Processes for the simultaneaous manufacturing of a network or an array of similar micro-structural devices

Industry

CPC
B81C1/00214

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00214Processes for the simultaneaous manufacturing of a network or an array of similar micro-structural devices

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for producing a plurality of sensor devices, and sensor device
- Patent number 12,195,330
- Issue date Jan 14, 2025
- Robert Bosch GmbH
- Daniel Haug
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface topography with ferromagnetic polymer pillars capable of mo...
- Patent number 11,648,374
- Issue date May 16, 2023
- Syracuse University
- Dacheng Ren
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Surface bio-functionalization method
- Patent number 11,560,304
- Issue date Jan 24, 2023
- Centre National de la Recherche Scientifique
- Kheya Sengupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bionic SERS substrate with metal-based compound eye bowl structure...
- Patent number 11,203,523
- Issue date Dec 21, 2021
- Jiangnan University
- Gang Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymer surface with t-shaped microstructure and fabrication method...
- Patent number 11,110,415
- Issue date Sep 7, 2021
- South China University of Technology
- Hanxiong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a structure with spatial encoded functionality
- Patent number 11,084,718
- Issue date Aug 10, 2021
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
- Metin Sitti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tiled CMUT dies with pitch uniformity
- Patent number 10,898,924
- Issue date Jan 26, 2021
- Koninklijke Philips N.V.
- Wojtek Sudol
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Environmental sensor and manufacturing method thereof
- Patent number 10,760,929
- Issue date Sep 1, 2020
- Weifang Goertek Microelectronics Co., Ltd.
- Junkai Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Release hole plus contact via for fine pitch ultrasound transducer...
- Patent number 10,722,918
- Issue date Jul 28, 2020
- QUALCOMM Incorporated
- Donald William Kidwell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electrical mechanical system sensor package and method of man...
- Patent number 10,631,100
- Issue date Apr 21, 2020
- Infineon Technologies AG
- Chau Fatt Chiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electrical mechanical system sensor package and method of man...
- Patent number 10,595,132
- Issue date Mar 17, 2020
- Infineon Technologies AG
- Chau Fatt Chiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual cavity pressure structures
- Patent number 10,308,503
- Issue date Jun 4, 2019
- Invensense, Inc.
- Jong Il Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method of manufacturing for combo MEMS device accommo...
- Patent number 10,266,399
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jiou-Kang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid CMOS-MEMS devices adapted for high-temperature operation and...
- Patent number 10,214,415
- Issue date Feb 26, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Benjamin Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Panel level packaging for MEMS application
- Patent number 10,150,667
- Issue date Dec 11, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trimming method for microresonators and microresonators made thereby
- Patent number 10,148,244
- Issue date Dec 4, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- Michael David Henry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gasses for increasing yield and reliability of MEMS devices
- Patent number 10,081,536
- Issue date Sep 25, 2018
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Relative and absolute pressure sensor combined on chip
- Patent number 10,031,003
- Issue date Jul 24, 2018
- Melexis Technologies NV
- Appolonius Jacobus Van Der Wiel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducer, method of producing same, and ultrasonic pro...
- Patent number 9,873,137
- Issue date Jan 23, 2018
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a microphone structure and a pressure sens...
- Patent number 9,758,369
- Issue date Sep 12, 2017
- Robert Bosch GmbH
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual cavity pressure structures
- Patent number 9,725,305
- Issue date Aug 8, 2017
- Invensense, Inc.
- Jong Il Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 9,617,143
- Issue date Apr 11, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon wafer with a plurality of chip patterns
- Patent number 9,559,090
- Issue date Jan 31, 2017
- Dai Nippon Printing Co., Ltd.
- Tatsuro Takagaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a semiconductor device
- Patent number 9,493,347
- Issue date Nov 15, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing ink jet printheads including electrostatic...
- Patent number 9,421,772
- Issue date Aug 23, 2016
- Xerox Corporation
- Peter J. Nystrom
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS micro-mirror assembly
- Patent number 9,405,116
- Issue date Aug 2, 2016
- Intel Corporation
- Faouzi Khechana
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING A PLURALITY OF SENSOR DEVICES, AND SENSOR DEVICE
- Publication number 20220041436
- Publication date Feb 10, 2022
- ROBERT BOSCH GmbH
- Daniel Haug
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bionic SERS substrate with metal-based compound eye bowl structure...
- Publication number 20210114868
- Publication date Apr 22, 2021
- JIANGNAN UNIVERSITY
- Gang Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE BIO-FUNCTIONALIZATION METHOD
- Publication number 20210053822
- Publication date Feb 25, 2021
- Centre National de la Recherche Scientifique
- Kheya Sengupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRICAL MECHANICAL SYSTEM SENSOR PACKAGE AND METHOD OF MAN...
- Publication number 20200084550
- Publication date Mar 12, 2020
- INFINEON TECHNOLOGIES AG
- Chau Fatt Chiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD OF MANUFACTURING FOR COMBO MEMS DEVICE ACCOMMO...
- Publication number 20190062156
- Publication date Feb 28, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- JIOU-KANG LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RELATIVE AND ABSOLUTE PRESSURE SENSOR COMBINED ON CHIP
- Publication number 20180299303
- Publication date Oct 18, 2018
- MELEXIS TECHNOLOGIES NV
- Appolonius Jacobus VAN DER WIEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PANEL LEVEL PACKAGING FOR MEMS APPLICATION
- Publication number 20180230004
- Publication date Aug 16, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling PAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A STRUCTURE WITH SPATIAL ENCODED FUNCTIONALITY
- Publication number 20180099869
- Publication date Apr 12, 2018
- Max-Planck-Gesellschaft zur Förderung der der Wissenschaften e.V.
- Metin SITTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL CAVITY PRESSURE STRUCTURES
- Publication number 20170297909
- Publication date Oct 19, 2017
- InvenSense, Inc.
- Jong Il Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TILED CMUT DIES WITH PITCH UNIFORMITY
- Publication number 20170165715
- Publication date Jun 15, 2017
- WOJTEK SUDOL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RELEASE HOLE PLUS CONTACT VIA FOR FINE PITCH ULTRASOUND TRANSDUCER...
- Publication number 20170066014
- Publication date Mar 9, 2017
- QUALCOMM Incorporated
- Donald William Kidwell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a microphone structure and a pressure sens...
- Publication number 20160304336
- Publication date Oct 20, 2016
- ROBERT BOSCH GmbH
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL CAVITY PRESSURE STRUCTURES
- Publication number 20160272486
- Publication date Sep 22, 2016
- Jong II Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION
- Publication number 20160264403
- Publication date Sep 15, 2016
- FREESCALE SEMICONDUCTO, INC.
- MAMUR CHOWDHURY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL FABRICATION AND BONDING OF MEMBRANES FOR ELECTROSTATIC...
- Publication number 20160159091
- Publication date Jun 9, 2016
- Xerox Corporation
- Peter J. Nystrom
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Relative and Absolute Pressure Sensor Combined on Chip
- Publication number 20160153815
- Publication date Jun 2, 2016
- X-FAB SEMICONDUCTOR FOUNDRIES AG.
- Appolonius Jacobus VAN DER WIEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND FORMATION METHOD THEREOF
- Publication number 20150274512
- Publication date Oct 1, 2015
- Semiconductor Manufacturing International (Shanghai) Corporation
- WEI XU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20150166331
- Publication date Jun 18, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL METHOD OF SEALING DIFFERENT PRESSURE LEVELS FOR MEMS SE...
- Publication number 20150061046
- Publication date Mar 5, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING NANOPARTICLES USING SEMICONDUCTOR MANUFACTURING...
- Publication number 20140138863
- Publication date May 22, 2014
- International Business Machines Corporation
- Joy Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS NANOSTRUCTURES AND METHODS OF FORMING THE SAME
- Publication number 20130256259
- Publication date Oct 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hsien CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH FIDELITY NANO-STRUCTURES AND ARRAYS FOR PHOTOVOLTAICS AND METH...
- Publication number 20130249138
- Publication date Sep 26, 2013
- Liquidia Technologies, Inc.
- Joseph M. DeSimone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SENSORS HAVING FUNCTIONALIZED RESONATING BEAMS
- Publication number 20120142135
- Publication date Jun 7, 2012
- Honeywell Romania S.R.L.
- Cornel P. COBIANU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN ARRANGEMENT METHOD, SILICON WAFER AND SEMICONDUCTOR DEVICE
- Publication number 20110140214
- Publication date Jun 16, 2011
- DAI NIPPON PRINTING CO., LTD.
- Tatsuro Takagaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110086443
- Publication date Apr 14, 2011
- Takashi Kobayashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH FIDELITY NANO-STRUCTURES AND ARRAYS FOR PHOTOVOLTAICS AND METH...
- Publication number 20100147365
- Publication date Jun 17, 2010
- The University of North Carolina at Chapel Hill
- Joseph M. DeSimone
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
BOTTOM-UP ASSEMBLY OF STRUCTURES ON A SUBSTRATE
- Publication number 20090242405
- Publication date Oct 1, 2009
- The Penn State Research Foundation
- Theresa S. Mayer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MECHANICAL AND MICROMECHANICAL PARTS
- Publication number 20090011373
- Publication date Jan 8, 2009
- EM Microelectronic-Marin SA
- Yvan Gonin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SELF-ASSEMBLING MICROSTRUCTURES
- Publication number 20080023435
- Publication date Jan 31, 2008
- Enboa WU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for self-assembling microstructures
- Publication number 20070007237
- Publication date Jan 11, 2007
- National Taiwan University
- Enboa Wu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Processes for the simultaneaous manufacturing of a network or an array of similar micro-structural devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for producing a plurality of sensor devices, and sensor device

Cellular array electrostatic actuator

Surface topography with ferromagnetic polymer pillars capable of mo...

Surface bio-functionalization method

Bionic SERS substrate with metal-based compound eye bowl structure...

Polymer surface with t-shaped microstructure and fabrication method...

Method for producing a structure with spatial encoded functionality

Tiled CMUT dies with pitch uniformity

Environmental sensor and manufacturing method thereof

Spectrally and temporally engineered processing using photoelectroc...

Release hole plus contact via for fine pitch ultrasound transducer...

Micro-electrical mechanical system sensor package and method of man...

Micro-electrical mechanical system sensor package and method of man...

Field emission devices and methods of making thereof

Dual cavity pressure structures

Apparatus and method of manufacturing for combo MEMS device accommo...

Hybrid CMOS-MEMS devices adapted for high-temperature operation and...

Panel level packaging for MEMS application

Trimming method for microresonators and microresonators made thereby

Spectrally and temporally engineered processing using photoelectroc...

Gasses for increasing yield and reliability of MEMS devices

Relative and absolute pressure sensor combined on chip

Ultrasonic transducer, method of producing same, and ultrasonic pro...

Method for manufacturing a microphone structure and a pressure sens...

Dual cavity pressure structures

Semiconductor device

Silicon wafer with a plurality of chip patterns

Method of forming a semiconductor device

Method of manufacturing ink jet printheads including electrostatic...

MEMS micro-mirror assembly

Patents Applicationslast 30 patents

METHOD FOR PRODUCING A PLURALITY OF SENSOR DEVICES, AND SENSOR DEVICE

Bionic SERS substrate with metal-based compound eye bowl structure...

SURFACE BIO-FUNCTIONALIZATION METHOD

MICRO-ELECTRICAL MECHANICAL SYSTEM SENSOR PACKAGE AND METHOD OF MAN...

APPARATUS AND METHOD OF MANUFACTURING FOR COMBO MEMS DEVICE ACCOMMO...

RELATIVE AND ABSOLUTE PRESSURE SENSOR COMBINED ON CHIP

PANEL LEVEL PACKAGING FOR MEMS APPLICATION

METHOD FOR PRODUCING A STRUCTURE WITH SPATIAL ENCODED FUNCTIONALITY

DUAL CAVITY PRESSURE STRUCTURES

TILED CMUT DIES WITH PITCH UNIFORMITY

RELEASE HOLE PLUS CONTACT VIA FOR FINE PITCH ULTRASOUND TRANSDUCER...

Method for manufacturing a microphone structure and a pressure sens...

DUAL CAVITY PRESSURE STRUCTURES

SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION

WAFER LEVEL FABRICATION AND BONDING OF MEMBRANES FOR ELECTROSTATIC...

Relative and Absolute Pressure Sensor Combined on Chip

MEMS DEVICE AND FORMATION METHOD THEREOF

SEMICONDUCTOR DEVICE

WAFER LEVEL METHOD OF SEALING DIFFERENT PRESSURE LEVELS FOR MEMS SE...

METHODS OF FORMING NANOPARTICLES USING SEMICONDUCTOR MANUFACTURING...

MEMS NANOSTRUCTURES AND METHODS OF FORMING THE SAME

HIGH FIDELITY NANO-STRUCTURES AND ARRAYS FOR PHOTOVOLTAICS AND METH...

METHOD OF FABRICATING SENSORS HAVING FUNCTIONALIZED RESONATING BEAMS

PATTERN ARRANGEMENT METHOD, SILICON WAFER AND SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

HIGH FIDELITY NANO-STRUCTURES AND ARRAYS FOR PHOTOVOLTAICS AND METH...

BOTTOM-UP ASSEMBLY OF STRUCTURES ON A SUBSTRATE

METHOD OF MANUFACTURING MECHANICAL AND MICROMECHANICAL PARTS

METHOD FOR SELF-ASSEMBLING MICROSTRUCTURES

Method for self-assembling microstructures