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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2203/00
Basic micro-electromechanical structures
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B81B2203/03
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a micro-fluid probe
Patent number
12,286,344
Issue date
Apr 29, 2025
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
12,281,007
Issue date
Apr 22, 2025
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhengyu Shi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonant sensor using MEMS resonator, and detection method by reson...
Patent number
12,275,634
Issue date
Apr 15, 2025
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Kunihiko Nakamura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for dynamic fluid pinning
Patent number
12,268,255
Issue date
Apr 8, 2025
BVW Holding AG
Michael Milbocker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
Patent number
12,269,734
Issue date
Apr 8, 2025
TDK Corporation
Pirmin Rombach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
12,269,732
Issue date
Apr 8, 2025
FORTEMEDIA, INC.
Jien-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical contacts using an array of micromachined flexures
Patent number
12,272,912
Issue date
Apr 8, 2025
Atomic Machines, Inc.
Fabian Goericke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system
Patent number
12,264,064
Issue date
Apr 1, 2025
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Scott Lyall Cargill
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
Patent number
12,263,506
Issue date
Apr 1, 2025
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device having microelectromechanical systems devices...
Patent number
12,257,602
Issue date
Mar 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
I-Hsuan Chiu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low hysteresis and flexible pressure sensitive composite
Patent number
12,259,287
Issue date
Mar 25, 2025
National University of Singapore
Chee Keong Tee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,258,266
Issue date
Mar 25, 2025
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate and microphone unit
Patent number
12,258,262
Issue date
Mar 25, 2025
Hosiden Corporation
Shingo Okano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a sequencing unit for sequencing a biochemical...
Patent number
12,240,752
Issue date
Mar 4, 2025
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic passage with protective layer
Patent number
12,240,239
Issue date
Mar 4, 2025
Hewlett-Packard Development Company, L.P.
Juan Carlos Ramos
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system component or a microfluidic component...
Patent number
12,234,143
Issue date
Feb 25, 2025
Berkin B.V.
Wouter Sparreboom
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatic device, electrostatic device intermediate body and pr...
Patent number
12,215,019
Issue date
Feb 4, 2025
The University of Tokyo
Hiroshi Toshiyoshi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing package structure
Patent number
12,215,018
Issue date
Feb 4, 2025
Winbond Electronics Corp.
Jin-Neng Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for fabricating microfluidic devices
Patent number
12,208,385
Issue date
Jan 28, 2025
The Charles Draper Laboratory, Inc.
Ashley Lynne Beckwith
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Arched membrane structure for MEMS device
Patent number
12,209,013
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical systems (MEMS) switch and related methods
Patent number
12,202,723
Issue date
Jan 21, 2025
Analog Devices International Unlimited Company
Padraig Fitzgerald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices with support structures and associated production methods
Patent number
12,195,325
Issue date
Jan 14, 2025
Infineon Technologies AG
Florian Brandl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sound producing cell
Patent number
12,192,722
Issue date
Jan 7, 2025
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
12,180,064
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system and process of making it
Patent number
12,180,065
Issue date
Dec 31, 2024
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Euan James Boyd
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,180,069
Issue date
Dec 31, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction enhancement of ruthenium contact
Patent number
12,172,888
Issue date
Dec 24, 2024
Qorvo US, Inc.
James D. Huffman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing fine structures in the volume of a substrate c...
Patent number
12,172,157
Issue date
Dec 24, 2024
Schott AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device package and a method of manufacturing the same
Patent number
12,168,605
Issue date
Dec 17, 2024
Advanced Semiconductor Engineering, Inc.
Hsu-Liang Hsiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
12,162,747
Issue date
Dec 10, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Ultrasonic sensor and manufacturing method thereof
Publication number
20250128288
Publication date
Apr 24, 2025
Qisda Corporation
Fu-Sheng Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE
Publication number
20250122072
Publication date
Apr 17, 2025
Soundskrit Inc.
Benjamin Evans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
Publication number
20250115473
Publication date
Apr 10, 2025
Advanced Semiconductor Engineering, Inc.
Hsu-Liang HSIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
Publication number
20250109015
Publication date
Apr 3, 2025
Murata Manufacturing Co., Ltd.
Jeanette LINDROOS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
Publication number
20250100869
Publication date
Mar 27, 2025
Qisda Corporation
Fu-Sheng Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
Publication number
20250100871
Publication date
Mar 27, 2025
InvenSense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE
Publication number
20250100872
Publication date
Mar 27, 2025
MEMSensing Microsystems (Suzhou, China) Co., Ltd.
Yanzi MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXTREMAL MICROSTRUCTURED SURFACES
Publication number
20250091856
Publication date
Mar 20, 2025
Lukas Bluecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
Publication number
20250093212
Publication date
Mar 20, 2025
Centre National de la Recherche Scientifique
Olivier BOURGEOIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
Publication number
20250091313
Publication date
Mar 20, 2025
Illumina, Inc.
M. Shane Bowen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
Publication number
20250091858
Publication date
Mar 20, 2025
INFINEON TECHNOLOGIES AG
Theresa LUTZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
Publication number
20250085175
Publication date
Mar 13, 2025
Beijing BOE Technology Development Co., Ltd.
Kui LIANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
Publication number
20250083948
Publication date
Mar 13, 2025
ROBERT BOSCH GmbH
Andreas Winden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
Publication number
20250074763
Publication date
Mar 6, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20250074766
Publication date
Mar 6, 2025
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE AND MEMS MICROPHONE...
Publication number
20250059024
Publication date
Feb 20, 2025
MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD.
Genlan RONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
Publication number
20250050329
Publication date
Feb 13, 2025
SCHOTT AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR
Publication number
20250042723
Publication date
Feb 6, 2025
TEXAS INSTRUMENTS INCORPORATED
Jeffrey S. Solas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
Publication number
20250042717
Publication date
Feb 6, 2025
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS microphone
Publication number
20250042722
Publication date
Feb 6, 2025
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Zhuanzhuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR STRUCTURE
Publication number
20250033951
Publication date
Jan 30, 2025
Bishnu Prasanna Gogoi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...
Publication number
20250033952
Publication date
Jan 30, 2025
ROBERT BOSCH GmbH
Daniel Baumgaertner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-DIRECTIONAL ACOUSTIC SENSOR DEVICES
Publication number
20250033953
Publication date
Jan 30, 2025
Soundskrit Inc.
Sahil Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20250026632
Publication date
Jan 23, 2025
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
Publication number
20250026633
Publication date
Jan 23, 2025
SILICON LIGHT MACHINES CORPORATION
Olav Solgaard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
Publication number
20250026629
Publication date
Jan 23, 2025
NXP USA, Inc.
Jun Tang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
Publication number
20250030998
Publication date
Jan 23, 2025
Vibrant Microsystems Inc.
Joseph Doll
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
Publication number
20250019226
Publication date
Jan 16, 2025
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
Publication number
20250019228
Publication date
Jan 16, 2025
ROBERT BOSCH GmbH
Maximilian Sommer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20250019225
Publication date
Jan 16, 2025
Rohm Co., Ltd.
Daisuke Nishinohara
B81 - MICRO-STRUCTURAL TECHNOLOGY