Surface micromachining

Industry

CPC
B81C1/00444

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00444Surface micromachining

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,964,866
- Issue date Apr 23, 2024
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stable landing above RF conductor in MEMS device
- Patent number 11,746,002
- Issue date Sep 5, 2023
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three dimensional microstructures with selectively removed regions...
- Patent number 11,703,331
- Issue date Jul 18, 2023
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,667,516
- Issue date Jun 6, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction system and method thereof
- Patent number 11,661,332
- Issue date May 30, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a flexible MEMS device
- Patent number 11,261,084
- Issue date Mar 1, 2022
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanostructures fabricated by metal asisted chemical etching for ant...
- Patent number 11,172,680
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Stacey M. Gifford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanostructures fabricated by metal assisted chemical etching for an...
- Patent number 10,292,384
- Issue date May 21, 2019
- International Business Machines Corporation
- Stacey M. Gifford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Misalignment correction for embedded microelectronic die applications
- Patent number 9,266,723
- Issue date Feb 23, 2016
- Intel Corporation
- Grant A. Crawford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-electro-mechanical system device and...
- Patent number 9,073,750
- Issue date Jul 7, 2015
- Richtek Technology Corporation
- Chiung-Cheng Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Misalignment correction for embedded microelectronic die applications
- Patent number 8,372,666
- Issue date Feb 12, 2013
- Intel Corporation
- Grant A. Crawford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of nanopatterning by forming cracks in a coated polymer subs...
- Patent number 7,232,686
- Issue date Jun 19, 2007
- The Regents of the University of Michigan
- Shuichi Takayama
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...
- Publication number 20250033141
- Publication date Jan 30, 2025
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Sen YANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
- Publication number 20240019249
- Publication date Jan 18, 2024
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
- Publication number 20230249959
- Publication date Aug 10, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...
- Publication number 20210292161
- Publication date Sep 23, 2021
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...
- Publication number 20210122627
- Publication date Apr 29, 2021
- San Diego State University Research Foundation
- Samuel Kassegne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
- Publication number 20200407214
- Publication date Dec 31, 2020
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING A FLEXIBLE MEMS DEVICE
- Publication number 20200399121
- Publication date Dec 24, 2020
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STABLE LANDING ABOVE RF CONDUCTOR IN MEMS DEVICE
- Publication number 20200399115
- Publication date Dec 24, 2020
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
- Publication number 20200262697
- Publication date Aug 20, 2020
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEDICAL IMPLANTS WITH 100% SUBSURFACE BORON CARBIDE DIFFUSION LAYER
- Publication number 20170367827
- Publication date Dec 28, 2017
- Arthrex, Inc.
- Matthew Fonte
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PHYSI...
- Publication number 20160195567
- Publication date Jul 7, 2016
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE AND...
- Publication number 20150056733
- Publication date Feb 26, 2015
- RICHTEK TECHNOLOGY CORPORATION
- Chiung-Cheng Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURED ARTICLES COMPRISING NANOSTRUCTURES AND METHOD
- Publication number 20130236697
- Publication date Sep 12, 2013
- 3M Innovative Properties Company
- Christopher B. Walker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MISALIGNMENT CORRECTION FOR EMBEDDED MICROELECTRONIC DIE APPLICATIONS
- Publication number 20130119046
- Publication date May 16, 2013
- Grant A. Crawford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MISALIGNMENT CORRECTION FOR EMBEDDED MICROELECTRONIC DIE APPLICATIONS
- Publication number 20120009738
- Publication date Jan 12, 2012
- Grant A. Crawford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microfluidic Cell Sorter System
- Publication number 20080213821
- Publication date Sep 4, 2008
- Nanyang Technological University
- Ai Qun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Patterning nanofeatures over large areas
- Publication number 20040063199
- Publication date Apr 1, 2004
- Shuichi Takayama
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Surface micromachining

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device having uniform contacts

Stable landing above RF conductor in MEMS device

Three dimensional microstructures with selectively removed regions...

MEMS device having uniform contacts

Stiction reduction system and method thereof

Method for preparing micro-cavity array surface product with inclin...

Method of forming a flexible MEMS device

Methods for forming a MEMS device layer on an active device layer a...

Nanostructures fabricated by metal asisted chemical etching for ant...

Nanostructures fabricated by metal assisted chemical etching for an...

Misalignment correction for embedded microelectronic die applications

Manufacturing method of micro-electro-mechanical system device and...

Misalignment correction for embedded microelectronic die applications

Method of nanopatterning by forming cracks in a coated polymer subs...

Patents Applicationslast 30 patents

APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...

Three Dimensional Microstructures With Selectively Removed Regions...

MEMS DEVICE HAVING UNIFORM CONTACTS

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and...

MEMS DEVICE HAVING UNIFORM CONTACTS

METHOD OF FORMING A FLEXIBLE MEMS DEVICE

STABLE LANDING ABOVE RF CONDUCTOR IN MEMS DEVICE

STICTION REDUCTION SYSTEM AND METHOD THEREOF

MEDICAL IMPLANTS WITH 100% SUBSURFACE BORON CARBIDE DIFFUSION LAYER

ELECTRONIC DEVICE, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PHYSI...

MANUFACTURING METHOD OF MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE AND...

MICROSTRUCTURED ARTICLES COMPRISING NANOSTRUCTURES AND METHOD

MISALIGNMENT CORRECTION FOR EMBEDDED MICROELECTRONIC DIE APPLICATIONS

MISALIGNMENT CORRECTION FOR EMBEDDED MICROELECTRONIC DIE APPLICATIONS

Microfluidic Cell Sorter System

Patterning nanofeatures over large areas