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G01N21/9501
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PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/00
Investigating or analysing materials by the use of optical means
Current Industry
G01N21/9501
Semiconductor wafers
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device inspection method and semiconductor device ins...
Patent number
11,971,364
Issue date
Apr 30, 2024
Hamamatsu Photonics K.K.
Shinsuke Suzuki
G01 - MEASURING TESTING
Information
Patent Grant
Wafer processing system and rework method thereof
Patent number
11,971,365
Issue date
Apr 30, 2024
GlobalWafers Co., Ltd.
Shang-Chi Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imaging ellipsometry (IE)-based inspection method and method of fab...
Patent number
11,972,960
Issue date
Apr 30, 2024
Samsung Electronics Co., Ltd.
Myungjun Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Dark-field optical inspection device
Patent number
11,965,834
Issue date
Apr 23, 2024
UNITY SEMICONDUCTOR
Mayeul Durand De Gevigney
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and method for gray field imaging
Patent number
11,965,835
Issue date
Apr 23, 2024
KLA Corporation
Xiumei Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect examination on a semiconductor specimen
Patent number
11,961,221
Issue date
Apr 16, 2024
Applied Materials Israel Ltd.
Dror Shemesh
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for defect inspection
Patent number
11,953,448
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Tsun-Cheng Tang
G01 - MEASURING TESTING
Information
Patent Grant
Method for evaluating defective region of wafer
Patent number
11,955,386
Issue date
Apr 9, 2024
SK SILTRON CO., LTD.
Jae Hyeong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for coating a substrate with magnesium fluoride via atomic...
Patent number
11,952,659
Issue date
Apr 9, 2024
Corning Incorporated
Ming-Huang Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Examination device
Patent number
11,946,858
Issue date
Apr 2, 2024
HITACHI HIGH-TECH CORPORATION
Yoshihiro Satou
G01 - MEASURING TESTING
Information
Patent Grant
Method of evaluating silicon wafer, method of evaluating silicon wa...
Patent number
11,948,819
Issue date
Apr 2, 2024
Sumco Corporation
Keiichiro Mori
B24 - GRINDING POLISHING
Information
Patent Grant
Method for determining the thermal donor concentration of a semicon...
Patent number
11,946,869
Issue date
Apr 2, 2024
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Torbjørn Mehl
G01 - MEASURING TESTING
Information
Patent Grant
Method for producing nitride semiconductor laminate, silicon semico...
Patent number
11,946,874
Issue date
Apr 2, 2024
Sumitomo Chemical Company, Limited
Fumimasa Horikiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Second Harmonic Generation (SHG) optical inspection system designs
Patent number
11,946,863
Issue date
Apr 2, 2024
FemtoMetrix, Inc.
Ming Lei
G01 - MEASURING TESTING
Information
Patent Grant
Optical phase measurement system and method
Patent number
11,946,875
Issue date
Apr 2, 2024
Nova Ltd.
Gilad Barak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method for detecting a defective bonding interface in a...
Patent number
11,942,379
Issue date
Mar 26, 2024
UNITY SEMICONDUCTOR
Dario Alliata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect inspection apparatus, method for inspecting defect, and meth...
Patent number
11,940,391
Issue date
Mar 26, 2024
Shin-Etsu Chemical Co., Ltd.
Ryusei Terashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dark field microscope
Patent number
11,940,608
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask fingerprint using mask sensitive circuit
Patent number
11,934,094
Issue date
Mar 19, 2024
International Business Machines Corporation
Effendi Leobandung
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
User interface for judgment concerning quality classification of di...
Patent number
11,935,221
Issue date
Mar 19, 2024
AT&S (Chongqing) Company Limited
Amin Nickkholgh
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple reflectometry for measuring etch parameters
Patent number
11,927,543
Issue date
Mar 12, 2024
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Grant
Wafer pre-aligner and method of pre-aligning wafer
Patent number
11,929,277
Issue date
Mar 12, 2024
Kabushiki Kaisha Yaskawa Denki
John Charles Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
11,927,539
Issue date
Mar 12, 2024
Tokyo Electron Limited
Naoki Akiyama
G01 - MEASURING TESTING
Information
Patent Grant
Wafer detection method, device, apparatus, and storage medium
Patent number
11,928,808
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Deqing Qu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Layer detection for high aspect ratio etch control
Patent number
11,929,291
Issue date
Mar 12, 2024
Nova Ltd.
Gil Loewenthal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,923,220
Issue date
Mar 5, 2024
Tokyo Electron Limited
Naoyuki Okamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatuses and methods for determining wafer defects
Patent number
11,922,613
Issue date
Mar 5, 2024
Micron Technology, Inc.
Yutao Gong
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Workpiece inspection apparatus
Patent number
11,915,955
Issue date
Feb 27, 2024
TAKAOKA TOKO CO., LTD.
Mitsuhiro Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE TREATMENT SYSTEM INCLU...
Publication number
20240142389
Publication date
May 2, 2024
SEMES CO., LTD.
Jeong Hoon HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF EXTRACTING PROPERTIES OF A LAYER ON A WAFER
Publication number
20240136232
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Inkeun BAEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHASE RETRIEVAL
Publication number
20240133807
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Benny Kirshner
G01 - MEASURING TESTING
Information
Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
Publication number
20240133825
Publication date
Apr 25, 2024
KLA Corporation
Chunhai Wang
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
Publication number
20240125709
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Donggun Lee
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR EVALUATING SEMICONDUCTOR WAFER, METHOD FOR SELECTING SEM...
Publication number
20240128130
Publication date
Apr 18, 2024
Shin-Etsu Handotai Co., Ltd.
Junya SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Surface Inspection Device
Publication number
20240118223
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Katsuhiko KIMURA
G01 - MEASURING TESTING
Information
Patent Application
DEFECT DETECTION AND REMOVAL APPARATUS AND METHOD
Publication number
20240118222
Publication date
Apr 11, 2024
PlayNitride Display Co., Ltd.
Chang-Rong Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETECTING DEFECTS ON WAFERS, SYSTEM FOR DETECTING DEFECT...
Publication number
20240112323
Publication date
Apr 4, 2024
United Semiconductor (Xiamen) Co., Ltd.
Yu Peng Hong
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE TEST APPARATUS AND METHOD
Publication number
20240110879
Publication date
Apr 4, 2024
SEMES CO., LTD.
Gyunam PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION SYSTEM AND A METHOD OF USE THEREOF
Publication number
20240102169
Publication date
Mar 28, 2024
JNK TECH
Youngjin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTORESIST CHARACTERISTICS ANALYSIS METHOD AND CHARACTERISTICS ANA...
Publication number
20240102927
Publication date
Mar 28, 2024
FEMTO Deployments Inc.
Akira WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT INSPECTION DEVICE
Publication number
20240096667
Publication date
Mar 21, 2024
Hitachi High-Tech Corporation
Hiromichi YAMAKAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
Publication number
20240096598
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE DEFECT DETECTION VIA IMAGE ANALYTICS
Publication number
20240095899
Publication date
Mar 21, 2024
Applied Materials, Inc.
Yash Chhabra
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY
Publication number
20240094642
Publication date
Mar 21, 2024
KLA Corporation
Franz Zach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTIVE AND RETROSPECTIVE ENDPOINT DETECTION FOR AUTOMATED DELAYER...
Publication number
20240094142
Publication date
Mar 21, 2024
FEI Company
Sophia E. Weeks
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SEPARATION OF THE SECOND HARMONIC GENERATI...
Publication number
20240085345
Publication date
Mar 14, 2024
FemtoMetrix, Inc.
Timothy M. Wong
G02 - OPTICS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240087937
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Naoki Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RNA MOLECULES, METHODS OF PRODUCING CIRCULAR RNA, AND TREATMENT MET...
Publication number
20240078661
Publication date
Mar 7, 2024
Cornell University
Samie R. JAFFREY
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BROADBAND WAFER DEFECT DETECTION
Publication number
20240068957
Publication date
Feb 29, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Nai-Han CHENG
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR MANUFACTURING...
Publication number
20240071795
Publication date
Feb 29, 2024
Mitsubishi Electric Corporation
Motoki IINUMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPONENT INSPECTION
Publication number
20240068955
Publication date
Feb 29, 2024
Muehlbauer GmbH & Co. KG
Stefan Feigl
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
SYSTEM FOR OPTICAL INSPECTION OF A SUBSTRATE USING SAME OR DIFFEREN...
Publication number
20240068956
Publication date
Feb 29, 2024
Unity Semiconductor
Mayeul Durand de Gevigney
G01 - MEASURING TESTING
Information
Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
Publication number
20240060906
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Bart Jacobus Martinus TIEMERSMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FOCUS CONTROL METHOD FOR SPECTROSCOPIC MEASURING APPARATUS, INSPECT...
Publication number
20240060907
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Youngsun Choi
G02 - OPTICS
Information
Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
Publication number
20240061347
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Alexandru ONOSE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT INSPECTION DEVICE AND METHOD FOR INSPECTING DEFECT
Publication number
20240060904
Publication date
Feb 22, 2024
SAMSUNG DISPLAY CO., LTD.
Jeong Moon LEE
G01 - MEASURING TESTING
Information
Patent Application
FOCUS-LESS INSPECTION APPARATUS AND METHOD
Publication number
20240060908
Publication date
Feb 22, 2024
KOH YOUNG TECHNOLOGY INC.
Chan Kwon LEE
G01 - MEASURING TESTING
Information
Patent Application
SCATTEROMETRY OVERLAY METROLOGY WITH ORTHOGONAL FINE-PITCH SEGMENTA...
Publication number
20240053687
Publication date
Feb 15, 2024
KLA Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY