Protection of windows for introduction of radiation into the coating chamber

Industry

CPC
C23C16/488

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/488Protection of windows for introduction of radiation into the coating chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Window for chemical vapor deposition systems and related methods
- Patent number 12,084,770
- Issue date Sep 10, 2024
- GlobalWafers Co., Ltd.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation shield
- Patent number 11,417,545
- Issue date Aug 16, 2022
- ASM IP Holding B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Window member for an x-ray device
- Patent number 11,094,494
- Issue date Aug 17, 2021
- OXFORD INSTRUMENTS X-RAY TECHNOLOGY INC.
- Yahya Alivov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation shield
- Patent number 10,692,741
- Issue date Jun 23, 2020
- ASM IP Holdings B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing chamber
- Patent number 10,053,777
- Issue date Aug 21, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition systems and susceptor assemblies for depositing a film o...
- Patent number 8,430,960
- Issue date Apr 30, 2013
- Cree, Inc.
- Joseph John Sumakeris
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-containing materials during a photoexcit...
- Patent number 8,387,557
- Issue date Mar 5, 2013
- Applied Materials
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-containing materials during a photoexcit...
- Patent number 7,651,955
- Issue date Jan 26, 2010
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-containing materials during a photoexcit...
- Patent number 7,648,927
- Issue date Jan 19, 2010
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treating substrates and films with photoexcitation
- Patent number 7,601,652
- Issue date Oct 13, 2009
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing semiconductor
- Patent number 7,381,275
- Issue date Jun 3, 2008
- Oki Electric Industry Co., Ltd.
- Junichi Miyano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling formation of deposits in a deposition syste...
- Patent number 7,118,781
- Issue date Oct 10, 2006
- Cree, Inc.
- Joseph John Sumakeris
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for photo-induced process
- Patent number 6,866,721
- Issue date Mar 15, 2005
- Korea Advanced Institute of Science and Technology
- Keong-Su Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 6,520,189
- Issue date Feb 18, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz window having reinforcing ribs
- Patent number 6,435,869
- Issue date Aug 20, 2002
- Tokyo Electron Limited
- Masayuki Kitamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
View port of a chemical vapor deposition device for manufacturing s...
- Patent number 6,367,415
- Issue date Apr 9, 2002
- Samsung Electronics Co., Ltd.
- Tae-Hoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for CVD and thermal processing of semiconducto...
- Patent number 6,301,434
- Issue date Oct 9, 2001
- Mattson Technology, Inc.
- James McDiarmid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooled window
- Patent number 6,284,051
- Issue date Sep 4, 2001
- AG Associates (Israel) Ltd.
- Igor Fidelman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Coating film excellent in resistance to halogen-containing gas corr...
- Patent number 6,027,792
- Issue date Feb 22, 2000
- Kabushiki Kaisha Kobe Seiko Sho
- Seigo Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 6,013,338
- Issue date Jan 11, 2000
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a film on a substrate
- Patent number 5,855,970
- Issue date Jan 5, 1999
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant aluminum nitride coating for a semiconductor ch...
- Patent number 5,779,848
- Issue date Jul 14, 1998
- Applied Materials, Inc.
- Michio Aruga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a multi-layer planarization structure
- Patent number 5,629,245
- Issue date May 13, 1997
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photo-assisted CVD apparatus
- Patent number 5,527,417
- Issue date Jun 18, 1996
- Kabushiki Kaisha Toshiba
- Yoshinori Iida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming thin film and multilayer film
- Patent number 5,443,646
- Issue date Aug 22, 1995
- Matsushita Research Institute Tokyo, Inc.
- Yuka Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 5,427,824
- Issue date Jun 27, 1995
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photo-assisted chemical vapor deposition method
- Patent number 5,364,667
- Issue date Nov 15, 1994
- Amtech Systems, Inc.
- Ji H. Rhieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for forming film by photo-chemical vapor deposition
- Patent number 5,328,514
- Issue date Jul 12, 1994
- Osaka Gas Company Limited
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photochemical vapor phase reaction apparatus and method of causing...
- Patent number 5,288,684
- Issue date Feb 22, 1994
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-SUBSTRATE PROCESSING SYSTEM
- Publication number 20250034708
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
- Publication number 20240401201
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD
- Publication number 20220375772
- Publication date Nov 24, 2022
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING MECHANISM AND SUBSTRATE-PROCESSING DEVICE WITH THE SAME
- Publication number 20220282378
- Publication date Sep 8, 2022
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
- Publication number 20220056583
- Publication date Feb 24, 2022
- GLOBALWAFERS CO., LTD.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD
- Publication number 20200273729
- Publication date Aug 27, 2020
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW MEMBER FOR AN X-RAY DEVICE
- Publication number 20200176212
- Publication date Jun 4, 2020
- Oxford Instruments X-ray Technology Inc.
- Yahya ALIVOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM COATING APPARATUS
- Publication number 20190237613
- Publication date Aug 1, 2019
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Xiaowei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD
- Publication number 20190051544
- Publication date Feb 14, 2019
- ASM IP HOLDING B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARING METHOD OF GRAPHENE BY USING NEAR-INFRARED AND APPARATUS T...
- Publication number 20150259800
- Publication date Sep 17, 2015
- SNU R&DB Foundation
- Byung Hee Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100330773
- Publication date Dec 30, 2010
- Hitachi Kokusai Electric Inc.
- Shin HIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRAVIOLET-RESISTANT MATERIALS AND DEVICES AND SYSTEMS INCLUDING SAME
- Publication number 20100275845
- Publication date Nov 4, 2010
- Hoya Candeo Optronics Corporation
- Yasuo Kogure
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...
- Publication number 20100018460
- Publication date Jan 28, 2010
- Applied Materials, Inc.
- Kaushal K. Singh
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition systems and susceptor assemblies for depositing a film o...
- Publication number 20070101939
- Publication date May 10, 2007
- Cree, Inc.
- Joseph John Sumakeris
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...
- Publication number 20060286774
- Publication date Dec 21, 2006
- Applied Materials Inc.
- Kaushal K. Singh
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...
- Publication number 20060286776
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...
- Publication number 20060286775
- Publication date Dec 21, 2006
- Kaushal K. Singh
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for treating substrates and films with photoexcitation
- Publication number 20060286820
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR CONTROLLING FORMATION OF DEPOSITS IN A DEPOSITION SYSTE...
- Publication number 20060216416
- Publication date Sep 28, 2006
- Joseph John Sumakeris
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD apparatus
- Publication number 20030140941
- Publication date Jul 31, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Takashi Inushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for manufacturing semiconductor
- Publication number 20030075107
- Publication date Apr 24, 2003
- Junichi Miyano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for photo-induced process
- Publication number 20030047133
- Publication date Mar 13, 2003
- Korea Advanced Institute of Science and Technology
- Keong-Su Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
View port of a chemical vapor deposition device for manufacturing s...
- Publication number 20020014203
- Publication date Feb 7, 2002
- Tae-Hoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quartz window having reinforcing ribs
- Publication number 20010034004
- Publication date Oct 25, 2001
- Masayuki Kitamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Protection of windows for introduction of radiation into the coating chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Window for chemical vapor deposition systems and related methods

Radiation shield

Window member for an x-ray device

Radiation shield

Clean resistant windows for ultraviolet thermal processing

Thermal processing chamber

Deposition systems and susceptor assemblies for depositing a film o...

Method for forming silicon-containing materials during a photoexcit...

Method for forming silicon-containing materials during a photoexcit...

Method for forming silicon-containing materials during a photoexcit...

Method for treating substrates and films with photoexcitation

Apparatus and method for manufacturing semiconductor

Methods for controlling formation of deposits in a deposition syste...

Apparatus and method for photo-induced process

CVD apparatus

Quartz window having reinforcing ribs

View port of a chemical vapor deposition device for manufacturing s...

Apparatus and method for CVD and thermal processing of semiconducto...

Cooled window

Coating film excellent in resistance to halogen-containing gas corr...

CVD apparatus

Method of forming a film on a substrate

Corrosion-resistant aluminum nitride coating for a semiconductor ch...

Method for forming a multi-layer planarization structure

Photo-assisted CVD apparatus

Method and apparatus for forming thin film and multilayer film

CVD apparatus

Photo-assisted chemical vapor deposition method

Device for forming film by photo-chemical vapor deposition

Photochemical vapor phase reaction apparatus and method of causing...

Patents Applicationslast 30 patents

MULTI-SUBSTRATE PROCESSING SYSTEM

WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS

RADIATION SHIELD

SHIELDING MECHANISM AND SUBSTRATE-PROCESSING DEVICE WITH THE SAME

WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS

RADIATION SHIELD

WINDOW MEMBER FOR AN X-RAY DEVICE

FILM COATING APPARATUS

RADIATION SHIELD

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

PREPARING METHOD OF GRAPHENE BY USING NEAR-INFRARED AND APPARATUS T...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ULTRAVIOLET-RESISTANT MATERIALS AND DEVICES AND SYSTEMS INCLUDING SAME

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...

Deposition systems and susceptor assemblies for depositing a film o...

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...

Method for treating substrates and films with photoexcitation

METHODS FOR CONTROLLING FORMATION OF DEPOSITS IN A DEPOSITION SYSTE...

CVD apparatus

Apparatus and method for manufacturing semiconductor

Apparatus and method for photo-induced process

View port of a chemical vapor deposition device for manufacturing s...

Quartz window having reinforcing ribs