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CPC
B81C2201/0122
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0122
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
Patent number
11,572,271
Issue date
Feb 7, 2023
ams AG
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
Patent number
11,535,512
Issue date
Dec 27, 2022
ams AG
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
High aspect ratio MEMS devices and methods for forming the same
Patent number
8,828,772
Issue date
Sep 9, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Hao Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating micro-electromechanical switches on CMOS comp...
Patent number
6,635,506
Issue date
Oct 21, 2003
International Business Machines Corporation
Richard P. Volant
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method of a micromachine
Patent number
6,503,775
Issue date
Jan 7, 2003
Aisin Seiki Kabushiki Kaisha
Satoru Nomoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING AN ETCH STOP LAYER AND MEMS SENSOR COMPRIS...
Publication number
20210214216
Publication date
Jul 15, 2021
ams AG
Alessandro FAES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH ASPECT RATIO MEMS DEVICES AND METHODS FOR FORMING THE SAME
Publication number
20130230939
Publication date
Sep 5, 2013
Taiwan Semiconductor Manufacturing Co. Ltd.
Te-Hao LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical Fabrication Methods Incorporating Dielectric Materi...
Publication number
20090165295
Publication date
Jul 2, 2009
University of Southern California
Adam L. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical fabrication methods incorporating dielectric materi...
Publication number
20050194348
Publication date
Sep 8, 2005
University of Southern California
Adam L. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SWITCHES ON CMOS COMP...
Publication number
20030148550
Publication date
Aug 7, 2003
International Business Machines Corporation
Richard P. Volant
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Production method of a micromachine
Publication number
20020037601
Publication date
Mar 28, 2002
Aisin Seiki Kabushiki Kaisha
Satoru Nomoto
B81 - MICRO-STRUCTURAL TECHNOLOGY