Structures having a predefined profile

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CPC
B81C1/00103

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00103Structures having a predefined profile

Industries

Patents Grantslast 30 patents

Information Patent Grant
Microfluidic device and preparation method therefor, and microfluid...
- Patent number 12,122,664
- Issue date Oct 22, 2024
- INSTITUTE OF FLEXIBLE ELECTRONICS TECHNOLOGY OF THU, ZHEJIANG
- Xue Feng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a trench in a first semiconductor layer of a mul...
- Patent number 12,094,717
- Issue date Sep 17, 2024
- Robert Bosch GmbH
- Christof Schwenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion generating device, method for manufacturing same, and air condi...
- Patent number 12,036,562
- Issue date Jul 16, 2024
- LG Electronics Inc.
- Sanggu Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual membrane transducer
- Patent number 11,905,167
- Issue date Feb 20, 2024
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 11,524,891
- Issue date Dec 13, 2022
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 11,434,131
- Issue date Sep 6, 2022
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component especially for horology with surface topology and method...
- Patent number 10,981,783
- Issue date Apr 20, 2021
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 10,981,780
- Issue date Apr 20, 2021
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 10,954,123
- Issue date Mar 23, 2021
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a cavity and a component having a cavity
- Patent number 10,840,107
- Issue date Nov 17, 2020
- Robert Bosch GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 10,773,948
- Issue date Sep 15, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for obtaining at least one structure approximating a sought...
- Patent number 10,739,583
- Issue date Aug 11, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Reboud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing a micromechanica...
- Patent number 10,696,542
- Issue date Jun 30, 2020
- Robert Bosch GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a microelectromechanical systems (MEMS) device using silico...
- Patent number 10,604,405
- Issue date Mar 31, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS and/or NEMS structure comprising at le...
- Patent number 10,585,074
- Issue date Mar 10, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method for manufacturing the same
- Patent number 10,584,025
- Issue date Mar 10, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanochannel device with three dimensional gradient by single step e...
- Patent number 10,464,061
- Issue date Nov 5, 2019
- INTERNATIONAL BUSINESS MACHINES CORPORTAION
- Jingwei Bai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a cavity and a component having a cavity
- Patent number 10,431,474
- Issue date Oct 1, 2019
- Robert Bosch GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of three-dimensional structures using reflowed molding
- Patent number 10,335,978
- Issue date Jul 2, 2019
- Honeywell International Inc.
- Grant Lodden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for creating patterns
- Patent number 10,336,023
- Issue date Jul 2, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Nicolas Posseme
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Use of shear to incorporate tilt into the microstructure of reversi...
- Patent number 10,259,975
- Issue date Apr 16, 2019
- The Administrators of the Tulane Educational Fund
- Noshir Pesika
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-based component with at least one chamfer and its fabricati...
- Patent number 10,197,973
- Issue date Feb 5, 2019
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic pump and valve structures and fabrication methods
- Patent number 10,119,619
- Issue date Nov 6, 2018
- Rheonix, Inc.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bowl-shaped structure, method for manufacturing same, and bowl array
- Patent number 9,956,740
- Issue date May 1, 2018
- Sogang University Research Foundation
- Kyung Byung Yoon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduction of chipping damage to MEMS structure
- Patent number 9,738,511
- Issue date Aug 22, 2017
- Invensense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with a reduced contact surface and its fa...
- Patent number 9,731,964
- Issue date Aug 15, 2017
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CREATING SURFACE MICROSTRUCTURES
- Publication number 20250004183
- Publication date Jan 2, 2025
- ROLIC Technologies AG
- Martin URBANSKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20240158224
- Publication date May 16, 2024
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Support for Dual Backplate Transducers
- Publication number 20230002219
- Publication date Jan 5, 2023
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL
- Publication number 20220371880
- Publication date Nov 24, 2022
- Microsoft Technology Licensing, LLC
- Risto Heikki MUTIKAINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...
- Publication number 20210171340
- Publication date Jun 10, 2021
- CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA RECHERCHE ET DEVELO...
- Nicolas BLONDIAUX
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Support for Dual Backplate Transducers
- Publication number 20210139319
- Publication date May 13, 2021
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND PREPARATION METHOD THEREFOR, AND MICROFLUID...
- Publication number 20210053815
- Publication date Feb 25, 2021
- INSTITUTE OF FLEXIBLE ELECTRONICS TECHNOLOGY OF THU, ZHEJIANG
- Xue FENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20210053821
- Publication date Feb 25, 2021
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS MICROPHONE
- Publication number 20200231429
- Publication date Jul 23, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...
- Publication number 20200231433
- Publication date Jul 23, 2020
- ROBERT BOSCH GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MICROSTRUCTURES
- Publication number 20200071160
- Publication date Mar 5, 2020
- EPIGEM LIMITED
- Richard TRAYNOR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT ESPECIALLY FOR HOROLOGY WITH SURFACE TOPOLOGY AND METHOD...
- Publication number 20200048081
- Publication date Feb 13, 2020
- Nivarox-Far S.A.
- Alex GANDELHMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY
- Publication number 20190348300
- Publication date Nov 14, 2019
- ROBERT BOSCH GmbH
- Simon Armbruster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Use of Shear to Incorporate Tilt into the Microstructure of Reversi...
- Publication number 20190211235
- Publication date Jul 11, 2019
- The Administrators of the Tulane Educational Fund
- Noshir Pesika
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180208455
- Publication date Jul 26, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...
- Publication number 20180194616
- Publication date Jul 12, 2018
- ROBERT BOSCH GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
- Publication number 20180105416
- Publication date Apr 19, 2018
- ROBERT BOSCH GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of Forming a Substrate Opening
- Publication number 20140357086
- Publication date Dec 4, 2014
- Mark Kiehlbauch
- B44 - DECORATIVE ARTS
Information Patent Application
METHOD FOR ETCHING A COMPLEX PATTERN
- Publication number 20140342557
- Publication date Nov 20, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS
- Publication number 20140246618
- Publication date Sep 4, 2014
- RHEONIX, INC.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BOWL-SHAPED STRUCTURE, METHOD FOR MANUFACTURING SAME, AND BOWL ARRAY
- Publication number 20140141184
- Publication date May 22, 2014
- SOGANG UNIVERSITY RESEARCH FOUNDATION
- Kyung Byung Yoon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CYLINDER CHANNEL HAVING A SAWTOOTH-SHAPED CROSS SECTION, COAXIAL CH...
- Publication number 20130323840
- Publication date Dec 5, 2013
- Korea University Research and Business Foundation
- Sang Hoon Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL WINDOW DEVICE FOR A MEMS DEVICE
- Publication number 20130285169
- Publication date Oct 31, 2013
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF
- Publication number 20130244181
- Publication date Sep 19, 2013
- Georgia Tech Research Corporation
- Paul A. Kohl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130212882
- Publication date Aug 22, 2013
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Dae Sik LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS
- Publication number 20130105017
- Publication date May 2, 2013
- RHEONIX, INC.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A...
- Publication number 20130047738
- Publication date Feb 28, 2013
- Endress + Hauser GmbH + Co.KG
- Anh Tuan Tham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MAKING NANOCONE STRUCTURES AND USING THE STRUCTURES TO...
- Publication number 20130025322
- Publication date Jan 31, 2013
- Massachusetts Institute of Technology
- Hyungryul Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE
- Publication number 20120306830
- Publication date Dec 6, 2012
- Hitachi Displays, Ltd.
- Yasukazu KIMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Structures having a predefined profile

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfluidic device and preparation method therefor, and microfluid...

Method for forming a trench in a first semiconductor layer of a mul...

Ion generating device, method for manufacturing same, and air condi...

Dual membrane transducer

Method for preparing micro-cavity array surface product with inclin...

Membrane support for dual backplate transducers

Methods for manufacturing micromechanical components and method for...

Manufacturing method for a micromechanical window structure and cor...

Component especially for horology with surface topology and method...

Membrane support for dual backplate transducers

Methods for manufacturing micromechanical components and method for...

Method for forming a cavity and a component having a cavity

Method for manufacturing MEMS microphone

Method for obtaining at least one structure approximating a sought...

Spectrally and temporally engineered processing using photoelectroc...

Micromechanical component and method for producing a micromechanica...

Forming a microelectromechanical systems (MEMS) device using silico...

Method of fabricating a MEMS and/or NEMS structure comprising at le...

MEMS microphone and method for manufacturing the same

Nanochannel device with three dimensional gradient by single step e...

Method for forming a cavity and a component having a cavity

Fabrication of three-dimensional structures using reflowed molding

Method for creating patterns

Use of shear to incorporate tilt into the microstructure of reversi...

Silicon-based component with at least one chamfer and its fabricati...

Microfluidic pump and valve structures and fabrication methods

Spectrally and temporally engineered processing using photoelectroc...

Bowl-shaped structure, method for manufacturing same, and bowl array

Reduction of chipping damage to MEMS structure

Micromechanical component with a reduced contact surface and its fa...

Patents Applicationslast 30 patents

METHOD FOR CREATING SURFACE MICROSTRUCTURES

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

Membrane Support for Dual Backplate Transducers

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...

Membrane Support for Dual Backplate Transducers

MICROFLUIDIC DEVICE AND PREPARATION METHOD THEREFOR, AND MICROFLUID...

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

METHOD FOR MANUFACTURING MEMS MICROPHONE

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...

METHOD FOR FORMING MICROSTRUCTURES

COMPONENT ESPECIALLY FOR HOROLOGY WITH SURFACE TOPOLOGY AND METHOD...

METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY

Use of Shear to Incorporate Tilt into the Microstructure of Reversi...

MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND COR...

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...

Methods of Forming a Substrate Opening

METHOD FOR ETCHING A COMPLEX PATTERN

MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS

BOWL-SHAPED STRUCTURE, METHOD FOR MANUFACTURING SAME, AND BOWL ARRAY

CYLINDER CHANNEL HAVING A SAWTOOTH-SHAPED CROSS SECTION, COAXIAL CH...

METHOD FOR PRODUCING AN OPTICAL WINDOW DEVICE FOR A MEMS DEVICE

POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF

MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME

MICROFLUIDIC PUMP AND VALVE STRUCTURES AND FABRICATION METHODS

PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A...

PROCESS FOR MAKING NANOCONE STRUCTURES AND USING THE STRUCTURES TO...

DISPLAY DEVICE