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G03F7/70933

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70933Purge

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 12,174,545
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Counterflow gas nozzle for contamination mitigation in extreme ultr...
- Patent number 12,158,576
- Issue date Dec 3, 2024
- KLA Corporation
- Rudy F. Garcia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for measuring a substrate and method for correcting cyclic e...
- Patent number 12,135,211
- Issue date Nov 5, 2024
- Carl Zeiss SMT GmbH
- Stephan Zschaeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Operating method of etching device
- Patent number 12,131,892
- Issue date Oct 29, 2024
- NANYA TECHNOLOGY CORPORATION
- Feng-Ju Tsai
- B08 - CLEANING
Information Patent Grant
Method and system for manufacturing a semiconductor device
- Patent number 12,019,370
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Han Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum pumping system
- Patent number 11,839,903
- Issue date Dec 12, 2023
- Edwards Limited
- Christopher Mark Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,841,624
- Issue date Dec 12, 2023
- Canon Kabushiki Kaisha
- Masato Homma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 11,768,437
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method using the same
- Patent number 11,740,564
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tao-Hsin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bake unit and apparatus for treating substrate
- Patent number 11,714,356
- Issue date Aug 1, 2023
- Semes Co., Ltd.
- Jun Ho Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and related methods
- Patent number 11,703,768
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Alisia Mariska Willems-Peters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Load port unit, storage apparatus including the same, and exhaust m...
- Patent number 11,579,538
- Issue date Feb 14, 2023
- Semes Co., Ltd.
- Yong Hun Sim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for optical-path coupling of light for in-situ ph...
- Patent number 11,543,757
- Issue date Jan 3, 2023
- KLA Corporation
- Shannon Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
- Patent number 11,531,278
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,487,212
- Issue date Nov 1, 2022
- Canon Kabushiki Kaisha
- Masato Homma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, extreme ultraviolet light generation apparatus, and...
- Patent number 11,483,917
- Issue date Oct 25, 2022
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System and method for performing extreme ultraviolet photolithograp...
- Patent number 11,392,040
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 11,353,792
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Norihisa Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device
- Patent number 11,281,108
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for protecting optics from vacuum ultraviolet light
- Patent number 11,262,664
- Issue date Mar 1, 2022
- KLA Corporation
- Matthew Derstine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for removing particles in semiconductor manufa...
- Patent number 11,256,181
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh-Lin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for cleaning optical elements for the ultraviolet wavelengt...
- Patent number 11,256,182
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Konstantin Forcht
- G02 - OPTICS
Information Patent Grant
Particle suppression systems and methods
- Patent number 11,137,694
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 11,121,018
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chueh-Chi Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus with improved patterning performance
- Patent number 11,048,178
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Federico La Torre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and apparatus for target material debris cleaning of...
- Patent number 11,013,096
- Issue date May 18, 2021
- ASML Nettherlands B.V.
- Jonghoon Baek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 11,003,088
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,990,025
- Issue date Apr 27, 2021
- ASML Netherlands B.V.
- Laurentius Johannes Adrianus Van Bokhoven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Objective lens protection device, objective lens system and lithogr...
- Patent number 10,983,448
- Issue date Apr 20, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xianming Li
- G02 - OPTICS
Information Patent Grant
System and method for cleaning optical surfaces of an extreme ultra...
- Patent number 10,953,441
- Issue date Mar 23, 2021
- KLA Corporation
- Gildardo Delgado
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD
- Publication number 20250021027
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Keisaku KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...
- Publication number 20250004389
- Publication date Jan 2, 2025
- CHYI DING TECHNOLOGIES CO., LTD.
- Shih-Chia CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240411235
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Dae Geun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385540
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DRYING DEVICE
- Publication number 20240337442
- Publication date Oct 10, 2024
- Carl Zeiss SMT GMBH
- Arvid Maczeyzik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240329547
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Shinichi MACHIDORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR AVOIDING A DEGRADATION OF AN OPTICAL USED...
- Publication number 20240319621
- Publication date Sep 26, 2024
- Carl Zeiss SMT GMBH
- Moritz BECKER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR DEPOSITING LAYERS OF MATERIALS ON SUBSTRATES AND STRUCT...
- Publication number 20240302748
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- João Antunes Afonso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DEPOSITING A COVER LAYER, EUV LITHOGRAPHY SYSTEM AND OPT...
- Publication number 20240302756
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Dirk EHM
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240295810
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Han HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE...
- Publication number 20240248390
- Publication date Jul 25, 2024
- SK enpulse Co., Ltd.
- Tae Wan KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240201602
- Publication date Jun 20, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTO TREATMENT DEVICE
- Publication number 20240103371
- Publication date Mar 28, 2024
- Ushio Denki Kabushiki Kaisha
- Akihiro Shimamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD
- Publication number 20240094647
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230418169
- Publication date Dec 28, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230369060
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Hai YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
- Publication number 20230367225
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20230333487
- Publication date Oct 19, 2023
- Rob Johan Theodoor RUTTEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID PURGING SYSTEM
- Publication number 20230314964
- Publication date Oct 5, 2023
- ASML NETHERLANDS B.V.
- José Nilton FONSECA JUNIOR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
- Publication number 20230205101
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Luuc KEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID PURGING SYSTEM, PROJECTION SYSTEM, ILLUMINATION SYSTEM, LIT...
- Publication number 20230205102
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- José Nilton FONSECA JUNIOR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD HAVING LATCH INCLUDING RAMPED SURFACE
- Publication number 20230075744
- Publication date Mar 9, 2023
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230062148
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Han HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230012970
- Publication date Jan 19, 2023
- Canon Kabushiki Kaisha
- Masato Homma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIRECTED GAS PURGE TO REDUCE DUSTING OF EXCIMER DISCHARGE CHAMBER W...
- Publication number 20230006409
- Publication date Jan 5, 2023
- CYMER, LLC
- John Theodore Melchior
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE SYSTEMS FOR A LASER SOURCE
- Publication number 20220413402
- Publication date Dec 29, 2022
- CYMER, LLC
- Gamaralalage G Padmabandu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...
- Publication number 20220350257
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRY CHAMBER CLEAN OF PHOTORESIST FILMS
- Publication number 20220344136
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- Daniel Peter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR OPTICAL-PATH COUPLING OF LIGHT FOR IN-SITU PH...
- Publication number 20220334504
- Publication date Oct 20, 2022
- Shannon Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for performing extreme ultraviolet photolithograp...

Counterflow gas nozzle for contamination mitigation in extreme ultr...

Device for measuring a substrate and method for correcting cyclic e...

Operating method of etching device

Method and system for manufacturing a semiconductor device

Vacuum pumping system

Exposure apparatus and method of manufacturing article

System and method for performing extreme ultraviolet photolithograp...

Lithography apparatus and method using the same

Bake unit and apparatus for treating substrate

Lithographic apparatus and related methods

Load port unit, storage apparatus including the same, and exhaust m...

System and method for optical-path coupling of light for in-situ ph...

EUV lithography system and method for decreasing debris in EUV lith...

Exposure apparatus and method of manufacturing article

Chamber device, extreme ultraviolet light generation apparatus, and...

System and method for performing extreme ultraviolet photolithograp...

Substrate processing apparatus

Exposure device

System and method for protecting optics from vacuum ultraviolet light

Apparatus and method for removing particles in semiconductor manufa...

Process for cleaning optical elements for the ultraviolet wavelengt...

Particle suppression systems and methods

Method and apparatus for lithography in semiconductor fabrication

Lithographic apparatus with improved patterning performance

System, method and apparatus for target material debris cleaning of...

Method and device for the correction of imaging defects

Patterning device cooling apparatus

Objective lens protection device, objective lens system and lithogr...

System and method for cleaning optical surfaces of an extreme ultra...

Patents Applicationslast 30 patents

EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD

EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...

SEMICONDUCTOR MANUFACTURING APPARATUS

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

METHOD AND DRYING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS AND METHOD FOR AVOIDING A DEGRADATION OF AN OPTICAL USED...

METHODS FOR DEPOSITING LAYERS OF MATERIALS ON SUBSTRATES AND STRUCT...

METHOD FOR DEPOSITING A COVER LAYER, EUV LITHOGRAPHY SYSTEM AND OPT...

METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE

APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE...

SUBSTRATE PROCESSING APPARATUS

PHOTO TREATMENT DEVICE

PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE

SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...

SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD

FLUID PURGING SYSTEM

APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS

A FLUID PURGING SYSTEM, PROJECTION SYSTEM, ILLUMINATION SYSTEM, LIT...

RETICLE POD HAVING LATCH INCLUDING RAMPED SURFACE

METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DIRECTED GAS PURGE TO REDUCE DUSTING OF EXCIMER DISCHARGE CHAMBER W...

GAS PURGE SYSTEMS FOR A LASER SOURCE

SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAP...

DRY CHAMBER CLEAN OF PHOTORESIST FILMS

SYSTEM AND METHOD FOR OPTICAL-PATH COUPLING OF LIGHT FOR IN-SITU PH...