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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Basic micro-electromechanical structures
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Patents Grants
last 30 patents
Information
Patent Grant
Anti-stiction enhancement of ruthenium contact
Patent number
12,172,888
Issue date
Dec 24, 2024
Qorvo US, Inc.
James D. Huffman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing fine structures in the volume of a substrate c...
Patent number
12,172,157
Issue date
Dec 24, 2024
Schott AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device package and a method of manufacturing the same
Patent number
12,168,605
Issue date
Dec 17, 2024
Advanced Semiconductor Engineering, Inc.
Hsu-Liang Hsiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
12,162,747
Issue date
Dec 10, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3-axis angular accelerometer
Patent number
12,153,065
Issue date
Nov 26, 2024
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrates comprising nano-patterning surfaces and methods of prepa...
Patent number
12,151,460
Issue date
Nov 26, 2024
Illumina, Inc.
M. Shane Bowen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
Patent number
12,145,838
Issue date
Nov 19, 2024
Vermon S.A.
Cyril Meynier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Drop resistant MEMS actuator-imager assembly package
Patent number
12,145,839
Issue date
Nov 19, 2024
Faez Ba-Tis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical sensor device with improved stability to stress
Patent number
12,139,396
Issue date
Nov 12, 2024
STMicroelectronics S.r.l.
Francesco Rizzini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic chip and fabrication method
Patent number
12,134,097
Issue date
Nov 5, 2024
Shanghai Tianma Micro-Electronics Co., Ltd.
Wei Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Arched membrane structure for MEMS device
Patent number
12,134,557
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Triple-membrane MEMS device
Patent number
12,133,060
Issue date
Oct 29, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronics package with vertically stacked MEMS device and co...
Patent number
12,129,168
Issue date
Oct 29, 2024
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor devices with gas-permeable cover and associated production m...
Patent number
12,122,667
Issue date
Oct 22, 2024
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS mirror arrays with reduced crosstalk
Patent number
12,103,843
Issue date
Oct 1, 2024
CALIENT.AI INC.
Scott A. Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical system and method for fabricating MEMS havi...
Patent number
12,103,845
Issue date
Oct 1, 2024
United Microelectronics Corp.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing implantable electrodes and electrodes made...
Patent number
12,098,069
Issue date
Sep 24, 2024
Sangwoo Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems structure
Patent number
12,096,183
Issue date
Sep 17, 2024
FORTEMEDIA, INC.
Chih-Yuan Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming micro pattern on surface of wire
Patent number
12,084,342
Issue date
Sep 10, 2024
Kookmin University Industry Academy Cooperation Foundation
Bongchul Kang
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
MEMS device having an improved stress distribution and manufacturin...
Patent number
12,084,341
Issue date
Sep 10, 2024
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having decreased contact resistance
Patent number
12,077,431
Issue date
Sep 3, 2024
Qorvo US, Inc.
Shibajyoti Ghosh Dastider
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
12,081,192
Issue date
Sep 3, 2024
Stathera IP Holdings, Inc.
Vamsy P. Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional micro-electro-mechanical, microfluidic, and micro...
Patent number
12,080,651
Issue date
Sep 3, 2024
NIELSON SCIENTIFIC, LLC
Gregory Nolan Nielson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
12,071,342
Issue date
Aug 27, 2024
Stathera IP Holding, Inc.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
Patent number
12,070,773
Issue date
Aug 27, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Extremal microstructured surfaces
Patent number
12,060,261
Issue date
Aug 13, 2024
BVW Holding AG
Lukas Bluecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress isolation using three-dimensional trenches
Patent number
12,054,385
Issue date
Aug 6, 2024
Texas Instruments Incorporated
Ting-Ta Yen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric MEMS microphone
Patent number
12,058,939
Issue date
Aug 6, 2024
The Regents of the University of Michigan
Karl Grosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
Patent number
12,050,102
Issue date
Jul 30, 2024
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device structure with movable membrane
Patent number
12,043,538
Issue date
Jul 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENS...
Publication number
20240425351
Publication date
Dec 26, 2024
ROBERT BOSCH GmbH
Christoph Schelling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three-axis Gyroscope
Publication number
20240425355
Publication date
Dec 26, 2024
SensorTek technology Corp.
Shih-Hsiung TSENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE
Publication number
20240425361
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Björn Oliver Eversmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR
Publication number
20240425353
Publication date
Dec 26, 2024
Soundskrit Inc.
Stephane Leahy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
Publication number
20240425360
Publication date
Dec 26, 2024
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
Publication number
20240425365
Publication date
Dec 26, 2024
SENSONICS TRANSDUCERS PRIVATE LIMITED
Brishbhan Singh PANWAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR FABRICATING MEMS HAVI...
Publication number
20240425366
Publication date
Dec 26, 2024
United Microelectronics Corp.
Jung-Hao CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Inertial Sensor
Publication number
20240425357
Publication date
Dec 26, 2024
SensorTek technology Corp.
Shih-Yuan LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
Publication number
20240425359
Publication date
Dec 26, 2024
STMicroelectronics S.r.l
Nicolo' BONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
Publication number
20240417240
Publication date
Dec 19, 2024
CENTER FOR ADVANCED SOFT ELECTRONICS
Kilwon CHO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20240416385
Publication date
Dec 19, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240418510
Publication date
Dec 19, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
Publication number
20240417242
Publication date
Dec 19, 2024
Calient.AI Inc.
Scott A. MILLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
Publication number
20240409398
Publication date
Dec 12, 2024
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System And Method For Generating Fluid Flow
Publication number
20240409399
Publication date
Dec 12, 2024
Sonicedge Ltd.
Mordehai Margalit
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP
Publication number
20240409396
Publication date
Dec 12, 2024
Canon Kabushiki Kaisha
RYOTARO MURAKAMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
Publication number
20240405454
Publication date
Dec 5, 2024
Atomic Machines, Inc.
Fabian Goericke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
Publication number
20240400377
Publication date
Dec 5, 2024
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
Publication number
20240400378
Publication date
Dec 5, 2024
ROBERT BOSCH GmbH
Peter Engelhart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240400376
Publication date
Dec 5, 2024
AAC TECHNOLOGIES PTE. LTD
Colin Robert Jenkins
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
Publication number
20240400374
Publication date
Dec 5, 2024
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND FORMATION THEREOF
Publication number
20240391761
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company Limited
Kai-Lan CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Packaging of microelectromechanical system devices
Publication number
20240391762
Publication date
Nov 28, 2024
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240391756
Publication date
Nov 28, 2024
AAC TECHNOLOGIES PTE. LTD
ZaiXiang Pua
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
Publication number
20240391757
Publication date
Nov 28, 2024
STMicroelectronics International N.V.
Marco GARBARINO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
Publication number
20240391760
Publication date
Nov 28, 2024
STMicroelectronics International N.V.
Silvia NICOLI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES
Publication number
20240391758
Publication date
Nov 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Ting-Ta YEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
Publication number
20240383743
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yu LIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
Publication number
20240383744
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240383742
Publication date
Nov 21, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY