 9,771,665
- Issue date Sep 26, 2017
- Griffith University
- Francesca Iacopi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure plating systems
- Patent number 9,758,364
- Issue date Sep 12, 2017
- Honeywell International Inc.
- Gordon A. Shaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-layer encapsulated structures
- Patent number 9,752,247
- Issue date Sep 5, 2017
- University of Southern California
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 9,714,473
- Issue date Jul 25, 2017
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for producing hermetically-sealed cavities
- Patent number 9,692,009
- Issue date Jun 27, 2017
- OSRAM OLED GmbH
- Erwin Lang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems devices with improved lateral sensit...
- Patent number 9,612,254
- Issue date Apr 4, 2017
- NXP USA, INC.
- Michael Naumann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a differential comb drive MEMS
- Patent number 9,611,135
- Issue date Apr 4, 2017
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymeric substrate having an etched-glass-like surface and a micro...
- Patent number 9,586,810
- Issue date Mar 7, 2017
- Sony Corporation
- Gerda Fuhrmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for anchoring components in MEMS semiconductor...
- Patent number 9,458,010
- Issue date Oct 4, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate with multiple encapsulated devices
- Patent number 9,455,353
- Issue date Sep 27, 2016
- Robert Bosch GmbH
- Po-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated CMOS and MEMS sensor fabrication method and structure
- Patent number 9,422,156
- Issue date Aug 23, 2016
- Invensense, Inc.
- Peter Smeys
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure plating systems and methods
- Patent number 9,371,222
- Issue date Jun 21, 2016
- Honeywell International Inc.
- Gordon A. Shaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonded stacked wafers and methods of electroplating bonded stacked...
- Patent number 9,331,048
- Issue date May 3, 2016
- Maxim Integrated Products, Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonded stacked wafers and methods of electroplating bonded stacked...
- Patent number 8,970,043
- Issue date Mar 3, 2015
- Maxim Integrated Products, Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240108817
- Publication date Apr 4, 2024
- SNVIA CO., LTD.
- Seung Yun YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240034617
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JHENG-HONG JIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS
- Publication number 20230077129
- Publication date Mar 9, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Sean Christopher O'BRIEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-PUMP FLUIDIC STRATEGY FOR FABRICATING PEROVSKITE MICROWIRE AR...
- Publication number 20210354136
- Publication date Nov 18, 2021
- King Abdullah University of Science and Technology
- Bin XIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CLOSING OPENINGS IN A FLEXIBLE DIAPHRAGM OF A MEMS ELEMENT
- Publication number 20210229983
- Publication date Jul 29, 2021
- ROBERT BOSCH GmbH
- Bernhard Gehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
- Publication number 20200368452
- Publication date Nov 26, 2020
- SNVIA CO., LTD.
- Seung Yun YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131031
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
- Publication number 20200055725
- Publication date Feb 20, 2020
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICRO ELECTRO-MECHANICAL SYSTEM
- Publication number 20180282154
- Publication date Oct 4, 2018
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LAYER STRUCTURE AND METHOD OF MANUFACTURING A LAYER STRUCTURE
- Publication number 20180016132
- Publication date Jan 18, 2018
- INFINEON TECHNOLOGIES AG
- Matthias Koenig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE OPENING MEMS SWITCH DEVICE
- Publication number 20170225942
- Publication date Aug 10, 2017
- ANALOG DEVICES GLOBAL
- Padraig Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTUR...
- Publication number 20170203960
- Publication date Jul 20, 2017
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Errong JING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method for a Differential Comb Drive MEMS
- Publication number 20170166437
- Publication date Jun 15, 2017
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-STRUCTURE AND METHOD OF MAKING THE SAME
- Publication number 20170159194
- Publication date Jun 8, 2017
- Hewlett-Packard Development Company, L.P.
- Peter Mardilovich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE WITH SEAL STRUCTURE
- Publication number 20170081178
- Publication date Mar 23, 2017
- FREESCALE SEMICONDUCTOR, INC.
- THOMAS C. SPEIGHT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING THERMAL BIMORPH DIAPHRAGM AND MEMS SPEAKER...
- Publication number 20170041719
- Publication date Feb 9, 2017
- GOERTEK INC.
- Quanbo ZOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE PLATING SYSTEMS AND METHODS
- Publication number 20170001856
- Publication date Jan 5, 2017
- HONEYWELL INTERNATIONAL INC.
- Gordon A. Shaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FORMING GRAPHENE LAYERS ON SILICON CARBIDE
- Publication number 20160230304
- Publication date Aug 11, 2016
- GRIFFITH UNIVERSITY
- Francesca IACOPI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE
- Publication number 20150034620
- Publication date Feb 5, 2015
- INSIGHTECH, LLC
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRASOUND LIQUID DISPERSION HUMIDIFIER
- Publication number 20140260710
- Publication date Sep 18, 2014
- Honeywell International Inc.
- Gordon A. Shaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20140231263
- Publication date Aug 21, 2014
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND A METHOD OF USING THE SAME
- Publication number 20140190257
- Publication date Jul 10, 2014
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate with Multiple Encapsulated Devices
- Publication number 20140035071
- Publication date Feb 6, 2014
- ROBERT BOSCH GmbH
- Po-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND A METHOD OF USING THE SAME
- Publication number 20140026659
- Publication date Jan 30, 2014
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND A METHOD OF USING THE SAME
- Publication number 20140026658
- Publication date Jan 30, 2014
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20140026660
- Publication date Jan 30, 2014
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20140026661
- Publication date Jan 30, 2014
- BIAO ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-Layer Encapsulated Structures
- Publication number 20140004374
- Publication date Jan 2, 2014
- University of Southern California
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON-METAL COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF MAN...
- Publication number 20130279307
- Publication date Oct 24, 2013
- Jean-Charles Fiaccabrino
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Implantable microneedle and manufacturing method therefor

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Method for coating microstructured components

Method for closing openings in a flexible diaphragm of a MEMS element

Actuator layer patterning with topography

Actuator layer patterning with topography

Active opening MEMS switch device

Fabrication of multilayered carbon MEMS devices

Layer structure and method of manufacturing a layer structure

Method for manufacturing MEMS double-layer suspension microstructur...

Nano-structure and method of making the same

Method for manufacturing a micro electro-mechanical system

Ceramic substrate, bonded body, module, and method for manufacturin...

Wafer bonding method for use in making a MEMS gyroscope

Method for manufacturing thermal bimorph diaphragm and MEMS speaker...

System and method for a differential comb drive MEMS

Process for forming graphene layers on silicon carbide

Microstructure plating systems

Multi-layer encapsulated structures

Method and apparatus for maintaining parallelism of layers and/or a...

Device and method for producing hermetically-sealed cavities

Microelectromechanical systems devices with improved lateral sensit...

System and method for a differential comb drive MEMS

Polymeric substrate having an etched-glass-like surface and a micro...

Systems and methods for anchoring components in MEMS semiconductor...

Substrate with multiple encapsulated devices

Integrated CMOS and MEMS sensor fabrication method and structure

Microstructure plating systems and methods

Bonded stacked wafers and methods of electroplating bonded stacked...

Bonded stacked wafers and methods of electroplating bonded stacked...

Patents Applicationslast 30 patents

IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR

SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS

MICRO-PUMP FLUIDIC STRATEGY FOR FABRICATING PEROVSKITE MICROWIRE AR...

METHOD FOR CLOSING OPENINGS IN A FLEXIBLE DIAPHRAGM OF A MEMS ELEMENT

IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS

METHOD FOR MANUFACTURING A MICRO ELECTRO-MECHANICAL SYSTEM

LAYER STRUCTURE AND METHOD OF MANUFACTURING A LAYER STRUCTURE

ACTIVE OPENING MEMS SWITCH DEVICE

METHOD FOR MANUFACTURING MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTUR...

System and Method for a Differential Comb Drive MEMS

NANO-STRUCTURE AND METHOD OF MAKING THE SAME

SEMICONDUCTOR DEVICE PACKAGE WITH SEAL STRUCTURE

METHOD FOR MANUFACTURING THERMAL BIMORPH DIAPHRAGM AND MEMS SPEAKER...

MICROSTRUCTURE PLATING SYSTEMS AND METHODS

PROCESS FOR FORMING GRAPHENE LAYERS ON SILICON CARBIDE

WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE

ULTRASOUND LIQUID DISPERSION HUMIDIFIER

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

MEMS DEVICE AND A METHOD OF USING THE SAME

Substrate with Multiple Encapsulated Devices

MEMS DEVICE AND A METHOD OF USING THE SAME

MEMS DEVICE AND A METHOD OF USING THE SAME

MEMS DEVICE

MEMS DEVICE

Multi-Layer Encapsulated Structures

SILICON-METAL COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF MAN...