Step and Flash imprinting, UV imprinting

Industry

CPC
B81C2201/0152

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0152Step and Flash imprinting, UV imprinting

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Process for making a patterned metal oxide structure
- Patent number 9,362,126
- Issue date Jun 7, 2016
- Agency for Science, Technology and Research
- Ramakrishnan Ganesan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing stamp for plasmonic nanolithography apparat...
- Patent number 9,028,639
- Issue date May 12, 2015
- Korea Institute of Machinery & Materials
- Eung-Sug Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern transferring mold, pattern transferring apparatus and devic...
- Patent number 7,690,912
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS structures
- Patent number 7,176,047
- Issue date Feb 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Chih Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electrical mechanical systems
- Patent number 7,067,239
- Issue date Jun 27, 2006
- CSEM Centre Suisse D'Electronique et de Microtechnique SA
- Samuel Obi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multilayer resist structure, and method of manufacturing three-dime...
- Patent number 6,455,227
- Issue date Sep 24, 2002
- Sony Corporation
- Masaki Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVIC...
- Publication number 20170144152
- Publication date May 25, 2017
- The Regents of the University of California
- Michelle Khine
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING STAMP FOR PLASMONIC NANOLITHOGRAPHY APPARAT...
- Publication number 20130340929
- Publication date Dec 26, 2013
- KOREA INSTITUTE OF MACHINERY & MATERIALS
- Eung-Sug LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MAKING A PATTERNED METAL OXIDE STRUCTURE
- Publication number 20130078796
- Publication date Mar 28, 2013
- Agency for Science, Technology and Research
- Ramakrishnan GANESAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING FINE PATTERN
- Publication number 20090039563
- Publication date Feb 12, 2009
- Riken
- Motoki Okinaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Planarization Method of Patterning a Substratte
- Publication number 20070034600
- Publication date Feb 15, 2007
- Board of Regents, The University of Texas System
- C. Grant Willson
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Pattern transferring mold, pattern transferring apparatus and devic...
- Publication number 20060192320
- Publication date Aug 31, 2006
- Toshinobu Tokita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and methods for three-dimensional lithography and nano-inde...
- Publication number 20050257709
- Publication date Nov 24, 2005
- Tony Mule
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing MEMS structures
- Publication number 20050170544
- Publication date Aug 4, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- M.C. Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Planarization method of patterning a substrate
- Publication number 20050156357
- Publication date Jul 21, 2005
- Board of Regents, The University of Texas System
- C. Grant Willson
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Planarization composition and method of patterning a substrate usin...
- Publication number 20040112862
- Publication date Jun 17, 2004
- Molecular Imprints, Inc.
- C. Grant Willson
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Micro systems
- Publication number 20040055151
- Publication date Mar 25, 2004
- Samuel Obi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Step and Flash imprinting, UV imprinting

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process for making a patterned metal oxide structure

Method of manufacturing stamp for plasmonic nanolithography apparat...

Pattern transferring mold, pattern transferring apparatus and devic...

Method for manufacturing MEMS structures

Micro electrical mechanical systems

Multilayer resist structure, and method of manufacturing three-dime...

Patents Applicationslast 30 patents

PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVIC...

METHOD OF MANUFACTURING STAMP FOR PLASMONIC NANOLITHOGRAPHY APPARAT...

PROCESS FOR MAKING A PATTERNED METAL OXIDE STRUCTURE

METHOD OF FORMING FINE PATTERN

Planarization Method of Patterning a Substratte

Pattern transferring mold, pattern transferring apparatus and devic...

Systems and methods for three-dimensional lithography and nano-inde...

Method for manufacturing MEMS structures

Planarization method of patterning a substrate

Planarization composition and method of patterning a substrate usin...

Micro systems