Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice-versa

Industry

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B81B3/0018

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice-versa

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Piezoelectric mems device with a suspended membrane having high mec...
- Patent number 12,185,633
- Issue date Dec 31, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lidar projection apparatus
- Patent number 12,164,033
- Issue date Dec 10, 2024
- Artilux, Inc.
- Tim K. Shia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 12,164,101
- Issue date Dec 10, 2024
- poLight ASA
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Quartz MEMS piezoelectric resonator for chipscale RF antennae
- Patent number 12,166,471
- Issue date Dec 10, 2024
- HRL Laboratories, LLC
- Randall L. Kubena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
- Patent number 12,140,752
- Issue date Nov 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Load-lock gauge
- Patent number 12,055,452
- Issue date Aug 6, 2024
- MKS Instruments, Inc.
- Gerardo A. Brucker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for controlling a drive apparatus of a micro-oscillation mir...
- Patent number 12,055,705
- Issue date Aug 6, 2024
- Valeo Schalter und Sensoren GmbH
- Jochen Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS inertial sensor with high resilience to the phenomenon of stic...
- Patent number 12,038,454
- Issue date Jul 16, 2024
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Image projection device
- Patent number 12,038,680
- Issue date Jul 16, 2024
- Sony Group Corporation
- Yusuke Ogawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning device and method for manufacturing the same
- Patent number 12,038,576
- Issue date Jul 16, 2024
- Mitsubishi Electric Corporation
- Nobuaki Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern recognition used to characterize LIDAR window obstruction
- Patent number 12,019,186
- Issue date Jun 25, 2024
- Innoviz Technologies Ltd.
- Nir Osiroff
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Capacitance gap measurement
- Patent number 12,017,907
- Issue date Jun 25, 2024
- Invensense, Inc.
- Edoardo Belloni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Techniques for alternate pressure equalization of a sensor
- Patent number 12,013,282
- Issue date Jun 18, 2024
- Invensense, Inc.
- Jeremy Parker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Binning and non-binning combination
- Patent number 12,000,960
- Issue date Jun 4, 2024
- Innoviz Technologies Ltd.
- Oded Yeruhami
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Distributing LIDAR system components
- Patent number 11,994,620
- Issue date May 28, 2024
- Innoviz Technologies Ltd.
- Amit Steinberg
- B60 - VEHICLES IN GENERAL
Information Patent Grant
MEMS inclinometer having a reduced vibration rectification error
- Patent number 11,993,509
- Issue date May 28, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure and method for manufacturing the same
- Patent number 11,970,388
- Issue date Apr 30, 2024
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric body and MEMS device using same
- Patent number 11,968,902
- Issue date Apr 23, 2024
- National Institute of Advanced Industrial Science and Technology
- Masato Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding manufacturing method
- Patent number 11,952,263
- Issue date Apr 9, 2024
- Robert Bosch GmbH
- Mike Schwarz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a capacitive pressure sensor device
- Patent number 11,940,345
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Thomas Friedrich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure including a functional element sit...
- Patent number 11,939,215
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Penny Weir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device having a rugged package and fabrication process thereof
- Patent number 11,873,215
- Issue date Jan 16, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element, angular velocity sensor, and multi-axis angular vel...
- Patent number 11,835,338
- Issue date Dec 5, 2023
- Kyocera Corporation
- Munetaka Soejima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-parametric machine olfaction
- Patent number 11,828,742
- Issue date Nov 28, 2023
- Brown University
- Jacob K. Rosenstein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gyroscope with calibration of the scale factor in real time an...
- Patent number 11,808,573
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Luca Guerinoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Load-lock gauge
- Patent number 11,802,806
- Issue date Oct 31, 2023
- MKS Instruments, Inc.
- Gerardo A. Brucker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical structure and micromecha...
- Patent number 11,787,687
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Aggregating data over time to improve image quality
- Patent number 11,782,137
- Issue date Oct 10, 2023
- Innoviz Technologies Ltd.
- Amit Steinberg
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Mass flow control based on micro-electromechanical devices
- Patent number 11,772,958
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Nir Merry
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR SYSTEMS AND METHODS
- Publication number 20240337732
- Publication date Oct 10, 2024
- Innoviz Technologies Ltd.
- Amir DAY
- B60 - VEHICLES IN GENERAL
Information Patent Application
Multi-Parametric Machine Olfaction
- Publication number 20240255483
- Publication date Aug 1, 2024
- Brown University
- Jacob K. Rosenstein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING PACKAGE STRUCTURE
- Publication number 20240217808
- Publication date Jul 4, 2024
- WINBOND ELECTRONICS CORP.
- Jin-Neng WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEVICE COMPRISING A LENS AND AN ACTUATOR FOR CONTROLLI...
- Publication number 20240061236
- Publication date Feb 22, 2024
- Polight ASA
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Load-Lock Gauge
- Publication number 20240019332
- Publication date Jan 18, 2024
- MKS Instruments, Inc.
- Gerardo A. Brucker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH REGISTRATION PARTICLES-TRANSFERRING SYSTEM
- Publication number 20230366093
- Publication date Nov 16, 2023
- Xerox Corporation
- Yunda Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...
- Publication number 20230320222
- Publication date Oct 5, 2023
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultra-High Frequency MEMS Resonators with First and Second Order Te...
- Publication number 20230264946
- Publication date Aug 24, 2023
- Stathera IP Holdings Inc.
- Anosh Daruwalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC VALVE, METHOD FOR ITS MANUFACTURE, AND USES THEREOF
- Publication number 20230258164
- Publication date Aug 17, 2023
- Consejo Superior de Investigaciones Cientificas (CSIC)
- Carlos SÁNCHEZ SOMOLINOS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-PARAMETRIC MACHINE OLFACTION
- Publication number 20230251238
- Publication date Aug 10, 2023
- Brown University
- Jacob K. Rosenstein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Distributed MEMS Switch Array Design with Multiple Input/Output Ports
- Publication number 20230202831
- Publication date Jun 29, 2023
- Menlo Microsystems, Inc.
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wavefront reversal device using a MEMS spatial phase modulator inte...
- Publication number 20230174368
- Publication date Jun 8, 2023
- David M Pepper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING A PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY...
- Publication number 20230130082
- Publication date Apr 27, 2023
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOACOUSTIC SENSORS AND MEMS DEVICES
- Publication number 20230116926
- Publication date Apr 20, 2023
- INFINEON TECHNOLOGIES AG
- Rainer Markus SCHALLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AGGREGATING DATA OVER TIME TO IMPROVE IMAGE QUALITY
- Publication number 20230121373
- Publication date Apr 20, 2023
- Innoviz Technologies Ltd.
- Amit Steinberg
- B60 - VEHICLES IN GENERAL
Information Patent Application
INTEGRATED MEMS RESONATOR AND METHOD
- Publication number 20230085673
- Publication date Mar 23, 2023
- Mohamed A. Abdelmoneum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS INERTIAL SENSOR WITH HIGH RESILIENCE TO THE PHENOMENON OF STIC...
- Publication number 20230083632
- Publication date Mar 16, 2023
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR DEVICE
- Publication number 20230084499
- Publication date Mar 16, 2023
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NO-GEL PRESSURE SENSOR PACKAGE
- Publication number 20230059566
- Publication date Feb 23, 2023
- NXP USA, Inc.
- Stephen Ryan Hooper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...
- Publication number 20230041830
- Publication date Feb 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Sergio Fabian Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MICROMACHINED STRUCTURES
- Publication number 20220411262
- Publication date Dec 29, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS ACOUSTIC SENSOR
- Publication number 20220390310
- Publication date Dec 8, 2022
- United Microelectronics Center Co., Ltd
- Pengcheng WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TECHNIQUES FOR ALTERNATE PRESSURE EQUALIZATION OF A SENSOR
- Publication number 20220381605
- Publication date Dec 1, 2022
- InvenSense, Inc.
- Jeremy Parker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR FOR IN-PLANE MOVEMENT OF A MOBILE MASS AND OPTICAL MO...
- Publication number 20220380199
- Publication date Dec 1, 2022
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...
- Publication number 20220342200
- Publication date Oct 27, 2022
- Beijing Voyager Technology Co., Ltd.
- Sergio Fabian Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220324698
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH INCLUDING A CAP CONTACT
- Publication number 20220324696
- Publication date Oct 13, 2022
- ROBERT BOSCH GmbH
- Bernd Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220326354
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice-versa

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezoelectric mems device with a suspended membrane having high mec...

Lidar projection apparatus

MEMS optical device comprising a lens and an actuator for controlli...

Quartz MEMS piezoelectric resonator for chipscale RF antennae

Thermal control of MEMS mirrors to limit resonant frequency shift

Load-lock gauge

Method for controlling a drive apparatus of a micro-oscillation mir...

MEMS inertial sensor with high resilience to the phenomenon of stic...

Image projection device

Optical scanning device and method for manufacturing the same

Pattern recognition used to characterize LIDAR window obstruction

Capacitance gap measurement

Techniques for alternate pressure equalization of a sensor

Binning and non-binning combination

Distributing LIDAR system components

MEMS inclinometer having a reduced vibration rectification error

Package structure and method for manufacturing the same

Piezoelectric body and MEMS device using same

Micromechanical sensor device and corresponding manufacturing method

Micromechanical component for a capacitive pressure sensor device

Microelectromechanical structure including a functional element sit...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Mems device having a rugged package and fabrication process thereof

Sensor element, angular velocity sensor, and multi-axis angular vel...

Multi-parametric machine olfaction

MEMS gyroscope with calibration of the scale factor in real time an...

Load-lock gauge

Method for manufacturing a micromechanical structure and micromecha...

Aggregating data over time to improve image quality

Mass flow control based on micro-electromechanical devices

Patents Applicationslast 30 patents

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

MULTI-LEVEL MEMS PROCESS

LIDAR SYSTEMS AND METHODS

Multi-Parametric Machine Olfaction

METHOD FOR MANUFACTURING PACKAGE STRUCTURE

MEMS OPTICAL DEVICE COMPRISING A LENS AND AN ACTUATOR FOR CONTROLLI...

Load-Lock Gauge

HIGH REGISTRATION PARTICLES-TRANSFERRING SYSTEM

PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...

Ultra-High Frequency MEMS Resonators with First and Second Order Te...

MICROFLUIDIC VALVE, METHOD FOR ITS MANUFACTURE, AND USES THEREOF

MULTI-PARAMETRIC MACHINE OLFACTION

Distributed MEMS Switch Array Design with Multiple Input/Output Ports

Wavefront reversal device using a MEMS spatial phase modulator inte...

METHOD OF MAKING A PIEZOELECTRIC SENSOR WITH INCREASED SENSITIVITY...

PHOTOACOUSTIC SENSORS AND MEMS DEVICES

AGGREGATING DATA OVER TIME TO IMPROVE IMAGE QUALITY

INTEGRATED MEMS RESONATOR AND METHOD

MEMS INERTIAL SENSOR WITH HIGH RESILIENCE TO THE PHENOMENON OF STIC...

MICROMIRROR DEVICE

NO-GEL PRESSURE SENSOR PACKAGE

SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...

SURFACE MICROMACHINED STRUCTURES

PIEZOELECTRIC MEMS ACOUSTIC SENSOR

TECHNIQUES FOR ALTERNATE PRESSURE EQUALIZATION OF A SENSOR

MEMS ACTUATOR FOR IN-PLANE MOVEMENT OF A MOBILE MASS AND OPTICAL MO...

SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A ME...

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MEMS SWITCH INCLUDING A CAP CONTACT

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY