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CPC
C30B25/12

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

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C30B25/12Substrate holders or susceptors

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Patents Grantslast 30 patents

Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for producing 2D materials by moving forming layers dispose...
- Patent number 12,110,610
- Issue date Oct 8, 2024
- General Graphene Corp.
- James Vig Sherrill
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for forming large area single crystal diamond substrates wi...
- Patent number 12,098,475
- Issue date Sep 24, 2024
- Board of Trustees of Michigan State University
- Timothy A. Grotjohn
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition equipment with adjustable temperature source
- Patent number 12,009,208
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih Yung Hung
- C30 - CRYSTAL GROWTH
Information Patent Grant
Susceptor, epitaxial growth apparatus, method of producing epitaxia...
- Patent number 11,984,346
- Issue date May 14, 2024
- Sumco Corporation
- Kazuhiro Narahara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for depositing an epitaxial layer on a front side of a semic...
- Patent number 11,982,015
- Issue date May 14, 2024
- Siltronic AG
- Joerg Haberecht
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptors for induction heating with thermal uniformity
- Patent number 11,979,965
- Issue date May 7, 2024
- King Abdullah University of Science and Technology
- Xiaohang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for connecting a susceptor to a drive shaft
- Patent number 11,959,190
- Issue date Apr 16, 2024
- Aixtron SE
- Torsten Werner Bastke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for conditioning a processing reactor
- Patent number 11,926,892
- Issue date Mar 12, 2024
- GlobalWafers Co., Ltd.
- Gang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a source/drain
- Patent number 11,929,401
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Wei Lee
- C30 - CRYSTAL GROWTH
Information Patent Grant
Diamonds and hetero-epitaxial methods of forming diamonds
- Patent number 11,905,619
- Issue date Feb 20, 2024
- M7D Corporation
- John P. Ciraldo
- C30 - CRYSTAL GROWTH
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...
- Patent number 11,869,767
- Issue date Jan 9, 2024
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shugo Nitta
- C30 - CRYSTAL GROWTH
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for alignment of a susceptor
- Patent number 11,859,307
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Edric Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device and method for manufacturing epitaxial sili...
- Patent number 11,846,039
- Issue date Dec 19, 2023
- Sumco Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
ALD method with multi-chambers for sic or multi-elements epitaxial...
- Patent number 11,834,754
- Issue date Dec 5, 2023
- SiEn (QingDao) Integrated Circuits Co., Ltd
- Zhaosheng Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber including lower volume upper dome
- Patent number 11,821,106
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Keum Seok Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing lateral growth of GaN crystals in an ammonother...
- Patent number 11,821,108
- Issue date Nov 21, 2023
- Instytut Wysokich Cisnien Polskiej Akademii Nauk
- Karolina Grabianska
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
- Patent number 11,784,026
- Issue date Oct 10, 2023
- Samsung Electronics Co., Ltd.
- Woongsik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer susceptor with improved thermal characteristics
- Patent number 11,773,506
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hung Lin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for stressing semiconductor substrates
- Patent number 11,764,071
- Issue date Sep 19, 2023
- GlobalWafers Co., Ltd.
- Robert J. Falster
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,749,525
- Issue date Sep 5, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
- Publication number 20240410077
- Publication date Dec 12, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Xuelun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMONDS AND HETERO-EPITAXIAL METHOD OF FORMING DIAMONDS
- Publication number 20240401232
- Publication date Dec 5, 2024
- Advanced Diamond Holdings, LLC
- John P. Ciraldo
- C30 - CRYSTAL GROWTH
Information Patent Application
REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240368803
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...
- Publication number 20240363378
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...
- Publication number 20240363390
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Xinning LUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...
- Publication number 20240360590
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR
- Publication number 20240347372
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Balakrishnam R. JAMPANA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Equipment with Adjustable Temperature Source
- Publication number 20240332018
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih Yung Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...
- Publication number 20240309548
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Awse MA'AYA
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL REACTION DEVICE
- Publication number 20240309550
- Publication date Sep 19, 2024
- Shenzhen Naso Tech Co Ltd
- Yunzhang XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR PRODUCING GROUP III NITRIDE CRYSTAL
- Publication number 20240271323
- Publication date Aug 15, 2024
- Panasonic Holdings Corporation
- Junichi TAKINO
- C30 - CRYSTAL GROWTH
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER WITH COVERING SYSTEM AND EPITAXIAL REACTOR
- Publication number 20240271319
- Publication date Aug 15, 2024
- LPE S.P.A.
- Srinivas Yarlagadda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning Wide Bandgap Epitaxial Susceptors and Method Therefor
- Publication number 20240266207
- Publication date Aug 8, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- B08 - CLEANING
Information Patent Application
INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...
- Publication number 20240254627
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...
- Publication number 20240247405
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Alexandros ANASTASOPOULOS
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240240319
- Publication date Jul 18, 2024
- CV Research Corporation
- Hiroshi KAWAURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE WAFER MADE...
- Publication number 20240218558
- Publication date Jul 4, 2024
- Siltronic AG
- Thomas STETTNER
- C30 - CRYSTAL GROWTH
Information Patent Application
THIN-FILM DEPOSITION APPARATUS
- Publication number 20240218561
- Publication date Jul 4, 2024
- Samsung Electronics Co., Ltd.
- Janghwi Lee
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS
- Publication number 20240218562
- Publication date Jul 4, 2024
- GLOBALWAFERS CO., LTD.
- Manabu Hamano
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20240209502
- Publication date Jun 27, 2024
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming a Source/Drain
- Publication number 20240213330
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manfacturing Co., Ltd.
- Chien-Wei Lee
- C30 - CRYSTAL GROWTH
Information Patent Application
LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...
- Publication number 20240198468
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Aniketnitin PATIL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EPITAXY SUSCEPTOR, EPITAXY GROWTH APPARATUS AND MANUFACTURING METHO...
- Publication number 20240191393
- Publication date Jun 13, 2024
- ZING SEMICONDUCTOR CORPORATION
- Gongbai CAO
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL GROWTH APPARATUS AND MULTI-LAYER GAS SUPPLY MODULE USED T...
- Publication number 20240183036
- Publication date Jun 6, 2024
- PJP TECH INC
- Bum Ho CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE-SIZE DIAMOND, MPCVD DEVICE AND PREPARATION METHOD OF LARGE-SI...
- Publication number 20240183067
- Publication date Jun 6, 2024
- ZHENGZHOU RESEARCH INSTITUTE FOR ABRASIVES & GRINDING CO., LTD.
- Xiaolei Wu
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...
- Publication number 20240175133
- Publication date May 30, 2024
- VEECO INSTRUMENTS INC.
- Ajit Paranjpe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Substrate holders or susceptors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Quartz susceptor for accurate non-contact temperature measurement

Methods for producing 2D materials by moving forming layers dispose...

Methods for forming large area single crystal diamond substrates wi...

Method for epitaxially depositing a material on a substrate by flow...

In-situ film growth rate monitoring apparatus, systems, and methods...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Apparatus and method for manufacturing hexagonal silicon crystal

Substrate lift mechanism and reactor including same

Deposition equipment with adjustable temperature source

Susceptor, epitaxial growth apparatus, method of producing epitaxia...

Method for depositing an epitaxial layer on a front side of a semic...

Susceptors for induction heating with thermal uniformity

Device for connecting a susceptor to a drive shaft

Apparatus for growing a semiconductor wafer and associated manufact...

Methods for conditioning a processing reactor

Method of forming a source/drain

Diamonds and hetero-epitaxial methods of forming diamonds

High pressure spatial chemical vapor deposition system and related...

Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...

Modular reactor for microwave plasma-assisted deposition

Apparatus and methods for alignment of a susceptor

Vapor deposition device and method for manufacturing epitaxial sili...

Thermal processing susceptor

ALD method with multi-chambers for sic or multi-elements epitaxial...

Semiconductor process chamber including lower volume upper dome

Method for reducing lateral growth of GaN crystals in an ammonother...

Substrate processing apparatus, material layer deposition apparatus...

Wafer susceptor with improved thermal characteristics

Apparatus for stressing semiconductor substrates

Vapor phase growth apparatus and vapor phase growth method

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

DIAMONDS AND HETERO-EPITAXIAL METHOD OF FORMING DIAMONDS

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...

Batch Mode Silicon Carbide Epitaxial Reactor

GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

SUSCEPTOR

Deposition Equipment with Adjustable Temperature Source

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...

EPITAXIAL REACTION DEVICE

DEVICE AND METHOD FOR PRODUCING GROUP III NITRIDE CRYSTAL

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

REACTION CHAMBER WITH COVERING SYSTEM AND EPITAXIAL REACTOR

Cleaning Wide Bandgap Epitaxial Susceptors and Method Therefor

INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...

METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

METHOD FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE WAFER MADE...

THIN-FILM DEPOSITION APPARATUS

METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

Method of Forming a Source/Drain

LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...

EPITAXY SUSCEPTOR, EPITAXY GROWTH APPARATUS AND MANUFACTURING METHO...

EPITAXIAL GROWTH APPARATUS AND MULTI-LAYER GAS SUPPLY MODULE USED T...

LARGE-SIZE DIAMOND, MPCVD DEVICE AND PREPARATION METHOD OF LARGE-SI...

MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...