Production flow monitoring

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CPC
H01L21/67276

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67276Production flow monitoring

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber component condition estimation using substrate measurements
- Patent number 12,216,455
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a substrate
- Patent number 12,205,837
- Issue date Jan 21, 2025
- Semes Co., Ltd.
- Seong Hyun Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Communication method, transport system, and communication device
- Patent number 12,198,957
- Issue date Jan 14, 2025
- Murata Machinery, Ltd.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 12,191,178
- Issue date Jan 7, 2025
- Ebara Corporation
- Jumpei Fujikata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
State determination device, state determination method, and compute...
- Patent number 12,176,227
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Junnosuke Maki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Predictive wafer scheduling for multi-chamber semiconductor equipment
- Patent number 12,154,804
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Adrian Rhee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dynamic dispatching method for semiconductor manufacturing system
- Patent number 12,131,928
- Issue date Oct 29, 2024
- Tong Ji University
- Li Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
AI-based determination of action plan for manufacturing component c...
- Patent number 12,117,810
- Issue date Oct 15, 2024
- AT&SAustria Technologie & Systemtechnik AG
- Tim Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart camera substrate
- Patent number 12,114,083
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 12,111,636
- Issue date Oct 8, 2024
- Daifuku Co., Ltd.
- Koichi Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerating preventative maintenance recovery and recipe optimizin...
- Patent number 12,106,984
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Pengyu Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for automated material handling management
- Patent number 12,094,741
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chieh Hsu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer-like sensor
- Patent number 12,074,044
- Issue date Aug 27, 2024
- CyberOptics Corporation
- Felix J. Schuda
- B32 - LAYERED PRODUCTS
Information Patent Grant
Recipe creation method or apparatus utilizing a series of steps acc...
- Patent number 12,066,815
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Takatoshi Seki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment method and treatment device for OOC action during semicon...
- Patent number 12,062,558
- Issue date Aug 13, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Jun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 12,062,559
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of vacuum processing apparatus
- Patent number 12,062,564
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Daichi Naiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, estimation method of substrate proc...
- Patent number 12,051,587
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical convolute metal bellows for rotary motion, vacuum sealing,...
- Patent number 12,044,701
- Issue date Jul 23, 2024
- KLA Corporation
- Bruce Borchers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing process control method and apparatus, d...
- Patent number 12,040,240
- Issue date Jul 16, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yu-Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring system and method of measuring static charges
- Patent number 12,020,962
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu-Sou Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Automated assistance in a semiconductor manufacturing environment
- Patent number 12,020,961
- Issue date Jun 25, 2024
- LAVORRO, INC.
- Akshay Oberoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequencer time leaping execution
- Patent number 12,009,237
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Chongyang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Eco-efficiency (sustainability) dashboard for semiconductor manufac...
- Patent number 12,001,197
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for scheduling apparatuses on production line
- Patent number 11,990,355
- Issue date May 21, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Shangui Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Anomaly detection method and system for manufacturing processes
- Patent number 11,984,334
- Issue date May 14, 2024
- Accenture Global Solutions Limited
- Makoto Murai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 11,978,652
- Issue date May 7, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate with cut semiconductor pieces having measurement test str...
- Patent number 11,978,679
- Issue date May 7, 2024
- KLA Corporation
- Chen Dror
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STATUS DETERMINATION METHOD AND MONITORING DEVICE
- Publication number 20250038022
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Huizhen BU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250029854
- Publication date Jan 23, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER-LIKE SENSOR
- Publication number 20250022732
- Publication date Jan 16, 2025
- CyberOptics Corporation
- Felix J. SCHUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCELERATING PREVENTATIVE MAINTENANCE RECOVERY AND RECIPE OPTIMIZIN...
- Publication number 20250022733
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pengyu Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250022731
- Publication date Jan 16, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...
- Publication number 20250014929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Risa TANIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION CONTROL SYSTEM
- Publication number 20240419156
- Publication date Dec 19, 2024
- Analog Devices International Unlimited Company
- Julius Seville Mallari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-TARGET DESIGN FOR IN-SITU ANALYSIS OF SEMICONDUCTOR FABRICATI...
- Publication number 20240404851
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Yudong Hao
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT
- Publication number 20240387214
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
- Publication number 20240385602
- Publication date Nov 21, 2024
- Kokusai Electric Corporation
- Takatoshi SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART CAMERA SUBSTRATE
- Publication number 20240365013
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR ELECTRONICS FOR FLOW CONTROL
- Publication number 20240363369
- Publication date Oct 31, 2024
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355654
- Publication date Oct 24, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20240355617
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...
- Publication number 20240310819
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Calibration Device
- Publication number 20240304479
- Publication date Sep 12, 2024
- DIODES INCORPORATED
- WanHui Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING SYSTEM AND METHOD OF MEASURING STATIC CHARGES
- Publication number 20240304480
- Publication date Sep 12, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU-SOU CHUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREDICTING ETCHING RECIPE AND SYSTEM THEREOF
- Publication number 20240281676
- Publication date Aug 22, 2024
- United Microelectronics Corp.
- Ming-I HO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR PRODUCTION SYSTEM AND METHOD
- Publication number 20240274453
- Publication date Aug 15, 2024
- Samsung Electronics Co., Ltd.
- Minhong YUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240242983
- Publication date Jul 18, 2024
- Kokusai Electric Corporation
- Motonari TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
- Publication number 20240234185
- Publication date Jul 11, 2024
- Pragmatic Printing Ltd.
- Richard David PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
- Publication number 20240222171
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED OCAP INTERFACING SYSTEM AND METHOD
- Publication number 20240213063
- Publication date Jun 27, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Tian Oon Goh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...
- Publication number 20240213064
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Minoru NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CALCULATING THROUGHPUT IN SEMICONDUCTOR MANUFACTURING AP...
- Publication number 20240213065
- Publication date Jun 27, 2024
- EBARA CORPORATION
- Shunsuke KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND COMPUTING SYSTEM FOR MANUFACTURING THREE-DIMENSIONAL SEM...
- Publication number 20240213054
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Youngsik OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT (IC) FABRICATED IN A HIGH MIX ENVIRONMENT
- Publication number 20240203799
- Publication date Jun 20, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Vinod Anumareddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION SENSOR ASSEMBLY
- Publication number 20240203767
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Venkata Raghavaiah Chowdhary Kode
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CONTROLLING OP...
- Publication number 20240203768
- Publication date Jun 20, 2024
- EBARA CORPORATION
- Kazuma IDEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED DRY CLEANING APPARATUS AND METHOD FOR DRIVE DEVICE
- Publication number 20240194460
- Publication date Jun 13, 2024
- LC Tech Co., Ltd.
- Jong Hwan KIM
- H01 - BASIC ELECTRIC ELEMENTS

Production flow monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate treating apparatus with parallel first and second parts o...

Chamber component condition estimation using substrate measurements

Apparatus for treating a substrate

Communication method, transport system, and communication device

Semiconductor manufacturing apparatus, failure prediction method fo...

Tin oxide mandrels in patterning

State determination device, state determination method, and compute...

Predictive wafer scheduling for multi-chamber semiconductor equipment

Dynamic dispatching method for semiconductor manufacturing system

AI-based determination of action plan for manufacturing component c...

Smart camera substrate

Transport system

Accelerating preventative maintenance recovery and recipe optimizin...

System and method for automated material handling management

Wafer-like sensor

Recipe creation method or apparatus utilizing a series of steps acc...

Treatment method and treatment device for OOC action during semicon...

Substrate processing system, substrate processing method, and contr...

Operating method of vacuum processing apparatus

Substrate processing apparatus, estimation method of substrate proc...

Vertical convolute metal bellows for rotary motion, vacuum sealing,...

Semiconductor manufacturing process control method and apparatus, d...

Measuring system and method of measuring static charges

Automated assistance in a semiconductor manufacturing environment

Sequencer time leaping execution

Eco-efficiency (sustainability) dashboard for semiconductor manufac...

Method and system for scheduling apparatuses on production line

Anomaly detection method and system for manufacturing processes

Automatic handling buffer for bare stocker

Substrate with cut semiconductor pieces having measurement test str...

Patents Applicationslast 30 patents

STATUS DETERMINATION METHOD AND MONITORING DEVICE

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

WAFER-LIKE SENSOR

ACCELERATING PREVENTATIVE MAINTENANCE RECOVERY AND RECIPE OPTIMIZIN...

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...

SEMICONDUCTOR FABRICATION CONTROL SYSTEM

MULTI-TARGET DESIGN FOR IN-SITU ANALYSIS OF SEMICONDUCTOR FABRICATI...

SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT

RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...

SMART CAMERA SUBSTRATE

MODULAR ELECTRONICS FOR FLOW CONTROL

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...

Calibration Device

MEASURING SYSTEM AND METHOD OF MEASURING STATIC CHARGES

METHOD FOR PREDICTING ETCHING RECIPE AND SYSTEM THEREOF

SEMICONDUCTOR PRODUCTION SYSTEM AND METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

AUTOMATED OCAP INTERFACING SYSTEM AND METHOD

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...

METHOD FOR CALCULATING THROUGHPUT IN SEMICONDUCTOR MANUFACTURING AP...

METHOD AND COMPUTING SYSTEM FOR MANUFACTURING THREE-DIMENSIONAL SEM...

INTEGRATED CIRCUIT (IC) FABRICATED IN A HIGH MIX ENVIRONMENT

VIBRATION SENSOR ASSEMBLY

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CONTROLLING OP...

ADVANCED DRY CLEANING APPARATUS AND METHOD FOR DRIVE DEVICE