Sacrificial metal

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CPC
B81C2201/0107

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0107Sacrificial metal

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
- Patent number 11,656,128
- Issue date May 23, 2023
- Industrial Technology Research Institute
- Chin-Jou Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating MEMS device integrated with a semiconductor...
- Patent number 10,640,372
- Issue date May 5, 2020
- United Microelectronics Corp.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,991
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,992
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of multilayered carbon MEMS devices
- Patent number 10,570,010
- Issue date Feb 25, 2020
- National Technology & Engineering Solutions of Sandia, LLC
- Patrick Sean Finnegan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a microelectromechanical system d...
- Patent number 10,570,011
- Issue date Feb 25, 2020
- United States of America as represented by Secretary of the Navy
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,549,987
- Issue date Feb 4, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device integrated with a semiconductor integrated circuit and...
- Patent number 10,472,232
- Issue date Nov 12, 2019
- United Microelectronics Corp.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
PCB speaker and method for micromachining speaker diaphragm on PCB...
- Patent number 10,433,088
- Issue date Oct 1, 2019
- GoerTek Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-Electro-Mechanical System (MEMS) structures and design struct...
- Patent number 9,981,842
- Issue date May 29, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) beam stru...
- Patent number 9,969,613
- Issue date May 15, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,938,137
- Issue date Apr 10, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,932,222
- Issue date Apr 3, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducer, method of producing same, and ultrasonic pro...
- Patent number 9,873,137
- Issue date Jan 23, 2018
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Refractory seed metal for electroplated MEMS structures
- Patent number 9,845,235
- Issue date Dec 19, 2017
- General Electric Company
- Joleyn Eileen Brewer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating suspended MEMS structures
- Patent number 9,656,859
- Issue date May 23, 2017
- The United States of America, as represented by the Secretary of the Navy
- David J. Meyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structuring three-dimensional components with non-diffusing noble o...
- Patent number 9,090,975
- Issue date Jul 28, 2015
- Heraeus Precious Metals GmbH & Co. KG
- Heiko Specht
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Horizontal coplanar switches and methods of manufacture
- Patent number 8,878,315
- Issue date Nov 4, 2014
- International Business Machines Corporation
- Felix P. Anderson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Horizontal coplanar switches and methods of manufacture
- Patent number 8,535,966
- Issue date Sep 17, 2013
- International Business Machines Corporation
- Felix P. Anderson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for implementation of a switching function in a microscale...
- Patent number 8,420,427
- Issue date Apr 16, 2013
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing implant structures for contacting or electrost...
- Patent number 8,423,153
- Issue date Apr 16, 2013
- IMI Intelligent Medical Implants, AG
- Hans-Jurgen Tiedtke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature amorphous silicon sacrificial layer for controlled...
- Patent number 8,358,458
- Issue date Jan 22, 2013
- QUALCOMM MEMS Technologies, Inc.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having electrothermal actuation and release and method...
- Patent number 8,264,054
- Issue date Sep 11, 2012
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS sensor and MEMS sensor
- Patent number 8,174,085
- Issue date May 8, 2012
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing a MEMS element having cantilever and cavity on a subs...
- Patent number 8,097,483
- Issue date Jan 17, 2012
- EPCOS AG
- Robertus T. F. Van Schaijk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a hermetically sealed cavity
- Patent number 8,062,497
- Issue date Nov 22, 2011
- IMEC
- Ann Witvrouw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Orientation-dependent etching of deposited AlN for structural use a...
- Patent number 7,960,200
- Issue date Jun 14, 2011
- Maxim Integrated Products, Inc.
- Guillaume Bouche
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
- Publication number 20240405454
- Publication date Dec 5, 2024
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...
- Publication number 20230040320
- Publication date Feb 9, 2023
- Industrial Technology Research Institute
- Chin-Jou KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
- Publication number 20220155025
- Publication date May 19, 2022
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and System for Fabricating a Microelectromechanical System D...
- Publication number 20200071161
- Publication date Mar 5, 2020
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
- Publication number 20190390919
- Publication date Dec 26, 2019
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MEMS DEVICE INTEGRATED WITH A SEMICONDUCTOR...
- Publication number 20190345029
- Publication date Nov 14, 2019
- UNITED MICROELECTRONICS CORP.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201503
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201502
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180179052
- Publication date Jun 28, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20180162725
- Publication date Jun 14, 2018
- UNITED MICROELECTRONICS CORP.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PCB SPEAKER AND METHOD FOR MICROMACHINING SPEAKER DIAPHRAGM ON PCB...
- Publication number 20170265013
- Publication date Sep 14, 2017
- GOERTEK INC.
- Quanbo ZOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REFRACTORY SEED METAL FOR ELECTROPLATED MEMS STRUCTURES
- Publication number 20170066645
- Publication date Mar 9, 2017
- GENERAL ELECTRIC COMPANY
- Joleyn Eileen Brewer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating Suspended MEMS Structures
- Publication number 20160304340
- Publication date Oct 20, 2016
- THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETA...
- David J. Meyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20160264405
- Publication date Sep 15, 2016
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO IMPROVE CANTILEVER PROCESS PERFORMANCE
- Publication number 20160090292
- Publication date Mar 31, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- LIANG NI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20140308771
- Publication date Oct 16, 2014
- INTERNATIONAL BUSINESS MACHINES CORPORATION
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE ON GLASS
- Publication number 20140054261
- Publication date Feb 27, 2014
- Viswanadam Gautham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES
- Publication number 20140009379
- Publication date Jan 9, 2014
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Sandeep K. Giri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REMOVAL OF MOLYBDENUM
- Publication number 20130335383
- Publication date Dec 19, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Teruo Sasagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HORIZONTAL COPLANAR SWITCHES AND METHODS OF MANUFACTURE
- Publication number 20130153378
- Publication date Jun 20, 2013
- International Business Machines Corporation
- Felix P. ANDERSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS
- Publication number 20130057557
- Publication date Mar 7, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Ravindra Vaman Shenoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HORIZONTAL COPLANAR SWITCHES AND METHODS OF MANUFACTURE
- Publication number 20120025331
- Publication date Feb 2, 2012
- International Business Machines Corporation
- Felix P. ANDERSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURING THREE-DIMENSIONAL COMPONENTS WITH NON-DIFFUSING NOBLE O...
- Publication number 20110308957
- Publication date Dec 22, 2011
- W.C. Heraeus GmbH
- Heiko Specht
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
- Publication number 20110051224
- Publication date Mar 3, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBS...
- Publication number 20100264498
- Publication date Oct 21, 2010
- EPCOS AG
- Robertus T. F. Van Schaijk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of and Apparatus for Molding Structures Using Sacrificial M...
- Publication number 20100213068
- Publication date Aug 26, 2010
- Microfabrica Inc.
- Christopher A. Bang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS SENSOR AND MEMS SENSOR
- Publication number 20100096714
- Publication date Apr 22, 2010
- Rohm Co., Ltd.
- Goro NAKATANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONDITIONING OF MEMS DEVICE AND INSULATING LAYER THEREOF
- Publication number 20090315567
- Publication date Dec 24, 2009
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chen-Jean Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
- Publication number 20090305010
- Publication date Dec 10, 2009
- QUALCOMM MEMS TECHNOLOGIES, INC.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Sacrificial metal

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical infrared sensing device and fabrication meth...

Method for forming MEMS cavity structure

Methods for forming a MEMS device layer on an active device layer a...

Micro-electro-mechanical system (MEMS) structures and design struct...

Method for fabricating MEMS device integrated with a semiconductor...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Fabrication of multilayered carbon MEMS devices

Method and system for fabricating a microelectromechanical system d...

Micro-electro-mechanical system (MEMS) structures and design struct...

MEMS device integrated with a semiconductor integrated circuit and...

PCB speaker and method for micromachining speaker diaphragm on PCB...

Micro-Electro-Mechanical System (MEMS) structures and design struct...

Method for forming micro-electro-mechanical system (MEMS) beam stru...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Ultrasonic transducer, method of producing same, and ultrasonic pro...

Refractory seed metal for electroplated MEMS structures

Method for fabricating suspended MEMS structures

Structuring three-dimensional components with non-diffusing noble o...

Horizontal coplanar switches and methods of manufacture

Horizontal coplanar switches and methods of manufacture

Methods for implementation of a switching function in a microscale...

Method for producing implant structures for contacting or electrost...

Low temperature amorphous silicon sacrificial layer for controlled...

MEMS device having electrothermal actuation and release and method...

Method of manufacturing MEMS sensor and MEMS sensor

Manufacturing a MEMS element having cantilever and cavity on a subs...

Method for forming a hermetically sealed cavity

Orientation-dependent etching of deposited AlN for structural use a...

Patents Applicationslast 30 patents

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

Method and System for Fabricating a Microelectromechanical System D...

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

METHOD FOR FABRICATING MEMS DEVICE INTEGRATED WITH A SEMICONDUCTOR...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF

PCB SPEAKER AND METHOD FOR MICROMACHINING SPEAKER DIAPHRAGM ON PCB...

REFRACTORY SEED METAL FOR ELECTROPLATED MEMS STRUCTURES

Method for Fabricating Suspended MEMS Structures

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

METHOD TO IMPROVE CANTILEVER PROCESS PERFORMANCE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-DEVICE ON GLASS

CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES

REMOVAL OF MOLYBDENUM

HORIZONTAL COPLANAR SWITCHES AND METHODS OF MANUFACTURE

HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS

HORIZONTAL COPLANAR SWITCHES AND METHODS OF MANUFACTURE

STRUCTURING THREE-DIMENSIONAL COMPONENTS WITH NON-DIFFUSING NOBLE O...

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...

MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBS...

Methods of and Apparatus for Molding Structures Using Sacrificial M...

METHOD OF MANUFACTURING MEMS SENSOR AND MEMS SENSOR

ELECTRICAL CONDITIONING OF MEMS DEVICE AND INSULATING LAYER THEREOF

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...