Structural features, others than packages, for protecting a device against environmental influences

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2207/00Micro-structural systems or auxiliary parts thereof

Current Industry

B81B2207/11Structural features, others than packages, for protecting a device against environmental influences

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS devices with support structures and associated production methods
- Patent number 12,195,325
- Issue date Jan 14, 2025
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing monolithic integration of piezoelectric microm...
- Patent number 12,037,239
- Issue date Jul 16, 2024
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,964,866
- Issue date Apr 23, 2024
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mass flow control based on micro-electromechanical devices
- Patent number 11,772,958
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Nir Merry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stable landing above RF conductor in MEMS device
- Patent number 11,746,002
- Issue date Sep 5, 2023
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,667,516
- Issue date Jun 6, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device and manufacturing met...
- Patent number 11,623,861
- Issue date Apr 11, 2023
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof microphone and associated packing techniques
- Patent number 11,312,620
- Issue date Apr 26, 2022
- Kathirgamasundaram Sooriakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a flexible MEMS device
- Patent number 11,261,084
- Issue date Mar 1, 2022
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-sensor
- Patent number 11,117,798
- Issue date Sep 14, 2021
- Infineon Technologies AG
- Gunar Lorenz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superhydrophobic and superoleophobic nanosurfaces
- Patent number 11,090,903
- Issue date Aug 17, 2021
- The Regents of the University of California
- Sungho Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic integration of piezoelectric micromachined ultrasonic tr...
- Patent number 10,988,376
- Issue date Apr 27, 2021
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 10,968,097
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) structure
- Patent number 10,865,100
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Elevated MEMS device in a microphone with ingress protection
- Patent number 10,654,712
- Issue date May 19, 2020
- Knowles Electronics, LLC
- John J. Albers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superhydrophobic and superoleophobic nanosurfaces
- Patent number 10,569,506
- Issue date Feb 25, 2020
- The Regents of the University of California
- Sungho Jin
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Electronic apparatus including holding structure for micro electro...
- Patent number 10,534,242
- Issue date Jan 14, 2020
- Canon Kabushiki Kaisha
- Akira Tagaya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level package with enhanced performance
- Patent number 10,486,965
- Issue date Nov 26, 2019
- Qorvo US, Inc.
- Jan Edward Vandemeer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system structure and method for forming th...
- Patent number 10,457,546
- Issue date Oct 29, 2019
- United Microelectronics Corp.
- Yuan-Sheng Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level package with enhanced performance
- Patent number 10,442,687
- Issue date Oct 15, 2019
- Qorvo US, Inc.
- Jan Edward Vandemeer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level package with enhanced performance
- Patent number 10,407,302
- Issue date Sep 10, 2019
- Qorvo US, Inc.
- Jan Edward Vandemeer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level package with enhanced performance
- Patent number 10,364,146
- Issue date Jul 30, 2019
- Qorvo US, Inc.
- Jan Edward Vandemeer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane for a capacitive MEMS pressure sensor and method of formin...
- Patent number 10,351,420
- Issue date Jul 16, 2019
- Robert Bosch GmbH
- Ando Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structure including isolatio...
- Patent number 10,343,895
- Issue date Jul 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor pressure sensor for harsh media application
- Patent number 10,308,502
- Issue date Jun 4, 2019
- Melexis Technologies NV
- Laurent Otte
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation features for stacked dies
- Patent number 10,287,161
- Issue date May 14, 2019
- Analog Devices, Inc.
- Xiaojie Xue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level package with enhanced performance
- Patent number 10,239,751
- Issue date Mar 26, 2019
- Qorvo US, Inc.
- Jan Edward Vandemeer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level getter structure and encapsulation structure comprising...
- Patent number 10,221,063
- Issue date Mar 5, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Xavier Baillin
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE STABILIZATION OF MICRO ELECTROMECHANICAL SYSTEM SENSORS...
- Publication number 20250066187
- Publication date Feb 27, 2025
- VIAVI SOLUTIONS INC.
- Thomas SEVILLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR
- Publication number 20250059025
- Publication date Feb 20, 2025
- ROBERT BOSCH GmbH
- Martin Kittel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE AND METHOD FOR PREPARING SAME, AND SENSOR
- Publication number 20240359972
- Publication date Oct 31, 2024
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Lihui WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOORBELL CAMERA HAVING ACTIVE COOLING
- Publication number 20240336475
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINI PC HAVING ACTIVE COOLING
- Publication number 20240338062
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF
- Publication number 20240327205
- Publication date Oct 3, 2024
- Coretronic MEMS Corporation
- Mei-Ling Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL PACKAGING STRUCTURE
- Publication number 20240034620
- Publication date Feb 1, 2024
- Merry Electronics(Shenzhen) Co., Ltd.
- Yung-Hsiang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...
- Publication number 20240004184
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Luc Roger Simonne HASPESLAGH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A MICROFLUIDIC SENSOR
- Publication number 20230404777
- Publication date Dec 21, 2023
- CAMBRIDGE ENTERPRISE LIMITED
- Sohini KAR-NARAYAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
- Publication number 20230382715
- Publication date Nov 30, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) INCLUDING TANTALUM AS A STRUC...
- Publication number 20230271822
- Publication date Aug 31, 2023
- Carnegie Mellon University
- Maarten P. de Boer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
- Publication number 20230249959
- Publication date Aug 10, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
- Publication number 20230234834
- Publication date Jul 27, 2023
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A MECHANICAL BARRIER STRUCTURE
- Publication number 20230202833
- Publication date Jun 29, 2023
- INFINEON TECHNOLOGIES AG
- Marc Füldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
- Publication number 20230127991
- Publication date Apr 27, 2023
- WEMEMS CO.,LTD.
- Jonghyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
- Publication number 20230126914
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20230118429
- Publication date Apr 20, 2023
- TDK Electronics AG
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
- Publication number 20230107094
- Publication date Apr 6, 2023
- STMicroelectronics S.r.l.
- Gianluca LONGONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM ONE OR MOR...
- Publication number 20230094674
- Publication date Mar 30, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT...
- Publication number 20230099440
- Publication date Mar 30, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-S...
- Publication number 20230050748
- Publication date Feb 16, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016038
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin film getter structure having miniature heater and manufacturin...
- Publication number 20220340412
- Publication date Oct 27, 2022
- SHANGHAI INDUSTRIAL µTECHNOLOGY RESEARCH INSTITUTE
- Shinan WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL DEVICE FOR USE IN A FLOW CONTROL APPARATUS
- Publication number 20220081282
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Nir Merry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES WITH SUPPORT STRUCTURES AND ASSOCIATED PRODUCTION METHODS
- Publication number 20210363001
- Publication date Nov 25, 2021
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Structural features, others than packages, for protecting a device against environmental influences

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS devices with support structures and associated production methods

Drop resistant MEMS actuator-imager assembly package

Method for producing monolithic integration of piezoelectric microm...

MEMS device having uniform contacts

Support structure for MEMS device with particle filter

Mass flow control based on micro-electromechanical devices

Stable landing above RF conductor in MEMS device

MEMS device having uniform contacts

Micromechanical component for a sensor device and manufacturing met...

Waterproof microphone and associated packing techniques

Method of forming a flexible MEMS device

MEMS-sensor

Superhydrophobic and superoleophobic nanosurfaces

Monolithic integration of piezoelectric micromachined ultrasonic tr...

Support structure for MEMS device with particle filter

Method for forming micro-electro-mechanical system (MEMS) structure

Elevated MEMS device in a microphone with ingress protection

Superhydrophobic and superoleophobic nanosurfaces

Electronic apparatus including holding structure for micro electro...

Wafer-level package with enhanced performance

Micro-electro-mechanical system structure and method for forming th...

Wafer-level package with enhanced performance

Wafer-level package with enhanced performance

Wafer-level package with enhanced performance

Membrane for a capacitive MEMS pressure sensor and method of formin...

Micro-electro-mechanical system (MEMS) structure including isolatio...

Semiconductor pressure sensor for harsh media application

Stress isolation features for stacked dies

Wafer-level package with enhanced performance

Multi-level getter structure and encapsulation structure comprising...

Patents Applicationslast 30 patents

TEMPERATURE STABILIZATION OF MICRO ELECTROMECHANICAL SYSTEM SENSORS...

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

PACKAGE STRUCTURE AND METHOD FOR PREPARING SAME, AND SENSOR

DOORBELL CAMERA HAVING ACTIVE COOLING

MINI PC HAVING ACTIVE COOLING

PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

MICRO-ELECTROMECHANICAL PACKAGING STRUCTURE

HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...

A MICROFLUIDIC SENSOR

LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) INCLUDING TANTALUM AS A STRUC...

A SCANNING MEMS MIRROR DEVICE

MEMS DEVICE HAVING UNIFORM CONTACTS

LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE

MEMS DEVICE HAVING A MECHANICAL BARRIER STRUCTURE

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM ONE OR MOR...

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT...

MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-S...

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

Thin film getter structure having miniature heater and manufacturin...

MICRO-ELECTROMECHANICAL DEVICE FOR USE IN A FLOW CONTROL APPARATUS

MEMS DEVICES WITH SUPPORT STRUCTURES AND ASSOCIATED PRODUCTION METHODS