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B81B2203/0384

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

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Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor structure and method for forming the same
- Patent number 12,017,908
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual membrane transducer
- Patent number 11,905,167
- Issue date Feb 20, 2024
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interposer substrate, MEMS device and corresponding manufacturing m...
- Patent number 11,623,860
- Issue date Apr 11, 2023
- Robert Bosch GmbH
- Corinna Koepernik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 11,524,891
- Issue date Dec 13, 2022
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical device having inclined opti...
- Patent number 11,479,461
- Issue date Oct 25, 2022
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bionic SERS substrate with metal-based compound eye bowl structure...
- Patent number 11,203,523
- Issue date Dec 21, 2021
- Jiangnan University
- Gang Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protective wafer including inclined optical windows and device
- Patent number 10,996,461
- Issue date May 4, 2021
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 10,981,780
- Issue date Apr 20, 2021
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a cavity and a component having a cavity
- Patent number 10,840,107
- Issue date Nov 17, 2020
- Robert Bosch GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical displacement structure and method for contro...
- Patent number 10,752,492
- Issue date Aug 25, 2020
- Agiltron, Inc.
- Luzhong Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing optical components using functional elements
- Patent number 10,752,500
- Issue date Aug 25, 2020
- FRAUNHOFER-GESELLSCAFT ZUR FÖRDERUNG ANGEWANDTEN FORSCHUNG E.V.
- Hans Joachim Quenzer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical displacement structure and method for contro...
- Patent number 10,730,740
- Issue date Aug 4, 2020
- Agiltron, Inc.
- Luzhong Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a protective wafer including inclined opti...
- Patent number 10,591,721
- Issue date Mar 17, 2020
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS and/or NEMS structure comprising at le...
- Patent number 10,585,074
- Issue date Mar 10, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming micro-pipes on a substrate and a structure formed...
- Patent number 10,493,378
- Issue date Dec 3, 2019
- Imec VZW
- Zheng Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for semiconductor structure
- Patent number 10,427,935
- Issue date Oct 1, 2019
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a cavity and a component having a cavity
- Patent number 10,431,474
- Issue date Oct 1, 2019
- Robert Bosch GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-based component with at least one chamfer and its fabricati...
- Patent number 10,197,973
- Issue date Feb 5, 2019
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method for the same
- Patent number 10,112,825
- Issue date Oct 30, 2018
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with a reduced contact surface and its fa...
- Patent number 9,731,964
- Issue date Aug 15, 2017
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micro-structure and optically patternable...
- Patent number 9,606,435
- Issue date Mar 28, 2017
- Shin-Etsu Chemical Co., Ltd.
- Yoshinori Hirano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanism for MEMS bump side wall angle improvement
- Patent number 9,466,541
- Issue date Oct 11, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chris Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sloped structure, method for manufacturing sloped structure, and sp...
- Patent number 9,285,271
- Issue date Mar 15, 2016
- Seiko Epson Corporation
- Takahiko Yoshizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabricating MEMS device
- Patent number 9,249,011
- Issue date Feb 2, 2016
- Hitachi, Ltd.
- Masatoshi Kanamaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluidic structure with nanopore array
- Patent number 9,057,719
- Issue date Jun 16, 2015
- International Business Machines Corporation
- Chengwen Pei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing an optical window device for a MEMS device
- Patent number 8,981,500
- Issue date Mar 17, 2015
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymers, methods of use thereof, and methods of decomposition thereof
- Patent number 8,956,805
- Issue date Feb 17, 2015
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanism for MEMS bump side wall angle improvement
- Patent number 8,940,586
- Issue date Jan 27, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chris Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sloped structure, method for manufacturing sloped structure, and sp...
- Patent number 8,889,463
- Issue date Nov 18, 2014
- Seiko Epson Corporation
- Takahiko Yoshizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240286889
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
- Publication number 20240250620
- Publication date Jul 25, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System for Moving a Mechanical Part in Two O...
- Publication number 20240243672
- Publication date Jul 18, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20240158224
- Publication date May 16, 2024
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Support for Dual Backplate Transducers
- Publication number 20230002219
- Publication date Jan 5, 2023
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL
- Publication number 20220371880
- Publication date Nov 24, 2022
- Microsoft Technology Licensing, LLC
- Risto Heikki MUTIKAINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20220340408
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL DEVICE HAVING INCLINED OPTI...
- Publication number 20210198102
- Publication date Jul 1, 2021
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Support for Dual Backplate Transducers
- Publication number 20210139319
- Publication date May 13, 2021
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bionic SERS substrate with metal-based compound eye bowl structure...
- Publication number 20210114868
- Publication date Apr 22, 2021
- JIANGNAN UNIVERSITY
- Gang Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20210053821
- Publication date Feb 25, 2021
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERPOSER SUBSTRATE, MEMS DEVICE AND CORRESPONDING MANUFACTURING M...
- Publication number 20200346921
- Publication date Nov 5, 2020
- ROBERT BOSCH GmbH
- Corinna Koepernik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...
- Publication number 20200231433
- Publication date Jul 23, 2020
- ROBERT BOSCH GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PROTECTIVE WAFER INCLUDING INCLINED OPTI...
- Publication number 20200166743
- Publication date May 28, 2020
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY
- Publication number 20190348300
- Publication date Nov 14, 2019
- ROBERT BOSCH GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE
- Publication number 20190016591
- Publication date Jan 17, 2019
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20180208460
- Publication date Jul 26, 2018
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...
- Publication number 20180194616
- Publication date Jul 12, 2018
- ROBERT BOSCH GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DISPLACEMENT STRUCTURE AND METHOD FOR CONTRO...
- Publication number 20170184840
- Publication date Jun 29, 2017
- AGILTRON, INC.
- Luzhong Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY
- Publication number 20170140943
- Publication date May 18, 2017
- ROBERT BOSCH GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICRO-STRUCTURE AND OPTICALLY PATTERNABLE...
- Publication number 20140356790
- Publication date Dec 4, 2014
- Yoshinori HIRANO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...
- Publication number 20140322918
- Publication date Oct 30, 2014
- Cristian A. Bolle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SLOPED STRUCTURE, METHOD FOR MANUFACTURING SLOPED STRUCTURE, AND SP...
- Publication number 20140299955
- Publication date Oct 9, 2014
- Takahiko YOSHIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL WINDOW DEVICE FOR A MEMS DEVICE
- Publication number 20130285169
- Publication date Oct 31, 2013
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF
- Publication number 20130244181
- Publication date Sep 19, 2013
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE AND METHOD TO FORM NANOPORE
- Publication number 20130164522
- Publication date Jun 27, 2013
- International Business Machines Corporation
- Chengwen Pei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NOVEL MECHANISM FOR MEMS BUMP SIDE WALL ANGLE IMPROVEMENT
- Publication number 20130127036
- Publication date May 23, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chris Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SLOPED STRUCTURE, METHOD FOR MANUFACTURING SLOPED STRUCTURE, AND SP...
- Publication number 20130043551
- Publication date Feb 21, 2013
- SEIKO EPSON CORPORATION
- Takahiko YOSHIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICRO-STRUCTURE AND OPTICALLY PATTERNABLE...
- Publication number 20120292286
- Publication date Nov 22, 2012
- Yoshinori HIRANO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
- Publication number 20120288683
- Publication date Nov 15, 2012
- Chin-Te Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

sloped profile

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor structure and method for forming the same

Dual membrane transducer

Interposer substrate, MEMS device and corresponding manufacturing m...

Membrane support for dual backplate transducers

Production method for a micromechanical device having inclined opti...

Bionic SERS substrate with metal-based compound eye bowl structure...

Manufacturing method for a micromechanical window structure and cor...

Protective wafer including inclined optical windows and device

Membrane support for dual backplate transducers

Method for forming a cavity and a component having a cavity

Microelectromechanical displacement structure and method for contro...

Method for producing optical components using functional elements

Microelectromechanical displacement structure and method for contro...

Method for manufacturing a protective wafer including inclined opti...

Method of fabricating a MEMS and/or NEMS structure comprising at le...

Method of forming micro-pipes on a substrate and a structure formed...

Manufacturing method for semiconductor structure

Method for forming a cavity and a component having a cavity

Silicon-based component with at least one chamfer and its fabricati...

Semiconductor structure and manufacturing method for the same

Micromechanical component with a reduced contact surface and its fa...

Method for manufacturing micro-structure and optically patternable...

Mechanism for MEMS bump side wall angle improvement

Sloped structure, method for manufacturing sloped structure, and sp...

Process for fabricating MEMS device

Fluidic structure with nanopore array

Method for producing an optical window device for a MEMS device

Polymers, methods of use thereof, and methods of decomposition thereof

Mechanism for MEMS bump side wall angle improvement

Sloped structure, method for manufacturing sloped structure, and sp...

Patents Applicationslast 30 patents

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

Electromechanical Microsystem for Moving a Mechanical Part in Two O...

Microelectromechanical System for Moving a Mechanical Part in Two O...

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

Membrane Support for Dual Backplate Transducers

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

PRODUCTION METHOD FOR A MICROMECHANICAL DEVICE HAVING INCLINED OPTI...

Membrane Support for Dual Backplate Transducers

Bionic SERS substrate with metal-based compound eye bowl structure...

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

INTERPOSER SUBSTRATE, MEMS DEVICE AND CORRESPONDING MANUFACTURING M...

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...

METHOD FOR MANUFACTURING A PROTECTIVE WAFER INCLUDING INCLINED OPTI...

METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY

MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...

MICROELECTROMECHANICAL DISPLACEMENT STRUCTURE AND METHOD FOR CONTRO...

METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY

METHOD FOR MANUFACTURING MICRO-STRUCTURE AND OPTICALLY PATTERNABLE...

MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...

SLOPED STRUCTURE, METHOD FOR MANUFACTURING SLOPED STRUCTURE, AND SP...

METHOD FOR PRODUCING AN OPTICAL WINDOW DEVICE FOR A MEMS DEVICE

POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF

STRUCTURE AND METHOD TO FORM NANOPORE

NOVEL MECHANISM FOR MEMS BUMP SIDE WALL ANGLE IMPROVEMENT

SLOPED STRUCTURE, METHOD FOR MANUFACTURING SLOPED STRUCTURE, AND SP...

METHOD FOR MANUFACTURING MICRO-STRUCTURE AND OPTICALLY PATTERNABLE...

PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME