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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/702
Reflective illumination
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Patents Grants
last 30 patents
Information
Patent Grant
Laser interference fringe control for higher EUV light source and E...
Patent number
11,960,210
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet lithography device and method of operating extr...
Patent number
11,960,212
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Hoduk Cho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle processing system
Patent number
11,940,724
Issue date
Mar 26, 2024
Applied Materials, Inc.
Sanjay Bhat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical objective for operation in EUV spectral region
Patent number
11,934,105
Issue date
Mar 19, 2024
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
Patent number
11,934,104
Issue date
Mar 19, 2024
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
Photolithography mask and photolithography system comprising said p...
Patent number
11,934,091
Issue date
Mar 19, 2024
TECHNOLOGIES DIGITHO INC.
Richard Beaudry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ion exposure method and apparatus
Patent number
11,915,942
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data inspection for digital lithography for HVM using offline and i...
Patent number
11,914,305
Issue date
Feb 27, 2024
Applied Materials, Inc.
Chung-Shin Kang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and projection lens with setting of the...
Patent number
11,906,904
Issue date
Feb 20, 2024
Carl Zeiss SMT GmbH
Toralf Gruner
G02 - OPTICS
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,899,379
Issue date
Feb 13, 2024
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography projection objective
Patent number
11,899,181
Issue date
Feb 13, 2024
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yinzhang Guo
G02 - OPTICS
Information
Patent Grant
Optical objective for operation in EUV spectral region
Patent number
11,899,371
Issue date
Feb 13, 2024
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
Controlling light source wavelengths for selectable phase shifts be...
Patent number
11,899,198
Issue date
Feb 13, 2024
Applied Materials, Inc.
Thomas L. Laidig
G02 - OPTICS
Information
Patent Grant
Method and system for nanoscale data recording
Patent number
11,886,123
Issue date
Jan 30, 2024
Franklin Mark Schellenberg
G11 - INFORMATION STORAGE
Information
Patent Grant
Photolithography system including selective light array
Patent number
11,880,139
Issue date
Jan 23, 2024
Honeywell Federal Manufacturing & Technologies, LLC
Barbara Diane Young
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring a substrate for semiconductor lithography
Patent number
11,880,145
Issue date
Jan 23, 2024
Carl Zeiss SMT GmbH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Non-telecentric light guide elements
Patent number
11,868,050
Issue date
Jan 9, 2024
Waymo LLC
James Dunphy
G02 - OPTICS
Information
Patent Grant
Programmable nanolithography mask
Patent number
11,868,051
Issue date
Jan 9, 2024
Massachusetts Institute of Technology
Aik Jun Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multifunctional lithography device
Patent number
11,868,055
Issue date
Jan 9, 2024
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint method, imprint apparatus, and film formation apparatus
Patent number
11,852,985
Issue date
Dec 26, 2023
Kioxia Corporation
Takeshi Higuchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Grating structure, manufacturing method thereof and display device
Patent number
11,828,959
Issue date
Nov 28, 2023
BOE Technology Group Co., Ltd.
Wusheng Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
Patent number
11,809,085
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Hans Michael Stiepan
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Radiation source supply system for lithographic tools
Patent number
11,809,084
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology system for examining objects with EUV measurement light
Patent number
11,796,926
Issue date
Oct 24, 2023
Carl Zeiss SMT GmbH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Facet mirror for an illumination optical unit of a projection expos...
Patent number
11,789,367
Issue date
Oct 17, 2023
Carl Zeiss SMT GmbH
Willi Anderl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology device and detection apparatus therefor
Patent number
11,782,351
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of controlling a position of a first object relative to a se...
Patent number
11,774,865
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Thijs Adriaan Cornelis Van Keulen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spin-on compositions comprising an inorganic oxide component and an...
Patent number
11,767,398
Issue date
Sep 26, 2023
Merck Patent GmbH
M. Dalil Rahman
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for producing an aperture array for a microlens array
Patent number
11,762,128
Issue date
Sep 19, 2023
HELLA GMBH & CO. KGAA
William Castellon Rivera
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE DEVICE AND METHOD
Publication number
20240126177
Publication date
Apr 18, 2024
Chun-Jung Chiu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPATIAL LIGHT MODULATION UNIT AND EXPOSURE APPARATUS
Publication number
20240126176
Publication date
Apr 18, 2024
Nikon Corporation
Yasuhito KUBOTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20240126178
Publication date
Apr 18, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...
Publication number
20240111216
Publication date
Apr 4, 2024
Carl Zeiss SMT GMBH
Dirk EHM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMAGING OPTICAL UNIT
Publication number
20240103382
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Hans-Jürgen Rostalski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS, METHOD FOR SETTING A TARGET DEFORMATION, AND LIT...
Publication number
20240103381
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Klaus Gwosch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Non-Telecentric Light Guide Elements
Publication number
20240103380
Publication date
Mar 28, 2024
WAYMO LLC
James Dunphy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING OPTICAL UNIT
Publication number
20240094637
Publication date
Mar 21, 2024
Carl Zeiss SMT GMBH
Hans-Jürgen Rostalski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20240094648
Publication date
Mar 21, 2024
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATTENUATED PHASE SHIFT MASK FOR TALBOT LITHOGRAPHY
Publication number
20240094623
Publication date
Mar 21, 2024
META PLATFORMS, INC.
Cheng Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID P...
Publication number
20240085776
Publication date
Mar 14, 2024
TECHNOLOGIES DIGITHO INC.
Richard BEAUDRY
G01 - MEASURING TESTING
Information
Patent Application
Method for Operating an Optical Component, and Optical Component
Publication number
20240085799
Publication date
Mar 14, 2024
ROBERT BOSCH GmbH
Ralf Noltemeyer
G02 - OPTICS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
Publication number
20240085800
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
Thilo Pollak
G02 - OPTICS
Information
Patent Application
Microelectromechanical Apparatus with Heating Element
Publication number
20240085661
Publication date
Mar 14, 2024
ROBERT BOSCH GmbH
Ralf Noltemeyer
G02 - OPTICS
Information
Patent Application
MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING
Publication number
20240077803
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION CORRECTION APPARATUS
Publication number
20240069443
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Donghyeong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PNEUMATIC CONTROLLED FLEXURE SYSTEM FOR STABILIZING A PROJECTION DE...
Publication number
20240069452
Publication date
Feb 29, 2024
Applied Materials, Inc.
Assaf KIDRON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH-SPEED NANOPATTERNING METHOD AND APPARATUS OF TWO-COLOR SUPER-R...
Publication number
20240061343
Publication date
Feb 22, 2024
Foundation of Soongsil University-Industry Cooperation
Dong-Ryoung LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK
Publication number
20240053685
Publication date
Feb 15, 2024
SEMES CO., LTD.
Youngdae Chung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH-PERFORMANCE EUV MICROSCOPE DEVICE WITH FREE-FORM ILLUMINATION...
Publication number
20240045338
Publication date
Feb 8, 2024
ESOL Inc.
Dong Gun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PRODUCING AN OPTICAL ELEMENT FOR A LITHOGRAPHY APPARATUS
Publication number
20240025003
Publication date
Jan 25, 2024
Carl Zeiss SMT GMBH
Conrad Wolke
B24 - GRINDING POLISHING
Information
Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240027920
Publication date
Jan 25, 2024
Gigaphoton Inc.
Yusuke HOSHINO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20240027921
Publication date
Jan 25, 2024
Canon Kabushiki Kaisha
TOSHIKI IWAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20240012334
Publication date
Jan 11, 2024
Carl Zeiss SMT GMBH
Markus Raab
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...
Publication number
20240004184
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Luc Roger Simonne HASPESLAGH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR DETERMINING MASK PATTERN AND TRAINING MACHINE LEARNING M...
Publication number
20240004305
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Jun TAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTROLLING LIGHT SOURCE WAVELENGTHS FOR SELECTABLE PHASE SHIFTS BE...
Publication number
20230408807
Publication date
Dec 21, 2023
Applied Materials, Inc.
Thomas L. Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND WIRING PATTERN FORMING METHOD
Publication number
20230400773
Publication date
Dec 14, 2023
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SWAPPING TOOL
Publication number
20230400772
Publication date
Dec 14, 2023
Carl Zeiss SMT GMBH
Eugen Doetzel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND METHOD OF OPERATING EXTR...
Publication number
20230393484
Publication date
Dec 7, 2023
Samsung Electronics Co., Ltd.
Hoduk CHO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY