Stacking the electronic processing unit and the micromechanical structure

Industry

CPC
B81C2203/0771

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

Current Industry

B81C2203/0771Stacking the electronic processing unit and the micromechanical structure

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for producing monolithic integration of piezoelectric microm...
- Patent number 12,037,239
- Issue date Jul 16, 2024
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
- Patent number 11,845,653
- Issue date Dec 19, 2023
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
- Patent number 11,833,542
- Issue date Dec 5, 2023
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,691,870
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
- Patent number 11,684,949
- Issue date Jun 27, 2023
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,667,519
- Issue date Jun 6, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical electronics device
- Patent number 11,667,523
- Issue date Jun 6, 2023
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
- Patent number 11,342,266
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and manufacturing method thereof
- Patent number 11,305,985
- Issue date Apr 19, 2022
- HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD.
- Wei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electromechanical system (NEMS) device structure and method fo...
- Patent number 11,167,984
- Issue date Nov 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Ping Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration scheme for microelectromechanical systems (MEMS) device...
- Patent number 11,078,074
- Issue date Aug 3, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-layer sealing film for high seal yield
- Patent number 11,034,578
- Issue date Jun 15, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Chien Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic integration of piezoelectric micromachined ultrasonic tr...
- Patent number 10,988,376
- Issue date Apr 27, 2021
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 10,934,158
- Issue date Mar 2, 2021
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical electronics device
- Patent number 10,894,712
- Issue date Jan 19, 2021
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
- Patent number 10,843,227
- Issue date Nov 24, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-structured organic sensor device and method for manufacturing...
- Patent number 10,797,109
- Issue date Oct 6, 2020
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Bernd Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
- Patent number 10,745,271
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Complementary metal oxide semiconductor (CMOS) ultrasonic transduce...
- Patent number 10,710,873
- Issue date Jul 14, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducers in complementary metal oxide semiconductor (...
- Patent number 10,707,201
- Issue date Jul 7, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-layer sealing film for high seal yield
- Patent number 10,676,343
- Issue date Jun 9, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Chien Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electromechanical system (NEMS) device structure and method fo...
- Patent number 10,676,351
- Issue date Jun 9, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Ping Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
- Patent number 10,672,974
- Issue date Jun 2, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating MEMS device integrated with a semiconductor...
- Patent number 10,640,372
- Issue date May 5, 2020
- United Microelectronics Corp.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
- Patent number 10,518,292
- Issue date Dec 31, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration scheme for microelectromechanical systems (MEMS) device...
- Patent number 10,513,429
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically controllable integrated switch
- Patent number 10,510,503
- Issue date Dec 17, 2019
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device integrated with a semiconductor integrated circuit and...
- Patent number 10,472,232
- Issue date Nov 12, 2019
- United Microelectronics Corp.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240228264
- Publication date Jul 11, 2024
- STMicroelectronics International N.V.
- Roseanne DUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240132340
- Publication date Apr 25, 2024
- STMicroelectronics (Malta) Ltd.
- Roseanne DUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20240100565
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME
- Publication number 20230163103
- Publication date May 25, 2023
- Qorvo US, Inc.
- Julio C. Costa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PROCESSING FOR MICROELECTRONIC DEVICE PACKAGE WITH CAVITY
- Publication number 20230092132
- Publication date Mar 23, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Hau Nguyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HETEROGENOUS INTEGRATION OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR...
- Publication number 20220162062
- Publication date May 26, 2022
- Meridian Innovation Pte Ltd
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...
- Publication number 20210155472
- Publication date May 27, 2021
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONICS DEVICE
- Publication number 20210139320
- Publication date May 13, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20210114060
- Publication date Apr 22, 2021
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20200391996
- Publication date Dec 17, 2020
- Hangzhou Silan Integrated Circuit Co., Ltd.
- Wei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
- Publication number 20200346925
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...
- Publication number 20200299129
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Ping CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LAYER SEALING FILM FOR HIGH SEAL YIELD
- Publication number 20200270121
- Publication date Aug 27, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Chien Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION SCHEME FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE...
- Publication number 20200115222
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICALLY CONTROLLABLE INTEGRATED SWITCH
- Publication number 20200083011
- Publication date Mar 12, 2020
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
- Publication number 20200024135
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20190388935
- Publication date Dec 26, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MEMS DEVICE INTEGRATED WITH A SEMICONDUCTOR...
- Publication number 20190345029
- Publication date Nov 14, 2019
- UNITED MICROELECTRONICS CORP.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20190283081
- Publication date Sep 19, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) ULTRASONIC TRANSDUCE...
- Publication number 20190210869
- Publication date Jul 11, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TR...
- Publication number 20190177160
- Publication date Jun 13, 2019
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- You QIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRASONIC TRANSDUCERS IN COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (...
- Publication number 20190164956
- Publication date May 30, 2019
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...
- Publication number 20190152769
- Publication date May 23, 2019
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
- Publication number 20190055120
- Publication date Feb 21, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE
- Publication number 20190016591
- Publication date Jan 17, 2019
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL ELECTRONICS DEVICE
- Publication number 20180257930
- Publication date Sep 13, 2018
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20180208460
- Publication date Jul 26, 2018
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) ULTRASONIC TRANSDUCE...
- Publication number 20180186628
- Publication date Jul 5, 2018
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20180162725
- Publication date Jun 14, 2018
- UNITED MICROELECTRONICS CORP.
- Tsong-Lin Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20180133756
- Publication date May 17, 2018
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Stacking the electronic processing unit and the micromechanical structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for producing monolithic integration of piezoelectric microm...

Heterogenous integration of complementary metal-oxide-semiconductor...

CMOS ultrasonic transducers and related apparatus and methods

Semiconductor device including a microelectromechanical structure a...

CMOS ultrasonic transducers and related apparatus and methods

Semiconductor device including a microelectromechanical structure a...

Optical electronics device

Method for integrating complementary metal-oxide-semiconductor (CMO...

MEMS device and manufacturing method thereof

Fence structure to prevent stiction in a MEMS motion sensor

Nano-electromechanical system (NEMS) device structure and method fo...

Integration scheme for microelectromechanical systems (MEMS) device...

Multi-layer sealing film for high seal yield

Monolithic integration of piezoelectric micromachined ultrasonic tr...

Semiconductor device including a microelectromechanical structure a...

Optical electronics device

CMOS ultrasonic transducers and related apparatus and methods

Micro-structured organic sensor device and method for manufacturing...

Method for integrating complementary metal-oxide-semiconductor (CMO...

Complementary metal oxide semiconductor (CMOS) ultrasonic transduce...

Ultrasonic transducers in complementary metal oxide semiconductor (...

Multi-layer sealing film for high seal yield

Nano-electromechanical system (NEMS) device structure and method fo...

Microfabricated ultrasonic transducers and related apparatus and me...

Method for fabricating MEMS device integrated with a semiconductor...

Fence structure to prevent stiction in a MEMS motion sensor

CMOS ultrasonic transducers and related apparatus and methods

Integration scheme for microelectromechanical systems (MEMS) device...

Electrically controllable integrated switch

MEMS device integrated with a semiconductor integrated circuit and...

Patents Applicationslast 30 patents

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME

WAFER LEVEL PROCESSING FOR MICROELECTRONIC DEVICE PACKAGE WITH CAVITY

HETEROGENOUS INTEGRATION OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR...

SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...

OPTICAL ELECTRONICS DEVICE

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...

NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...

MULTI-LAYER SEALING FILM FOR HIGH SEAL YIELD

INTEGRATION SCHEME FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE...

ELECTRICALLY CONTROLLABLE INTEGRATED SWITCH

METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

METHOD FOR FABRICATING MEMS DEVICE INTEGRATED WITH A SEMICONDUCTOR...

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) ULTRASONIC TRANSDUCE...

MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TR...

ULTRASONIC TRANSDUCERS IN COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (...

SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...

METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...

MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE

OPTICAL ELECTRONICS DEVICE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) ULTRASONIC TRANSDUCE...

SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS