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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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Reflective illumination
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Patents Grants
last 30 patents
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Patent Grant
Grating structure, manufacturing method thereof and display device
Patent number
11,828,959
Issue date
Nov 28, 2023
BOE Technology Group Co., Ltd.
Wusheng Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
Patent number
11,809,085
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Hans Michael Stiepan
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Radiation source supply system for lithographic tools
Patent number
11,809,084
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology system for examining objects with EUV measurement light
Patent number
11,796,926
Issue date
Oct 24, 2023
Carl Zeiss SMT GmbH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Facet mirror for an illumination optical unit of a projection expos...
Patent number
11,789,367
Issue date
Oct 17, 2023
Carl Zeiss SMT GmbH
Willi Anderl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology device and detection apparatus therefor
Patent number
11,782,351
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of controlling a position of a first object relative to a se...
Patent number
11,774,865
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Thijs Adriaan Cornelis Van Keulen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spin-on compositions comprising an inorganic oxide component and an...
Patent number
11,767,398
Issue date
Sep 26, 2023
Merck Patent GmbH
M. Dalil Rahman
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for producing an aperture array for a microlens array
Patent number
11,762,128
Issue date
Sep 19, 2023
HELLA GMBH & CO. KGAA
William Castellon Rivera
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus for semiconductor lithography having...
Patent number
11,754,934
Issue date
Sep 12, 2023
Carl Zeiss SMT GmbH
Peter Nieland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining the combination of patterns to be applied to a substrat...
Patent number
11,747,738
Issue date
Sep 5, 2023
ASML Netherlands B.V.
Coen Adrianus Verschuren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for manufacturing s...
Patent number
11,747,737
Issue date
Sep 5, 2023
Canon Kabushiki Kaisha
Kazuhiro Takahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for performing a manufacturing process and associated appara...
Patent number
11,733,606
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Thomas Theeuwes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Collector mirror and apparatus for creating extreme ultraviolet lig...
Patent number
11,698,590
Issue date
Jul 11, 2023
Samsung Electronics Co., Ltd.
Hoseok Song
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for illuminating image points
Patent number
11,681,228
Issue date
Jun 20, 2023
EV Group E. Thallner GmbH
Bernhard Thallner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
Patent number
11,675,277
Issue date
Jun 13, 2023
KLA Corporation
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask, exposure apparatus, and method of fabricating three-dime...
Patent number
11,662,659
Issue date
May 30, 2023
Samsung Electronics Co., Ltd.
Donghwan Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-field control of a lithographic process and associated apparatus
Patent number
11,662,666
Issue date
May 30, 2023
ASML Netherlands B.V.
Rowin Meijerink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging arrangement with a piezoelectric device
Patent number
11,656,453
Issue date
May 23, 2023
Carl Zeiss SMT GmbH
Yim-Bun Patrick Kwan
G02 - OPTICS
Information
Patent Grant
Method of modeling a mask by taking into account of mask pattern ed...
Patent number
11,645,443
Issue date
May 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Jen Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure method, exposure apparatus, article manufacturing method,...
Patent number
11,640,119
Issue date
May 2, 2023
Canon Kabushiki Kaisha
Tetsuya Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microscopic system for testing structures and defects on EUV lithog...
Patent number
11,615,897
Issue date
Mar 28, 2023
RI Research Institute GmbH
Rainer Lebert
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Photomask inspection method and apparatus thereof
Patent number
11,614,684
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Wei Wen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure and lithographic apparatus
Patent number
11,614,689
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,599,032
Issue date
Mar 7, 2023
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser interference fringe control for higher EUV light source and E...
Patent number
11,592,749
Issue date
Feb 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift mask and manufacturing method of semiconductor device
Patent number
11,586,107
Issue date
Feb 21, 2023
Powerchip Semiconductor Manufacturing Corporation
Yi-Kai Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavefront optimization for tuning scanner based on performance matc...
Patent number
11,586,114
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing effects of lens heating and/or cooling in a lith...
Patent number
11,573,496
Issue date
Feb 7, 2023
ASML Netherlands B.V.
Nick Kant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND METHOD OF OPERATING EXTR...
Publication number
20230393484
Publication date
Dec 7, 2023
Samsung Electronics Co., Ltd.
Hoduk CHO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ASSEMBLY, METHOD FOR DEFORMING AN OPTICAL ELEMENT, AND PROJ...
Publication number
20230393485
Publication date
Dec 7, 2023
Carl Zeiss SMT GMBH
Tim Hoffmann
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHODS
Publication number
20230375940
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shang-Chieh Chien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
Publication number
20230367227
Publication date
Nov 16, 2023
Carl Zeiss SMT GMBH
Heiko Feldmann
G02 - OPTICS
Information
Patent Application
PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD
Publication number
20230359126
Publication date
Nov 9, 2023
V TECHNOLOGY CO., LTD.
Yoshiyuki ENOMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, ME...
Publication number
20230350311
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Thomas GROEZINGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR HEATING AN OPTICAL ELEMENT IN A MICROLITHO-GRAPHIC PROJE...
Publication number
20230350312
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Dirk Hellweg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY
Publication number
20230350307
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Stefan Xalter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230324648
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Andre Dirauf
G02 - OPTICS
Information
Patent Application
FILTER ASSEMBLY, IN PARTICULAR FOR A CONTROL LOOP FOR CONTROLLING T...
Publication number
20230324649
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Thomas Gorius
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...
Publication number
20230314953
Publication date
Oct 5, 2023
Applied Materials, Inc.
Chi-Ming TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230305290
Publication date
Sep 28, 2023
Carl Zeiss SMT GMBH
Hartmut Enkisch
G02 - OPTICS
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20230288817
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
Publication number
20230280658
Publication date
Sep 7, 2023
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING
Information
Patent Application
A METHOD AND APPARATUS FOR CALCULATING A SPATIAL MAP ASSOCIATED WIT...
Publication number
20230273527
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Mauritius Gerardus Elisabeth SCHNEIDERS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SPECTROMETRIC METROLOGY SYSTEMS BASED ON MULTIMODE INTERFERENCE AND...
Publication number
20230273531
Publication date
Aug 31, 2023
ASML Holding N.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MODELING A MASK BY TAKING INTO ACCOUNT OF MASK PATTERN ED...
Publication number
20230274063
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Chien-Jen Lai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR REFLECTING EUV RADIATION, OPTICA...
Publication number
20230266673
Publication date
Aug 24, 2023
Carl Zeiss SMT GMBH
Vitaliy SHKLOVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND MET...
Publication number
20230259024
Publication date
Aug 17, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Hsiung LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER INTERFERENCE FRINGE CONTROL FOR HIGHER EUV LIGHT SOURCE AND E...
Publication number
20230236511
Publication date
Jul 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chansyun David YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...
Publication number
20230228798
Publication date
Jul 20, 2023
Carl Zeiss SMT GMBH
Markus Raab
G01 - MEASURING TESTING
Information
Patent Application
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
Publication number
20230229091
Publication date
Jul 20, 2023
Carl Zeiss SMT GMBH
Matthias Manger
G01 - MEASURING TESTING
Information
Patent Application
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
Publication number
20230229092
Publication date
Jul 20, 2023
Carl Zeiss SMT GMBH
Matthias Manger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AN...
Publication number
20230229090
Publication date
Jul 20, 2023
ASML NETHERLANDS B.V.
Victor Sebastiaan Dolk
G02 - OPTICS
Information
Patent Application
PROGRAMMABLE NANOLITHOGRAPHY MASK
Publication number
20230221650
Publication date
Jul 13, 2023
Massachusetts Institute of Technology
Aik Jun Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF...
Publication number
20230221649
Publication date
Jul 13, 2023
Carl Zeiss SMT GMBH
Michael Patra
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AN...
Publication number
20230213868
Publication date
Jul 6, 2023
ASML Holding N.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LITHOGRAPHY APPARATUS
Publication number
20230215594
Publication date
Jul 6, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
Cheng Hung TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR LITHOGRAPHY SYSTEM
Publication number
20230194994
Publication date
Jun 22, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ASSEMBLY, METHOD FOR CONTROLLING AN OPTICAL ASSEMBLY, AND P...
Publication number
20230176486
Publication date
Jun 8, 2023
Carl Zeiss SMT GMBH
Markus Raab
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY