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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/702
Reflective illumination
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Patents Grants
last 30 patents
Information
Patent Grant
Optical imaging arrangement with a piezoelectric device
Patent number
11,656,453
Issue date
May 23, 2023
Carl Zeiss SMT GmbH
Yim-Bun Patrick Kwan
G02 - OPTICS
Information
Patent Grant
Method of modeling a mask by taking into account of mask pattern ed...
Patent number
11,645,443
Issue date
May 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Jen Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure method, exposure apparatus, article manufacturing method,...
Patent number
11,640,119
Issue date
May 2, 2023
Canon Kabushiki Kaisha
Tetsuya Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microscopic system for testing structures and defects on EUV lithog...
Patent number
11,615,897
Issue date
Mar 28, 2023
RI Research Institute GmbH
Rainer Lebert
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Photomask inspection method and apparatus thereof
Patent number
11,614,684
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Wei Wen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure and lithographic apparatus
Patent number
11,614,689
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,599,032
Issue date
Mar 7, 2023
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser interference fringe control for higher EUV light source and E...
Patent number
11,592,749
Issue date
Feb 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift mask and manufacturing method of semiconductor device
Patent number
11,586,107
Issue date
Feb 21, 2023
Powerchip Semiconductor Manufacturing Corporation
Yi-Kai Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavefront optimization for tuning scanner based on performance matc...
Patent number
11,586,114
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing effects of lens heating and/or cooling in a lith...
Patent number
11,573,496
Issue date
Feb 7, 2023
ASML Netherlands B.V.
Nick Kant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maskless photolithography devices, methods, and systems
Patent number
11,567,411
Issue date
Jan 31, 2023
NANOPATH, INC.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UV lithography system
Patent number
11,561,476
Issue date
Jan 24, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining subset of components of an optical characteristic of pa...
Patent number
11,561,478
Issue date
Jan 24, 2023
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and lithographic apparatus comprising said projec...
Patent number
11,550,227
Issue date
Jan 10, 2023
ASML Netherlands B.V.
Marinus Engelbertus Cornelis Mutsaers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,543,755
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Takehiro Toyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tunable illuminator for lithography systems
Patent number
11,543,753
Issue date
Jan 3, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ken-Hsien Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduction or elimination of pattern placement error in metrology me...
Patent number
11,537,043
Issue date
Dec 27, 2022
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Control apparatus and control method, exposure apparatus and exposu...
Patent number
11,537,051
Issue date
Dec 27, 2022
Nikon Corporation
Satoshi Yashiki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography system with diffraction optics
Patent number
11,520,235
Issue date
Dec 6, 2022
Kenneth Carlisle Johnson
G02 - OPTICS
Information
Patent Grant
Optical element driving mechanism
Patent number
11,520,244
Issue date
Dec 6, 2022
TDK TAIWAN CORP.
Fu-Yuan Wu
G11 - INFORMATION STORAGE
Information
Patent Grant
Non-telecentric light guide elements
Patent number
11,520,236
Issue date
Dec 6, 2022
Waymo LLC
James Dunphy
G02 - OPTICS
Information
Patent Grant
Prism-mask for angled patterning applications
Patent number
11,506,982
Issue date
Nov 22, 2022
Intel Corporation
Vahidreza Parichehreh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic method and lithographic apparatus
Patent number
11,493,851
Issue date
Nov 8, 2022
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of and apparatus for in-situ repair of reflective optic
Patent number
11,474,440
Issue date
Oct 18, 2022
ASML Netherlands B.V.
Alexander I. Ershov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
Patent number
11,467,501
Issue date
Oct 11, 2022
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
Method for adusting a first element of a lithography apparatus towa...
Patent number
11,460,780
Issue date
Oct 4, 2022
Carl Zeiss SMT GmbH
Boaz Pnini
G02 - OPTICS
Information
Patent Grant
Optical patterning systems and methods
Patent number
11,448,965
Issue date
Sep 20, 2022
Board of Regents, The University of Texas System
Yuebing Zheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical system, exposure apparatus, and article manufa...
Patent number
11,448,969
Issue date
Sep 20, 2022
Canon Kabushiki Kaisha
Michio Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source supply system for lithographic tools
Patent number
11,435,669
Issue date
Sep 6, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
WAVEFRONT OPTIMIZATION FOR TUNING SCANNER BASED ON PERFORMANCE MATC...
Publication number
20230161264
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20230161274
Publication date
May 25, 2023
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask Synthesis Integrating Mask Fabrication Effects and Wafer Litho...
Publication number
20230152683
Publication date
May 18, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE STABILIZATION FOR DIGITAL LITHOGRAPHY
Publication number
20230152712
Publication date
May 18, 2023
Thomas L. LAIDIG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES USING MOIRÉ PATTERNS
Publication number
20230152715
Publication date
May 18, 2023
Samsung Electronics Co., Ltd.
Woohyeok Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV COLLECTOR
Publication number
20230146235
Publication date
May 11, 2023
Carl Zeiss SMT GMBH
Valentin Jonatan Bolsinger
G02 - OPTICS
Information
Patent Application
A PROJECTION OBJECTIVE INCLUDING AN OPTICAL DEVICE
Publication number
20230142187
Publication date
May 11, 2023
Carl Zeiss SMT GMBH
Johannes Lippert
G02 - OPTICS
Information
Patent Application
METHOD FOR MEASURING A SUBSTRATE FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20230136478
Publication date
May 4, 2023
Carl Zeiss SMT GMBH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIFUNCTIONAL LITHOGRAPHY DEVICE
Publication number
20230129163
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR REPRODUCING A TARGET WAVEFRONT OF AN IMAGING OPTICAL PRO...
Publication number
20230130187
Publication date
Apr 27, 2023
Carl Zeiss SMT GMBH
Lukas Fischer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM WITH AN APERTURE STOP
Publication number
20230123115
Publication date
Apr 20, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Correction and compensation method in semiconductor manufacturing p...
Publication number
20230123680
Publication date
Apr 20, 2023
United Semiconductor (Xiamen) Co., Ltd.
XIONGWU HE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK FABRICATION EFFECTS IN THREE-DIMENSIONAL MASK SIMULATIONS USIN...
Publication number
20230104510
Publication date
Apr 6, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REDUCTION OR ELIMINATION OF PATTERN PLACEMENT ERROR IN METROLOGY ME...
Publication number
20230099105
Publication date
Mar 30, 2023
KLA-Tencor Corporation
Yoel Feler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Non-Telecentric Light Guide Elements
Publication number
20230099679
Publication date
Mar 30, 2023
WAYMO LLC
James Dunphy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHY SYSTEM INCLUDING SELECTIVE LIGHT ARRAY
Publication number
20230092166
Publication date
Mar 23, 2023
HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC
Barbara Diane Young
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MIRROR, IN PARTICULAR FOR MICROLITHOGRAPHY
Publication number
20230088791
Publication date
Mar 23, 2023
Carl Zeiss SMT GMBH
Jan HORN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHODS OF TUNING A MODEL FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...
Publication number
20230084130
Publication date
Mar 16, 2023
ASML NETHERLANDS B.V.
Mhamed AKHSSAY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK CORNER ROUNDING EFFECTS IN THREE-DIMENSIONAL MASK SIMULATIONS...
Publication number
20230079453
Publication date
Mar 16, 2023
Synopsys, Inc.
Peng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNIFICATION ADJUSTABLE PROJECTION SYSTEM USING DEFORMABLE LENS PL...
Publication number
20230077090
Publication date
Mar 9, 2023
Corning Incorporated
Robert Dennis Grejda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIG...
Publication number
20230071131
Publication date
Mar 9, 2023
Samsung Electronics Co., Ltd.
Hoseok SONG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
An Optical Effect Device
Publication number
20230073096
Publication date
Mar 9, 2023
CCL SECURE PTY LTD
Karlo Ivan Jolic
B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information
Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230051439
Publication date
Feb 16, 2023
Carl Zeiss SMT GMBH
Oliver Herbst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR CORRECTING A TELECENTRICITY ERROR OF AN IMAGI...
Publication number
20230050291
Publication date
Feb 16, 2023
Carl Zeiss SMT GMBH
Susanne Toepfer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230047921
Publication date
Feb 16, 2023
Carl Zeiss SMT GMBH
Michel Aliman
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
DATA INSPECTION FOR DIGITAL LITHOGRAPHY FOR HVM USING OFFLINE AND I...
Publication number
20230042334
Publication date
Feb 9, 2023
Applied Materials, Inc.
Chung-Shin KANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
Publication number
20230024028
Publication date
Jan 26, 2023
Nikon Corporation
Hideki Komatsuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD, DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230028288
Publication date
Jan 26, 2023
Carl Zeiss SMT GMBH
Sönke RHEIN
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
UV Lithography System
Publication number
20230011685
Publication date
Jan 12, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROSCOPIC SYSTEM FOR TESTING STRUCTURES AND DEFECTS ON EUV LITHOG...
Publication number
20220392660
Publication date
Dec 8, 2022
RI Research Instruments GmbH
Rainer LEBERT
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING