Processing photosensitive materials Apparatus therefor

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/26Processing photosensitive materials Apparatus therefor

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Patents Grantslast 30 patents

Information Patent Grant
Metal-compound-removing solvent and method in lithography
- Patent number 12,210,286
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method composition and methods thereof
- Patent number 12,211,698
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Siao-Shan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist and method
- Patent number 12,197,128
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Liang-Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist composition and resist pattern forming method
- Patent number 12,181,800
- Issue date Dec 31, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tuning threshold voltage through meta stable plasma treatment
- Patent number 12,148,620
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet photolithography method with infiltration for e...
- Patent number 12,111,576
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Christine Y Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for treating a relief plate precursor having a...
- Patent number 12,078,932
- Issue date Sep 3, 2024
- XSYS PREPRESS N.V.
- Bart Wattyn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,068,170
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Onium salt, chemically amplified negative resist composition, and p...
- Patent number 12,060,317
- Issue date Aug 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,033,866
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directly photo-patternable, stretchable, electrically conductive po...
- Patent number 12,019,372
- Issue date Jun 25, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Zhenan Bao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Microfluidic device and method for manufacturing the same, and meth...
- Patent number 11,992,836
- Issue date May 28, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Tuo Sun
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods that utilize angled photolithography for manufa...
- Patent number 11,994,802
- Issue date May 28, 2024
- Waymo LLC
- James Dunphy
- G02 - OPTICS
Information Patent Grant
Resist underlayer composition, and method of forming patterns using...
- Patent number 11,987,561
- Issue date May 21, 2024
- Samsung SDI Co., Ltd.
- Yoojeong Choi
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Photosensitive element, resin composition for forming barrier layer...
- Patent number 11,960,208
- Issue date Apr 16, 2024
- Resonac Corporation
- Masakazu Kume
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for treating and transporting a relief printin...
- Patent number 11,953,834
- Issue date Apr 9, 2024
- XSYS PREPRESS N.V.
- Bart Wattyn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement system, substrate processing system, and device manufac...
- Patent number 11,915,961
- Issue date Feb 27, 2024
- Nikon Corporation
- Go Ichinose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 11,899,366
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Salts and photoresists comprising same
- Patent number 11,880,134
- Issue date Jan 23, 2024
- Rohm and Haas Electronic Materials LLC
- Emad Aqad
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Photoacid generator
- Patent number 11,846,886
- Issue date Dec 19, 2023
- International Business Machines Corporation
- Gerhard Ingmar Meijer
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Mask and method for manufacturing the same, exposure system, method...
- Patent number 11,841,615
- Issue date Dec 12, 2023
- CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Shouqiang Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
- Patent number 11,791,162
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yasuaki Noda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Filtering device, purification device, and method for manufacturing...
- Patent number 11,759,749
- Issue date Sep 19, 2023
- FUJIFILM Corporation
- Tadashi Omatsu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Chemical liquid, chemical liquid storage body, pattern forming meth...
- Patent number 11,747,727
- Issue date Sep 5, 2023
- FUJIFILM Corporation
- Tetsuya Kamimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Carboxylate, carboxylic acid generator, resist composition and meth...
- Patent number 11,739,056
- Issue date Aug 29, 2023
- Sumitomo Chemical Company, Limited
- Tatsuro Masuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography process method for defining sidewall morphology of lith...
- Patent number 11,726,400
- Issue date Aug 15, 2023
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and patterning process
- Patent number 11,720,020
- Issue date Aug 8, 2023
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer film, electrode protective film, laminate, capacitive inpu...
- Patent number 11,703,759
- Issue date Jul 18, 2023
- FUJIFILM Corporation
- Tatsuya Shimoyama
- B32 - LAYERED PRODUCTS
Information Patent Grant
Tuning threshold voltage through meta stable plasma treatment
- Patent number 11,688,606
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Jyun Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION COLLECTION SYSTEM, INSPECTION SUBSTRATE, AND INFORMATIO...
- Publication number 20240385538
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION
- Publication number 20240382994
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TUNING THRESHOLD VOLTAGE THROUGH META STABLE PLASMA TREATMENT
- Publication number 20240387178
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER
- Publication number 20240353094
- Publication date Oct 24, 2024
- PROTERIAL, LTD.
- Akira Sasaki
- F22 - STEAM GENERATION
Information Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
- Publication number 20240327321
- Publication date Oct 3, 2024
- Samsung SDI Co., Ltd.
- Seil CHOI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UNDERCOAT AGENT, AND METHOD FOR PRODUCING STRUCTURE INCLUDING PHASE...
- Publication number 20240191096
- Publication date Jun 13, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Junichi Tsuchiya
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CROSSTALK REDUCTION OF MICROCAPSULE IMAGING SYSTEM
- Publication number 20240184198
- Publication date Jun 6, 2024
- Polaroid IP B.V.
- Rong-Chang Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING LAMINATE
- Publication number 20240179848
- Publication date May 30, 2024
- Namics Corporation
- Naoki OBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
- Publication number 20240145245
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yung-chen LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...
- Publication number 20240117102
- Publication date Apr 11, 2024
- Mitsubishi Gas Chemical Company, Inc.
- Kodai MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, CIRCUIT PATTER...
- Publication number 20240109997
- Publication date Apr 4, 2024
- Mitsubishi Gas Chemical Company, Inc.
- Junya HORIUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOACID GENERATOR
- Publication number 20240069442
- Publication date Feb 29, 2024
- International Business Machines Corporation
- Gerhard Ingmar Meijer
- C07 - ORGANIC CHEMISTRY
Information Patent Application
APPARATUS AND METHOD FOR TREATING AND TRANSPORTING A RELIEF PRINTIN...
- Publication number 20240036472
- Publication date Feb 1, 2024
- XSYS PREPRESS N.V.
- Bart WATTYN
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHOD OF FABRICATING BIT LINE CONTACTS
- Publication number 20240008266
- Publication date Jan 4, 2024
- NANYA TECHNOLOGY CORPORATION
- CHIH-YING TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING PATTERNS
- Publication number 20230406970
- Publication date Dec 21, 2023
- Samsung SDI Co., Ltd.
- Seung-Wook SHIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST UNDERLAYER AND METHOD OF MANUFACTURING A SEMICONDUCTOR...
- Publication number 20230393474
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren ZI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
- Publication number 20230395380
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN FORMING METHOD, KIT, AND RESIST COMPOSITION
- Publication number 20230350290
- Publication date Nov 2, 2023
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metal-Compound-Removing Solvent And Method In Lithography
- Publication number 20230324806
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, MANUFACTURING METHOD OF CIRCUIT BOARD, AND...
- Publication number 20230305403
- Publication date Sep 28, 2023
- FUJIFILM CORPORATION
- Akio KATAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230290646
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
- Publication number 20230282484
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Jyun Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESIST UNDERLAYER COMPOSITION, AND METHOD OF FORMING PATTERNS USING...
- Publication number 20230273523
- Publication date Aug 31, 2023
- Samsung SDI Co., Ltd.
- Jaeyeol BAEK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230215736
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
- Publication number 20230168588
- Publication date Jun 1, 2023
- NanoPath, Inc.
- Kevin Donahue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN COMPOSITION, RESIN FILM AND DISPLAY DEVICE
- Publication number 20230104913
- Publication date Apr 6, 2023
- JILIN OLED OPTICAL AND ELECTRONIC MATERIALS CO., LTD.
- Hui WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Extreme Ultraviolet Photolithography Method with Infiltration for E...
- Publication number 20230055135
- Publication date Feb 23, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Christine Y. Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230042033
- Publication date Feb 9, 2023
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Processing photosensitive materials Apparatus therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Metal-compound-removing solvent and method in lithography

Method composition and methods thereof

Photoresist and method

Resist composition and resist pattern forming method

Tuning threshold voltage through meta stable plasma treatment

Film processing method

Extreme ultraviolet photolithography method with infiltration for e...

Apparatus and method for treating a relief plate precursor having a...

Vapor phase thermal etch solutions for metal oxo photoresists

Onium salt, chemically amplified negative resist composition, and p...

Vapor phase thermal etch solutions for metal oxo photoresists

Directly photo-patternable, stretchable, electrically conductive po...

Microfluidic device and method for manufacturing the same, and meth...

Systems and methods that utilize angled photolithography for manufa...

Resist underlayer composition, and method of forming patterns using...

Photosensitive element, resin composition for forming barrier layer...

Apparatus and method for treating and transporting a relief printin...

Measurement system, substrate processing system, and device manufac...

Method and apparatus for post exposure processing of photoresist wa...

Salts and photoresists comprising same

Photoacid generator

Mask and method for manufacturing the same, exposure system, method...

Processing apparatus for forming a coating film on a substrate havi...

Filtering device, purification device, and method for manufacturing...

Chemical liquid, chemical liquid storage body, pattern forming meth...

Carboxylate, carboxylic acid generator, resist composition and meth...

Lithography process method for defining sidewall morphology of lith...

Resist composition and patterning process

Transfer film, electrode protective film, laminate, capacitive inpu...

Tuning threshold voltage through meta stable plasma treatment

Patents Applicationslast 30 patents

INFORMATION COLLECTION SYSTEM, INSPECTION SUBSTRATE, AND INFORMATIO...

METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION

TUNING THRESHOLD VOLTAGE THROUGH META STABLE PLASMA TREATMENT

VAPORIZER

HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS

UNDERCOAT AGENT, AND METHOD FOR PRODUCING STRUCTURE INCLUDING PHASE...

CROSSTALK REDUCTION OF MICROCAPSULE IMAGING SYSTEM

METHOD FOR MANUFACTURING LAMINATE

ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME

POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...

RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, CIRCUIT PATTER...

PHOTOACID GENERATOR

APPARATUS AND METHOD FOR TREATING AND TRANSPORTING A RELIEF PRINTIN...

METHOD OF FABRICATING BIT LINE CONTACTS

METHOD OF FORMING PATTERNS

PHOTORESIST UNDERLAYER AND METHOD OF MANUFACTURING A SEMICONDUCTOR...

PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...

PATTERN FORMING METHOD, KIT, AND RESIST COMPOSITION

Metal-Compound-Removing Solvent And Method In Lithography

PATTERN FORMING METHOD, MANUFACTURING METHOD OF CIRCUIT BOARD, AND...

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

Tuning Threshold Voltage Through Meta Stable Plasma Treatment

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

RESIST UNDERLAYER COMPOSITION, AND METHOD OF FORMING PATTERNS USING...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

RESIN COMPOSITION, RESIN FILM AND DISPLAY DEVICE

Extreme Ultraviolet Photolithography Method with Infiltration for E...

SUBSTRATE TREATING APPARATUS