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Processing photosensitive materials Apparatus therefor
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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Processing photosensitive materials Apparatus therefor
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last 30 patents
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Patent Grant
Photosensitive element, resin composition for forming barrier layer...
Patent number
11,960,208
Issue date
Apr 16, 2024
Resonac Corporation
Masakazu Kume
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Apparatus and method for treating and transporting a relief printin...
Patent number
11,953,834
Issue date
Apr 9, 2024
XSYS PREPRESS N.V.
Bart Wattyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,915,961
Issue date
Feb 27, 2024
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
Patent number
11,899,366
Issue date
Feb 13, 2024
Applied Materials, Inc.
Viachslav Babayan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Salts and photoresists comprising same
Patent number
11,880,134
Issue date
Jan 23, 2024
Rohm and Haas Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photoacid generator
Patent number
11,846,886
Issue date
Dec 19, 2023
International Business Machines Corporation
Gerhard Ingmar Meijer
C07 - ORGANIC CHEMISTRY
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Patent Grant
Mask and method for manufacturing the same, exposure system, method...
Patent number
11,841,615
Issue date
Dec 12, 2023
CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Shouqiang Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
Patent number
11,791,162
Issue date
Oct 17, 2023
Tokyo Electron Limited
Yasuaki Noda
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Filtering device, purification device, and method for manufacturing...
Patent number
11,759,749
Issue date
Sep 19, 2023
FUJIFILM Corporation
Tadashi Omatsu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Grant
Chemical liquid, chemical liquid storage body, pattern forming meth...
Patent number
11,747,727
Issue date
Sep 5, 2023
FUJIFILM Corporation
Tetsuya Kamimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Carboxylate, carboxylic acid generator, resist composition and meth...
Patent number
11,739,056
Issue date
Aug 29, 2023
Sumitomo Chemical Company, Limited
Tatsuro Masuyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithography process method for defining sidewall morphology of lith...
Patent number
11,726,400
Issue date
Aug 15, 2023
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Hui Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Resist composition and patterning process
Patent number
11,720,020
Issue date
Aug 8, 2023
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Transfer film, electrode protective film, laminate, capacitive inpu...
Patent number
11,703,759
Issue date
Jul 18, 2023
FUJIFILM Corporation
Tatsuya Shimoyama
B32 - LAYERED PRODUCTS
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Patent Grant
Tuning threshold voltage through meta stable plasma treatment
Patent number
11,688,606
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metal-compound-removing solvent and method in lithography
Patent number
11,681,226
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Resist underlayer composition, and method of forming patterns using...
Patent number
11,675,271
Issue date
Jun 13, 2023
Samsung SDI Co., Ltd.
Jaeyeol Baek
C07 - ORGANIC CHEMISTRY
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Patent Grant
Stepped substrate coating composition containing compound having cu...
Patent number
11,674,051
Issue date
Jun 13, 2023
NISSAN CHEMICAL CORPORATION
Hikaru Tokunaga
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Grant
Method for pitch split patterning using sidewall image transfer
Patent number
11,676,817
Issue date
Jun 13, 2023
Tokyo Electron Limited
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Filtering device, purification device, and method for manufacturing...
Patent number
11,666,864
Issue date
Jun 6, 2023
FUJIFILM Corporation
Tetsuya Shimizu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Grant
Via-trace structures
Patent number
11,652,036
Issue date
May 16, 2023
Santa Clara
Jeremy Ecton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Filtering device, purification device, and method for manufacturing...
Patent number
11,628,402
Issue date
Apr 18, 2023
FUJIFILM Corporation
Tetsuya Shimizu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
Patent number
11,621,172
Issue date
Apr 4, 2023
Applied Materials, Inc.
Lakmal Charidu Kalutarage
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Pattern formation method, laminate, and method of producing touch p...
Patent number
11,567,410
Issue date
Jan 31, 2023
FUJIFILM Corporation
Shinichi Kanna
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Maskless photolithography devices, methods, and systems
Patent number
11,567,411
Issue date
Jan 31, 2023
NANOPATH, INC.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Compound, resin, resist composition and method for producing resist...
Patent number
11,548,961
Issue date
Jan 10, 2023
Sumitomo Chemical Company, Limited
Katsuhiro Komuro
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Fast fabrication of polymer out-of-plane optical coupler by gray-sc...
Patent number
11,531,270
Issue date
Dec 20, 2022
Arizona Board of Regents on behalf of the University of Arizona
Yuzuru Takashima
G02 - OPTICS
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Patent Grant
Positive photoresist composition, via-forming method, display subst...
Patent number
11,526,077
Issue date
Dec 13, 2022
BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
Wei Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method using silicon-containing underlayers
Patent number
11,506,979
Issue date
Nov 22, 2022
Rohm and Haas Electronic Materials LLC
Li Cui
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Underlying coating compositions for use with photoresists
Patent number
11,500,291
Issue date
Nov 15, 2022
Rohm and Haas Electronic Materials Korea Ltd.
Jung-June Lee
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
Publication number
20240145245
Publication date
May 2, 2024
Applied Materials, Inc.
Yung-chen LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...
Publication number
20240117102
Publication date
Apr 11, 2024
Mitsubishi Gas Chemical Company, Inc.
Kodai MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, CIRCUIT PATTER...
Publication number
20240109997
Publication date
Apr 4, 2024
Mitsubishi Gas Chemical Company, Inc.
Junya HORIUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOACID GENERATOR
Publication number
20240069442
Publication date
Feb 29, 2024
International Business Machines Corporation
Gerhard Ingmar Meijer
C07 - ORGANIC CHEMISTRY
Information
Patent Application
APPARATUS AND METHOD FOR TREATING AND TRANSPORTING A RELIEF PRINTIN...
Publication number
20240036472
Publication date
Feb 1, 2024
XSYS PREPRESS N.V.
Bart WATTYN
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
METHOD OF FABRICATING BIT LINE CONTACTS
Publication number
20240008266
Publication date
Jan 4, 2024
NANYA TECHNOLOGY CORPORATION
CHIH-YING TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF FORMING PATTERNS
Publication number
20230406970
Publication date
Dec 21, 2023
Samsung SDI Co., Ltd.
Seung-Wook SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST UNDERLAYER AND METHOD OF MANUFACTURING A SEMICONDUCTOR...
Publication number
20230393474
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren ZI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
Publication number
20230395380
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Yasuaki NODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN FORMING METHOD, KIT, AND RESIST COMPOSITION
Publication number
20230350290
Publication date
Nov 2, 2023
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metal-Compound-Removing Solvent And Method In Lithography
Publication number
20230324806
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., LTD
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD, MANUFACTURING METHOD OF CIRCUIT BOARD, AND...
Publication number
20230305403
Publication date
Sep 28, 2023
FUJIFILM CORPORATION
Akio KATAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
Publication number
20230290646
Publication date
Sep 14, 2023
Applied Materials, Inc.
Lakmal Charidu Kalutarage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
Publication number
20230282484
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230273516
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RESIST UNDERLAYER COMPOSITION, AND METHOD OF FORMING PATTERNS USING...
Publication number
20230273523
Publication date
Aug 31, 2023
Samsung SDI Co., Ltd.
Jaeyeol BAEK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230266662
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
Publication number
20230215736
Publication date
Jul 6, 2023
Applied Materials, Inc.
Lakmal Charidu Kalutarage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
Publication number
20230168588
Publication date
Jun 1, 2023
NanoPath, Inc.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN COMPOSITION, RESIN FILM AND DISPLAY DEVICE
Publication number
20230104913
Publication date
Apr 6, 2023
JILIN OLED OPTICAL AND ELECTRONIC MATERIALS CO., LTD.
Hui WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Extreme Ultraviolet Photolithography Method with Infiltration for E...
Publication number
20230055135
Publication date
Feb 23, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Christine Y. Ouyang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20230042033
Publication date
Feb 9, 2023
SCREEN Semiconductor Solutions Co., Ltd.
Yoshiteru Fukutomi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Application
METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION
Publication number
20230010749
Publication date
Jan 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wei LIAO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE...
Publication number
20220397822
Publication date
Dec 15, 2022
King Abdullah University of Science and Technology
Wenli ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20220367224
Publication date
Nov 17, 2022
Nikon Corporation
Go ICHINOSE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Photoresist and Method
Publication number
20220317571
Publication date
Oct 6, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Liang-Yi Chang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CHEMICALLY AMPLIFIED POSITIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION...
Publication number
20220283500
Publication date
Sep 8, 2022
Tokyo Ohka Kogyo Co., Ltd.
Akiya KAWAUE
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION
Publication number
20220283501
Publication date
Sep 8, 2022
NISSAN CHEMICAL CORPORATION
Hiroto OGATA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
Publication number
20220139712
Publication date
May 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Jyun Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK AND METHOD FOR FABRICATING THE SAME
Publication number
20220113621
Publication date
Apr 14, 2022
Taiwan Semiconductor Manufacturing company Ltd.
HUANG-MING WU
G06 - COMPUTING CALCULATING COUNTING