Processes for manufacturing micro-systems not provided for in groups B81C1/00023 - B81C1/00261

Industry

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B81C1/00341

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00341Processes for manufacturing micro-systems not provided for in groups B81C1/00023 - B81C1/00261

Industries

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical sensor device and corresponding production method
- Patent number 12,077,429
- Issue date Sep 3, 2024
- Robert Bosch GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator system
- Patent number 11,987,495
- Issue date May 21, 2024
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device comprising different types of microelectromech...
- Patent number 11,851,323
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dielectric comb for MEMS device
- Patent number 11,825,266
- Issue date Nov 21, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked-die MEMS resonator
- Patent number 11,708,264
- Issue date Jul 25, 2023
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction system and method thereof
- Patent number 11,661,332
- Issue date May 30, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated structure of mems microphone and air pressure sensor and...
- Patent number 11,516,595
- Issue date Nov 29, 2022
- Weifang Goertek Microelectronics Co., Ltd.
- Dexin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked-die MEMS resonator
- Patent number 11,370,656
- Issue date Jun 28, 2022
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro devices and method for their production
- Patent number 11,208,321
- Issue date Dec 28, 2021
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Templated nanostructure sensors and methods of manufacture
- Patent number 11,192,780
- Issue date Dec 7, 2021
- United States of America as represented by the Administrator of National Aero...
- Azlin M. Biaggi-Labiosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices with an element having varying widths
- Patent number 11,130,670
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing of integrated circuit resonator
- Patent number 10,913,655
- Issue date Feb 9, 2021
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Discharge circuits, devices and methods
- Patent number 10,865,101
- Issue date Dec 15, 2020
- Skyworks Solutions, Inc.
- Jerod F. Mason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device with via strut
- Patent number 10,775,609
- Issue date Sep 15, 2020
- Texas Instruments Incorporated
- Stephen Howard Looney
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure for micromechanical resonator
- Patent number 10,723,617
- Issue date Jul 28, 2020
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS inertial sensor and forming method therefor
- Patent number 10,591,508
- Issue date Mar 17, 2020
- MEMSEN ELECTRONICS INC
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure manufacturing method and ION beam apparatus
- Patent number 10,549,989
- Issue date Feb 4, 2020
- Hitachi, Ltd.
- Hiroyasu Shichi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microchip structure and treatments for electrochemical detection
- Patent number 10,416,109
- Issue date Sep 17, 2019
- General Atomics
- Graham D. Jack
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
RF MEMS electrodes with limited grain growth
- Patent number 10,301,173
- Issue date May 28, 2019
- Cavendish Kinetics, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Templated nanostructure sensors and methods of manufacture
- Patent number 10,294,099
- Issue date May 21, 2019
- The United States of America as Represented by the Administrator of National...
- Azlin M. Biaggi-Labiosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-profile stacked-die MEMS resonator system
- Patent number 10,287,162
- Issue date May 14, 2019
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming micro-electro-mechanical devices including a con...
- Patent number 10,266,390
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices having discharge circuits
- Patent number 10,125,011
- Issue date Nov 13, 2018
- Skyworks Solutions, Inc.
- Jerod F. Mason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photostructured chemical devices and methods for making same
- Patent number 10,099,918
- Issue date Oct 16, 2018
- The Aerospace Corporation
- Henry Helvajian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS inertial sensor and forming method therefor
- Patent number 9,958,471
- Issue date May 1, 2018
- MEMSEN ELECTRONICS INC
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual substrate electrostatic MEMS switch with multiple hinges and m...
- Patent number 9,953,787
- Issue date Apr 24, 2018
- Innovative Micro Technology
- Christopher S. Gudeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch device and method of fabrication
- Patent number 9,911,563
- Issue date Mar 6, 2018
- Analog Devices Global
- John G Macnamara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked-die MEMS resonator system
- Patent number 9,821,998
- Issue date Nov 21, 2017
- SiTime Corpoaration
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a pressure sensor and corresponding sensor
- Patent number 9,643,836
- Issue date May 9, 2017
- Auxitrol S.A.
- Sebastiano Brida
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
3D Heterogeneously Integrated Power Electronic Building Blocks
- Publication number 20250033954
- Publication date Jan 30, 2025
- TELEDYNE SCIENTIFIC & IMAGING, LLC
- Vivek Mehrotra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20250019229
- Publication date Jan 16, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CARTRIDGE INTERFERENCE
- Publication number 20240124297
- Publication date Apr 18, 2024
- VueReal Inc.
- Gholamreza CHAJI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL MICROSYSTEM
- Publication number 20240034616
- Publication date Feb 1, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Laurent MOLLARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...
- Publication number 20230406695
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20230391611
- Publication date Dec 7, 2023
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
- Publication number 20230382717
- Publication date Nov 30, 2023
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
- Publication number 20230348259
- Publication date Nov 2, 2023
- Vanguard International Semiconductor Corporation
- WAI MUN CHONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...
- Publication number 20230174370
- Publication date Jun 8, 2023
- Huawei Technologies Co., Ltd
- Fengpei SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
- Publication number 20230061430
- Publication date Mar 2, 2023
- STMicroelectronics S.r.l.
- Paolo FERRARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20220356059
- Publication date Nov 10, 2022
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
- Publication number 20220063990
- Publication date Mar 3, 2022
- ROBERT BOSCH GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20210179421
- Publication date Jun 17, 2021
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...
- Publication number 20210061647
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIELECTRIC COMB FOR MEMS DEVICE
- Publication number 20210029470
- Publication date Jan 28, 2021
- KNOWLES ELECTRONICS LLC.
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED STRUCTURE OF MEMS MICROPHONE AND AIR PRESSURE SENSOR AND...
- Publication number 20210021937
- Publication date Jan 21, 2021
- WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Dexin WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-PROFILE STACKED-DIE MEMS RESONATOR SYSTEM
- Publication number 20200385261
- Publication date Dec 10, 2020
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
- Publication number 20200262697
- Publication date Aug 20, 2020
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE WITH VIA STRUT
- Publication number 20200081244
- Publication date Mar 12, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Stephen Howard Looney
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Package Structure For Micromechanical Resonator
- Publication number 20190292043
- Publication date Sep 26, 2019
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming the Same
- Publication number 20190248646
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISCHARGE CIRCUITS, DEVICES AND METHODS
- Publication number 20190144266
- Publication date May 16, 2019
- SKYWORKS SOLUTIONS, INC.
- Jerod F. MASON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION
- Publication number 20190062154
- Publication date Feb 28, 2019
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
- Daniil KARNAUSHENKO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microstructure manufacturing method and ION beam apparatus
- Publication number 20180244517
- Publication date Aug 30, 2018
- Hitachi, Ltd
- Hiroyasu Shichi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS INERTIAL SENSOR AND FORMING METHOD THEREFOR
- Publication number 20180210006
- Publication date Jul 26, 2018
- MEMSEN ELECTRONICS INC
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR FACILITATING REPAIR OF INOPERABLE MEMS DISP...
- Publication number 20170039961
- Publication date Feb 9, 2017
- Pixtronix, Inc.
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR SYSTEM
- Publication number 20170029269
- Publication date Feb 2, 2017
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND M...
- Publication number 20160268084
- Publication date Sep 15, 2016
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RF MEMS ELECTRODES WITH LIMITED GRAIN GROWTH
- Publication number 20160200565
- Publication date Jul 14, 2016
- CAVENDISH KINETICS, INC.
- Mickael RENAULT
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for manufacturing micro-systems not provided for in groups B81C1/00023 - B81C1/00261

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical sensor device and corresponding production method

MEMS resonator system

Semiconductor device comprising different types of microelectromech...

Dielectric comb for MEMS device

Stacked-die MEMS resonator

Method for coating microstructured components

Stiction reduction system and method thereof

Integrated structure of mems microphone and air pressure sensor and...

Stacked-die MEMS resonator

Three-dimensional micro devices and method for their production

Templated nanostructure sensors and methods of manufacture

MEMS devices with an element having varying widths

Manufacturing of integrated circuit resonator

Discharge circuits, devices and methods

Micromechanical device with via strut

Package structure for micromechanical resonator

MEMS inertial sensor and forming method therefor

Microstructure manufacturing method and ION beam apparatus

Microchip structure and treatments for electrochemical detection

RF MEMS electrodes with limited grain growth

Templated nanostructure sensors and methods of manufacture

Low-profile stacked-die MEMS resonator system

Methods of forming micro-electro-mechanical devices including a con...

MEMS devices having discharge circuits

Photostructured chemical devices and methods for making same

MEMS inertial sensor and forming method therefor

Dual substrate electrostatic MEMS switch with multiple hinges and m...

MEMS switch device and method of fabrication

Stacked-die MEMS resonator system

Method for producing a pressure sensor and corresponding sensor

Patents Applicationslast 30 patents

3D Heterogeneously Integrated Power Electronic Building Blocks

STACKED-DIE MEMS RESONATOR

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...

CARTRIDGE INTERFERENCE

ELECTROMECHANICAL MICROSYSTEM

SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...

STACKED-DIE MEMS RESONATOR

MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...

MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...

METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...

STACKED-DIE MEMS RESONATOR

MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD

STACKED-DIE MEMS RESONATOR

SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...

DIELECTRIC COMB FOR MEMS DEVICE

INTEGRATED STRUCTURE OF MEMS MICROPHONE AND AIR PRESSURE SENSOR AND...

LOW-PROFILE STACKED-DIE MEMS RESONATOR SYSTEM

STICTION REDUCTION SYSTEM AND METHOD THEREOF

MICROMECHANICAL DEVICE WITH VIA STRUT

Package Structure For Micromechanical Resonator

MEMS Devices and Methods of Forming the Same

DISCHARGE CIRCUITS, DEVICES AND METHODS

THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION

Microstructure manufacturing method and ION beam apparatus

MEMS INERTIAL SENSOR AND FORMING METHOD THEREFOR

SYSTEMS AND METHODS FOR FACILITATING REPAIR OF INOPERABLE MEMS DISP...

STACKED-DIE MEMS RESONATOR SYSTEM

DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND M...

RF MEMS ELECTRODES WITH LIMITED GRAIN GROWTH