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CPC
B24B37/32
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
Current Industry
B24B37/32
Retaining rings
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Polishing head with local wafer pressure
Patent number
11,986,923
Issue date
May 21, 2024
Applied Materials, Inc.
Andrew Nagengast
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, elastic membrane, polishing apparatus,...
Patent number
11,958,163
Issue date
Apr 16, 2024
Ebara Corporation
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Grant
Stepped retaining ring
Patent number
11,958,164
Issue date
Apr 16, 2024
Applied Materials, Inc.
Shaun Van Der Veen
B24 - GRINDING POLISHING
Information
Patent Grant
Dual membrane carrier head for chemical mechanical polishing
Patent number
11,945,073
Issue date
Apr 2, 2024
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing and method of polishing
Patent number
11,926,018
Issue date
Mar 12, 2024
Ebara Corporation
Masayoshi Ito
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing carrier head with piezoelectric pressure control
Patent number
11,890,715
Issue date
Feb 6, 2024
Applied Materials, Inc.
Brian J. Brown
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,883,922
Issue date
Jan 30, 2024
Ebara Corporation
Yuki Watanabe
B24 - GRINDING POLISHING
Information
Patent Grant
CMP polishing head design for improving removal rate uniformity
Patent number
11,865,666
Issue date
Jan 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien Hou
B24 - GRINDING POLISHING
Information
Patent Grant
Method of forming retaining ring with shaped surface
Patent number
11,850,703
Issue date
Dec 26, 2023
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization membrane
Patent number
11,850,702
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Ping Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing carrier head with multiple angular pressurizable zones
Patent number
11,780,049
Issue date
Oct 10, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head with segmented substrate chuck
Patent number
11,759,911
Issue date
Sep 19, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Method of making carrier head membrane with regions of different ro...
Patent number
11,738,421
Issue date
Aug 29, 2023
Applied Materials, Inc.
Young J. Paik
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
11,731,235
Issue date
Aug 22, 2023
Ebara Corporation
Shingo Togashi
B24 - GRINDING POLISHING
Information
Patent Grant
Method for selecting template assembly, method for polishing workpi...
Patent number
11,731,236
Issue date
Aug 22, 2023
Shin-Etsu Handotai Co., Ltd.
Kazuya Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Pivotable substrate retaining ring
Patent number
11,724,357
Issue date
Aug 15, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polish edge uniformity control with secondary fluid dispense
Patent number
11,724,355
Issue date
Aug 15, 2023
Applied Materials, Inc.
Justin H. Wong
B24 - GRINDING POLISHING
Information
Patent Grant
Retaining ring for use in chemical mechanical polishing and CMP app...
Patent number
11,717,933
Issue date
Aug 8, 2023
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Yong-Seok Ro
B24 - GRINDING POLISHING
Information
Patent Grant
Polyurethane polishing pad and composition for manufacturing the same
Patent number
11,717,932
Issue date
Aug 8, 2023
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Kwang-Bok Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Top ring for holding a substrate and substrate processing apparatus
Patent number
11,701,750
Issue date
Jul 18, 2023
Ebara Corporation
Yu Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-toothed, magnetically controlled retaining ring
Patent number
11,691,244
Issue date
Jul 4, 2023
Applied Materials, Inc.
Boguslaw A. Swedek
B24 - GRINDING POLISHING
Information
Patent Grant
Method and system for performing chemical mechanical polishing
Patent number
11,685,015
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Yuan Yang
B24 - GRINDING POLISHING
Information
Patent Grant
Retaining ring having inner surfaces with facets
Patent number
11,682,561
Issue date
Jun 20, 2023
Applied Materials, Inc.
Jeonghoon Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing head system and polishing apparatus
Patent number
11,673,222
Issue date
Jun 13, 2023
Ebara Corporation
Katsuhide Watanabe
B24 - GRINDING POLISHING
Information
Patent Grant
Retaining ring for CMP
Patent number
11,673,226
Issue date
Jun 13, 2023
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing method
Patent number
11,673,223
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chen Wei
B24 - GRINDING POLISHING
Information
Patent Grant
Dual loading retaining ring
Patent number
11,660,721
Issue date
May 30, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing jig assembly for a new or refurbished electrostatic chuck
Patent number
11,648,639
Issue date
May 16, 2023
Applied Materials, Inc.
William Ming-ye Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laminated membrane, substrate holder including laminated membrane,...
Patent number
11,638,980
Issue date
May 2, 2023
Ebara Corporation
Kenichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head retaining ring tilting moment control
Patent number
11,623,321
Issue date
Apr 11, 2023
Applied Materials, Inc.
Andrew Nagengast
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
CHEMICAL MECHANICAL POLISHING DEVICE AND POLISHING METHOD
Publication number
20240131655
Publication date
Apr 25, 2024
Powerchip Semiconductor Manufacturing Corporation
Ming-Hsiang Chen
B24 - GRINDING POLISHING
Information
Patent Application
RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRA...
Publication number
20240091902
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Sangyun LEE
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD, AND POLISHING TREATMENT DEVICE
Publication number
20240082983
Publication date
Mar 14, 2024
MICRO ENGINEERING, INC.
Akio KOMURA
B24 - GRINDING POLISHING
Information
Patent Application
RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD
Publication number
20240075584
Publication date
Mar 7, 2024
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD SYSTEM AND POLISHING METHOD
Publication number
20240066658
Publication date
Feb 29, 2024
EBARA CORPORATION
Osamu NABEYA
B24 - GRINDING POLISHING
Information
Patent Application
DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240042574
Publication date
Feb 8, 2024
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
MEMBRANE FOR CARRIER HEAD WITH SEGMENTED SUBSTRATE CHUCK
Publication number
20240017373
Publication date
Jan 18, 2024
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
RETAINER, TOP RING, AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240001506
Publication date
Jan 4, 2024
EBARA CORPORATION
Yu ISHII
B24 - GRINDING POLISHING
Information
Patent Application
HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240006204
Publication date
Jan 4, 2024
EBARA CORPORATION
Makoto KASHIWAGI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ZONES
Publication number
20230405758
Publication date
Dec 21, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC MONITORING OF CMP RETAINING RING
Publication number
20230390883
Publication date
Dec 7, 2023
Applied Materials, Inc.
Haoquan Fang
B24 - GRINDING POLISHING
Information
Patent Application
CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
Publication number
20230381917
Publication date
Nov 30, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
Carrier Head Membrane With Regions of Different Roughness
Publication number
20230356353
Publication date
Nov 9, 2023
Applied Materials, Inc.
Young J. Paik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
Publication number
20230356354
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
Publication number
20230356355
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISH EDGE UNIFORMITY CONTROL WITH SECONDARY FLUID DISPENSE
Publication number
20230339066
Publication date
Oct 26, 2023
Applied Materials, Inc.
Justin H. WONG
B24 - GRINDING POLISHING
Information
Patent Application
Retaining Ring Having Inner Surfaces with Facets
Publication number
20230290645
Publication date
Sep 14, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND SYSTEM FOR PERFORMING CHEMICAL MECHANICAL POLISHING
Publication number
20230278160
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Yuan YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
Publication number
20230264317
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chen WEI
B24 - GRINDING POLISHING
Information
Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230249313
Publication date
Aug 10, 2023
EBARA CORPORATION
Yu Ishii
B24 - GRINDING POLISHING
Information
Patent Application
LARGE AREA QUARTZ CRYSTAL WAFER LAPPING DEVICE AND A LAPPING METHOD...
Publication number
20230249312
Publication date
Aug 10, 2023
TANGSHAN GUOXIN JINGYUAN ELECTRONICS CO., LTD.
Jianmin XU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD WITH MEMBRANE POSITION CONTROL
Publication number
20230241744
Publication date
Aug 3, 2023
Applied Materials, Inc.
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
MEGA-SONIC VIBRATION ASSISTED CHEMICAL MECHANICAL PLANARIZATION
Publication number
20230219188
Publication date
Jul 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hao Kung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF RAISING POLISHING HEAD AFTER POLISHING OF WORKPIECE, POLI...
Publication number
20230191553
Publication date
Jun 22, 2023
EBARA CORPORATION
Yuichi Kato
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE
Publication number
20230182261
Publication date
Jun 15, 2023
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE POLISHING DEVICE
Publication number
20230182262
Publication date
Jun 15, 2023
EBARA CORPORATION
ERINA BABA
B08 - CLEANING
Information
Patent Application
CMP POLISHER HEAD OVER-ROTATION RESTRICTOR
Publication number
20230166382
Publication date
Jun 1, 2023
TEXAS INSTRUMENTS INCORPORATED
John Wirt Hornbrook
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20230158632
Publication date
May 25, 2023
EBARA CORPORATION
Hiroyuki SHINOZAKI
B24 - GRINDING POLISHING
Information
Patent Application
CMP Polishing Head Design for Improving Removal Rate Uniformity
Publication number
20230125195
Publication date
Apr 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Chien Hou
B24 - GRINDING POLISHING
Information
Patent Application
Retaining Ring for Wafer Polishing
Publication number
20230129597
Publication date
Apr 27, 2023
SCH POWER TECH CO., LTD.
Ho-Hsi Yeh
H01 - BASIC ELECTRIC ELEMENTS