Reduction or decomposition of gaseous compounds

Industry

CPC
H01L21/0262

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/0262Reduction or decomposition of gaseous compounds

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Remote capacitively coupled plasma deposition of amorphous silicon
- Patent number 12,365,986
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth methods and structures thereof
- Patent number 12,369,374
- Issue date Jul 22, 2025
- Taiwan Semicoductor Manufacturing Co., Ltd.
- Tetsuji Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, processing method, and non-transito...
- Patent number 12,368,043
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pixel device on deep trench isolation (DTI) structure for image sensor
- Patent number 12,369,422
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Seiji Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Increasing source/drain dopant concentration to reduced resistance
- Patent number 12,369,342
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Jing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synthesis and use of precursors for ALD of molybdenum or tungsten c...
- Patent number 12,365,981
- Issue date Jul 22, 2025
- ASM IP Holding B.V.
- Tiina McKee
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Atomic layer deposition and etching of transition metal dichalcogen...
- Patent number 12,365,988
- Issue date Jul 22, 2025
- ASM IP Holding B.V.
- Jani Hämäläinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a Group IV semiconductor and related semicond...
- Patent number 12,363,960
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Joe Margetis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing SiC substrate
- Patent number 12,362,175
- Issue date Jul 15, 2025
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor device, reservoir computing system, and method for ma...
- Patent number 12,363,968
- Issue date Jul 15, 2025
- Fujitsu Limited
- Kenichi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,362,173
- Issue date Jul 15, 2025
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and wafer processing furnace for forming an epitaxial stack...
- Patent number 12,362,174
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Steven Van Aerde
- C30 - CRYSTAL GROWTH
Information Patent Grant
Near-infrared light emitting semiconductor element and method for m...
- Patent number 12,364,058
- Issue date Jul 15, 2025
- The Ritsumeikan Trust
- Shuhei Ichikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride semiconductor component and process for its production
- Patent number 12,364,059
- Issue date Jul 15, 2025
- ALLOS SEMICONDUCTORS GMBH
- Armin Dadgar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SiC wafer and manufacturing method thereof
- Patent number 12,363,973
- Issue date Jul 15, 2025
- PROTERIAL, LTD.
- Keisuke Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a strained structure and structure formed
- Patent number 12,356,674
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,351,913
- Issue date Jul 8, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor film
- Patent number 12,351,906
- Issue date Jul 8, 2025
- NGK Insulators, Ltd.
- Jun Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
- Patent number 12,354,872
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method for manufacturing SiC epitaxial wafer
- Patent number 12,356,687
- Issue date Jul 8, 2025
- Resonac Corporation
- Naoto Ishibashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Transistor and manufacturing method thereof
- Patent number 12,349,583
- Issue date Jul 1, 2025
- HUIZHOU CHINA STAR OPTOELECTRONICS DISPLAY CO., LTD.
- Lixuan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 12,349,460
- Issue date Jul 1, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Masashi Oota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MOCVD method for growing INALGAN/GAN heterostructure
- Patent number 12,347,678
- Issue date Jul 1, 2025
- NATIONAL YANG MING CHIAO TUNG UNIVERSITY
- Edward Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming silicon-phosphorous materials
- Patent number 12,338,547
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,341,006
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Hiroyuki Matsuura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a layer of aluminum nitride (ALN) on a structu...
- Patent number 12,338,545
- Issue date Jun 24, 2025
- COMMISSARIAT L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Maxime Legallais
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses including band offset materials, and related memory dev...
- Patent number 12,342,544
- Issue date Jun 24, 2025
- Albert Fayrushin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrates for III-nitride epitaxy
- Patent number 12,331,426
- Issue date Jun 17, 2025
- X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Victor Sizov
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial wafer, semiconductor device, and method for manufacturing...
- Patent number 12,334,340
- Issue date Jun 17, 2025
- Mitsubishi Electric Corporation
- Atsushi Era
- C30 - CRYSTAL GROWTH
Information Patent Grant
Source/drain structure for semiconductor device
- Patent number 12,336,210
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Wei Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH PURITY POLYSILOCARB DERIVED SILICON CARBIDE MATERIALS, APPLICA...
- Publication number 20250236524
- Publication date Jul 24, 2025
- Pallidus, Inc.
- Douglas M. Dukes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF OPERATING A SPATIAL DEPOSITION TOOL
- Publication number 20250239479
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20250239449
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kun-Yen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR FILM FORMATION
- Publication number 20250232958
- Publication date Jul 17, 2025
- Gallium Enterprises Pty Ltd
- Satyanarayan Barik
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FORMATION OF SINGLE CRYSTAL SEMICONDUCTORS USING PLANAR VAPOR LIQUI...
- Publication number 20250226217
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Martin Christopher Holland
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250223690
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Hajime KARASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF DOPANT HYDRIDE EVOLUTION FROM EPITAXIAL FILMS IN INT...
- Publication number 20250218777
- Publication date Jul 3, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Michael Todd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH SOURCE/DRAIN CONTACT FORMED USING BOTTOM-...
- Publication number 20250203976
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sung-Li WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING SE...
- Publication number 20250201568
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsz-Mei KWOK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INSPECTING GROUP-III ELEMENT NITRIDE SUBSTRATE, METHOD OF...
- Publication number 20250201636
- Publication date Jun 19, 2025
- NGK Insulators, Ltd.
- Yoshitaka KURAOKA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING A FINFET WITH MERGED EXPITAXIAL SOURCE/DRAI...
- Publication number 20250203917
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...
- Publication number 20250201594
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE SEMICONDUCTOR, INCLUDING MULTI-PORTION NITRIDE REGION
- Publication number 20250203983
- Publication date Jun 19, 2025
- Kabushiki Kaisha Toshiba
- Toshiki HIKOSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Semiconductor Device Fabrication Involving Porous Silico...
- Publication number 20250194125
- Publication date Jun 12, 2025
- INFINEON TECHNOLOGIES AG
- Hans-Joachim SCHULZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF RF COMPONENTS
- Publication number 20250191935
- Publication date Jun 12, 2025
- STMicroelectronics (Tours) SAS
- Patrick HAUTTECOEUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250188604
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...
- Publication number 20250183029
- Publication date Jun 5, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
- Publication number 20250183066
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Abbas RASTEGAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...
- Publication number 20250183033
- Publication date Jun 5, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING NANOSTRUCTURE TRANSISTOR AND METHODS OF...
- Publication number 20250185306
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORD LINE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE
- Publication number 20250176182
- Publication date May 29, 2025
- Yangtze Memory Technologies Co., Ltd.
- Qiang XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC LASER-ASSISTED ETCHING
- Publication number 20250174461
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Yu Tang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ATOMIC SCALE FABRICATION OF DIAMOND QUANTUM COMPUTERS
- Publication number 20250174460
- Publication date May 29, 2025
- Quantum Brilliance PTY LTD
- Marcus DOHERTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING HETEROEPITAXIAL FILM
- Publication number 20250163609
- Publication date May 22, 2025
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CURTAIN FOR SEMICONDUCTOR MANUFACUTRING SYSTEM
- Publication number 20250166998
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Co., Lid.
- Kent LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING BORON CONTAINING SILICON GERMANIUIM LAYERS
- Publication number 20250157814
- Publication date May 15, 2025
- ASM IP HOLDING B.V.
- Lucas Petersen Barbosa Lima
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI-FLOW CHAMBER KITS, PROCESSING CHAMBERS, AND RELATED APPARATUS...
- Publication number 20250149350
- Publication date May 8, 2025
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT ARCHITECTURE FOR CAPACITANCE REDUCTION AND SATISFACTORY CON...
- Publication number 20250151363
- Publication date May 8, 2025
- Intel Corporation
- Rishabh MEHANDRU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR WAFER, MEMORY DEVICE, AND ELECT...
- Publication number 20250151273
- Publication date May 8, 2025
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Hajime KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LATTICE POLARITY CONTROL IN III-NITRIDE SEMICONDUCTOR HETEROSTRUCTURES
- Publication number 20250149334
- Publication date May 8, 2025
- The Regents of the University of Michigan
- Ping Wang
- C30 - CRYSTAL GROWTH

Reduction or decomposition of gaseous compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Remote capacitively coupled plasma deposition of amorphous silicon

Epitaxial growth methods and structures thereof

Substrate processing apparatus, processing method, and non-transito...

Pixel device on deep trench isolation (DTI) structure for image sensor

Increasing source/drain dopant concentration to reduced resistance

Synthesis and use of precursors for ALD of molybdenum or tungsten c...

Atomic layer deposition and etching of transition metal dichalcogen...

Method for depositing a Group IV semiconductor and related semicond...

Method for manufacturing SiC substrate

Semiconductor device, reservoir computing system, and method for ma...

Method for manufacturing a composite structure comprising a thin la...

Method and wafer processing furnace for forming an epitaxial stack...

Near-infrared light emitting semiconductor element and method for m...

Nitride semiconductor component and process for its production

SiC wafer and manufacturing method thereof

Method for fabricating a strained structure and structure formed

Film forming apparatus and film forming method

Semiconductor film

Method for forming doped metal oxide films on a substrate by cyclic...

SiC epitaxial wafer and method for manufacturing SiC epitaxial wafer

Transistor and manufacturing method thereof

Manufacturing method of semiconductor device

MOCVD method for growing INALGAN/GAN heterostructure

Method for forming silicon-phosphorous materials

Heat treatment method and heat treatment apparatus

Method for producing a layer of aluminum nitride (ALN) on a structu...

Apparatuses including band offset materials, and related memory dev...

Substrates for III-nitride epitaxy

Epitaxial wafer, semiconductor device, and method for manufacturing...

Source/drain structure for semiconductor device

Patents Applicationslast 30 patents

HIGH PURITY POLYSILOCARB DERIVED SILICON CARBIDE MATERIALS, APPLICA...

METHODS OF OPERATING A SPATIAL DEPOSITION TOOL

SEMICONDUCTOR DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF

APPARATUS AND METHOD FOR FILM FORMATION

FORMATION OF SINGLE CRYSTAL SEMICONDUCTORS USING PLANAR VAPOR LIQUI...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUPPRESSION OF DOPANT HYDRIDE EVOLUTION FROM EPITAXIAL FILMS IN INT...

SEMICONDUCTOR DEVICE WITH SOURCE/DRAIN CONTACT FORMED USING BOTTOM-...

METHOD AND CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING SE...

METHOD OF INSPECTING GROUP-III ELEMENT NITRIDE SUBSTRATE, METHOD OF...

METHOD OF MANUFACTURING A FINFET WITH MERGED EXPITAXIAL SOURCE/DRAI...

MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...

NITRIDE SEMICONDUCTOR, INCLUDING MULTI-PORTION NITRIDE REGION

Methods of Semiconductor Device Fabrication Involving Porous Silico...

MANUFACTURING METHOD OF RF COMPONENTS

BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS

ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...

PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...

METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...

SEMICONDUCTOR DEVICE HAVING NANOSTRUCTURE TRANSISTOR AND METHODS OF...

WORD LINE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE

DYNAMIC LASER-ASSISTED ETCHING

ATOMIC SCALE FABRICATION OF DIAMOND QUANTUM COMPUTERS

METHOD FOR PRODUCING HETEROEPITAXIAL FILM

GAS CURTAIN FOR SEMICONDUCTOR MANUFACUTRING SYSTEM

METHOD FOR DEPOSITING BORON CONTAINING SILICON GERMANIUIM LAYERS

MULTI-FLOW CHAMBER KITS, PROCESSING CHAMBERS, AND RELATED APPARATUS...

CONTACT ARCHITECTURE FOR CAPACITANCE REDUCTION AND SATISFACTORY CON...

SEMICONDUCTOR DEVICE, SEMICONDUCTOR WAFER, MEMORY DEVICE, AND ELECT...

LATTICE POLARITY CONTROL IN III-NITRIDE SEMICONDUCTOR HETEROSTRUCTURES