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B81C1/00468

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00468Releasing structures

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Patents Grantslast 30 patents

Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,274,037
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing partially freestanding two-dimensional crys...
- Patent number 11,033,862
- Issue date Jun 15, 2021
- Koninklijke Philips N.V.
- Kamal Asadi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication and self-aligned local functionalization of nanocups an...
- Patent number 11,002,908
- Issue date May 11, 2021
- California Institute of Technology
- Chieh-feng Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication and self-aligned local functionalization of nanocups an...
- Patent number 9,512,000
- Issue date Dec 6, 2016
- California Institute of Technology
- Chieh-feng Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device and microtube thereof
- Patent number 8,992,859
- Issue date Mar 31, 2015
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 8,585,910
- Issue date Nov 19, 2013
- Integrated Sensing Systems Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Packaging of microelectromechanical system devices
- Publication number 20240391762
- Publication date Nov 28, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Jae-Wung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF THREE-DIMENSIONAL STRUCTURES USING REFLOWED MOLDING
- Publication number 20170341932
- Publication date Nov 30, 2017
- HONEYWELL INTERNATIONAL INC.
- Grant Lodden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND MICROTUBE THEREOF
- Publication number 20140044900
- Publication date Feb 13, 2014
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20090220710
- Publication date Sep 3, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Releasing structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dual micro-electro mechanical system and manufacturing method thereof

Dual micro-electro mechanical system and manufacturing method thereof

Methods for forming a MEMS device layer on an active device layer a...

Method of manufacturing partially freestanding two-dimensional crys...

Fabrication and self-aligned local functionalization of nanocups an...

MEMS and method for forming the same

Fabrication and self-aligned local functionalization of nanocups an...

Microfluidic device and microtube thereof

Process of making a microtube and microfluidic devices formed there...

Patents Applicationslast 30 patents

Packaging of microelectromechanical system devices

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

FABRICATION OF THREE-DIMENSIONAL STRUCTURES USING REFLOWED MOLDING

MICROFLUIDIC DEVICE AND MICROTUBE THEREOF

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...