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G03F9/7092
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F9/00
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces
Current Industry
G03F9/7092
Signal processing
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Patents Grants
last 30 patents
Information
Patent Grant
Method for determining a center of a radiation spot, sensor and sta...
Patent number
11,982,948
Issue date
May 14, 2024
ASML Netherlands B.V.
Mihaita Popinciuc
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
11,940,740
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Alignment method and associated alignment and lithographic apparatuses
Patent number
11,927,892
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Bonding alignment marks at bonding interface
Patent number
11,876,049
Issue date
Jan 16, 2024
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calibrating alignment of wafer and lithography system
Patent number
11,854,854
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Jen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment sensor based on wavelength-scanning
Patent number
11,841,626
Issue date
Dec 12, 2023
ASML Holding N.V.
Muhsin Eralp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for enhancing alignment performance of lithograph...
Patent number
11,796,927
Issue date
Oct 24, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zhao Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Misalignment measuring apparatus and misalignment measuring method
Patent number
11,776,112
Issue date
Oct 3, 2023
Kioxia Corporation
Yuki Watanabe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Alignment method
Patent number
11,762,305
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Sergei Sokolov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing system, processing method, measurement apparatus, substr...
Patent number
11,726,412
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement apparatus, lithography apparatus and article manufactur...
Patent number
11,693,328
Issue date
Jul 4, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and method for measuring substrate height
Patent number
11,662,669
Issue date
May 30, 2023
ASML Netherlands B.V.
Andrey Valerievich Rogachevskiy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment mark evaluation method and alignment mark evaluation system
Patent number
11,586,118
Issue date
Feb 21, 2023
GHANGXIN MEMORY TECHNOLOGIES, INC.
Liyuan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology method and apparatus, substrate, lithographic system and...
Patent number
11,526,085
Issue date
Dec 13, 2022
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Adaptive alignment
Patent number
11,513,446
Issue date
Nov 29, 2022
ASML Holding N.V.
Greger Göte Andersson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Noise correction for alignment signal
Patent number
11,493,852
Issue date
Nov 8, 2022
ASML Holdings N.V.
Zahrasadat Dastouri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
Patent number
11,422,476
Issue date
Aug 23, 2022
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining a position of a feature
Patent number
11,392,044
Issue date
Jul 19, 2022
ASML Netherlands B.V.
Ralph Timotheus Huijgen
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
11,385,550
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for evaluating control strategies in a semiconductor manufac...
Patent number
11,372,338
Issue date
Jun 28, 2022
ASML Netherlands B.V.
Ivo Matteo Leonardus Weijden
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Position measurement apparatus, overlay inspection apparatus, posit...
Patent number
11,372,342
Issue date
Jun 28, 2022
Canon Kabushiki Kaisha
Toshiki Iwai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment apparatus, alignment method, lithography apparatus, and m...
Patent number
11,360,401
Issue date
Jun 14, 2022
Canon Kabushiki Kaisha
Shinichi Egashira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scan signal characterization diagnostics
Patent number
11,347,152
Issue date
May 31, 2022
ASML Netherlands B.V.
Cornelis Melchior Brouwer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for calculating electromagnetic scattering pr...
Patent number
11,347,151
Issue date
May 31, 2022
ASML Netherlands B.V.
Markus Gerardus Martinus Maria Van Kraaij
G01 - MEASURING TESTING
Information
Patent Grant
Position sensor
Patent number
11,333,985
Issue date
May 17, 2022
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Bonding alignment marks at bonding in interface
Patent number
11,289,422
Issue date
Mar 29, 2022
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Position detection apparatus, position detection method, lithograph...
Patent number
11,249,401
Issue date
Feb 15, 2022
Canon Kabushiki Kaisha
Genki Murayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining deformation
Patent number
11,181,836
Issue date
Nov 23, 2021
ASML Netherlands B.V.
Edo Maria Hulsebos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Detection apparatus detection method and lithography apparatus
Patent number
11,156,929
Issue date
Oct 26, 2021
Canon Kabushiki Kaisha
Tadaki Miyazaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
Patent number
11,150,565
Issue date
Oct 19, 2021
ASML Netherlands B.V.
Rene Marinus Gerardus Johan Queens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DATA FILTER FOR SCANNING METROLOGY
Publication number
20240069454
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Cristina CARESIO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE AC...
Publication number
20240061353
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Simon Hendrik Celine VAN GORP
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
Publication number
20240036484
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Timothy Dugan DAVIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEEP LEARNING BASED ADAPTIVE ALIGNMENT PRECISION METROLOGY FOR DIGI...
Publication number
20230408932
Publication date
Dec 21, 2023
Applied Materials, Inc.
Tamer COSKUN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20230359134
Publication date
Nov 9, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTUR...
Publication number
20230288823
Publication date
Sep 14, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT OF STITCHING ERROR USING SPLIT TARGETS
Publication number
20230281779
Publication date
Sep 7, 2023
KLA Corporation
Mark GHINOVKER
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
Publication number
20230259042
Publication date
Aug 17, 2023
ASML NETHERLANDS B.V.
Sarathi ROY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEIGHT MEASUREMENT METHOD AND HEIGHT MEASUREMENT SYSTEM
Publication number
20230244153
Publication date
Aug 3, 2023
ASML NETHERLANDS B.V.
Andrey Valerievich ROGACHEVSKIY
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETECTION APPARATUS, DETECTION METHOD, EXPOSURE APPARATUS AND ARTIC...
Publication number
20230229095
Publication date
Jul 20, 2023
Canon Kabushiki Kaisha
HIRONORI MAEDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GENERATING AN ALIGNMENT SIGNAL BASED ON LOCAL ALIGNMENT MARK DISTOR...
Publication number
20230176494
Publication date
Jun 8, 2023
ASML Holding N.V.
Zahrasadat DASTOURI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
Publication number
20230168595
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Edo Maria HULSEBOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR OPTIMIZING ACTUATOR FORCES
Publication number
20230127984
Publication date
Apr 27, 2023
Canon Kabushiki Kaisha
Nilabh K. Roy
B82 - NANO-TECHNOLOGY
Information
Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
Publication number
20230004097
Publication date
Jan 5, 2023
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT METHOD
Publication number
20220382175
Publication date
Dec 1, 2022
ASML NETHERLANDS B.V.
Sergei SOKOLOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MARK DETECTING APPARATUS, MARK LEARNING APPARATUS, SUBSTRATE PROCES...
Publication number
20220365454
Publication date
Nov 17, 2022
Canon Kabushiki Kaisha
Masashi Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20220342324
Publication date
Oct 27, 2022
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND DEVICE FOR ENHANCING ALIGNMENT PERFORMANCE OF LITHOGRAPH...
Publication number
20220308470
Publication date
Sep 29, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Zhao CHENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING A CENTER OF A RADIATION SPOT, SENSOR AND STA...
Publication number
20220308468
Publication date
Sep 29, 2022
ASML NETHERLANDS B.V.
Mihaita POPINCIUC
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING SUBSTRATE HEIGHT
Publication number
20220244651
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Andrey Valerievich ROGACHEVSKIY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BONDING ALIGNMENT MARKS AT BONDING INTERFACE
Publication number
20220173038
Publication date
Jun 2, 2022
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOISE CORRECTION FOR ALIGNMENT SIGNAL
Publication number
20220066334
Publication date
Mar 3, 2022
Zahrasadat DASTOURI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION MEASUREMENT APPARATUS, OVERLAY INSPECTION APPARATUS, POSIT...
Publication number
20210263432
Publication date
Aug 26, 2021
Canon Kabushiki Kaisha
Toshiki Iwai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING DEFORMATION
Publication number
20210149316
Publication date
May 20, 2021
ASML NETHERLANDS B.V.
Edo Maria HULSEBOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION SENSOR
Publication number
20210124276
Publication date
Apr 29, 2021
ASML NETHERLANDS B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, LITHOGRAPH...
Publication number
20210103226
Publication date
Apr 8, 2021
Canon Kabushiki Kaisha
Genki Murayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING ALIGNMENT MARKS AT BONDING INTERFACE
Publication number
20210072653
Publication date
Mar 11, 2021
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...
Publication number
20210018847
Publication date
Jan 21, 2021
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EVALUATING CONTROL STRATEGIES IN A SEMICONDUCTOR MANUFAC...
Publication number
20200401052
Publication date
Dec 24, 2020
ASML NETHERLANDS B.V.
Ivo Matteo Leonardus WEIJDEN
G01 - MEASURING TESTING
Information
Patent Application
Scan Signal Characterization Diagnostics
Publication number
20200401053
Publication date
Dec 24, 2020
ASML NETHERLANDS B.V.
Cornelis Melchior BROUWER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY