Stress or warp of chucks, mask or workpiece

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G03F7/70783

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70783Stress or warp of chucks, mask or workpiece

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Patents Grantslast 30 patents

Information Patent Grant
Method of clamping a substrate to a clamping system, a substrate ho...
- Patent number 12,158,704
- Issue date Dec 3, 2024
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermo-mechanical actuator
- Patent number 12,117,739
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Bas Jansen
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,062,582
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structures and methods for use in photolithography
- Patent number 12,055,863
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Daniele Piumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for lithography in semiconductor fabrication
- Patent number 12,025,918
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic overlay correction and lithographic process
- Patent number 11,966,170
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ai-Jen Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, substrate and system for estimating stress in a substrate
- Patent number 11,953,837
- Issue date Apr 9, 2024
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
- Patent number 11,887,881
- Issue date Jan 30, 2024
- ASML Holding N.V.
- Bruce Tirri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Object table, a stage apparatus and a lithographic apparatus
- Patent number 11,880,144
- Issue date Jan 23, 2024
- ASML Netherlands B.V.
- Sander Jeroen Hermanussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system, lithographic apparatus, method for positioning and de...
- Patent number 11,860,552
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Stef Marten Johan Janssens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object positioner, method for correcting the shape of an object, li...
- Patent number 11,860,554
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Mark Johannes Hermanus Frencken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement tool and methods for EUV lithography masks
- Patent number 11,815,810
- Issue date Nov 14, 2023
- Intel Corporation
- Yoshihiro Tezuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of customized components for fitting wafer profile
- Patent number 11,788,833
- Issue date Oct 17, 2023
- Nikon Corporation
- Travis D. Bow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,768,444
- Issue date Sep 26, 2023
- Canon Kabushiki Kaisha
- Tetsuji Okada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process-induced distortion prediction and feedforward and feedback...
- Patent number 11,761,880
- Issue date Sep 19, 2023
- KLA Corporation
- Pradeep Vukkadala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus
- Patent number 11,740,566
- Issue date Aug 29, 2023
- ASML Netherlands B.V.
- Paulus Albertus Van Hal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,669,021
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structures and methods for use in photolithography
- Patent number 11,644,758
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Daniele Piumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography system, method of clamping and wafer table
- Patent number RE49488
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Guido De Boer
Information Patent Grant
Wafer backside engineering for wafer stress control
- Patent number 11,569,134
- Issue date Jan 31, 2023
- International Business Machines Corporation
- Nikhil Jain
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and apparatus for lithography in semiconductor fabrication
- Patent number 11,550,228
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Carrier system, exposure apparatus, carrier method, exposure method...
- Patent number 11,511,438
- Issue date Nov 29, 2022
- Nikon Corporation
- Hideaki Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
- Patent number 11,467,504
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Bas Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
- Patent number 11,422,476
- Issue date Aug 23, 2022
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and an object positioning system
- Patent number RE49142
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
Information Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
- Patent number RE49066
- Issue date May 10, 2022
- ASML Holding N.V.
- Raymond Wilhelmus Louis Lafarre
Information Patent Grant
Determining an optimal operational parameter setting of a metrology...
- Patent number 11,320,750
- Issue date May 3, 2022
- ASML Netherlands B.V.
- Leon Paul Van Dijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 11,313,758
- Issue date Apr 26, 2022
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Method of adapting feed-forward parameters
- Patent number 11,300,886
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Hadi Yagubizade
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining stress in a substrate, control system for co...
- Patent number 11,300,888
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Richard Johannes Franciscus Van Haren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
THERMO-MECHANICAL ACTUATOR
- Publication number 20240402621
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Bas JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240393703
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPH...
- Publication number 20240369948
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR SYSTEM
- Publication number 20240345492
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G01 - MEASURING TESTING
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240337955
- Publication date Oct 10, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD
- Publication number 20240329546
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240290650
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- KAZUNORI NAKAJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY
- Publication number 20240176254
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Keane Michael LEVY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...
- Publication number 20240168394
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Stef Marten Johan JANSSENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20240142885
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frequency and Amplitude Modulation of Implant Dose for Stress Manag...
- Publication number 20240103385
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Pradeep K. SUBRAHMANYAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20230378003
- Publication date Nov 23, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Li-Chao YIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...
- Publication number 20230314962
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Tammo UITTERDIJK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURES AND METHODS FOR USE IN PHOTOLITHOGRAPHY
- Publication number 20230259043
- Publication date Aug 17, 2023
- ASM IP HOLDING B.V.
- Daniele Piumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREAT...
- Publication number 20230251584
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Daniel J. FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR...
- Publication number 20230251574
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Anthony R. SCHEPIS
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...
- Publication number 20230176487
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Rogier Sebastiaan GILIJAMSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20230152713
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Kuan WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPROVED LITHOGRAPHY APPARATUS
- Publication number 20230068088
- Publication date Mar 2, 2023
- ASML NETHERLANDS B.V.
- Paulus Albertus VAN HAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
- Publication number 20230048723
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMO-MECHANICAL ACTUATOR
- Publication number 20220236651
- Publication date Jul 28, 2022
- ASML NETHERLANDS B.V.
- Bas JANSEN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LI...
- Publication number 20220214626
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Mark Johannes Hermanus FRENCKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
- Publication number 20220216092
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Bruce TIRRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20220197154
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria ZAAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE M...
- Publication number 20220115260
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Johannes Josephus MAASSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD, SUBSTRATE AND SYSTEM FOR ESTIMATING STRESS IN A SUBSTRATE
- Publication number 20220113640
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HO...
- Publication number 20220082952
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Abraham Alexander SOETHOUDT
- H01 - BASIC ELECTRIC ELEMENTS

Stress or warp of chucks, mask or workpiece

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of clamping a substrate to a clamping system, a substrate ho...

Thermo-mechanical actuator

Method of manufacturing semiconductor devices

Structures and methods for use in photolithography

Method for lithography in semiconductor fabrication

Lithographic overlay correction and lithographic process

Method, substrate and system for estimating stress in a substrate

Lithographic apparatus, substrate table, and non-uniform coating me...

Object table, a stage apparatus and a lithographic apparatus

Stage system, lithographic apparatus, method for positioning and de...

Object positioner, method for correcting the shape of an object, li...

Measurement tool and methods for EUV lithography masks

Determination of customized components for fitting wafer profile

Imprint apparatus and method of manufacturing article

Process-induced distortion prediction and feedforward and feedback...

Lithography apparatus

Lithographic apparatus and device manufacturing method

Structures and methods for use in photolithography

Lithography system, method of clamping and wafer table

Wafer backside engineering for wafer stress control

System and apparatus for lithography in semiconductor fabrication

Carrier system, exposure apparatus, carrier method, exposure method...

Piezoelectric actuator, actuator system, substrate support, and lit...

Methods and apparatus for monitoring a lithographic manufacturing p...

Lithographic apparatus and an object positioning system

Chucks and clamps for holding objects of a lithographic apparatus a...

Determining an optimal operational parameter setting of a metrology...

Apparatus and methods for measuring thermally induced reticle disto...

Method of adapting feed-forward parameters

Methods of determining stress in a substrate, control system for co...

Patents Applicationslast 30 patents

THERMO-MECHANICAL ACTUATOR

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPH...

SENSOR SYSTEM

IMPRINTING APPARATUS

LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

SUBSTRATE HOLDER AND METHOD

CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY

STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...

OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS

Frequency and Amplitude Modulation of Implant Dose for Stress Manag...

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...

STRUCTURES AND METHODS FOR USE IN PHOTOLITHOGRAPHY

IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREAT...

METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR...

SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...

METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION

IMPROVED LITHOGRAPHY APPARATUS

SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE

THERMO-MECHANICAL ACTUATOR

OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LI...

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE M...

METHOD, SUBSTRATE AND SYSTEM FOR ESTIMATING STRESS IN A SUBSTRATE

METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HO...