See-saws

Industry

CPC
B81B2203/0181

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0181See-saws

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for lithography process
- Patent number 12,066,756
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal metamaterial for low power MEMS thermal control
- Patent number 12,055,927
- Issue date Aug 6, 2024
- Honeywell International Inc.
- Robert Compton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS accelerometric sensor having high accuracy and low sensitivity...
- Patent number 11,835,541
- Issue date Dec 5, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS bridge devices and methods of manufacture thereof
- Patent number 11,834,327
- Issue date Dec 5, 2023
- SOFANT TECHNOLOGIES LTD
- Nakul Haridas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor and inertial measurement unit
- Patent number 11,693,023
- Issue date Jul 4, 2023
- Seiko Epson Corporation
- Teruo Takizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,339,050
- Issue date May 24, 2022
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Linearized micromechanical sensor
- Patent number 11,326,969
- Issue date May 10, 2022
- Robert Bosch GmbH
- Stefan Zehringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 11,125,771
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
- Patent number 10,843,915
- Issue date Nov 24, 2020
- Infineon Dresdon GmbH & Co. KG
- Sebastian Pregl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with dual pendulous proof masses
- Patent number 10,759,656
- Issue date Sep 1, 2020
- Apple Inc.
- Christopher C. Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic device, and mobile body
- Patent number 10,663,481
- Issue date May 26, 2020
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active opening MEMS switch device
- Patent number 10,640,363
- Issue date May 5, 2020
- Analog Devices Global
- Padraig Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS accelerometric sensor having high accuracy and low sensitivity...
- Patent number 10,591,507
- Issue date Mar 17, 2020
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 10,589,985
- Issue date Mar 17, 2020
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with motion limiters
- Patent number 10,429,186
- Issue date Oct 1, 2019
- Murata Manufacturing Co., Ltd.
- Ville Ahtee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional element, electronic apparatus and mobile entity
- Patent number 10,421,661
- Issue date Sep 24, 2019
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-axis accelerometer with reduced stress sensitivity
- Patent number 10,393,770
- Issue date Aug 27, 2019
- Semiconductor Components Industries, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator
- Patent number 10,331,217
- Issue date Jun 25, 2019
- Korea Institute of Science and Technology
- Youngsu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor and method for producing a micromechanical s...
- Patent number 10,294,095
- Issue date May 21, 2019
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic device, and mobile body
- Patent number 10,228,386
- Issue date Mar 12, 2019
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Z axis accelerometer design with offset compensation
- Patent number 10,078,098
- Issue date Sep 18, 2018
- Analog Devices, Inc.
- Jianglong Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, manufacturing method of physical quantity...
- Patent number 10,035,697
- Issue date Jul 31, 2018
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 9,983,401
- Issue date May 29, 2018
- Intel Corporation
- Nicolas Abele
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rocker device for a micromechanical Z-sensor
- Patent number 9,970,957
- Issue date May 15, 2018
- Robert Bosch GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional element, physical quantity sensor, electronic apparatus...
- Patent number 9,828,235
- Issue date Nov 28, 2017
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by deposition of nanoclusters
- Patent number 9,776,853
- Issue date Oct 3, 2017
- NXP USA, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming microstructure and electronic device having move...
- Patent number 9,604,845
- Issue date Mar 28, 2017
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS electrostatic actuator device for RF varactor applications
- Patent number 9,573,801
- Issue date Feb 21, 2017
- Texas Instruments Incorporated
- Arun Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR LITHOGRAPHY PROCESS
- Publication number 20220404390
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20220242721
- Publication date Aug 4, 2022
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor And Inertial Measurement Unit
- Publication number 20220011339
- Publication date Jan 13, 2022
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210371270
- Publication date Dec 2, 2021
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Shanshan GU-STOPPEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WATERPROOF MEMS BUTTON DEVICE, INPUT DEVICE COMPRISING THE MEMS BUT...
- Publication number 20210095949
- Publication date Apr 1, 2021
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20200180944
- Publication date Jun 11, 2020
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND CIRCUITS INCLUDING SAME
- Publication number 20200102213
- Publication date Apr 2, 2020
- SOFANT TECHNOLOGIES LTD.
- Nakul HARIDAS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LINEARIZED MICROMECHANICAL SENSOR
- Publication number 20200088598
- Publication date Mar 19, 2020
- ROBERT BOSCH GmbH
- Stefan Zehringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
- Publication number 20190233276
- Publication date Aug 1, 2019
- Infineon Dresden GmbH & Co. KG
- Sebastian PREGL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY
- Publication number 20190154728
- Publication date May 23, 2019
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC OFFSET CORRECTION
- Publication number 20190025056
- Publication date Jan 24, 2019
- InvenSense, Inc.
- Kevin Hughes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS AND MOBILE ENTITY
- Publication number 20180050899
- Publication date Feb 22, 2018
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical Sensor and Method for Producing a Micromechanical S...
- Publication number 20170341927
- Publication date Nov 30, 2017
- ROBERT BOSCH GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY...
- Publication number 20170285064
- Publication date Oct 5, 2017
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE OPENING MEMS SWITCH DEVICE
- Publication number 20170225942
- Publication date Aug 10, 2017
- ANALOG DEVICES GLOBAL
- Padraig Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMAGNETICALLY ACTUATED MICROSHUTTER
- Publication number 20170168288
- Publication date Jun 15, 2017
- Intel Corporation
- ORPHEE CUGAT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD OF PHYSICAL QUANTITY...
- Publication number 20170088413
- Publication date Mar 30, 2017
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20160370576
- Publication date Dec 22, 2016
- Intel Corporation
- Nicolas Abele
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING SENSOR INTEGRATED PACKAGES AND STRUCTURES FORMED...
- Publication number 20160280535
- Publication date Sep 29, 2016
- Intel Corporation
- Kyu Oh Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY INCREASING SURFACE ROUGHNESS
- Publication number 20160176707
- Publication date Jun 23, 2016
- FREESCALE SEMICONDUCTOR, INC.
- RUBEN B. MONTEZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20160167944
- Publication date Jun 16, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20140167189
- Publication date Jun 19, 2014
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY INTRODUCTION OF A CARBON BARRIER
- Publication number 20140167188
- Publication date Jun 19, 2014
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTROSTATIC ACTUATOR
- Publication number 20140076697
- Publication date Mar 20, 2014
- TEXAS INSTRUMENTS INCORPORATED
- Arun K. Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMAGNETICALLY ACTUATED MICROSHUTTER
- Publication number 20130003155
- Publication date Jan 3, 2013
- Orphee Cugat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming a mirror mems device
- Publication number 20120285925
- Publication date Nov 15, 2012
- TEXAS INSTRUMENTS INCORPORATED
- Brett A. Mangrum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Methods for Manufacturing and Using Same
- Publication number 20120206785
- Publication date Aug 16, 2012
- Sason SOURANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE ALLOY PROCESS FOR MEMS AND NEMS
- Publication number 20120161573
- Publication date Jun 28, 2012
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ELEMENT MOBILE ALONG AT LEAST ONE AXIS OF ROTATION
- Publication number 20120140303
- Publication date Jun 7, 2012
- SERCALO Microtechnology Ltd.
- Cornel Marxer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for lithography process

Thermal metamaterial for low power MEMS thermal control

Waterproof MEMS button device, input device comprising the MEMS but...

Actuator device

MEMS accelerometric sensor having high accuracy and low sensitivity...

MEMS bridge devices and methods of manufacture thereof

Inertial sensor and inertial measurement unit

Actuator device

Linearized micromechanical sensor

Micromechanical z-inertial sensor

Forming an offset in an interdigitated capacitor of a microelectrom...

MEMS sensor with dual pendulous proof masses

Physical quantity sensor, electronic device, and mobile body

Active opening MEMS switch device

MEMS accelerometric sensor having high accuracy and low sensitivity...

Actuator device

Microelectromechanical device with motion limiters

Functional element, electronic apparatus and mobile entity

Multi-axis accelerometer with reduced stress sensitivity

Actuator

Micromechanical sensor and method for producing a micromechanical s...

Physical quantity sensor, electronic device, and mobile body

Z axis accelerometer design with offset compensation

Physical quantity sensor, manufacturing method of physical quantity...

MEMS device

Rocker device for a micromechanical Z-sensor

Functional element, physical quantity sensor, electronic apparatus...

Reducing MEMS stiction by deposition of nanoclusters

Methods of forming microstructure and electronic device having move...

MEMS electrostatic actuator device for RF varactor applications

Patents Applicationslast 30 patents

ACTUATOR DEVICE

METHOD FOR LITHOGRAPHY PROCESS

ACTUATOR DEVICE

Inertial Sensor And Inertial Measurement Unit

MEMS AND METHOD OF MANUFACTURING THE SAME

WATERPROOF MEMS BUTTON DEVICE, INPUT DEVICE COMPRISING THE MEMS BUT...

ACTUATOR DEVICE

MEMS DEVICES AND CIRCUITS INCLUDING SAME

LINEARIZED MICROMECHANICAL SENSOR

FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

ELECTROSTATIC OFFSET CORRECTION

FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS AND MOBILE ENTITY

Micromechanical Sensor and Method for Producing a Micromechanical S...

MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY...

ACTIVE OPENING MEMS SWITCH DEVICE

ELECTROMAGNETICALLY ACTUATED MICROSHUTTER

PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD OF PHYSICAL QUANTITY...

MEMS DEVICE

METHODS OF FORMING SENSOR INTEGRATED PACKAGES AND STRUCTURES FORMED...

REDUCING MEMS STICTION BY INCREASING SURFACE ROUGHNESS

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

REDUCING MEMS STICTION BY INTRODUCTION OF A CARBON BARRIER

MEMS ELECTROSTATIC ACTUATOR

ELECTROMAGNETICALLY ACTUATED MICROSHUTTER

Method for forming a mirror mems device

MEMS Device and Methods for Manufacturing and Using Same

SURFACE ALLOY PROCESS FOR MEMS AND NEMS

MICROMECHANICAL ELEMENT MOBILE ALONG AT LEAST ONE AXIS OF ROTATION