Structures dimensioned for mechanical prevention of stiction

Industry

CPC
B81B3/0013

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0013Structures dimensioned for mechanical prevention of stiction

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Sound producing cell
- Patent number 12,192,722
- Issue date Jan 7, 2025
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 12,151,932
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing cell and manufacturing method thereof
- Patent number 11,943,595
- Issue date Mar 26, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator and physical quantity sensor
- Patent number 11,846,651
- Issue date Dec 19, 2023
- Denso Corporation
- Shota Harada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,834,325
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,814,283
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,584,634
- Issue date Feb 21, 2023
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,365,115
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer including free plate diaphragm with spring members
- Patent number 11,197,104
- Issue date Dec 7, 2021
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film material transfer method
- Patent number 11,180,367
- Issue date Nov 23, 2021
- The University of Manchester
- Aravind Vijayaraghavan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 11,040,870
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,882,735
- Issue date Jan 5, 2021
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical component
- Patent number 10,794,928
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,766,764
- Issue date Sep 8, 2020
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator and switch
- Patent number 10,457,543
- Issue date Oct 29, 2019
- Sony Corporation
- Shinya Morita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,421,659
- Issue date Sep 24, 2019
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 10,287,159
- Issue date May 14, 2019
- MURATA MANUFACTURING CO., LTD.
- Junya Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,239,746
- Issue date Mar 26, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semi-flexible proof-mass
- Patent number 10,190,938
- Issue date Jan 29, 2019
- Murata Manufacturing Co., Ltd.
- Anssi Blomqvist
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and structures of integrated MEMS-CMOS devices
- Patent number 9,950,924
- Issue date Apr 24, 2018
- MCube, Inc.
- Sudheer S. Sridharamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic apparatus, and moving body
- Patent number 9,746,490
- Issue date Aug 29, 2017
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional device, electronic apparatus, and moving object
- Patent number 9,718,670
- Issue date Aug 1, 2017
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system device with enhanced structural str...
- Patent number 9,660,555
- Issue date May 23, 2017
- Pixart Imaging Incorporation
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,580,298
- Issue date Feb 28, 2017
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS BUMP STOPPER SURFACE FEATURES
- Publication number 20240208800
- Publication date Jun 27, 2024
- KNOWLES ELECTRONICS, LLC
- Ken Deng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
- Publication number 20240140781
- Publication date May 2, 2024
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20230382712
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20230373780
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES
- Publication number 20230305291
- Publication date Sep 28, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Lisa Wesneski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRONIC NON-LANDING MIRROR SYSTEM
- Publication number 20230008066
- Publication date Jan 12, 2023
- SHENZHEN LIGHTING INSTITUTE
- Andrew Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20220306452
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...
- Publication number 20220048758
- Publication date Feb 17, 2022
- ROBERT BOSCH GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210309508
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20210155471
- Publication date May 27, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20210130160
- Publication date May 6, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20210130159
- Publication date May 6, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20210061641
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC ACTUATOR AND PHYSICAL QUANTITY SENSOR
- Publication number 20210041475
- Publication date Feb 11, 2021
- DENSO CORPORATION
- Shota HARADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
- Publication number 20210024348
- Publication date Jan 28, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER INCLUDING FREE PLATE DIAPHRAGM WITH SPRING MEMBERS
- Publication number 20200245077
- Publication date Jul 30, 2020
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
- Publication number 20200166156
- Publication date May 28, 2020
- MICROFAB SERVICE GMBH
- Marco CORDELAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN FILM MATERIAL TRANSFER METHOD
- Publication number 20200048082
- Publication date Feb 13, 2020
- The University of Manchester
- Aravind VIJAYARAGHAVAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT
- Publication number 20190359479
- Publication date Nov 28, 2019
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20190152766
- Publication date May 23, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT
- Publication number 20190144264
- Publication date May 16, 2019
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20180134543
- Publication date May 17, 2018
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME
- Publication number 20180127263
- Publication date May 10, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chuan TAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH OFFSET ELECTRODE
- Publication number 20180079640
- Publication date Mar 22, 2018
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC ACTUATOR AND SWITCH
- Publication number 20170369303
- Publication date Dec 28, 2017
- SONY CORPORATION
- SHINYA MORITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20170073214
- Publication date Mar 16, 2017
- Murata Manufacturing Co., Ltd.
- Junya Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY INCREASING SURFACE ROUGHNESS
- Publication number 20160176707
- Publication date Jun 23, 2016
- FREESCALE SEMICONDUCTOR, INC.
- RUBEN B. MONTEZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-PHASED MEMS PLATE LOWERING AND LIFTING SYSTEM AND METHOD
- Publication number 20160075548
- Publication date Mar 17, 2016
- TEXAS INSTRUMENTS INCORPORATED
- Paul G. Barker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE
- Publication number 20160033759
- Publication date Feb 4, 2016
- HIMAX DISPLAY, INC.
- Hui-Lun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Structures dimensioned for mechanical prevention of stiction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sound producing cell

Optical device and method for manufacturing same

Microelectromechanical systems device having a mechanically robust...

Sound producing cell and manufacturing method thereof

Electrostatic actuator and physical quantity sensor

Piezoelectric anti-stiction structure for microelectromechanical sy...

Microelectromechanical systems device having a mechanically robust...

Manufacturing method of semiconductor structure

Micromechanical component and method for manufacturing a micromecha...

Micro check valve and system with multiple micro check valves and m...

Piezoelectric anti-stiction structure for microelectromechanical sy...

Manufacturing method of semiconductor structure

MEMS transducer including free plate diaphragm with spring members

Method for preparing silicon wafer with rough surface and silicon w...

Thin film material transfer method

Microelectromechanical systems device having a mechanically robust...

Vertical stopper for capping MEMS devices

Microelectromechanical component

MEMS sensor compensation for off-axis movement

Electrostatic actuator and switch

MEMS sensor compensation for off-axis movement

MEMS device

Vertical stopper for capping MEMS devices

Semi-flexible proof-mass

MEMS and method for forming the same

Methods and structures of integrated MEMS-CMOS devices

Physical quantity sensor, electronic apparatus, and moving body

Functional device, electronic apparatus, and moving object

Micro-electro-mechanical system device with enhanced structural str...

Micro-electro-mechanical system (MEMS) structures and design struct...

Patents Applicationslast 30 patents

MEMS BUMP STOPPER SURFACE FEATURES

MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES

MICRO-ELECTRONIC NON-LANDING MIRROR SYSTEM

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

OPTICAL DEVICE

OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME

OPTICAL DEVICE

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

ELECTROSTATIC ACTUATOR AND PHYSICAL QUANTITY SENSOR

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...

MEMS TRANSDUCER INCLUDING FREE PLATE DIAPHRAGM WITH SPRING MEMBERS

MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...

THIN FILM MATERIAL TRANSFER METHOD

MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

MEMS STRUCTURE WITH BILAYER STOPPER AND METHOD FOR FORMING THE SAME

MEMS DEVICE WITH OFFSET ELECTRODE

ELECTROSTATIC ACTUATOR AND SWITCH

MEMS DEVICE

REDUCING MEMS STICTION BY INCREASING SURFACE ROUGHNESS

MULTI-PHASED MEMS PLATE LOWERING AND LIFTING SYSTEM AND METHOD

MICROELECTROMECHANICAL SYSTEM DEVICE