Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484

Industry

CPC
B81C1/00492

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00492Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484

Industries

Patents Grantslast 30 patents

Information Patent Grant
Surface micromachined structures
- Patent number 11,713,243
- Issue date Aug 1, 2023
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromachined structures
- Patent number 11,434,130
- Issue date Sep 6, 2022
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked structure and method for manufacturing the same
- Patent number 11,332,363
- Issue date May 17, 2022
- Advanced Semiconductor Engineering, Inc.
- Chieh-An Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro channel structure
- Patent number 10,800,653
- Issue date Oct 13, 2020
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for release-assisted microcontact printing of...
- Patent number 10,570,005
- Issue date Feb 25, 2020
- Massachusetts Institute of Technology
- Apoorva Murarka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,513,430
- Issue date Dec 24, 2019
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of preparing nanodevices
- Patent number 9,919,921
- Issue date Mar 20, 2018
- The Regents of the University of Colorado, a Body Corporate
- Victor M. Bright
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of tungsten MEMS structures
- Patent number 9,878,901
- Issue date Jan 30, 2018
- Analog Devices, Inc.
- John A. Geen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 9,714,473
- Issue date Jul 25, 2017
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing electronic component
- Patent number 9,611,142
- Issue date Apr 4, 2017
- Sumitomo Precision Products Co., LTD
- Yasuyuki Hirata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a transducer apparatus
- Patent number 9,376,312
- Issue date Jun 28, 2016
- MCube Inc.
- Daniel N. Koury
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming MEMS device
- Patent number 9,296,608
- Issue date Mar 29, 2016
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenxing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inorganic nanostructure reactive direct-write and growth
- Patent number 9,153,437
- Issue date Oct 6, 2015
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for packaging integrated circuits
- Patent number 8,907,465
- Issue date Dec 9, 2014
- STMicroelectronics Pte Ltd
- Kim-Yong Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 8,702,956
- Issue date Apr 22, 2014
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a fixed structure defining a volume receivin...
- Patent number 8,685,777
- Issue date Apr 1, 2014
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Christel Dieppedale
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microstructure using self-assembly of amph...
- Patent number 8,673,786
- Issue date Mar 18, 2014
- Kabushiki Kaisha Toshiba
- Kei Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor design and method for MEMS transducer apparatuses
- Patent number 8,553,389
- Issue date Oct 8, 2013
- MCube Inc.
- Daniel N. Koury
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterning of antistiction films for electromechanical systems devices
- Patent number 8,445,390
- Issue date May 21, 2013
- QUALCOMM MEMS Technologies, Inc.
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing localized patterns
- Patent number 8,048,712
- Issue date Nov 1, 2011
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Mohamed Benwadih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structural element having a porous region at least regionally provi...
- Patent number 7,709,933
- Issue date May 4, 2010
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 7,588,674
- Issue date Sep 15, 2009
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal MEMS devices and methods of making same
- Patent number 7,569,411
- Issue date Aug 4, 2009
- The Regents of the University of California
- Noel C. MacDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrochemical fabrication methods incorporating dielectric materi...
- Patent number 7,517,462
- Issue date Apr 14, 2009
- Microfabrica Inc.
- Adam L. Cohen
- B44 - DECORATIVE ARTS
Information Patent Grant
Methods for electrochemically fabricating structures using adhered...
- Patent number 7,501,328
- Issue date Mar 10, 2009
- Microfabrica Inc.
- Michael S. Lockard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachining process, system and product
- Patent number 7,385,209
- Issue date Jun 10, 2008
- Haute Ecole Arc Ne-Be-Ju
- Samuel Jaccard
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SURFACE MICROMACHINED STRUCTURES
- Publication number 20220411262
- Publication date Dec 29, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20220259038
- Publication date Aug 18, 2022
- Vibrant Composites Inc.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MICROMACHINED STRUCTURES
- Publication number 20210198103
- Publication date Jul 1, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210130166
- Publication date May 6, 2021
- Advanced Semiconductor Engineering, Inc.
- Chieh-An YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
- Publication number 20200247667
- Publication date Aug 6, 2020
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MICRO CHANNEL STRUCTURE
- Publication number 20200140264
- Publication date May 7, 2020
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131033
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20190256353
- Publication date Aug 22, 2019
- VIBRANT COMPOSITES, INC.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3D PIEZOELECTRIC POLYMER MATERIALS AND DEVICES
- Publication number 20160322560
- Publication date Nov 3, 2016
- The Regents of the University of California
- Donald J. Sirbuly
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED SPEAKER IMPLEMENTATION
- Publication number 20160277845
- Publication date Sep 22, 2016
- DSP Group Ltd.
- Haim Kupershmidt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
- Publication number 20160200569
- Publication date Jul 14, 2016
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Yasuyuki HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHOD OF MANUFACTURING
- Publication number 20160052784
- Publication date Feb 25, 2016
- Rosemount Aerospace Inc.
- David P. Potasek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOLITHIC INTEGRATION OF STRESS ISOLATION FEAUTURES IN A MICROELEC...
- Publication number 20160039664
- Publication date Feb 11, 2016
- Honeywell International Inc.
- Grant H. Lodden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20140231263
- Publication date Aug 21, 2014
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH
- Publication number 20140162436
- Publication date Jun 12, 2014
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR RELEASE-ASSISTED MICROCONTACT PRINTING OF...
- Publication number 20140054732
- Publication date Feb 27, 2014
- Massachusetts Institute of Technology
- Apoorva MURARKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR DESIGN AND METHOD FOR MEMS TRANSDUCER APPARATUSES
- Publication number 20140024162
- Publication date Jan 23, 2014
- MCube Inc.
- DANIEL N. KOURY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERNING OF ANTISTICTION FILMS FOR ELECTROMECHANICAL SYSTEMS DEVICES
- Publication number 20130120414
- Publication date May 16, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROSTRUCTURE
- Publication number 20130084704
- Publication date Apr 4, 2013
- Kei WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20120181180
- Publication date Jul 19, 2012
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20120114861
- Publication date May 10, 2012
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING A FIXED STRUCTURE DEFINING A VOLUME RECEIVIN...
- Publication number 20120021550
- Publication date Jan 26, 2012
- CHRISTEL DIEPPEDALE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FIBROUS NETWORKS AND A METHOD AND APPARATUS FOR CONTINUOUS OR BATCH...
- Publication number 20110212308
- Publication date Sep 1, 2011
- CANATU OY
- David P Brown
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Apparatus for Nanolapping
- Publication number 20110126328
- Publication date May 26, 2011
- General Nanotechnology LLC
- Victor B. Kley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING LOCALIZED PATTERNS
- Publication number 20110076797
- Publication date Mar 31, 2011
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Mohamed BENWADIH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-cell Masks and Methods and Apparatus for Using Such Masks To...
- Publication number 20100147695
- Publication date Jun 17, 2010
- University of Southern California
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20100038253
- Publication date Feb 18, 2010
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for Electrochemically Fabricating Structures Using Adhered...
- Publication number 20090212009
- Publication date Aug 27, 2009
- Microfabrica Inc.
- Michael S. Lockard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Production of microfluidic devices using laser-induced shockwaves
- Publication number 20090166562
- Publication date Jul 2, 2009
- Micah James Atkin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20090020433
- Publication date Jan 22, 2009
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Surface micromachined structures

Atomic-scale e-beam sculptor

Surface micromachined structures

Stacked structure and method for manufacturing the same

High-volume millimeter scale manufacturing

Methods for forming a MEMS device layer on an active device layer a...

Actuator layer patterning with topography

Manufacturing method of micro channel structure

Method and apparatus for release-assisted microcontact printing of...

Semiconductor device

Methods of preparing nanodevices

Fabrication of tungsten MEMS structures

Method and apparatus for maintaining parallelism of layers and/or a...

Method for manufacturing electronic component

Method for fabricating a transducer apparatus

Method of forming MEMS device

Inorganic nanostructure reactive direct-write and growth

Methods and devices for packaging integrated circuits

Method and apparatus for maintaining parallelism of layers and/or a...

Method for fabricating a fixed structure defining a volume receivin...

Method for manufacturing microstructure using self-assembly of amph...

Anchor design and method for MEMS transducer apparatuses

Patterning of antistiction films for electromechanical systems devices

Method for producing localized patterns

Structural element having a porous region at least regionally provi...

Method and apparatus for maintaining parallelism of layers and/or a...

Metal MEMS devices and methods of making same

Electrochemical fabrication methods incorporating dielectric materi...

Methods for electrochemically fabricating structures using adhered...

Micromachining process, system and product

Patents Applicationslast 30 patents

SURFACE MICROMACHINED STRUCTURES

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

SURFACE MICROMACHINED STRUCTURES

STACKED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

ATOMIC-SCALE E-BEAM SCULPTOR

MANUFACTURING METHOD OF MICRO CHANNEL STRUCTURE

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

3D PIEZOELECTRIC POLYMER MATERIALS AND DEVICES

MEMS-BASED SPEAKER IMPLEMENTATION

METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

MEMS DEVICES AND METHOD OF MANUFACTURING

MONOLITHIC INTEGRATION OF STRESS ISOLATION FEAUTURES IN A MICROELEC...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH

METHOD AND APPARATUS FOR RELEASE-ASSISTED MICROCONTACT PRINTING OF...

ANCHOR DESIGN AND METHOD FOR MEMS TRANSDUCER APPARATUSES

PATTERNING OF ANTISTICTION FILMS FOR ELECTROMECHANICAL SYSTEMS DEVICES

METHOD FOR MANUFACTURING MICROSTRUCTURE

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

Electrochemical Fabrication Methods for Producing Multilayer Struct...

METHOD FOR FABRICATING A FIXED STRUCTURE DEFINING A VOLUME RECEIVIN...

FIBROUS NETWORKS AND A METHOD AND APPARATUS FOR CONTINUOUS OR BATCH...

Methods and Apparatus for Nanolapping

METHOD FOR PRODUCING LOCALIZED PATTERNS

Multi-cell Masks and Methods and Apparatus for Using Such Masks To...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

Methods for Electrochemically Fabricating Structures Using Adhered...

Production of microfluidic devices using laser-induced shockwaves

Electrochemical Fabrication Methods for Producing Multilayer Struct...