Releasing the movable structure without liquid etchant

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B81C1/00936

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00936Releasing the movable structure without liquid etchant

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,991
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,992
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,549,987
- Issue date Feb 4, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-Electro-Mechanical System (MEMS) structures and design struct...
- Patent number 9,981,842
- Issue date May 29, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) beam stru...
- Patent number 9,969,613
- Issue date May 15, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,938,137
- Issue date Apr 10, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,932,222
- Issue date Apr 3, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a cavity structure, for fabricating a cavity...
- Patent number 9,363,609
- Issue date Jun 7, 2016
- Infineon Technologies AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing electro-mechanical systems
- Patent number 9,139,425
- Issue date Sep 22, 2015
- SPTS Technologies Limited
- Daniel J. Vestyck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a cavity structure, for fabricating a cavity...
- Patent number 8,575,037
- Issue date Nov 5, 2013
- Infineon Technologies AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for forming moveable features on a composite subs...
- Patent number 7,785,913
- Issue date Aug 31, 2010
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anhydrous HF release of process for MEMS devices
- Patent number 7,365,016
- Issue date Apr 29, 2008
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical (MEM) device including a spring release brid...
- Patent number 7,273,762
- Issue date Sep 25, 2007
- FREESCALE SEMICONDUCTOR, INC.
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a gyroscope
- Patent number 7,225,524
- Issue date Jun 5, 2007
- Samsung Electronics Co., Ltd.
- Moon-chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Patent number 7,160,815
- Issue date Jan 9, 2007
- Advanced Technology Materials, Inc.
- Michael B. Korzenski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulation of MEMS devices using pillar-supported caps
- Patent number 7,153,717
- Issue date Dec 26, 2006
- IC Mechanics Inc.
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method for fabricating the same
- Patent number 7,074,635
- Issue date Jul 11, 2006
- Samsung Electro-Mechanics Co., Ltd.
- Jong Sam Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacture of MEMS structures in sealed cavity using dry-release M...
- Patent number 7,008,812
- Issue date Mar 7, 2006
- IC Mechanics, Inc.
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device capable of sensing dyn...
- Patent number 6,906,394
- Issue date Jun 14, 2005
- Denso Corporation
- Hiroshi Muto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction-free microstructure releasing method for fabricating MEMS...
- Patent number 6,806,205
- Issue date Oct 19, 2004
- Electronics and Telecommunications Research Institute
- Won-Ick Jang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device capable of sensing dyn...
- Patent number 6,753,201
- Issue date Jun 22, 2004
- Denso Corporation
- Hiroshi Muto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to remove metal and silicon oxide during gas-phase sacrifici...
- Patent number 6,534,413
- Issue date Mar 18, 2003
- Air Products and Chemicals, Inc.
- Eric Anthony Robertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor dynamic quantity sensor
- Patent number 6,423,563
- Issue date Jul 23, 2002
- Denso Corporation
- Tsuyoshi Fukada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma etch techniques for fabricating silicon structures from a su...
- Patent number 6,399,516
- Issue date Jun 4, 2002
- Massachusetts Institute of Technology
- Arturo A. Ayon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor dynamic quantity sensor
- Patent number 6,287,885
- Issue date Sep 11, 2001
- Denso Corporation
- Hiroshi Muto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dendritic material sacrificial layer micro-scale gap formation method
- Patent number 6,248,668
- Issue date Jun 19, 2001
- The Board of Trustees of the University of Illinois
- David Beebe
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20220388837
- Publication date Dec 8, 2022
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201503
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201502
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180179052
- Publication date Jun 28, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH OFFSET ELECTRODE
- Publication number 20180079640
- Publication date Mar 22, 2018
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Cavity Structure, for Fabricating a Cavity...
- Publication number 20140037116
- Publication date Feb 6, 2014
- INFINEON TECHNOLOGIES AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING ELECTRO-MECHANICAL SYSTEMS
- Publication number 20130334628
- Publication date Dec 19, 2013
- Primaxx, Inc.
- Daniel J. Vestyck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Cavity Structure, for Fabricating a Cavity...
- Publication number 20120161257
- Publication date Jun 28, 2012
- INFINEON TECHNOLOGIES AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method for forming moveable features on a composite subs...
- Publication number 20070196998
- Publication date Aug 23, 2007
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anhydrous HF release of process for MEMS devices
- Publication number 20060211163
- Publication date Sep 21, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical (MEM) device including a spring release brid...
- Publication number 20060096377
- Publication date May 11, 2006
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS structure and method for fabricating the same
- Publication number 20050280106
- Publication date Dec 22, 2005
- Samsung Electro-Mechanics Co., Ltd.
- Jong Sam Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for gyroscope using SMS wafer and gyroscope fabricated by th...
- Publication number 20050132798
- Publication date Jun 23, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Moon-chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Publication number 20050118813
- Publication date Jun 2, 2005
- Michael B. Korzenski
- B08 - CLEANING
Information Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
- Publication number 20050118832
- Publication date Jun 2, 2005
- Michael B. Korzenski
- B08 - CLEANING
Information Patent Application
Method of manufacturing semiconductor device capable of sensing dyn...
- Publication number 20030201506
- Publication date Oct 30, 2003
- Hiroshi Muto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging microelectromechanical systems
- Publication number 20030183916
- Publication date Oct 2, 2003
- John Heck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Encapsulation of MEMS devices using pillar-supported caps
- Publication number 20030153116
- Publication date Aug 14, 2003
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing semiconductor device capable of sensing dyn...
- Publication number 20020177252
- Publication date Nov 28, 2002
- Hiroshi Muto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Stiction-free microstructure releasing method for fabricating MEMS...
- Publication number 20020058422
- Publication date May 16, 2002
- Won-Ick Jang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing semiconductor dynamic quantity sensor
- Publication number 20010029060
- Publication date Oct 11, 2001
- DENSO Corporation
- Tsuyoshi Fukada
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Releasing the movable structure without liquid etchant

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical system (MEMS) structures and design struct...

Method and apparatus for reducing in-process and in-use stiction fo...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Method and apparatus for reducing in-process and in-use stiction fo...

MEMS and method for forming the same

Micro-Electro-Mechanical System (MEMS) structures and design struct...

Method for forming micro-electro-mechanical system (MEMS) beam stru...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Method for fabricating a cavity structure, for fabricating a cavity...

Process for manufacturing electro-mechanical systems

Method for fabricating a cavity structure, for fabricating a cavity...

System and method for forming moveable features on a composite subs...

Anhydrous HF release of process for MEMS devices

Microelectromechanical (MEM) device including a spring release brid...

Method for fabricating a gyroscope

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Encapsulation of MEMS devices using pillar-supported caps

MEMS structure and method for fabricating the same

Manufacture of MEMS structures in sealed cavity using dry-release M...

Method of manufacturing semiconductor device capable of sensing dyn...

Stiction-free microstructure releasing method for fabricating MEMS...

Method of manufacturing semiconductor device capable of sensing dyn...

Method to remove metal and silicon oxide during gas-phase sacrifici...

Method for manufacturing semiconductor dynamic quantity sensor

Plasma etch techniques for fabricating silicon structures from a su...

Method for manufacturing semiconductor dynamic quantity sensor

Dendritic material sacrificial layer micro-scale gap formation method

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A MICROSTRUCTURE

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MEMS DEVICE WITH OFFSET ELECTRODE

Method for Fabricating a Cavity Structure, for Fabricating a Cavity...

PROCESS FOR MANUFACTURING ELECTRO-MECHANICAL SYSTEMS

Method for Fabricating a Cavity Structure, for Fabricating a Cavity...

System and method for forming moveable features on a composite subs...

Anhydrous HF release of process for MEMS devices

Microelectromechanical (MEM) device including a spring release brid...

MEMS structure and method for fabricating the same

Method for gyroscope using SMS wafer and gyroscope fabricated by th...

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Removal of MEMS sacrificial layers using supercritical fluid/chemic...

Method of manufacturing semiconductor device capable of sensing dyn...

Packaging microelectromechanical systems

Encapsulation of MEMS devices using pillar-supported caps

Method of manufacturing semiconductor device capable of sensing dyn...

Stiction-free microstructure releasing method for fabricating MEMS...

Method for manufacturing semiconductor dynamic quantity sensor