Processes for the planarization of structures

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B81C2201/0118

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0118Processes for the planarization of structures

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor structure and planarization...
- Patent number 11,377,347
- Issue date Jul 5, 2022
- United Microelectronics Corporation
- Xiang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of reverse tone patterning
- Patent number 10,211,051
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Niyaz Khusnatdinov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of polishing sapphire surfaces
- Patent number 9,896,604
- Issue date Feb 20, 2018
- Ecolab USA Inc.
- Kim Marie Long
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
MEMS STRUCTURE
- Publication number 20230331546
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- FAN HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
- Publication number 20230127991
- Publication date Apr 27, 2023
- WEMEMS CO.,LTD.
- Jonghyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY