Scanning probe microscopy

Industry

CPC
G03F9/7061

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7061Scanning probe microscopy

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for determining the position of a target stru...
- Patent number 11,927,891
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Nitesh Pandey
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,650,495
- Issue date May 16, 2023
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,385,540
- Issue date Jul 12, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,976,672
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining an overlay error, method for manufacturing a...
- Patent number 10,935,568
- Issue date Mar 2, 2021
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Maarten Hubertus van Es
- G01 - MEASURING TESTING
Information Patent Grant
Alignment system and method
- Patent number 10,663,874
- Issue date May 26, 2020
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Hamed Sadeghian Marnani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,274,838
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a first article relative to a second article
- Patent number 10,025,207
- Issue date Jul 17, 2018
- Universitat Kassel
- Ivo Rangelow
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Measurement system and measurement method
- Patent number 10,002,743
- Issue date Jun 19, 2018
- Hitachi High-Technologies Corporation
- Shoji Hotta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for aligning a first article relative to a second article
- Patent number 7,946,029
- Issue date May 24, 2011
- Universitat Kassel
- Ivo Rangelow
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface shape measuring apparatus, surface measuring method, and ex...
- Patent number 7,497,111
- Issue date Mar 3, 2009
- Canon Kabushiki Kaisha
- Hideki Ina
- G01 - MEASURING TESTING
Information Patent Grant
Nanometer-precision tip-to-substrate control and pattern registrati...
- Patent number 7,474,410
- Issue date Jan 6, 2009
- Massachusetts Institute of Technology
- Euclid E. Moon
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe based lithographic alignment
- Patent number 6,955,767
- Issue date Oct 18, 2005
- Hewlett-Packard Development Company, L.P.
- Yong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Position detection device, apparatus using the same, exposure appar...
- Patent number 6,946,666
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Kenji Saito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detection device, apparatus using the same, exposure appar...
- Patent number 6,806,477
- Issue date Oct 19, 2004
- Canon Kabushiki Kaisha
- Kenji Saito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment method and exposure apparatus using the same
- Patent number 6,636,311
- Issue date Oct 21, 2003
- Canon Kabushiki Kaisha
- Hideki Ina
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment method, alignment apparatus, profiler, exposure apparatus...
- Patent number 6,559,924
- Issue date May 6, 2003
- Canon Kabushiki Kaisha
- Hideki Ina
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and positioning method
- Patent number 6,097,473
- Issue date Aug 1, 2000
- Nikon Corporation
- Kazuya Ota
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of detecting positional displacement between mask and wafer,...
- Patent number 5,508,527
- Issue date Apr 16, 1996
- Canon Kabushiki Kaisha
- Ryo Kuroda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for high-accuracy alignment
- Patent number 5,317,141
- Issue date May 31, 1994
- National Semiconductor Corporation
- Michael E. Thomas
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray mask containing a cantilevered tip for gap control and alignment
- Patent number 5,150,392
- Issue date Sep 22, 1992
- International Business Machines Corporation
- Fritz J. Hohn
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20220334469
- Publication date Oct 20, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND METROLOGY TOOL FOR DETERMINING INFORMATION ABOUT A TARGE...
- Publication number 20220283122
- Publication date Sep 8, 2022
- ASML NETHERLANDS B.V.
- Zili ZHOU
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Methods for Determining the Position of a Target Stru...
- Publication number 20210364936
- Publication date Nov 25, 2021
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20200233299
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING LITHOGRAPHY PROCESS IN SEMICONDUCT...
- Publication number 20190250522
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT SYSTEM AND MEASUREMENT METHOD
- Publication number 20170047197
- Publication date Feb 16, 2017
- Hitachi High-Technologies Corporation
- Shoji HOTTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS DETECTION APPARATUS FOR PROJECTION LITHOGRAPHY SYSTEM
- Publication number 20130027679
- Publication date Jan 31, 2013
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Jinlong LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for aligning surfaces
- Publication number 20120032377
- Publication date Feb 9, 2012
- Lars Montelius
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND...
- Publication number 20110219635
- Publication date Sep 15, 2011
- Universitat Kassel
- Ivo Rangelow
- G01 - MEASURING TESTING
Information Patent Application
A METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE A...
- Publication number 20070248892
- Publication date Oct 25, 2007
- Ivo Rangelow
- G01 - MEASURING TESTING
Information Patent Application
NANOMETER-PRECISION TIP-TO-SUBSTRATE CONTROL AND PATTERN REGISTRATI...
- Publication number 20070234786
- Publication date Oct 11, 2007
- Euclid E. Moon
- G01 - MEASURING TESTING
Information Patent Application
Surface shape measuring apparatus, surface measuring method, and ex...
- Publication number 20060076488
- Publication date Apr 13, 2006
- Hideki Ina
- G01 - MEASURING TESTING
Information Patent Application
Ultra-fine alignment system and method using acoustic-AFM interaction
- Publication number 20030003676
- Publication date Jan 2, 2003
- Brian Lee
- B82 - NANO-TECHNOLOGY
Information Patent Application
Scanning probe based lithographic alignment
- Publication number 20020170880
- Publication date Nov 21, 2002
- Yong Chen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithography method for forming semiconductor devices with sub-micro...
- Publication number 20020127865
- Publication date Sep 12, 2002
- MOTOROLA, INC.
- John George Maltabes
- B82 - NANO-TECHNOLOGY
Information Patent Application
Alignment method, alignment apparatus, profiler, exposure apparatus...
- Publication number 20020018207
- Publication date Feb 14, 2002
- Hideki Ina
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION DEVICE, APPARATUS USING THE SAME, EXPOSURE APPAR...
- Publication number 20010042838
- Publication date Nov 22, 2001
- KENJI SAITO
- B82 - NANO-TECHNOLOGY

Scanning probe microscopy

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and methods for determining the position of a target stru...

Apparatus and method for determining a position of an element on a...

Apparatus and method for determining a position of an element on a...

System and method for performing lithography process in semiconduct...

Method of determining an overlay error, method for manufacturing a...

Alignment system and method

System and method for performing lithography process in semiconduct...

Method of aligning a first article relative to a second article

Measurement system and measurement method

Apparatus for aligning a first article relative to a second article

Surface shape measuring apparatus, surface measuring method, and ex...

Nanometer-precision tip-to-substrate control and pattern registrati...

Scanning probe based lithographic alignment

Position detection device, apparatus using the same, exposure appar...

Position detection device, apparatus using the same, exposure appar...

Alignment method and exposure apparatus using the same

Alignment method, alignment apparatus, profiler, exposure apparatus...

Exposure apparatus and positioning method

Method of detecting positional displacement between mask and wafer,...

Apparatus and method for high-accuracy alignment

X-ray mask containing a cantilevered tip for gap control and alignment

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

METHOD AND METROLOGY TOOL FOR DETERMINING INFORMATION ABOUT A TARGE...

Apparatus and Methods for Determining the Position of a Target Stru...

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

SYSTEM AND METHOD FOR PERFORMING LITHOGRAPHY PROCESS IN SEMICONDUCT...

MEASUREMENT SYSTEM AND MEASUREMENT METHOD

FOCUS DETECTION APPARATUS FOR PROJECTION LITHOGRAPHY SYSTEM

Apparatus and method for aligning surfaces

METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND...

A METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE A...

NANOMETER-PRECISION TIP-TO-SUBSTRATE CONTROL AND PATTERN REGISTRATI...

Surface shape measuring apparatus, surface measuring method, and ex...

Ultra-fine alignment system and method using acoustic-AFM interaction

Scanning probe based lithographic alignment

Lithography method for forming semiconductor devices with sub-micro...

Alignment method, alignment apparatus, profiler, exposure apparatus...

POSITION DETECTION DEVICE, APPARATUS USING THE SAME, EXPOSURE APPAR...