Roughening a surface

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CPC
B81C2201/115

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/115Roughening a surface

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 12,054,382
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction system and method thereof
- Patent number 11,661,332
- Issue date May 30, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 11,655,138
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and manufacturing method thereof
- Patent number 11,505,454
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kang-Che Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a semiconductor on insulator type structur...
- Patent number 11,373,898
- Issue date Jun 28, 2022
- Soitec
- Daniel Delprat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,305,988
- Issue date Apr 19, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 11,192,775
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component especially for horology with surface topology and method...
- Patent number 10,981,783
- Issue date Apr 20, 2021
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
- Patent number 10,850,306
- Issue date Dec 1, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,841,711
- Issue date Nov 17, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and processes
- Patent number 10,450,189
- Issue date Oct 22, 2019
- Cirrus Logic, Inc.
- Tom Hanley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 10,273,141
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system device and method for manufacturing t...
- Patent number 10,131,533
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough MEMS surface
- Patent number 9,988,260
- Issue date Jun 5, 2018
- NXP USA, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon microphone with high-aspect-ratio corrugated diaphragm and...
- Patent number 9,930,453
- Issue date Mar 27, 2018
- GoerTek Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for stiction reduction in MEMS sensors
- Patent number 9,926,192
- Issue date Mar 27, 2018
- Invensense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for controlling surface roughness in MEMS structure
- Patent number 9,776,852
- Issue date Oct 3, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by deposition of nanoclusters
- Patent number 9,776,853
- Issue date Oct 3, 2017
- NXP USA, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Film induced interface roughening and method of producing the same
- Patent number 9,611,133
- Issue date Apr 4, 2017
- Invensense, Inc.
- Fang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by increasing surface roughness
- Patent number 9,550,664
- Issue date Jan 24, 2017
- NXP USA, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor devices and methods of forming thereof
- Patent number 9,458,009
- Issue date Oct 4, 2016
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by deposition of nanoclusters
- Patent number 9,290,380
- Issue date Mar 22, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20230264945
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20220135397
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...
- Publication number 20220063995
- Publication date Mar 3, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20210087056
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- KANG-CHE HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
- Publication number 20200262697
- Publication date Aug 20, 2020
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION
- Publication number 20200024125
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200021920
- Publication date Jan 16, 2020
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20190002273
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE AND METHOD FOR MANUFACTURING T...
- Publication number 20180334378
- Publication date Nov 22, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- SHANG-YING TSAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTs) AND RELATED...
- Publication number 20180243792
- Publication date Aug 30, 2018
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND PROCESSES
- Publication number 20180148315
- Publication date May 31, 2018
- Cirrus Logic International Semiconductor Ltd.
- Tom HANLEY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE
- Publication number 20170217756
- Publication date Aug 3, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
- Publication number 20160368763
- Publication date Dec 22, 2016
- ROBERT BOSCH GmbH
- Julian Gonska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20160167944
- Publication date Jun 16, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FILM INDUCED INTERFACE ROUGHENING AND METHOD OF PRODUCING THE SAME
- Publication number 20160115016
- Publication date Apr 28, 2016
- InvenSense, Inc.
- Fang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR STICTION REDUCTION IN MEMS SENSORS
- Publication number 20150353353
- Publication date Dec 10, 2015
- InvenSense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR STICTION REDUCTION IN MEMS SENSORS
- Publication number 20140353774
- Publication date Dec 4, 2014
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Devices and Methods of Forming Thereof
- Publication number 20140264651
- Publication date Sep 18, 2014
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE
- Publication number 20140264655
- Publication date Sep 18, 2014
- InvenSense, Inc.
- Kirt Reed WILLIAMS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20140167189
- Publication date Jun 19, 2014
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL TUNABLE FABRY-PEROT INTERFEROMETER, AN INTERMEDIATE...
- Publication number 20120050751
- Publication date Mar 1, 2012
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Martti Blomberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDED WAFER SUBSTRATE FOR USE IN MEMS STRUCTURES
- Publication number 20110260265
- Publication date Oct 27, 2011
- Icemos Technology Ltd.
- Robin Wilson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS
- Publication number 20110205615
- Publication date Aug 25, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE
- Publication number 20110186089
- Publication date Aug 4, 2011
- Chang Han Je
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT
- Publication number 20110063712
- Publication date Mar 17, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Manish Kothari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
- Publication number 20110051224
- Publication date Mar 3, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING NANO-SCALE PATTERNED SURFACES
- Publication number 20110006674
- Publication date Jan 13, 2011
- Yeda Research and Development Company Ltd. Israeli Company, At The Weizmann I...
- Ron NAAMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Roughening a surface

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Roughness selectivity for MEMS movement stiction reduction

Modification to rough polysilicon using ion implantation and silicide

Stiction reduction system and method thereof

Roughness selectivity for MEMS movement stiction reduction

MEMS apparatus with anti-stiction layer

MEMS structure and manufacturing method thereof

Method for manufacturing a semiconductor on insulator type structur...

Method for preparing silicon wafer with rough surface and silicon w...

Modification to rough polysilicon using ion implantation and silicide

Fence structure to prevent stiction in a MEMS motion sensor

Rough layer for better anti-stiction deposition

Method for preparing silicon wafer with rough surface and silicon w...

Component especially for horology with surface topology and method...

Capacitive micromachined ultrasonic transducers (CMUTs) and related...

MEMS microphone and method of manufacturing the same

Method of stiction prevention by patterned anti-stiction layer

Method of stiction prevention by patterned anti-stiction layer

Fence structure to prevent stiction in a MEMS motion sensor

MEMS devices and processes

Rough layer for better anti-stiction deposition

Microelectromechanical system device and method for manufacturing t...

Rough MEMS surface

Silicon microphone with high-aspect-ratio corrugated diaphragm and...

Methods for stiction reduction in MEMS sensors

Method for controlling surface roughness in MEMS structure

Reducing MEMS stiction by deposition of nanoclusters

Film induced interface roughening and method of producing the same

Reducing MEMS stiction by increasing surface roughness

Semiconductor devices and methods of forming thereof

Reducing MEMS stiction by deposition of nanoclusters

Patents Applicationslast 30 patents

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...

MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF

MEMS APPARATUS WITH ANTI-STICTION LAYER

STICTION REDUCTION SYSTEM AND METHOD THEREOF

ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

MICROELECTROMECHANICAL SYSTEM DEVICE AND METHOD FOR MANUFACTURING T...

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTs) AND RELATED...

MEMS DEVICES AND PROCESSES

METHOD FOR CONTROLLING SURFACE ROUGHNESS IN MEMS STRUCTURE

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

FILM INDUCED INTERFACE ROUGHENING AND METHOD OF PRODUCING THE SAME

METHODS FOR STICTION REDUCTION IN MEMS SENSORS

METHODS FOR STICTION REDUCTION IN MEMS SENSORS

Semiconductor Devices and Methods of Forming Thereof

SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

MICROMECHANICAL TUNABLE FABRY-PEROT INTERFEROMETER, AN INTERMEDIATE...

BONDED WAFER SUBSTRATE FOR USE IN MEMS STRUCTURES

MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS

APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE

DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...

METHOD FOR FABRICATING NANO-SCALE PATTERNED SURFACES