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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67276
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,512
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Makoto Sambu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Model-based failure mitigation for semiconductor processing systems
Patent number
11,955,358
Issue date
Apr 9, 2024
Applied Materials, Inc.
Anshul Ashok Vyas
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Control method, measurement method, control device, and heat treatm...
Patent number
11,929,269
Issue date
Mar 12, 2024
Tokyo Electron Limited
Tatsuya Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical metrology in machine learning to characterize features
Patent number
11,921,433
Issue date
Mar 5, 2024
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for mounting components on a substrate
Patent number
11,924,974
Issue date
Mar 5, 2024
Besi Switzerland AG
Norbert Bilewicz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and transfer schedule creation method
Patent number
11,915,959
Issue date
Feb 27, 2024
Tokyo Electron Limited
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
Patent number
11,908,712
Issue date
Feb 20, 2024
Tokyo Electron Limited
Toshiharu Hirata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ metrology and process control
Patent number
11,908,718
Issue date
Feb 20, 2024
Applied Materials, Inc.
Ramesh Krishnamurthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus including predictive control
Patent number
11,907,235
Issue date
Feb 20, 2024
HITACHI HIGH-TECH CORPORATION
Yutaka Okuyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Predictive wafer scheduling for multi-chamber semiconductor equipment
Patent number
11,901,204
Issue date
Feb 13, 2024
Applied Materials, Inc.
Adrian Rhee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing apparatus and recording medium
Patent number
11,876,010
Issue date
Jan 16, 2024
Kokusai Electric Corporation
Tadashi Okazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process data detection method, computer readable medium, and electr...
Patent number
11,869,784
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Dandan Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
Patent number
11,860,607
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Kai-Ting Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing control method, substrate processing apparatus...
Patent number
11,862,496
Issue date
Jan 2, 2024
Tokyo Electron Limited
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for improving the operation of semiconductor proc...
Patent number
11,856,706
Issue date
Dec 26, 2023
Applied Materials, Inc.
Hsui Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus capable of adjusting inner pressure...
Patent number
11,846,025
Issue date
Dec 19, 2023
Kokusai Electric Corporation
Masamichi Yachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system and substrate processing apparatus
Patent number
11,823,932
Issue date
Nov 21, 2023
Samsung Electronics Co., Ltd.
Eungjin Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fabrication process and method of optimizing the same
Patent number
11,791,184
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Jiho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transport control apparatus and transport control system including...
Patent number
11,789,425
Issue date
Oct 17, 2023
Semes Co., Ltd.
Su Jong Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for controlling lot risk score based dynamic lot...
Patent number
11,782,432
Issue date
Oct 10, 2023
SK Holdings Co., Ltd.
Tae Young Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control system and method of machine and host computer
Patent number
11,776,830
Issue date
Oct 3, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xiangwei Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for testing a standard interface and interface-tester
Patent number
11,764,088
Issue date
Sep 19, 2023
China Triumph International Engineering Co., Ltd.
Shou Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Smart camera substrate
Patent number
11,736,818
Issue date
Aug 22, 2023
Applied Materials, Inc.
Upendra Ummethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced process and hardware architecture to detect and correct re...
Patent number
11,735,447
Issue date
Aug 22, 2023
Applied Materials, Inc.
Kartik Santhanam
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Wafer manufacturing system
Patent number
11,728,193
Issue date
Aug 15, 2023
Sumco Corporation
Shigeru Daigo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system
Patent number
11,726,456
Issue date
Aug 15, 2023
Kokusai Electric Corporation
Masanori Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate drying method
Patent number
11,715,648
Issue date
Aug 1, 2023
Tokyo Electron Limited
Katsuya Nakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for mounting components on a substrate
Patent number
11,696,429
Issue date
Jul 4, 2023
Besi Switzerland AG
Norbert Bilewicz
G05 - CONTROLLING REGULATING
Information
Patent Grant
Transport apparatus and adapter pendant
Patent number
11,670,534
Issue date
Jun 6, 2023
BROOKS AUTOMATION US, LLC
Dana L. Atwood
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate processing apparatus and controller
Patent number
11,663,562
Issue date
May 30, 2023
Kokusai Electric Corporation
Mitsuru Fukuda
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
Publication number
20240136211
Publication date
Apr 25, 2024
Pragmatic Printing Ltd.
Richard David PRICE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER PROCESSING APPARATUS
Publication number
20240120226
Publication date
Apr 11, 2024
ASM IP HOLDING, B.V.
Yoshiyuki Umeoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
Publication number
20240096656
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096666
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Yuri TAKEBAYASHI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096655
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Katsuhiko Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240087927
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Koichiro HARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
Publication number
20240087928
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toyohisa TSURUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240087937
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Naoki Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND LEAK DETERMINATION METHOD FOR US...
Publication number
20240087920
Publication date
Mar 14, 2024
SCREEN Holdings Co., Ltd.
Mao OMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
Publication number
20240076780
Publication date
Mar 7, 2024
Kokusai Electric Corporation
Masamichi YACHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
Publication number
20240071791
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Tae Soon KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREDICTIVE WAFER SCHEDULING FOR MULTI-CHAMBER SEMICONDUCTOR EQUIPMENT
Publication number
20240055284
Publication date
Feb 15, 2024
Applied Materials, Inc.
Adrian Rhee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD...
Publication number
20240014055
Publication date
Jan 11, 2024
Kokusai Electric Corporation
Kazuyoshi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Image Modeling-Assisted Contour Extraction
Publication number
20230420278
Publication date
Dec 28, 2023
KLA Corporation
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM TOOLS FOR MONITORING, ASSESSING AND RES...
Publication number
20230400508
Publication date
Dec 14, 2023
LAM RESEARCH CORPORATION
Bridget Hill FREESE
G05 - CONTROLLING REGULATING
Information
Patent Application
TRANSPORT CONTROL APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCLUDIN...
Publication number
20230386872
Publication date
Nov 30, 2023
SEMES CO., LTD.
Da Hye JUNG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SMART CAMERA SUBSTRATE
Publication number
20230345137
Publication date
Oct 26, 2023
Applied Materials, Inc.
Upendra Ummethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA FUSION OF MULTIPLE SENSORS
Publication number
20230317483
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Masaki KITSUNEZUKA
G05 - CONTROLLING REGULATING
Information
Patent Application
PROCESSING TASK START METHOD AND DEVICE IN SEMICONDUCTOR PROCESSING...
Publication number
20230307272
Publication date
Sep 28, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Fangna WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for mounting components on a substrate
Publication number
20230284426
Publication date
Sep 7, 2023
Besi Switzerland AG
Norbert BILEWICZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE, WAFER CONVEYANCE SYSTEM, WAFER...
Publication number
20230274963
Publication date
Aug 31, 2023
KIOXIA Corporation
Teppei KITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CONDITION SETTING METHOD, SUBSTRATE PROCESSING...
Publication number
20230268208
Publication date
Aug 24, 2023
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER COMPONENT CONDITION ESTIMATION USING SUBSTRATE MEASUREMENTS
Publication number
20230236583
Publication date
Jul 27, 2023
Applied Materials, Inc.
Chunlei Zhang
G05 - CONTROLLING REGULATING
Information
Patent Application
SEMICONDUCTOR MANUFACTURING PROCESS PREDICTION METHOD AND SEMICONDU...
Publication number
20230238262
Publication date
Jul 27, 2023
United Microelectronics Corp.
Hsiao-Ying YANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF DISPLAYING SUBSTRATE ARRANGEMENT DATA, METHOD OF MANUFACT...
Publication number
20230238263
Publication date
Jul 27, 2023
Kokusai Electric Corporation
Yuna SUIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLOW CONTROL EQUIPMENT AND AUTOMATIC REFILLING SYSTEM
Publication number
20230223288
Publication date
Jul 13, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Bo LIU
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
PROCESSING CHAMBER CALIBRATION
Publication number
20230222264
Publication date
Jul 13, 2023
Applied Materials, Inc.
Rohit Mahakali
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS DATA DETECTION METHOD, COMPUTER READABLE MEDIUM, AND ELECTR...
Publication number
20230215747
Publication date
Jul 6, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Dandan CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
Publication number
20230215751
Publication date
Jul 6, 2023
Hitachi High-Tech Corporation
Daichi Naiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
Publication number
20230170240
Publication date
Jun 1, 2023
BROOKS AUTOMATION (GERMANY) GMBH
Lutz REBSTOCK
H01 - BASIC ELECTRIC ELEMENTS