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Stress or warp of chucks, mask or workpiece
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G03F7/70783
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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70783
Stress or warp of chucks, mask or workpiece
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last 30 patents
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Patent Grant
Lithographic overlay correction and lithographic process
Patent number
11,966,170
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ai-Jen Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, substrate and system for estimating stress in a substrate
Patent number
11,953,837
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
Patent number
11,887,881
Issue date
Jan 30, 2024
ASML Holding N.V.
Bruce Tirri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Object table, a stage apparatus and a lithographic apparatus
Patent number
11,880,144
Issue date
Jan 23, 2024
ASML Netherlands B.V.
Sander Jeroen Hermanussen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage system, lithographic apparatus, method for positioning and de...
Patent number
11,860,552
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Stef Marten Johan Janssens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Object positioner, method for correcting the shape of an object, li...
Patent number
11,860,554
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Mark Johannes Hermanus Frencken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement tool and methods for EUV lithography masks
Patent number
11,815,810
Issue date
Nov 14, 2023
Intel Corporation
Yoshihiro Tezuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determination of customized components for fitting wafer profile
Patent number
11,788,833
Issue date
Oct 17, 2023
Nikon Corporation
Travis D. Bow
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus and method of manufacturing article
Patent number
11,768,444
Issue date
Sep 26, 2023
Canon Kabushiki Kaisha
Tetsuji Okada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process-induced distortion prediction and feedforward and feedback...
Patent number
11,761,880
Issue date
Sep 19, 2023
KLA Corporation
Pradeep Vukkadala
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus
Patent number
11,740,566
Issue date
Aug 29, 2023
ASML Netherlands B.V.
Paulus Albertus Van Hal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Structures and methods for use in photolithography
Patent number
11,644,758
Issue date
May 9, 2023
ASM IP Holding B.V.
Daniele Piumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system, method of clamping and wafer table
Patent number
RE49488
Issue date
Apr 11, 2023
ASML Netherlands B.V.
Guido De Boer
Information
Patent Grant
Wafer backside engineering for wafer stress control
Patent number
11,569,134
Issue date
Jan 31, 2023
International Business Machines Corporation
Nikhil Jain
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and apparatus for lithography in semiconductor fabrication
Patent number
11,550,228
Issue date
Jan 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Kuan Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Carrier system, exposure apparatus, carrier method, exposure method...
Patent number
11,511,438
Issue date
Nov 29, 2022
Nikon Corporation
Hideaki Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
Patent number
11,467,504
Issue date
Oct 11, 2022
ASML Netherlands B.V.
Bas Jansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
Patent number
11,422,476
Issue date
Aug 23, 2022
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and an object positioning system
Patent number
RE49142
Issue date
Jul 19, 2022
ASML Netherlands B.V.
Adrianus Hendrik Koevoets
Information
Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
Patent number
RE49066
Issue date
May 10, 2022
ASML Holding N.V.
Raymond Wilhelmus Louis Lafarre
Information
Patent Grant
Determining an optimal operational parameter setting of a metrology...
Patent number
11,320,750
Issue date
May 3, 2022
ASML Netherlands B.V.
Leon Paul Van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
Patent number
11,313,758
Issue date
Apr 26, 2022
Nikon Corporation
Michael Sogard
G01 - MEASURING TESTING
Information
Patent Grant
Method of adapting feed-forward parameters
Patent number
11,300,886
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Hadi Yagubizade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining stress in a substrate, control system for co...
Patent number
11,300,888
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer table with dynamic support pins
Patent number
11,302,566
Issue date
Apr 12, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology apparatus
Patent number
11,300,889
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Leon Paul Van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,275,316
Issue date
Mar 15, 2022
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Burls with altered surface topography for holding an object in lith...
Patent number
11,270,906
Issue date
Mar 8, 2022
ASML Holding N.V.
Mehmet Ali Akbas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus, lithographic apparatus, control unit and method
Patent number
11,243,476
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Ringo Petrus Cornelis Van Dorst
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
Publication number
20240142885
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Sander Jeroen HERMANUSSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Frequency and Amplitude Modulation of Implant Dose for Stress Manag...
Publication number
20240103385
Publication date
Mar 28, 2024
Applied Materials, Inc.
Pradeep K. SUBRAHMANYAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
Publication number
20230384694
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Abdullah ALIKHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20230378003
Publication date
Nov 23, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Li-Chao YIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...
Publication number
20230314962
Publication date
Oct 5, 2023
ASML Holding N.V.
Tammo UITTERDIJK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURES AND METHODS FOR USE IN PHOTOLITHOGRAPHY
Publication number
20230259043
Publication date
Aug 17, 2023
ASM IP HOLDING B.V.
Daniele Piumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREAT...
Publication number
20230251584
Publication date
Aug 10, 2023
TOKYO ELECTRON LIMITED
Daniel J. FULFORD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR...
Publication number
20230251574
Publication date
Aug 10, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...
Publication number
20230176487
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Rogier Sebastiaan GILIJAMSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
Publication number
20230152713
Publication date
May 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Kuan WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPROVED LITHOGRAPHY APPARATUS
Publication number
20230068088
Publication date
Mar 2, 2023
ASML NETHERLANDS B.V.
Paulus Albertus VAN HAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
Publication number
20230048723
Publication date
Feb 16, 2023
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
THERMO-MECHANICAL ACTUATOR
Publication number
20220236651
Publication date
Jul 28, 2022
ASML NETHERLANDS B.V.
Bas JANSEN
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LI...
Publication number
20220214626
Publication date
Jul 7, 2022
ASML NETHERLANDS B.V.
Mark Johannes Hermanus FRENCKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
Publication number
20220216092
Publication date
Jul 7, 2022
ASML Holding N.V.
Bruce TIRRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20220197154
Publication date
Jun 23, 2022
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE M...
Publication number
20220115260
Publication date
Apr 14, 2022
ASML NETHERLANDS B.V.
Johannes Josephus MAASSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD, SUBSTRATE AND SYSTEM FOR ESTIMATING STRESS IN A SUBSTRATE
Publication number
20220113640
Publication date
Apr 14, 2022
ASML NETHERLANDS B.V.
Thomas POIESZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HO...
Publication number
20220082952
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Abraham Alexander SOETHOUDT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURES AND METHODS FOR USE IN PHOTOLITHOGRAPHY
Publication number
20220019149
Publication date
Jan 20, 2022
ASM IP HOLDING B.V.
Daniele Piumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CARRIER SYSTEM, EXPOSURE APPARATUS, CARRIER METHOD, EXPOSURE METHOD...
Publication number
20210354309
Publication date
Nov 18, 2021
Nikon Corporation
Hideaki HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIEZOELECTRIC ACTUATOR, ACTUATOR SYSTEM, SUBSTRATE SUPPORT, AND LIT...
Publication number
20210318624
Publication date
Oct 14, 2021
ASML NETHERLANDS B.V.
Bas JANSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing semiconductor devices
Publication number
20210217670
Publication date
Jul 15, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Li-Chao Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
Publication number
20210216015
Publication date
Jul 15, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Kuan WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
Publication number
20210202293
Publication date
Jul 1, 2021
ASML Holding N.V.
Mehmet Ali AKBAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY APPARATUS
Publication number
20210165335
Publication date
Jun 3, 2021
ASML NETHERLANDS B.V.
Leon Paul VAN DIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR EMBOSSING OF A NANOSTRUCTURE
Publication number
20210129520
Publication date
May 6, 2021
EV GROUP E. THALLNER GMBH
Gerald Kreindl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage Apparatus, Lithographic Apparatus, Control Unit and Method
Publication number
20210116820
Publication date
Apr 22, 2021
ASML NETHERLANDS B.V.
Ringo Petrus Cornelis VAN DORST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOOL CONTROL USING MULTISTAGE LSTM FOR PREDICTING ON-WAFER MEASUREM...
Publication number
20210103221
Publication date
Apr 8, 2021
International Business Machines Corporation
Dung Tien Phan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Wafer Table with Dynamic Support Pins
Publication number
20210035848
Publication date
Feb 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY