Sacrificial polymer, ashing of organics

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B81C2201/0108

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0108Sacrificial polymer, ashing of organics

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfluidic module and method of fabricating the microfluidic module
- Patent number 12,128,401
- Issue date Oct 29, 2024
- UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Taesung Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically functional polymer microneedle array
- Patent number 12,070,307
- Issue date Aug 27, 2024
- International Business Machines Corporation
- Neil Ebejer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capless semiconductor package with a micro-electromechanical system...
- Patent number 11,897,763
- Issue date Feb 13, 2024
- STMicroelectronics, Inc.
- Jefferson Sismundo Talledo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 11,651,952
- Issue date May 16, 2023
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microfluidic device
- Patent number 11,052,388
- Issue date Jul 6, 2021
- Wageningen Universiteit
- Vittorio Saggiomo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Process for fabricating a device for detecting electromagnetic radi...
- Patent number 10,981,782
- Issue date Apr 20, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Jean-Jacques Yon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 10,916,418
- Issue date Feb 9, 2021
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of achieving universal interfacing using suspended and/or f...
- Patent number 10,807,864
- Issue date Oct 20, 2020
- The Regents of the University of Colorado, a Body Corporate
- Joseph J. Brown
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
- Patent number 10,508,020
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 10,497,558
- Issue date Dec 3, 2019
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS device and its fabrication
- Patent number 10,427,932
- Issue date Oct 1, 2019
- Texas Instruments Incorporated
- John Charles Ehmke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of encapsulating a microelectronic component
- Patent number 10,280,075
- Issue date May 7, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS double-layer suspension microstructure manufacturing method, a...
- Patent number 10,093,536
- Issue date Oct 9, 2018
- CSMC Technologies FAB2 Co., Ltd.
- Errong Jing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymer-based microfabricated thermal ground plane
- Patent number 9,921,004
- Issue date Mar 20, 2018
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for achieving good adhesion between dielectric and organic m...
- Patent number 9,908,774
- Issue date Mar 6, 2018
- Cavendish Kinetics, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS device and its fabrication
- Patent number 9,890,036
- Issue date Feb 13, 2018
- Texas Instruments Incorporated
- John Charles Ehmke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing thin-film support beam
- Patent number 9,862,595
- Issue date Jan 9, 2018
- CSMC Technologies FAB1 Co., Ltd.
- Errong Jing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of metal native oxide to control stress gradient and bending mo...
- Patent number 9,656,860
- Issue date May 23, 2017
- Texas Instruments Incorporated
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micro-structure
- Patent number 9,650,538
- Issue date May 16, 2017
- Shin-Etsu Chemical Co., Ltd.
- Hideto Kato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
- Patent number 9,556,015
- Issue date Jan 31, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a corrugated deflection diaphragm
- Patent number 9,550,023
- Issue date Jan 24, 2017
- MINIPUMPS, LLC
- Changlin Pang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Photosensitive sacrificial polymer with low residue
- Patent number 8,999,629
- Issue date Apr 7, 2015
- Georgia Tech Research Corporation
- Paul Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making microchannels on a substrate, and substrate inclu...
- Patent number 8,962,487
- Issue date Feb 24, 2015
- Universite des Sciences et Technologies de Lille
- Abdennour Abbas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymers, methods of use thereof, and methods of decomposition thereof
- Patent number 8,956,805
- Issue date Feb 17, 2015
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure
- Patent number 8,796,058
- Issue date Aug 5, 2014
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaging compatible wafer level capping of MEMS devices
- Patent number 8,765,512
- Issue date Jul 1, 2014
- Georgia Tech Research Corporation
- Paul A Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photosensitive sacrificial polymer with low residue
- Patent number 8,728,717
- Issue date May 20, 2014
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with reduced stress in the membrane and manufacturing m...
- Patent number 8,482,088
- Issue date Jul 9, 2013
- Wolfson Microelectronics plc
- Richard Ian Laming
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
- Publication number 20240124300
- Publication date Apr 18, 2024
- STMICROELECTRONICS, INC.
- Jefferson Sismundo TALLEDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
- Publication number 20210179423
- Publication date Jun 17, 2021
- STMICROELECTRONICS, INC.
- Jefferson Sismundo TALLEDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20210159069
- Publication date May 27, 2021
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATING A DEVICE FOR DETECTING ELECTROMAGNETIC RADI...
- Publication number 20200115225
- Publication date Apr 16, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Jacques YON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20200075316
- Publication date Mar 5, 2020
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20190267232
- Publication date Aug 29, 2019
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE SUBSTRATE INTEGRATED DEVICES
- Publication number 20190169020
- Publication date Jun 6, 2019
- Intel Corporation
- Aleksandar ALEKSOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF ACHIEVING UNIVERSAL INTERFACING USING SUSPENDED AND/OR F...
- Publication number 20180215613
- Publication date Aug 2, 2018
- The Regents of the University of Colorado, a Body Corporate
- JOSEPH J. BROWN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTURE MANUFACTURING METHOD, A...
- Publication number 20180134548
- Publication date May 17, 2018
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Errong JING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROOPTICAL DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTUR...
- Publication number 20170336624
- Publication date Nov 23, 2017
- SEIKO EPSON CORPORATION
- Masashi NAKAGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETICALLY SEALED MEMS DEVICE AND ITS FABRICATION
- Publication number 20170152136
- Publication date Jun 1, 2017
- TEXAS INSTRUMENTS INCORPORATED
- John Charles Ehmke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...
- Publication number 20170129767
- Publication date May 11, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USE OF METAL NATIVE OXIDE TO CONTROL STRESS GRADIENT AND BENDING MO...
- Publication number 20160368765
- Publication date Dec 22, 2016
- TEXAS INSTRUMENTS INCORPORATED
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Hollow Structure
- Publication number 20160280536
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM
- Publication number 20160229691
- Publication date Aug 11, 2016
- CSMC TECHNOLOGIES FABI CO., LTD.
- Errong JING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ACHIEVING GOOD ADHESION BETWEEN DIELECTRIC AND ORGANIC M...
- Publication number 20160221823
- Publication date Aug 4, 2016
- CAVENDISH KINETICS, INC.
- Mickael RENAULT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICRO-STRUCTURE
- Publication number 20140296380
- Publication date Oct 2, 2014
- Hideto KATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOSENSITIVE SACRIFICIAL POLYMER WITH LOW RESIDUE
- Publication number 20140272708
- Publication date Sep 18, 2014
- Georgia Tech Research Corporation
- PAUL KOHL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Display Apparatus Incorporating an Elevated Aperture Layer and Meth...
- Publication number 20140268274
- Publication date Sep 18, 2014
- Pixtronix, Inc.
- Timothy Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging Compatible Wafer Level Capping of MEMS Devices
- Publication number 20130341736
- Publication date Dec 26, 2013
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF
- Publication number 20130244181
- Publication date Sep 19, 2013
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC SUBSTRATE COMPRISING A LAYER OF BURIED ORGANIC MATE...
- Publication number 20130207281
- Publication date Aug 15, 2013
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Xavier BAILLIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20130105920
- Publication date May 2, 2013
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Fabricating Integrated Circuits
- Publication number 20130095638
- Publication date Apr 18, 2013
- SILVERBROOK RESEARCH PTY LTD
- Andrew Leon Vella
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Photosensitive Sacrificial Polymer with Low Residue
- Publication number 20130011784
- Publication date Jan 10, 2013
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING INERTIAL SENSOR
- Publication number 20120267825
- Publication date Oct 25, 2012
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Sung Jun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for making microchannels on a substrate, and substrate inclu...
- Publication number 20120043649
- Publication date Feb 23, 2012
- UNIVERSITE DES SCIENCES ET TECHNOLOGIES DE LILLE
- Abdennour Abbas
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Sacrificial polymer, ashing of organics

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfluidic module and method of fabricating the microfluidic module

Electrically functional polymer microneedle array

Capless semiconductor package with a micro-electromechanical system...

Using sacrificial polymer materials in semiconductor processing

Method for forming MEMS cavity structure

Methods for forming a MEMS device layer on an active device layer a...

Method of manufacturing a microfluidic device

Process for fabricating a device for detecting electromagnetic radi...

Using sacrificial polymer materials in semiconductor processing

Methods of achieving universal interfacing using suspended and/or f...

Substrate structure, semiconductor structure and method for fabrica...

Using sacrificial polymer materials in semiconductor processing

Hermetically sealed MEMS device and its fabrication

Method of encapsulating a microelectronic component

MEMS double-layer suspension microstructure manufacturing method, a...

Polymer-based microfabricated thermal ground plane

Method for achieving good adhesion between dielectric and organic m...

Hermetically sealed MEMS device and its fabrication

Method for manufacturing thin-film support beam

Use of metal native oxide to control stress gradient and bending mo...

Method for manufacturing micro-structure

Substrate structure, semiconductor structure and method for fabrica...

Method of making a corrugated deflection diaphragm

Photosensitive sacrificial polymer with low residue

Method for making microchannels on a substrate, and substrate inclu...

Polymers, methods of use thereof, and methods of decomposition thereof

Semiconductor structure

Packaging compatible wafer level capping of MEMS devices

Photosensitive sacrificial polymer with low residue

MEMS device with reduced stress in the membrane and manufacturing m...

Patents Applicationslast 30 patents

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

PROCESS FOR FABRICATING A DEVICE FOR DETECTING ELECTROMAGNETIC RADI...

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

PACKAGE SUBSTRATE INTEGRATED DEVICES

METHODS OF ACHIEVING UNIVERSAL INTERFACING USING SUSPENDED AND/OR F...

MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTURE MANUFACTURING METHOD, A...

ELECTROOPTICAL DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTUR...

HERMETICALLY SEALED MEMS DEVICE AND ITS FABRICATION

SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...

USE OF METAL NATIVE OXIDE TO CONTROL STRESS GRADIENT AND BENDING MO...

Method for Manufacturing Hollow Structure

METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM

METHOD FOR ACHIEVING GOOD ADHESION BETWEEN DIELECTRIC AND ORGANIC M...

METHOD FOR MANUFACTURING MICRO-STRUCTURE

PHOTOSENSITIVE SACRIFICIAL POLYMER WITH LOW RESIDUE

Display Apparatus Incorporating an Elevated Aperture Layer and Meth...

Packaging Compatible Wafer Level Capping of MEMS Devices

POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF

MICROELECTRONIC SUBSTRATE COMPRISING A LAYER OF BURIED ORGANIC MATE...

SEMICONDUCTOR STRUCTURE

Method of Fabricating Integrated Circuits

Photosensitive Sacrificial Polymer with Low Residue

METHOD OF MANUFACTURING INERTIAL SENSOR

Method for making microchannels on a substrate, and substrate inclu...